CN209715928U - A kind of columnar electrode quickly reloads plasma cleaning cavity - Google Patents
A kind of columnar electrode quickly reloads plasma cleaning cavity Download PDFInfo
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- CN209715928U CN209715928U CN201920380121.1U CN201920380121U CN209715928U CN 209715928 U CN209715928 U CN 209715928U CN 201920380121 U CN201920380121 U CN 201920380121U CN 209715928 U CN209715928 U CN 209715928U
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- aluminum pipe
- box
- plasma cleaning
- cleaning cavity
- columnar electrode
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Abstract
It quickly reloads plasma cleaning cavity the utility model discloses a kind of columnar electrode, the left and right sides has extended through row's aluminum pipe group between the top of the box and bottom, aluminum pipe group includes more aluminum pipes, more aluminum pipe word orders, aluminum pipe one end is fixed on bottom of box inner wall, the aluminum pipe other end passes through top of the box, and the end of aluminum pipe is connected by electrode plate；Box back surface is provided with vacuum orifice；The top of the box and bottom, which respectively correspond, is provided with guide rail, and mobile connection has carrier in the guide rail.The utility model is not likely to produce molecule, improves article cleaning effect and homogeneity, has maximally reduced the influence for vacuumizing link air-flow to material, and simple structure is easy to maintain.
Description
Technical field
It quickly reloads plasma cleaning cavity the utility model relates to a kind of columnar electrode, belongs to plasma cleaner technology
Field.
Background technique
Currently, plasma cleaner is also plasma cleans machine or Surface Treatment with Plasma instrument, it is a kind of completely new height
Science and technology achieve the effect that Conventional cleaning method is unable to reach using plasma.The mechanism of plasma clean, mainly
It is to achieve the purpose that remove body surface spot by active particle " activation " in plasma.
The electrode that existing plasma cleaner uses is placed between each layer electrode plate for horizontal multi-layer electrode plate structure
Have carrier, this structure is inconvenient when placing article-cleaning, need replacement article from level to level, and this structure for
Convective is poor in the cavity for inorganic gas, between electrode in jig product treatment effect and uniformity have certain lack
It falls into.
It is added between existing carrier and box body guide rail using being slidably connected, when mutually moving movement, is easy because of friction
Small particle is generated, secondary pollution is formed to the article of cleaning high-precision requirement.
Utility model content
Purpose: in order to overcome the deficiencies in the prior art, the utility model provides a kind of columnar electrode and quickly reloads
Plasma cleaning cavity.
Technical solution: in order to solve the above technical problems, the technical solution adopted by the utility model is:
A kind of columnar electrode quickly reloads plasma cleaning cavity, comprising: cabinet, it is left between the top of the box and bottom
Right two sides have extended through row's aluminum pipe group, and aluminum pipe group includes more aluminum pipes, and more aluminum pipe word orders, aluminum pipe one end is fixed on
Bottom of box inner wall, the aluminum pipe other end pass through top of the box, and the end of aluminum pipe is connected by electrode plate；Box back surface setting
There is vacuum orifice；The top of the box and bottom, which respectively correspond, is provided with guide rail, and horizontal row is shown on two walls on the inside of the guide rail
Multiple to sidewinder mechanism, the mechanism of sidewindering includes the sleeve being mounted in guiding cheekn, and barrel forward end activity is connected with ball；Institute
It states and is arranged with multiple fixed columns between guide rail, be provided with camshaft bearing in fixed column；Mobile connection has carrier in the guide rail.
Preferably, the bottom of box inner wall setting is fluted, and sleeve is provided in groove, is set on top of the box
It is equipped with through-hole, clamping joint is provided in through-hole, aluminum pipe one end is removably connected with sleeve, and the aluminum pipe other end is from through-hole one end
It penetrates, is pierced by from the clamping joint other end, clamping joint exit is also socketed with sealing ring, and sealing ring passes through sealing cover phase with clamping joint
Fixed, the sleeve and clamping joint are all made of isolation material.
Preferably, the carrier includes bracket, and frame body is provided between bracket, is laterally arranged between frame body
There is pallet.
Preferably, the sealing ring uses silica gel material.
Preferably, it is provided with wind deflector on the cabinet of the vacuum orifice front end, is provided with air holes on wind deflector.
Preferably, the aluminum pipe group is made of 4-10 root aluminum pipe.
The plasma cleaning cavity the utility model has the advantages that a kind of columnar electrode provided by the utility model quickly reloads, is not likely to produce
Molecule improves article cleaning effect and homogeneity, has maximally reduced and has vacuumized link air-flow to the shadow of material
It rings, simple structure is easy to maintain.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of cabinet vacuum orifice；
Fig. 3 is the connection schematic diagram of guide rail and bracket；
Fig. 4 is aluminum pipe and bottom of box connection schematic diagram；
Fig. 5 is aluminum pipe and top of the box connection schematic diagram；
Fig. 6 is the structural schematic diagram of carrier.
Specific embodiment
The utility model is further described with reference to the accompanying drawing.
The plasma cleaning cavity as shown in Figure 1-3, a kind of columnar electrode quickly reloads, comprising: cabinet 1, the cabinet 1 push up
The left and right sides has extended through row's aluminum pipe group 2 between portion and bottom, and aluminum pipe group 2 includes more aluminum pipes 3, more 3 one words of aluminum pipe
Arrangement, 3 one end of aluminum pipe are fixed on bottom of box inner wall, and 3 other end of aluminum pipe passes through 1 top of cabinet, and the end of aluminum pipe 3 passes through electricity
Pole plate 4 is connected；1 back side of cabinet is provided with vacuum orifice 5；1 top and bottom of cabinet, which respectively corresponds, is provided with guide rail 6,
On 6 two walls of inside of the guide rail horizontal row show it is multiple sidewinder mechanism 7, the mechanism 7 of sidewindering includes being mounted in 6 side wall of guide rail
Sleeve 701,701 front end activity of sleeve is connected with ball 702；Multiple fixed columns 703 are arranged between the guide rail 6, it is fixed
Camshaft bearing 704 is provided on column 703；Mobile connection has carrier 8 in the guide rail 6.
As illustrated in figures 4-5,1 bottom interior wall of cabinet is arranged fluted 9, and sleeve 10 is provided in groove 9, and cabinet 1 pushes up
It is provided with through-hole 11 in portion, clamping joint 12 is provided in through-hole 11,3 one end of aluminum pipe is removably connected with sleeve 10, aluminum pipe 3
The other end is penetrated from 11 one end of through-hole, is pierced by from 12 other end of clamping joint, and 12 exit of clamping joint is also socketed with sealing ring 13, close
Seal 13 is fixed with clamping joint 12 by 14 phase of sealing cover, and the sleeve 10 is all made of isolation material with clamping joint 12.
As shown in fig. 6, the carrier 8 includes bracket 801, be provided with frame body 802 between bracket 801, frame body 802 it
Between be horizontally arranged with pallet 803.
The sealing ring 13 uses silica gel material.
It is provided with wind deflector 15 on the cabinet 1 of 5 front end of vacuum orifice, air holes 16 is provided on wind deflector 15.
The aluminum pipe group 2 is made of 4-10 root aluminum pipe 3.
Embodiment:
In use, carrier is integrally pulled out, article is put on pallet, by bracket be pushed into guide rail, due to bracket with lead
Rail is by ball and camshaft bearing mobile connection, so bracket is easy to push and pull, and friction area is small between each other, is not easy to produce
Raw molecule.This cavity accesses radio frequency by electrode plate using row's aluminum pipe group, and another row's aluminum pipe group passes through electrode plate earthing,
It is adequately ionized mixed gas between two rows of aluminum pipe groups, due to there is gap between aluminum pipe, so the plasma being ionized
It can be flowed freely in entire cabinet, improve article cleaning effect and homogeneity, in addition, vacuum orifice is provided with band air holes
Wind deflector, maximally reduced the influence for vacuumizing link air-flow to material.
Meanwhile the design uses aluminum pipe detachable structure, aluminum pipe one end is threadedly secured in the inner wall of cabinet side
In sleeve, the aluminum pipe other end is mutually fixed with wall box by clamping joint, since sleeve and clamping joint all use isolation material, is used
In ensuring mutually insulated between aluminum pipe and cabinet.In addition, gap is mutually sealed by clamping joint between aluminum pipe and through-hole, clamping joint with
Gap is mutually sealed by sealing ring between aluminum pipe, for ensuring the air-tightness of cabinet.And between clamping joint, sealing ring, sealing cover
It is all that the maintenance and replacement in later period are easy to using the connection of the removablies such as clamping.
The above is only the preferred embodiment of the utility model, it should be pointed out that: for the common skill of the art
For art personnel, without departing from the principle of this utility model, several improvements and modifications can also be made, these improve and
Retouching also should be regarded as the protection scope of the utility model.
Claims (6)
- A kind of plasma cleaning cavity 1. columnar electrode quickly reloads, comprising: cabinet, it is characterised in that: the top of the box with The left and right sides has extended through row's aluminum pipe group between bottom, and aluminum pipe group includes more aluminum pipes, more aluminum pipe word orders, aluminum pipe One end is fixed on bottom of box inner wall, and the aluminum pipe other end passes through top of the box, and the end of aluminum pipe is connected by electrode plate；Case The body back side is provided with vacuum orifice；The top of the box and bottom, which respectively correspond, is provided with guide rail, on the inside of the guide rail on two walls Horizontal row show it is multiple sidewinder mechanism, the mechanism of sidewindering includes the sleeve being mounted in guiding cheekn, barrel forward end active card It is connected to ball；It is arranged with multiple fixed columns between the guide rail, is provided with camshaft bearing in fixed column；It is moved in the guide rail It is connected with carrier.
- The plasma cleaning cavity 2. a kind of columnar electrode according to claim 1 quickly reloads, it is characterised in that: the case The setting of body bottom interior wall is fluted, and sleeve is provided in groove, through-hole is provided on top of the box, clamping is provided in through-hole Head, aluminum pipe one end are removably connected with sleeve, and the aluminum pipe other end is penetrated from through-hole one end, are pierced by from the clamping joint other end, Clamping joint exit is also socketed with sealing ring, and sealing ring is mutually fixed with clamping joint by sealing cover, and the sleeve and clamping joint are equal Using isolation material.
- The plasma cleaning cavity 3. a kind of columnar electrode according to claim 1 quickly reloads, it is characterised in that: the load Tool includes bracket, is provided with frame body between bracket, is horizontally arranged with pallet between frame body.
- The plasma cleaning cavity 4. a kind of columnar electrode according to claim 2 quickly reloads, it is characterised in that: described close Seal uses silica gel material.
- The plasma cleaning cavity 5. a kind of columnar electrode according to claim 1 quickly reloads, it is characterised in that: the pumping It is provided with wind deflector on the cabinet of vacuum port front end, is provided with air holes on wind deflector.
- The plasma cleaning cavity 6. a kind of columnar electrode according to claim 1 quickly reloads, it is characterised in that: the aluminium Pipe group is made of 4-10 root aluminum pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920380121.1U CN209715928U (en) | 2019-03-25 | 2019-03-25 | A kind of columnar electrode quickly reloads plasma cleaning cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920380121.1U CN209715928U (en) | 2019-03-25 | 2019-03-25 | A kind of columnar electrode quickly reloads plasma cleaning cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209715928U true CN209715928U (en) | 2019-12-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920380121.1U Active CN209715928U (en) | 2019-03-25 | 2019-03-25 | A kind of columnar electrode quickly reloads plasma cleaning cavity |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111299259A (en) * | 2020-04-20 | 2020-06-19 | 昆山索坤莱机电科技有限公司 | Integrated plasma treatment box |
-
2019
- 2019-03-25 CN CN201920380121.1U patent/CN209715928U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111299259A (en) * | 2020-04-20 | 2020-06-19 | 昆山索坤莱机电科技有限公司 | Integrated plasma treatment box |
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