CN209707444U - A kind of rotary target failure detector - Google Patents
A kind of rotary target failure detector Download PDFInfo
- Publication number
- CN209707444U CN209707444U CN201920173205.8U CN201920173205U CN209707444U CN 209707444 U CN209707444 U CN 209707444U CN 201920173205 U CN201920173205 U CN 201920173205U CN 209707444 U CN209707444 U CN 209707444U
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- failure detector
- fixed
- rotary target
- lead screw
- out against
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Abstract
The utility model relates to a kind of rotary target failure detectors, including pond and the fixation device and failure detector that are located in pond.Failure detector includes the flaw detecting rack being fixed in tank floor, the feed rod being horizontally fixed on flaw detecting rack and the mounting seat being slidably connected with feed rod.Fixed device include the left support being symmetrically fixed in tank floor and right support, with the left rotary shaft of left support rotation connection, be fixed in left rotary shaft it is left it is top, with right support screw thread hold out against lead screw and being located at hold out against it is right top on lead screw.The utility model is used for the flaw detection of rotary target, has technical effect easy to operate, inspection speed is fast and flaw detection is high-efficient.
Description
Technical field
The utility model relates to the technical fields of target quality testing, more particularly, to a kind of rotary target failure detector.
Background technique
Plated film target be by magnetron sputtering, multi-arc ion coating or other kinds of coating system under appropriate process conditions
It sputters on substrate and forms the sputtering source of various function films.Briefly, target is exactly the mesh of high speed lotus energy particle bombardment
Mark material, in high energy laser weapon, different capacity density, different output waveforms, different wave length laser and different targets
When material interacts, different killing damage effects can be generated.Such as: magnetron evaporation sputter coating is heating evaporation plated film, aluminium
Film etc..Replace different targets (such as aluminium, copper, stainless steel, titanium, nickel target), can be obtained different membrane systems (it is such as superhard, wear-resisting,
Corrosion-resistant alloy film etc.).
Various types of sputtered film materials are in semiconductor integrated circuit (VLSI), optical disc, flat-panel screens and workpiece
Surface covering etc. be all widely used.Since the 1990s, the synchronization of sputtering target material and sputtering technology
Development greatly meets the demand of various new electronic component development.For example, in semiconductor integrated circuit manufacturing process
In, be routed with the lower copper conductor film of resistivity instead of aluminium film: in flat display industry, various display technologies are (such as
LCD, PDP, OLED and FED etc.) synchronized development, some has been used to the display manufacturing of computer and computer；It is deposited in information
In storage industry, the memory capacity of magnetic storage is continuously increased, and new magneto-optic recording material continues to introduce new these all to institute
The quality of sputtering target material is needed to propose increasingly higher demands, quantity required also increases year by year.
Target is detected a flaw after completing, and finds its internal and surface defect that may be present.Flaw detection uses
Equipment be supersonic detector, need that special probe is cooperated to use in use process.Target is wide in variety, shape multiplicity, ruler
Very little variation is big, and most of to need to customize probe, testing cost is very high, and for part irregular on target, can not make
It is detected with contact method.
Utility model content
The purpose of the utility model is to provide a kind of rotary target failure detectors more convenient to use.
The above-mentioned purpose of the utility model has the technical scheme that
A kind of rotary target failure detector is filled including pond, the fixation device being located in pond and the flaw detection being located in pond
It sets；
The failure detector include the flaw detecting rack being fixed in tank floor, the feed rod being horizontally fixed on flaw detecting rack and with
The mounting seat that feed rod is slidably connected.
By using above-mentioned technical proposal, full of ultrasonic probe is fixed in mounting seat after water in pond, install
For pedestal during sliding on feed rod, ultrasonic probe detects a flaw to rotary target.During being somebody's turn to do, ultrasonic probe level is moved
It is dynamic, it when avoiding manual operation the problem of the fluctuation of detection track, while using water as detection medium, avoids using special fixed
System probe and voussoir, can reduce testing cost and detection difficulty.
The utility model is further arranged to: the fixed device include the left support that is symmetrically fixed in tank floor with
Right support, with the left rotary shaft of left support rotation connection, the left side being fixed in left rotary shaft is top, holds out against silk with right support screw thread
It is top that thick stick and being located at holds out against the right side on lead screw.
By using above-mentioned technical proposal, the utility model provides a kind of specific structure of fixed device, it is left top and
The right side is top to withstand rotary target from two sides, keeps it hanging, can detect in this way to whole outer surfaces of rotary target.
The utility model is further arranged to: being rotatably connected to right spindle on described one end for holding out against lead screw；
On the top free end for withstanding on right spindle in the right side.
By using above-mentioned technical proposal, it is left top and it is right it is top rotary target is held out against after, by rotation left rotary shaft or
Right spindle, it will be able to drive rotary target to rotate, avoid the trouble of repeated disassembled and assembled, detection time can be shortened, improve detection effect
Rate.
The utility model is further arranged to: being fixed with turntable on the free end of the left rotary shaft.
By using above-mentioned technical proposal, disk diameter is big, holds more convenient.
The utility model is further arranged to: the turntable is equipped with and holds out against screw rod；
Described one end for holding out against screw rod is withstood on left support.
By using above-mentioned technical proposal, after rotary target turns to suitable position, rotation holds out against screw rod, makes one end top
On left support, it can be avoided rotary target and rotate and shake in the detection process, the work for improving detection accuracy can be played
With.
The utility model is further arranged to: horizontal on the flaw detecting rack to be equipped with lead screw；
The mounting seat is connect with threads of lead screw.
By using above-mentioned technical proposal, ultrasonic probe is just able to drive by rotational lead screw in the horizontal direction at the uniform velocity
It is mobile, it is compared with manually controlling, it is more accurate.
The utility model is further arranged to: being fixed with runner on one end of the lead screw.
By using above-mentioned technical proposal, runner diameter is big, holds more convenient.
The utility model is further arranged to: being fixed with dial on the left support；
It is fixed on one end of the left rotary shaft and subscale mark disk；
The subscale mark disk is located in the hole on dial.
By using above-mentioned technical proposal, in detection process, subscale mark disk follows left rotary shaft to rotate, in layer of correcting one's mistakes,
It is changed with the relative position of dial, the rotational angle of target can be accurately learnt by the change.
The utility model is further arranged to: the left side it is top and it is right it is top on be equipped with blind hole；
It further include the auxiliary detection bar that both ends are inserted respectively into left top and right top upper blind hole.
By using above-mentioned technical proposal, in detection process, ultrasonic wave reflects in auxiliary detection bar, is capable of providing
One more stable bottom wave, when avoiding target inner hole coarse caused by testing result deviation.
In conclusion the advantageous effects of the utility model are as follows:
1. the utility model detects a flaw to rotary target in pond, when flaw detection, rotary target impregnates in water, mounting seat
It drives ultrasonic probe to move horizontally on feed rod, rotary target is detected.This detection mode is easy to operate, testing result
Stablize.In detection process, ultrasonic probe does not contact directly with rotary target, therefore does not need specific customization, can either reduce inspection
Difficulty is surveyed, and can reduce testing cost.
2. the utility model withstands rotary target from two sides using left top and the right side is top, in entire detection process, rotation
Target is hanging and can be freely rotated in its axial direction.Entire rotary target can be detected, be detected by being once loaded
It is more efficient.
3. the utility model is mounted with an auxiliary detection bar in rotary target, auxiliary detection bar surface is smooth, can give
Detection provide a stable bottom wave, when avoiding rotary target inner hole wall coarse caused by detection error and error.
Detailed description of the invention
Fig. 1 is the schematic perspective view of the utility model.
Fig. 2 is the positional diagram of the utility model dial Yu subscale mark disk.
Fig. 3 is the fixed schematic diagram of rotary target when detecting of the utility model.
In figure, 11, pond；12, left support；13, right support；14, left rotary shaft；15, left top；16, lead screw is held out against；17,
It is right top；21, right spindle；31, turntable；32, screw rod is held out against；41, lead screw；42, runner；51, flaw detecting rack；52, feed rod；53, pacify
Fill pedestal；61, dial；62, subscale mark disk；7, blind hole；8, detection bar is assisted.
Specific embodiment
The utility model is described in further detail below in conjunction with attached drawing.
Referring to Figures 1 and 2, it is a kind of rotary target failure detector disclosed by the utility model, including pond 11 and is mounted on
Fixation device and failure detector in pond.
The specific structure of fixed device are as follows: left support 12 and right support 13 are symmetrically fixed on the bottom surface in pond 11, left branch
It is provided with hole on frame 12, left rotary shaft 14 is installed in hole, left rotary shaft 14 can be freely rotated around its axis.On one end of left rotary shaft 14
It is fixed with a left side top 15, a subscale mark disk 62 is fixed on middle section, is fixed with one on the side of left support 12
Dial 61,61 sets of dial on subscale mark disk 62.A turntable 31, turntable are further fixed on the free end of left rotary shaft 14
It is horizontally installed with one on 31 and holds out against screw rod 32, holds out against screw rod 32 and is threadedly coupled with turntable 31, can be moved in the horizontal direction
And it withstands on left support 12.
It is provided with threaded hole on right support 13, is equipped in threaded hole and holds out against lead screw 16, holds out against and is rotated on one end of lead screw 16
It is connected with right spindle 21, the right side top 17 is fixed on the free end of right spindle 21.When rotation holds out against lead screw 16, the right side top 17 can
It is mobile to the direction close to or far from a left side top 15.
The specific structure of failure detector are as follows: flaw detecting rack 51 is equally fixed on the bottom surface in pond 11.It is equipped with one thereon
Feed rod 52 and a lead screw 41, the both ends of feed rod 52 are each attached on flaw detecting rack 51, and the both ends of lead screw 41 are inserted into flaw detecting rack respectively
In hole on 51, it can be freely rotated around its axis.A through-hole and a threaded hole, through-hole and spiral shell are provided in mounting seat 53
Pit is connect with feed rod 52 and lead screw 41 respectively.When rotational lead screw 41, mounting seat 53 can be made to slide on feed rod 52.Lead screw
It is fixed with runner 42 on 41 one end, facilitates gripping.
Referring to Fig. 2 and Fig. 3, a blind hole 7, the both ends point of auxiliary detection bar 8 are all provided on a left side top 15 and the right side top 17
It is not inserted into the two blind holes 7, auxiliary detection bar 8 and 7 clearance fit of blind hole.
The implementation principle of the present embodiment are as follows:
Detection bar 8 will be assisted to be inserted into the blind hole 7 on a left side top 15 first, rotary target is then set to auxiliary detection bar 8
On, then rotation holds out against lead screw 16, keeps the right side top 17 mobile to the direction close to a left side top 15, auxiliary detection bar 8 is inserted into right top
Stop after in blind hole 7 on point 17.
Then slowly rotation holds out against lead screw 16, is inserted into a left side top 15 and the right side top 17 slowly from the both ends of rotary target,
Stop after rotary target is clamped, then rotate and hold out against screw rod 32 on turntable 31, pushes up the one end for holding out against screw rod 32 to left support
On 12, rotary target is avoided to rotate during detection.
Ultrasonic probe is screwed to the ultrasonic flaw-detecting machine for starting afterwards in mounting seat 53 and being attached thereto, is started
It detects a flaw.During flaw detection, rotating wheel 42 makes it drive 41 uniform rotation of lead screw.Mounting seat 53 when lead screw 41 rotates
It is at the uniform velocity moved on feed rod 52, in moving process, ultrasonic probe issues ultrasonic wave, and the ultrasonic wave of reflection is connect by ultrasonic probe
Pass detection device after receipts back, testing staff judges rotary target with the presence or absence of internal flaw according to the waveform of detection device.
After having detected a position, unscrews and hold out against screw rod 32 and rotate turntable 31, target can turn together therewith during being somebody's turn to do
Dynamic, screw rod 32 will be held out against again by, which turning to after suitable position, tightens.
Target needs the relative position by 62 high scale of dial 61 and subscale mark disk in continuous detection process
Determine rotational angle, each difference is exactly the rotational angle of target.
The embodiment of present embodiment is the preferred embodiment of the utility model, and not limitation is originally practical new according to this
The protection scope of type, therefore: the equivalence changes that all structures, shape, principle according to the utility model are done should all be covered by practical
Within novel protection scope.
Claims (9)
1. a kind of rotary target failure detector, it is characterised in that: including pond (11), the fixation device being located in pond (11) and set
Failure detector in pond (11)；
The failure detector includes the flaw detecting rack (51) being fixed on pond (11) bottom surface, is horizontally fixed on flaw detecting rack (51)
Feed rod (52) and the mounting seat (53) being slidably connected with feed rod (52).
2. a kind of rotary target failure detector according to claim 1, it is characterised in that: the fixed device includes symmetrical solid
The left rotary shaft (14) of the left support (12) being scheduled on pond (11) bottom surface and right support (13) and left support (12) rotation connection,
Holding out against lead screw (16) and being located at for left top (15) and right support (13) screw thread being fixed on left rotary shaft (14) holds out against lead screw
(16) right top (17) on.
3. a kind of rotary target failure detector according to claim 2, it is characterised in that: described one end for holding out against lead screw (16)
On be rotatably connected to right spindle (21)；
The right side top (17) is withstood on the free end of right spindle (21).
4. a kind of rotary target failure detector according to claim 2, it is characterised in that: the free end of the left rotary shaft (14)
On be fixed with turntable (31).
5. a kind of rotary target failure detector according to claim 4, it is characterised in that: the turntable (31) is equipped with and holds out against
Screw rod (32)；
Described one end for holding out against screw rod (32) is withstood on left support (12).
6. a kind of rotary target failure detector according to claim 1, it is characterised in that: level is set on the flaw detecting rack (51)
There are lead screw (41)；
The mounting seat (53) is threadedly coupled with lead screw (41).
7. a kind of rotary target failure detector according to claim 6, it is characterised in that: solid on one end of the lead screw (41)
Surely there are runner (42).
8. a kind of rotary target failure detector according to any one of claim 2-5, it is characterised in that: the left support
(12) dial (61) are fixed on；
It is fixed on one end of the left rotary shaft (14) and subscale mark disk (62)；
The subscale mark disk (62) is located in the hole on dial (61).
9. a kind of rotary target failure detector according to claim 8, it is characterised in that: the left side top (15) and the right side are top
(17) blind hole (7) are equipped on；
It further include that both ends are inserted respectively into auxiliary detection bar (8) on left top (15) and the right side top (17) in blind hole (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920173205.8U CN209707444U (en) | 2019-01-31 | 2019-01-31 | A kind of rotary target failure detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920173205.8U CN209707444U (en) | 2019-01-31 | 2019-01-31 | A kind of rotary target failure detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209707444U true CN209707444U (en) | 2019-11-29 |
Family
ID=68642475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920173205.8U Active CN209707444U (en) | 2019-01-31 | 2019-01-31 | A kind of rotary target failure detector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209707444U (en) |
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2019
- 2019-01-31 CN CN201920173205.8U patent/CN209707444U/en active Active
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