CN209702838U - A kind of vacuum evaporation equipment - Google Patents
A kind of vacuum evaporation equipment Download PDFInfo
- Publication number
- CN209702838U CN209702838U CN201822221620.4U CN201822221620U CN209702838U CN 209702838 U CN209702838 U CN 209702838U CN 201822221620 U CN201822221620 U CN 201822221620U CN 209702838 U CN209702838 U CN 209702838U
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- baffle
- shaft
- vacuum evaporation
- driving
- evaporation equipment
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Abstract
The utility model, which discloses, provides a kind of vacuum evaporation equipment, the vacuum evaporation equipment includes deposited chamber, indoor support component is being deposited in setting, the antifouling cover board being fastened in the support component, the baffle plate assembly being mounted below antifouling cover board, and the driving assembly being connected with baffle plate assembly, opening is provided on the antifouling cover board.The baffle plate assembly matches with the opening, and the baffle plate assembly includes the first baffle and second baffle that can be overturn and be mutually closed；The driving component and the first baffle and second baffle are sequentially connected, and the driving component can drive the first baffle and second baffle to overturn and be closed, and block the opening.The arrangement increases production efficiencys and precision, have saved production cost；The space for reducing evaporation source plane is conducive to arrange more evaporation sources on the same device；And the device can control closing and the opening speed of baffle in use.
Description
Technical field
The utility model relates to a kind of vacuum evaporation equipments, belong to evaporated device technical field.
Background technique
At present OLED display technology have self-luminous, wide viewing angle, almost infinite high contrast, compared with low power consumption, high anti-
The advantages that answering speed, the trend of big substituted traditional liquid crystal screen.Upstream industry of the vacuum coating equipment as OLED industrial chain, often
The a large amount of market demand of Nian Douyou.It is relatively simple that domestic vacuum coating equipment compares external structural principle, mechanism with also compared with
It is few.The design proposition of vacuum coating equipment can effectively enhance the reasonability and mechanical performance of domestic equipment, which was using
Production efficiency is not only increased in journey, also improves competitiveness of the product with import equipment.
When OLED carries out vapor deposition production, in order to improve the production efficiency with precision, save material cost, in continuous evaporating-plating or
The accuracy of film thickness is required to block evaporation source to prevent the further vapor deposition of material and influenced at the end of vapor deposition.It is existing
Technology generallys use following three kinds of solutions:
1, evaporation source is blocked by way of symmetrical rotary below media disk using magnetic fluid；
2, evaporation source is blocked by way of rotating vane using motor；
3, the mode of sheet metal rotation and lifting is driven to block evaporation source using cylinder.
In use, the baffle occupancy area of plane is big, and working efficiency is low, and precision is not smart enough for the above several ways
Standard, thus study it is a kind of precision can be improved and can control the vacuum evaporation equipment structure of baffle opening and closing speed just become urgently
It solves the problems, such as.
Summary of the invention
The purpose of this utility model is exactly to propose a kind of vacuum evaporation to solve the above-mentioned problems in the prior art
Equipment.
The purpose of this utility model will be realized through the following technical scheme: a kind of vacuum evaporation equipment, including vapor deposition
Room, setting are mounted below antifouling cover board in the indoor support component of vapor deposition, the antifouling cover board being fastened in the support component
Baffle plate assembly, and the driving assembly being connected with baffle plate assembly is provided with opening on the antifouling cover board；The baffle plate assembly
Match with the opening, the baffle plate assembly includes the first baffle and second gear that can be cooperated and close the opening
Plate；The driving component and the first baffle and second baffle are sequentially connected, and the driving component can drive described first
Baffle and second baffle overturning are closed, and block the opening.
Preferably, the support component includes the multiple supporting blocks being fixed in vapor deposition chamber interior walls, and fixed setting
Antifouling bending plate in supporting block, the inner sidewall palette of the antifouling bending plate and the deposited chamber.
Preferably, the baffle plate assembly further includes being fixedly connected respectively with one end of the first baffle and second baffle
First rotating shaft and the second shaft, the first rotating shaft and the second shaft are rotatably arranged in the supporting block, the driving component
It is connect respectively with the first rotating shaft and the second rotating shaft transmission.
Preferably, the first baffle and second baffle mirror symmetry are arranged, and the driving component includes respectively with first
Shaft and two driving structures of the second rotating shaft transmission connection.
Preferably, the driving structure includes the link assembly and cylinder being arranged in outside deposited chamber, two driving structures
The link assembly respectively by the transform linear motion of Telescopic-cylinder bar at the rotary motion of first rotating shaft and the second shaft.
Preferably, the driving structure further includes magnetic fluid seal, the link assembly difference of two driving structures
It is connect by magnetic fluid seal with the first rotating shaft and the second shaft, the magnetic fluid seal is through setting in deposited chamber
Cavity wall on.
Preferably, the support component further includes the multiple axle sleeves being fixed in the supporting block, and described first turn
The both ends of axis and the second shaft are rotatably arranged in the axle sleeve.
Preferably, the first baffle has the step-like structure being mutually matched with the place of docking of the second baffle, makes
The first baffle being capable of gap between closed baffle plate after docking with the second baffle.
The advantages of technical solutions of the utility model is mainly reflected in: the device reduces the spaces of evaporation source plane, favorably
In arranging more evaporation sources on the same device.The arrangement increases production efficiencys and precision, have saved production cost, fit
Conjunction is industrially promoted the use of.
Detailed description of the invention
Fig. 1 is the stereoscopic schematic diagram of the vacuum evaporation equipment of the utility model.
Fig. 2 is the structural decomposition diagram of the vacuum evaporation equipment of the utility model.
Fig. 3 is the first baffle of the utility model and the structural schematic diagram of second baffle.
Fig. 4 is the first baffle of the utility model and the structural schematic diagram of second baffle.
Fig. 5 is the vacuum evaporation equipment schematic diagram of internal structure of the utility model.
Fig. 6 is the partial enlargement diagram in Fig. 5 of the utility model at A.
Specific embodiment
The purpose of this utility model, advantage and feature will carry out figure by the non-limitative illustration of preferred embodiment below
Show and explains.These embodiments are only the prominent examples using technical solutions of the utility model, all to take equivalent replacement or wait
Effect transformation and formed technical solution, all fall within the requires of the utility model protection within the scope of.
The utility model discloses a kind of vacuum evaporation equipment, and as depicted in figs. 1 and 2, which includes steaming
Room is plated, setting is mounted on antifouling cover in the indoor support component 10 of vapor deposition, the antifouling cover board 20 being fastened in the support component
Baffle plate assembly 30 below plate, and the driving assembly 40 being connected with baffle plate assembly.
As depicted in figs. 1 and 2, opening 21, the baffle plate assembly 30 and the opening 21 are provided on the antifouling cover board
Match, the baffle plate assembly 30 includes the first baffle 31 and second baffle 32 for cooperating and closing the opening.Such as Fig. 3 institute
Show, in the technical scheme, the first baffle 31 is arranged with 32 mirror symmetry of second baffle, first baffle 31 and second baffle
The opening shape of shape and antifouling cover board after 32 closures matches.The driving component 40 and the first baffle 31 and second
Baffle 32 is sequentially connected, and the driving component 40 can drive the first baffle 31 to be closed with the overturning of second baffle 32, blocks
The folding downwards of the opening 21, the first baffle 31 and second baffle 32, the first baffle 31 and second baffle 32 are opened
Close angle degree is 0 °~90 °.
Specifically, as shown in Figures 3 and 4, the first baffle 31 has mutual with the place of docking of the second baffle 32
Matched step-like structure, when the first baffle 31 is closed with second baffle 32, the first baffle 31 and the second gear
Step-like structure on plate 32 overlapped can cooperate so that the first baffle 31 docked with the second baffle 32 after energy
Enough it is closed the gap between first baffle 31 and second baffle 32.In the present embodiment, when the first baffle 31 and second baffle
When 32 closure, first baffle 31 is first closed, and then second baffle 32 turns off, so that the step structure on the second baffle 32
Matching is docked with the step-like structure on first baffle 31.
Optionally, it as shown in figure 4, the step-like structure is the continuous concaveconvex structure being mutually matched, further ensures
The first baffle 31 docks the leakproofness at place with the second baffle 32.
As shown in Fig. 2, the support component 10 includes the multiple supporting blocks 11 being fixed on deposited chamber inner sidewall, and
The multiple antifouling bending plates being fixed in supporting block 11, the inner sidewall sealing paste of the antifouling bending plate and the deposited chamber
It closes, prevents evaporant from entering upper space from the gap of inner sidewall and antifouling bending plate, influence the accuracy of film thickness.In this technology
In scheme, the deposited chamber is preferably cuboid, and the antifouling bending plate includes pasting respectively with four side walls of the deposited chamber
The first antifouling bending plate 12, the second antifouling bending plate 13, the antifouling bending plate 14 of third and the 4th antifouling bending plate 15 closed, it is described
First antifouling bending plate 12, the second antifouling bending plate 13, the antifouling bending plate 14 of third and the 4th antifouling bending plate 15 setting can
Guarantee baffle with the airtightness of the external space, to guarantee the isolation of top media disk and lower section evaporation source.
As shown in figure 5, the baffle plate assembly 30 further includes one end with the first baffle 31 and second baffle 32 respectively
Two shafts being fixedly connected, two shafts are respectively first rotating shaft 33 and the second shaft 34, the first rotating shaft 33 and
Second shaft 34 is rotatably arranged in the supporting block 11, and each supporting block is symmetrically disposed on four angles of vapor deposition chamber interior walls.
As shown in fig. 6, the driving component 40 includes two to be sequentially connected respectively with first rotating shaft 33 and the second shaft 34
A driving structure.The driving structure includes the link assembly 411 and cylinder 412 being arranged in outside deposited chamber, driving structure
The link assembly is by the transform linear motion of Telescopic-cylinder bar at the rotary motion of the shaft.The driving structure further includes
Magnetic fluid seal 413, the link assembly 411 pass through the cavity wall and the shaft of deposited chamber by magnetic fluid seal 413
Connection.The link assembly 411 includes two first connecting rods and second connecting rod being hinged, and the first connecting rod is far from second
One end of connecting rod and Telescopic-cylinder bar are hinged, and the second connecting rod passes through magnetic fluid seal and institute far from one end of first connecting rod
State shaft connection.Further, one end of the shaft is provided with shaft coupling 414, the shaft and magnetic fluid seal 413 it
Between connected by shaft coupling 414.
The support component further includes the multiple axle sleeves 35 being fixed in the supporting block, the first rotating shaft 33 and
The both ends of second shaft 34 are rotatably arranged in the axle sleeve 35.
When work, cylinder operation drives link assembly movement, and linear motion is converted to circular motion, to drive first
Shaft 33 and the rotation of the second shaft 34 realize that the overturning of first baffle 31 and second baffle 32 is closed, cover antifouling cover board 20
Opening, blocks evaporation source, realizes the open and close of evaporation source upper space inside deposited chamber, guarantees top media disk
With the isolation of lower section evaporation source.Cylinder 412 and link assembly 411 are arranged outside deposited chamber, the body being not take up inside deposited chamber
Product, while using the transmission of magnetic fluid seal realization shaft, guarantee internal air-tightness；Further, by controlling the gas
The operating rate of cylinder is that can control the closure and opening speed of the baffle plate assembly.
The utility model blocks evaporation source using the baffle plate assembly of overturning structure, reduces the space of plane, is conducive to
More evaporation sources are arranged in same equipment, production efficiency and precision is improved, has saved production cost, are suitble to industrially
It promotes the use of.
Still there are many embodiment, all technologies formed using equivalents or equivalent transformation for the utility model
Scheme is all fallen within the protection scope of the utility model.
Claims (8)
1. a kind of vacuum evaporation equipment, it is characterised in that: including deposited chamber, indoor support component (10), button is being deposited in setting
Close the antifouling cover board (20) in the support component, the baffle plate assembly (30) being mounted below antifouling cover board, and and baffle group
The driving assembly (40) that part is connected is provided with opening (21) on the antifouling cover board；The baffle plate assembly (30) is opened with described
Mouth (21) matches, and the baffle plate assembly (30) includes the first baffle (31) and second that can be cooperated and close the opening
Baffle (32)；The driving component (40) and the first baffle (31) and second baffle (32) are sequentially connected, the driving group
Part (40) can drive the first baffle (31) and second baffle (32) to overturn and be closed, and block the opening (21).
2. a kind of vacuum evaporation equipment according to claim 1, it is characterised in that: the support component (10) includes fixing
Multiple supporting blocks (11) in vapor deposition chamber interior walls, and the antifouling bending plate being fixed in supporting block are set, it is described antifouling
The inner sidewall palette of bending plate and the deposited chamber.
3. a kind of vacuum evaporation equipment according to claim 2, it is characterised in that: the baffle plate assembly (30) further includes point
The first rotating shaft (33) and the second shaft (34) not being fixedly connected with one end of the first baffle (31) and second baffle (32),
The first rotating shaft (33) and the second shaft (34) are rotatably arranged on the supporting block (11), and the driving component (40) is respectively
It is sequentially connected with the first rotating shaft (33) and the second shaft (34).
4. a kind of vacuum evaporation equipment according to claim 3, it is characterised in that: the first baffle (31) and second gear
The setting of plate (32) mirror symmetry, the driving component (40) include connecting respectively with first rotating shaft (33) and the second shaft (34) transmission
Two driving structures connect.
5. a kind of vacuum evaporation equipment according to claim 4, it is characterised in that: the driving structure includes that setting is being steamed
The link assembly (411) and cylinder (412) of outdoor are plated, the link assembly (411) of two driving structures is respectively by cylinder
The transform linear motion of telescopic rod at first rotating shaft (33) and the second shaft (34) rotary motion.
6. a kind of vacuum evaporation equipment according to claim 4, it is characterised in that: the driving structure further includes magnetic fluid
Sealing element (413), the link assembly (411) of two driving structures pass through magnetic fluid seal (413) and described the respectively
One shaft (33) and the second shaft (34) connection, the magnetic fluid seal (413), which is run through, to be arranged in the cavity wall of deposited chamber.
7. a kind of vacuum evaporation equipment according to claim 3, it is characterised in that: the support component further includes that fixation is set
Set multiple axle sleeves (35) in the supporting block, the both ends of the first rotating shaft (33) and the second shaft (34) are rotatably arranged on
In the axle sleeve (35).
8. a kind of vacuum evaporation equipment according to claim 1, it is characterised in that: the first baffle (31) and described the
There is the step-like structure being mutually matched at the docking of two baffles (32), make the first baffle (31) and the second baffle
It (32) being capable of gap between closed baffle plate after docking.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822221620.4U CN209702838U (en) | 2018-12-27 | 2018-12-27 | A kind of vacuum evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822221620.4U CN209702838U (en) | 2018-12-27 | 2018-12-27 | A kind of vacuum evaporation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209702838U true CN209702838U (en) | 2019-11-29 |
Family
ID=68638590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822221620.4U Active CN209702838U (en) | 2018-12-27 | 2018-12-27 | A kind of vacuum evaporation equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209702838U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112981314A (en) * | 2021-02-03 | 2021-06-18 | 武汉华星光电半导体显示技术有限公司 | Evaporation plating equipment |
| TWI815135B (en) * | 2021-06-29 | 2023-09-11 | 天虹科技股份有限公司 | Shielding device and thin film deposition equipment with shielding device |
-
2018
- 2018-12-27 CN CN201822221620.4U patent/CN209702838U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112981314A (en) * | 2021-02-03 | 2021-06-18 | 武汉华星光电半导体显示技术有限公司 | Evaporation plating equipment |
| TWI815135B (en) * | 2021-06-29 | 2023-09-11 | 天虹科技股份有限公司 | Shielding device and thin film deposition equipment with shielding device |
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