CN209471935U - Groove body is automatically switched lid mechanism - Google Patents
Groove body is automatically switched lid mechanism Download PDFInfo
- Publication number
- CN209471935U CN209471935U CN201920513644.9U CN201920513644U CN209471935U CN 209471935 U CN209471935 U CN 209471935U CN 201920513644 U CN201920513644 U CN 201920513644U CN 209471935 U CN209471935 U CN 209471935U
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- CN
- China
- Prior art keywords
- cover board
- side plate
- rubber strip
- cover
- groove body
- Prior art date
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- Expired - Fee Related
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Abstract
The utility model discloses groove bodies to be automatically switched lid mechanism; including the first side plate and its second side plate disposed in parallel; symmetrically there are two the first cover boards for rotation connection between first side plate and the second side plate; lateral surface corresponding two first cap hinge axle positions symmetrically arranged two connection frame of first side plate away from the second side plate; two connection frames are welded with corresponding cylinder fender bracket, and the inside of the cylinder fender bracket is fixed with rotary cylinder.In the utility model, the second cover board of the first cover board and its rotation connection is driven to realize block to groove body port by rotary cylinder, it is small to open and close the space occupied, is convenient for worker operation；The strip for crossing rubber strip top surface engages with card slot, realize the sealing between the first cover board and the second cover board, by reclining for the second rubber strip and third rubber strip, the sealing between the first cover board and the second cover board bottom surface and shelves top surface is realized, guarantee the leakproofness of groove body port.
Description
Technical field
The utility model relates to semiconductor wet process equipment part technical fields, and in particular to groove body automatically opening and closing machine
Structure.
Background technique
Instantly each wet process facility switching lid mode is not perfect, and since allowed installation space is narrow, end cap is opened
The factors such as angle and compactness requirement are opened, therefore needed for many switch cover modes are not able to satisfy still.Since traditional switch lid mechanism is big
Part realizes that the switch of end cap is moved with artificial, draft cylinder and connecting rod, by gravity, draft cylinder and link mechanism sheet
Body it is restricted, not only make troubles to worker operation, and constrain end cap opening angle and compactness greatly.
Utility model content
In order to overcome above-mentioned technical problem, the purpose of this utility model is to provide groove bodies to be automatically switched lid mechanism, leads to
Crossing rotary cylinder drives the first cover board and its second cover board of rotation connection to realize that the block to groove body port, opening and closing account for
According to space it is small, be convenient for worker operation；The strip for crossing rubber strip top surface engages with card slot, realize the first cover board and the second cover board it
Between sealing the first cover board and the second cover board bottom surface and shelves item top are realized by reclining for the second rubber strip and third rubber strip
Sealing between face guarantees the leakproofness of groove body port.
The purpose of this utility model can be achieved through the following technical solutions:
Groove body is automatically switched lid mechanism, including the first side plate and its second side plate disposed in parallel, first side plate and
Symmetrically there are two the first cover board, lateral surface corresponding two of first side plate away from the second side plate for rotation connection between second side plate
A symmetrically arranged two connection frames of first cap hinge axle position, two connection frames are protected with corresponding cylinder
Frame welding, the inside of the cylinder fender bracket are fixed with rotary cylinder, and the rotary cylinder passes through rotary shaft and corresponding position
The transmission connection of first cover board；
The lower weld that the opposite face of both first side plate and the second side plate is located at the first cap hinge axle has extension
To the shelves item of the first side plate and the second side plate two sides, the top that the opposite face of first side plate and the second side plate is located at shelves item is equal
It symmetrically opens up there are two arc guide slot, end underrun hinge and second cover board of first cover board far from shaft rotate
Connection, second cover board are made of the removable cover for fixing cover board and end is slidably connected, the fixed cover board two outside
Sidewall weld has the wheel shaft extended in arc guide slot, and the outer wall rotation of the wheel shaft is socketed with pastes with arc guide slot inner wall
The idler wheel leaned on, the fixed cover board are equidistantly opened up with respect to the side of removable cover there are four slide bar slot, and the removable cover is cut
Face is L-type, and the removable cover is welded with inserted link with respect to the position of the corresponding four slide bar slots in the end face of four slide bar slots, institute
The outer wall for stating inserted link is socketed with the extension spring of connection removable cover and fixed cover board, with respect to four slide bar slots of the removable cover
End face inside equidistant insertion installation there are three flat thin magnet, the removable cover has been adhered fixed away from the end face of three flat thin magnets
First rubber strip；
It is connected with rubber strip between first cover board and the bottom surface of the second cover board, first cover board and the second cover board
Bottom surface corresponds to rubber strip lateral location and offers card slot, and the top surface of the rubber strip corresponds to card slot position and is provided with card
Item.
Be furthermore that: the surface adhesion of the shelves item is fixed with the second rubber strip, first cover board and the second cover board
The corresponding second rubber strip position in bottom surface be adhered fixed third rubber strip.
Be furthermore that: the flat thin magnet that two removable cover opposite faces are embedded in installation is attracting, and two activities
Two the first rubber strip surfaces of cover board opposite face adherency offer the groove being mutually clamped.
It is furthermore that: being wider than the outer diameter of idler wheel in the arc guide slot.
Be furthermore that: the bottom width of the removable cover is greater than the shift length of removable cover.
Be furthermore that: the rotation angle of first cover board is 0-90 °.
Be furthermore that: the width of the rubber strip is less than rubber strip junction on the second cover board and the first cover board hinged place
Between sum of the distance 3-5mm between rubber strip junction and the second cover board hinged place on distance and the first cover board.
The utility model has the beneficial effects that
1, symmetrically open up in the opposite face of the first side plate and the second side plate there are two arc guide slot, in the first side plate and
Symmetrically there are two the first cover boards for rotation connection between second side plate, drive the first cover board to rotate using rotary cylinder, in the first lid
End underrun hinge and second cover board of the plate far from shaft are rotatablely connected, two lateral wall of the fixation cover board welding of the second cover board
There is the wheel shaft extended in arc guide slot, and the outer wall rotation of wheel shaft is socketed with the rolling to recline with arc guide slot inner wall
Wheel, this kind of structure drive the first cover board and its second cover board of rotation connection to realize the envelope to groove body port by rotary cylinder
Gear, it is small to open and close the space occupied, is convenient for worker operation；
2, it is connected with rubber strip between the first cover board and the bottom surface of the second cover board, at the bottom of the first cover board and the second cover board
Face corresponds to rubber strip lateral location and offers card slot, and the top surface of rubber strip corresponds to card slot position and is provided with strip, and
The surface adhesion of shelves item is fixed with the second rubber strip, the corresponding second rubber strip position in the bottom surface of the first cover board and the second cover board
Place has been adhered fixed third rubber strip, and the flat thin magnet that two removable cover opposite faces are embedded in installation is attracting, and two activities
Two the first rubber strip surfaces of cover board opposite face adherency offer the groove being mutually clamped, this kind of structure passes through rubber strip top
The strip in face engages with card slot, realizes the sealing between the first cover board and the second cover board, passes through the second rubber strip and third rubber
Item reclines, and realizes the sealing between the first cover board and the second cover board bottom surface and shelves top surface, guarantees the leakproofness of groove body port.
Detailed description of the invention
The utility model will be further described below with reference to the accompanying drawings.
Fig. 1 is the structural schematic diagram of the utility model switch lid mechanism；
Fig. 2 is the structural schematic diagram that another visual angle of lid mechanism is switched in the utility model；
Fig. 3 is the explosive view of the second cover board in the utility model；
Fig. 4 is the structural schematic diagram of removable cover in the utility model；
Fig. 5 is the first cover board and the second cover board connection structure schematic diagram in the utility model.
In figure: 1, connection frame；2, rotary cylinder；3, cylinder fender bracket；4, the first side plate；5, the first cover board；6, the second lid
Plate；61, fixed cover board；611, wheel shaft；612, idler wheel；613, slide bar slot；62, removable cover；621, inserted link；622, flat thin magnet；
623, the first rubber strip；63, extension spring；7, arc guide slot；8, the second side plate；9, the second rubber strip；10, shelves item；11, it revolves
Shaft；12, third rubber strip；13, rubber strip；131, strip；14, card slot；15, hinge.
Specific embodiment
Below in conjunction with the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear, complete
Site preparation description, it is clear that the described embodiments are only a part of the embodiments of the utility model, instead of all the embodiments.
Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
All other embodiment, fall within the protection scope of the utility model.
Embodiment 1
It please refers to shown in Fig. 1-3, groove body is automatically switched lid mechanism, including the first side plate 4 and its second side disposed in parallel
Plate 8 is symmetrically rotatablely connected between first side plate 4 and the second side plate 8 there are two the first cover board 5, and the rotation angle of the first cover board 5 is
0-90 °, it can be realized the opening and closing to groove body port, lateral surface corresponding two of first side plate 4 away from the second side plate 8 in this way
A symmetrically arranged two connection frames 1 of first cover board, 5 shaft position, two connection frames 1 are protected with corresponding cylinder
Frame 3 welds, and the inside of cylinder fender bracket 3 is fixed with rotary cylinder 2, rotary cylinder 2 pass through rotary shaft 11 and corresponding position the
The transmission connection of one cover board 5；
The lower weld that the opposite face of 8 the two of the first side plate 4 and the second side plate is located at 5 shaft of the first cover board extends to
The opposite face of the shelves item 10 of 8 two sides of first side plate 4 and the second side plate, the first side plate 4 and the second side plate 8 is located at the top of shelves item 10
Arc guide slot 7 there are two symmetrically opening up, end underrun hinge 15 and second cover board 6 of first cover board 5 far from shaft
Rotation connection, the second cover board 6 are made of the removable cover 62 that fixed cover board 61 and end are slidably connected, and the two of fixed cover board 61
Lateral wall is welded with the wheel shaft 611 extended in arc guide slot 7, and the outer wall rotation of wheel shaft 611 is socketed with and arc guide slot 7
The idler wheel 612 that inner wall reclines, the interior outer diameter for being wider than idler wheel 612 of arc guide slot 7, such idler wheel 612 can draw in arc
Sliding in guide groove 7.
Embodiment 2
It please refers to shown in Fig. 3-5, the side of the opposite removable cover 62 of fixed cover board 61 equidistantly opens up that there are four slide bar slots
613, the section of removable cover 62 is L-type, the corresponding four slide bar slots 613 in end face of the opposite four slide bar slots 613 of removable cover 62
Position be welded with inserted link 621, the outer wall of inserted link 621 is socketed with the stretching bullet of connection removable cover 62 and fixed cover board 61
Spring 63, there are three flat thin magnet 622, removable covers for the equidistant insertion installation in the end face inside of the opposite four slide bar slots 613 of removable cover 62
Plate 62 has been adhered fixed the first rubber strip 623 away from the end face of three flat thin magnets 622, and the bottom width of removable cover 62 is greater than removable cover
The shift length of plate 62；
Rubber strip 13, the bottom of the first cover board 5 and the second cover board 6 are connected between first cover board 5 and the bottom surface of the second cover board 6
Face corresponds to 13 lateral location of rubber strip and offers card slot 14, and the top surface of rubber strip 13 corresponds to 14 position of card slot and is provided with card
Item 131, the width of rubber strip 13 less than on the second cover board 6 between 5 hinged place of 13 junction of rubber strip and the first cover board distance with
Sum of the distance 3-5mm between 6 hinged place of 13 junction of rubber strip and the second cover board on first cover board 5, in this way when 5 He of the first cover board
When second cover board 6 is in exceptionally straight state, rubber strip 13 can be tensed and realized to the gap between the first cover board 5 and the second cover board 6
Realize that sealing is blocked, the surface adhesion of shelves item 10 is fixed with the second rubber strip 9, the bottom surface correspondence of the first cover board 5 and the second cover board 6
Second rubber strip, 9 position has been adhered fixed third rubber strip 12, and two 62 opposite faces of removable cover are embedded in installation
Flat thin magnet 622 is attracting, in this way when two removable covers 62 are close to each other, under the suction of flat thin magnet 622, by two work
Dynamic cover board 62 splices integrally, and two 623 surfaces of the first rubber strip of two 62 opposite faces of removable cover adherency offer
The groove being mutually clamped increases the sealing of the two by the groove being mutually clamped in this way when two removable covers 62 mutually recline
Property.
Working principle: in use, will switch lid mechanism by the groove body port of bolt and semiconductor wet process equipment into
Row connection, in the outside of the first side plate 4, by 10 fixed baffle of shelves item between the first side plate 4 and the second side plate 8, and
The top of baffle is fixed overlapped with the first cover board 5 rubber press strip, is then revolved external feeder by tracheae with two
2 respective two suction nozzles of rotaring cylinder are attached, control switch lid mechanism close lid when, external feeder by tracheae to
2 one end of rotary cylinder gas supply, control rotary cylinder 2 drive rotary shaft 11 to rotate, the rotary shaft 11 of rotation drive the first cover board 5 to
It is inside overturn, is rotatablely connected due to passing through hinge 15 between the first cover board 5 and the second cover board 6, and the side wall of the second cover board 6
It is provided with the idler wheel 612 being slidably connected with arc guide slot 7, under the guiding function of idler wheel 612, the second cover board 6 is along arc
Guiding groove 7 is mobile, the flat thin magnet when the top surface of the second cover board 6 tends to be overlapped, in two 6 end removable covers 62 of the second cover board
622 attract each other, so that moved towards between two removable covers 62, the splicing between two the second cover boards 6 of completion, while the
One cover board 5 and the second cover board 6, when top surface is in coincidence, 9 He of the second rubber strip of 6 bottom surface lower part of the first cover board 5 and the second cover board
Sealing is realized between third rubber strip 12, and the rubber press strip on baffle is realized 5 junction of the first cover board and overlapped；Control is opened
When pass lid mechanism is uncapped, external feeder is supplied by tracheae to 2 other end of rotary cylinder, and control rotary cylinder 2 drives
Rotary shaft 11 reversely rotates, and the rotary shaft 11 of reverse rotation drives the first cover board 5 to be overturn outward, at this time two the second cover boards
Mutually deviate between 6, the flat thin magnet 622 in 6 end removable cover 62 of the second cover board is gradually disengaged, and in extension spring 63
Under effect, restore to initial position, then as the gradually overturning of the first cover board 5, the second cover board 6 is by idler wheel 612 along arc
Shape guiding groove 7 is mobile, and the second cover board 6 is drawn close to the first cover board 5, thus by the groove body port of semiconductor wet process equipment
It opens.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one of the utility model
In embodiment or example.In the present specification, schematic expression of the above terms be not necessarily referring to identical embodiment or
Example.Moreover, particular features, structures, materials, or characteristics described can be in any one or more embodiment or examples
In can be combined in any suitable manner.
Above content is only to examples for clearly illustrating the present invention and explanation, affiliated those skilled in the art couple
Described specific embodiment does various modifications or additions or is substituted in a similar manner, without departing from practical new
Type or beyond the scope defined by this claim, all should belong to the protection range of the utility model.
Claims (7)
1. groove body is automatically switched lid mechanism, which is characterized in that including the first side plate (4) and its second side plate disposed in parallel (8),
Symmetrically there are two the first cover board (5), first side plates (4) for rotation connection between first side plate (4) and the second side plate (8)
Away from corresponding two symmetrically arranged two connection frames of the first cover board (5) shaft position of the lateral surface of the second side plate (8)
(1), two connection frames (1) are welded with corresponding cylinder fender bracket (3), and the inside of the cylinder fender bracket (3) is fixed
Have rotary cylinder (2), the rotary cylinder (2) is sequentially connected by the first cover board (5) of rotary shaft (11) and corresponding position；
The lower weld that the opposite face of first side plate (4) and the second side plate (8) the two is located at the first cover board (5) shaft has
Extend to the shelves item (10) of the first side plate (4) and the second side plate (8) two sides, the phase of first side plate (4) and the second side plate (8)
The top that opposite is located at shelves item (10) is symmetrically opened up there are two arc guide slot (7), the separate shaft of first cover board (5)
End underrun hinge (15) and the second cover board (6) are rotatablely connected, and second cover board (6) is by fixed cover board (61) and holds
Removable cover (62) composition that portion is slidably connected, two lateral walls of the fixed cover board (61), which are welded with, extends to arc guide slot
(7) the outer wall rotation of the wheel shaft (611) in, the wheel shaft (611) is socketed with the idler wheel to recline with arc guide slot (7) inner wall
(612), the fixed cover board (61) equidistantly opens up the work there are four slide bar slot (613) with respect to the side of removable cover (62)
The section of dynamic cover board (62) is L-type, the corresponding four slide bar slots in end face of the opposite four slide bar slots (613) of the removable cover (62)
(613) position is welded with inserted link (621), and the outer wall of the inserted link (621) is socketed with connection removable cover (62) and consolidates
Determine the extension spring (63) of cover board (61), the end face inside of the opposite four slide bar slots (613) of the removable cover (62) is equidistant embedding
Enter installation there are three flat thin magnet (622), the removable cover (62) has been adhered fixed the away from the end face of three flat thin magnets (622)
One rubber strip (623)；
Be connected with rubber strip (13) between first cover board (5) and the bottom surface of the second cover board (6), first cover board (5) and
The bottom surface of second cover board (6) corresponds to rubber strip (13) lateral location and offers card slot (14), the top surface pair of the rubber strip (13)
Card slot (14) position is answered to be provided with strip (131).
2. groove body according to claim 1 is automatically switched lid mechanism, which is characterized in that the surface adhesion of the shelves item (10)
It is fixed with the second rubber strip (9), the first cover board (5) the second rubber strip (9) institute corresponding with the bottom surface of the second cover board (6) is in place
The place of setting has been adhered fixed third rubber strip (12).
3. groove body according to claim 1 is automatically switched lid mechanism, which is characterized in that two removable cover (62) phases
The flat thin magnet (622) that opposite is embedded in installation is attracting, and two the first rubber of two removable cover (62) opposite faces adherency
Item (623) surface offers the groove being mutually clamped.
4. groove body according to claim 1 is automatically switched lid mechanism, which is characterized in that the arc guide slot (7) it is interior
It is wider than the outer diameter of idler wheel (612).
5. groove body according to claim 1 is automatically switched lid mechanism, which is characterized in that the bottom width of the removable cover (62)
Greater than the shift length of removable cover (62).
6. groove body according to claim 1 is automatically switched lid mechanism, which is characterized in that the rotation of first cover board (5)
Angle is 0-90 °.
7. groove body according to claim 1 is automatically switched lid mechanism, which is characterized in that the width of the rubber strip (13) is small
Distance and rubber on the first cover board (5) between rubber strip (13) junction on the second cover board (6) and the first cover board (5) hinged place
Sum of the distance 3-5mm between band (13) junction and the second cover board (6) hinged place.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920513644.9U CN209471935U (en) | 2019-04-16 | 2019-04-16 | Groove body is automatically switched lid mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920513644.9U CN209471935U (en) | 2019-04-16 | 2019-04-16 | Groove body is automatically switched lid mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209471935U true CN209471935U (en) | 2019-10-08 |
Family
ID=68093858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920513644.9U Expired - Fee Related CN209471935U (en) | 2019-04-16 | 2019-04-16 | Groove body is automatically switched lid mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209471935U (en) |
-
2019
- 2019-04-16 CN CN201920513644.9U patent/CN209471935U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191008 Termination date: 20210416 |