CN209692140U - A kind of coaxial laser and its light source kernel of included wavelength calibration - Google Patents
A kind of coaxial laser and its light source kernel of included wavelength calibration Download PDFInfo
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- CN209692140U CN209692140U CN201920607192.0U CN201920607192U CN209692140U CN 209692140 U CN209692140 U CN 209692140U CN 201920607192 U CN201920607192 U CN 201920607192U CN 209692140 U CN209692140 U CN 209692140U
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Abstract
The utility model relates to a kind of coaxial laser of included wavelength calibration and its light source kernels, including TO tube socket, TEC refrigerator, heat transfer cushion block, aluminium nitride cushion block, chip of laser, thermistor and TO pin, TEC refrigerator, chip of laser and thermistor are electrically connected with TO pin respectively, the primary optical axis of chip of laser and the central axis coaxial of TO tube socket；TEC refrigerator includes temperature control huyashi-chuuka (cold chinese-style noodles) and radiating surface, and heat conductive pad block welding is on temperature control huyashi-chuuka (cold chinese-style noodles)；Heat transfer cushion block includes the first cushion block and the second cushion block, and the first cushion block is fixed at the upper surface of the second cushion block, and the upper surface of TEC refrigerator is arranged in the second cushion block, and the thermal diffusion coefficient that the material of the first cushion block is made is greater than 40mm2/ s, the thermal diffusion coefficient that the material of the second cushion block is made are less than 10mm2/s.It is poor that the utility model had not only efficiently solved the problems, such as current coaxial laser there are stability of display, but also really realizes wavelength self-calibration function, effectively improves TDLAS gas detection precision, is more suitable for TDLAS gas detecting system.
Description
Technical field
The utility model relates to field of gas detection, the especially a kind of coaxial laser and its light source of included wavelength calibration
Kernel.
Background technique
Gas content real-time online formula detection system based on TDLAS (tunable diode laser absorption spectroscopy) technology is
By gas to the laser absorption of specific wavelength, the content of corresponding gas is measured.It is advanced highly sensitive, quick response
Gas detection technology of new generation.The technology has measurement accuracy high, up to ppm (hundred a ten thousandths) magnitude；Accuracy is high, can examine
Survey the special component gas in mixed gas；Fast response time, up to millisecond response level；It is detected, can be resisted using optical mode
Interference and explosion-resistance characteristic；The advantages that without often demarcating, can be used for flammable explosive gas detection.
Wherein, to the high-acruracy survey of realization laser, it is necessary to assure in laser system in laser light source work
The long absorbing wavelength for being just aligned tested gas of cardiac wave, by taking methane gas as an example, a certain absorbing wavelength is 1653.7nm, therefore is swashed
Chip of laser scanning wavelength center in light methane transducer light source needs to be directed at 1653.7nm.However the drive of laser light source
The factors such as streaming current, environment temperature can all cause the drift of chip of laser wavelength, and environment temperature is higher, chip of laser wavelength
It is longer, on the contrary it is shorter.Therefore in variation of ambient temperature, laser center wavelength itself jump, laser drive current variation etc.
Under the influence of multiple factors, the scanning center of laser wavelength constantly self calibration is needed, it is ensured that chip of laser issues laser wave
Long scanning center does not change, and ability accurate detection goes out object gas, so that equipment becomes real calibration-free, exempts to tie up
Protect equipment.
The laser in laser gas detection system is primarily present following several problems at present:
1, currently used for the laser of laser gas detection field be use butterfly 14pin (butterfly) or
The packing forms or concentric zones of BOX freeze packing forms, on all Vehicles Collected from Market laser optical product-derived of all categories without
Wavelength self-calibration function can not really realize non-maintaining laser optical product-derived, be unfavorable for the accurate detection of gas；And current
The laser of concentric zones refrigeration packing forms is chiefly used in the communications field, and the control precision of wave length shift is 1nm or so, control essence
Degree is not suitable for field of gas detection completely.
2, current low-power consumption small-sized package laser, such as miniaturization BOX encapsulation type and concentric zones refrigeration mode laser
Device all has that length scanning center is unstable, i.e., with the TDLAS gas detection equipment detection gas of such laser when, concentration is shown
Value is not sufficiently stable, it may appear that 1% or so reciprocating swing.Its reason is: the semiconductor cooler TEC control in such laser
Warm huyashi-chuuka (cold chinese-style noodles) is to keep set temperature, needs ceaselessly to carry out sine wave type function of temperature compensation control, due to small-sized package laser
Inner space is limited, and heat sink heat load is too small, therefore heat sink temperature stability is low.And thermistor distance TEC temperature control huyashi-chuuka (cold chinese-style noodles)
Height causes control to be delayed because reasons in structure is not easy to reduce.So as to cause DFB/Vcsel chip of laser length scanning center
Always it is being in the variation of sine wave type, is being not sufficiently stable to influence TDLAS gas detection equipment concentration indicating value.
3, current lasers are all outer to guarantee system stability or non-maintaining in the application of TDLAS gas detecting system
Add independent reference gas chamber or the photodetector with reference gas chamber, but such system photoconductive structure is complicated, volume is big, cost
Height, reliability are low.There are no a kind of swashing from the calibrated function of bandgap wavelength compact-sized, small in size, at low cost currently on the market
Light device.
Utility model content
Technical problem to be solved in the utility model is in view of the above shortcomings of the prior art, to provide a kind of from bandgap wavelength
The coaxial laser and its light source kernel of calibration can not be carried out in wavelength self calibration and length scanning with solving existing laser
The technical problem of heart stability difference.
The technical solution that the utility model solves above-mentioned technical problem is as follows:
A kind of coaxial laser light source kernel of included wavelength calibration, including TO tube socket, setting table on the TO tube socket
The heat transfer cushion block that TEC refrigerator upper surface is arranged in, table is arranged on the heat transfer cushion block in the TEC refrigerator in face
The aluminium nitride cushion block in face and the chip of laser and thermistor for being separately positioned on aluminium nitride cushion block upper surface；
It further include through the TO pin being arranged on the TO tube socket, the TEC refrigerator, the chip of laser and institute
It states thermistor to be electrically connected with the TO pin respectively, and the center of the primary optical axis of the chip of laser and the TO tube socket
Axis coaxle；
The TEC refrigerator includes temperature control huyashi-chuuka (cold chinese-style noodles) and radiating surface, and the upper surface of the TEC refrigerator is that the temperature control is cold
The lower surface in face, the TEC refrigerator is the radiating surface, and the heat conductive pad block welding is on the temperature control huyashi-chuuka (cold chinese-style noodles)；
The heat transfer cushion block includes the first cushion block and the second cushion block, and first cushion block is fixed at second pad
The upper surface of the TEC refrigerator is arranged in the upper surface of block, second cushion block, and the material of first cushion block is made
Thermal diffusion coefficient is greater than 40mm2/ s, the thermal diffusion coefficient that the material of second cushion block is made are less than 10mm2/s。
The beneficial effects of the utility model are: being needed not since TEC refrigerator temperature control huyashi-chuuka (cold chinese-style noodles) is to keep set temperature constant
The carry out sine wave type function of temperature compensation control stopped, and the time of thermistor perception TEC refrigerator temperature control coldface temperature variation prolongs
The heat load of heat transfer cushion block late and on TEC refrigerator temperature control huyashi-chuuka (cold chinese-style noodles), thermal inertia have codetermined TEC refrigerator to sharp
The stable temperature control of light device chip, wherein thermistor perceives the time delay of TEC refrigerator temperature control coldface temperature variation, with
The relationship of the distance between TEC refrigerator and thermistor is inverse relation, i.e. distance is about small, and time delay is shorter, and perception is got over
Fastly, heat load (the i.e. quality of heat transfer cushion block of the heat transfer cushion block on stable temperature control Du Genggao, TEC refrigerator temperature control huyashi-chuuka (cold chinese-style noodles)
Multiplied by specific heat capacity) it is bigger, it is better that temperature redundancy brought by control delay is absorbed, so that temperature stability is higher；Heat passes
The thermal diffusion coefficient for leading cushion block is smaller, and the thermal inertia of material is bigger, and heat insulation effect is better, so that temperature stability is higher；
Therefore the utility model is fixed at the upper surface of the second cushion block by the first cushion block and the heat transfer cushion block that constitutes,
And the thermal diffusion coefficient that the material of the first cushion block is made is greater than 40mm2/ s, the thermal diffusion coefficient that the material of the second cushion block is made are small
In 10mm2/ s, such as the first cushion block made of tungsten copper, the second cushion block made of kovar alloy, first made of tungsten copper
Cushion block thermal diffusion coefficient is 74mm2/ s can effectively reduce temperature control time delay, the second cushion block thermal diffusion made of kovar alloy
Coefficient is 5mm2/ s, can effectively increase heat sink thermal inertia, and thermal diffusion coefficient it is small material package thermal diffusion coefficient it is big
Material also plays certain insulation effect；Therefore it with the heat transfer cushion block of structure described in the utility model, can increase substantially
The stability of laser control temperature, to improve the stability at chip of laser length scanning center, solve current low-power consumption,
Small package type laser in TDLAS gas detection equipment in application, 1% or so wild effect of concentration indicating value, and with the structure
The laser of heat transfer cushion block can reach the stability of concentration indicating value 4 ‰, to be more suitable for TDLAS gas detecting system；
Wherein, the temperature variation (refrigerating capacity or heating capacity) that heat transfer cushion block is used to control TEC refrigerator is uniformly flat
Sliding is transmitted in thermistor and chip of laser, either metal material or alloy material, are also possible to non-metallic material
Matter, aluminium nitride cushion block are used to design the temperature control circuit of chip of laser and thermistor, both can guarantee that temperature variation was transmitted to
In thermistor and chip of laser, and it can guarantee chip of laser and thermistor mutually insulated.
Based on the above technical solution, the utility model can also do following improvement:
Further, first cushion block is weldingly fixed on the upper of second cushion block by solder bonding metal solder or silver paste
Surface, the solder bonding metal solder include gold-tin eutectic solder, SAC solder, indalloy, the weldering of bismuth tin alloy
At least one of material, wiping solder, indium stannum alloy solder.
Further, the pyroconductivity of the solder bonding metal solder or silver paste is greater than or equal to 40W/ (mK).
The beneficial effect of above-mentioned further scheme is: selection pyroconductivity is greater than or equal to the metal pricker of 40W/ (mK)
Weld connection substance as the first cushion block and the second cushion block of solder or silver paste, it is ensured that controlled transformation temperature is from TEC system
Cooler temperature control huyashi-chuuka (cold chinese-style noodles) runs through the first, second heat transfer cushion block, then between thermistor and the heat dissipation bottom surface of chip of laser
Travel at high speeds, so that temperature acquisition sensitivity of the TEC refrigerator to thermistor and the temperature to chip of laser control spirit
Sensitivity all effectively improves, so that laser wavelength stability improves, further avoids laser wavelength scanning center not
Stable case effectively improves wavelength control precision, but also based on the coaxial laser light source kernel in the utility model
The measurement accuracy and stability of TDLAS gas detection equipment are effectively promoted.
Further, the TO pin is made of copper or copper alloy.
The beneficial effect of above-mentioned further scheme is: TO pin is changed to copper pipe foot from traditional pin that cuts down, accordingly,
Seal glass between TO pin and TO tube socket corresponding can be changed to compression sealing-in formula copper sealing glass.Resistance can be effectively reduced in copper pipe foot
It is anti-, enable external module temperature-adjusting circuit more accurately to perceive the change in resistance of thermistor, and the temperature to TEC refrigerator
Degree driving is more accurate, especially in the case where small current driving, swashs to further ensure the coaxial of the utility model
In light device light source nuclear energy it is in office meaning variation of ambient temperature when export high stable wavelength laser beam.
Further, further include TO pipe cap, and the TO pipe cap sealing welding is on the TO tube socket, and the TEC freezes
Device, the heat transfer cushion block, the aluminium nitride cushion block, the chip of laser and the thermistor are arranged at the TO pipe
In seal chamber made of cap and the TO tube socket surround；
The TO pipe cap is equipped with pipe cap lens, and the central axis of the primary optical axis of the pipe cap lens and the TO tube socket
Coaxially.
Further, the pipe cap lens include any one of flat window planar lens, non-spherical lens and spherical lens.
The beneficial effect of above-mentioned further scheme is: since object radiates or predominantly heat transfer and heat radiation two of absorbing heat
Kind, space made of being surrounded by TO tube socket with TO pipe cap in the laser light source kernel of the utility model coaxial packaging vacuumizes
It manages (being designed to seal chamber), vacuum environment significantly reduces the mutual heat radiation of heat transfer cushion block and environment, thus into one
The power consumption for walking reduced product, improves temperature stability；Simultaneously in the case where high concentration is tested gaseous environment, gas may be penetrated into
In the inside optical path of laser light source kernel, part of laser beam is caused to be actually taken up by gas, so that optical power absorption line linearly goes out
Now change, appraise and decide algorithm and judge by accident, therefore the air-tight packaging of the utility model laser light source kernel can be avoided effectively
It is possible that high concentration is tested the mistake survey occurred when working under gaseous environment, and air-tight packaging can effectively avoid the dirts such as steam, dust
Dye, further increases the service life of product；
Wherein, by the flat window planar lens on TO pipe cap, it can be achieved that coaxial laser light source kernel maintains laser core
Piece divergent beams characteristic, subsequent optical path scalability are strong；And by non-spherical lens and spherical lens can realize light convergence or
Parallel light output can be docked preferably with external optical system standardization.
According to the another aspect of the utility model, a kind of coaxial laser of included wavelength calibration, including this reality are provided
It further include tube body with the coaxial laser light source kernel of one of novel included wavelength calibration, the coaxial laser light source
Kernel is fixedly welded on one end of the tubular body and the TO pin is extend out to outside the tube body；
It further include the coupled lens for being fixedly welded on the tubular body, optoisolator and semi-transparent semi-reflecting eyeglass, and institute
State coupled lens, the optoisolator and the semi-transparent semi-reflecting eyeglass successively with the coaxial laser light source kernel optical path coupling
It closes, the central axis coaxial of the primary optical axis of the optoisolator and the coaxial laser light source kernel, the semi-transparent semi-reflecting lens
The central axis of piece and the coaxial laser light source kernel is in 45° angle；
It further include the photodetector of included reference gas chamber, the photodetector is fixedly welded on the tubular body
Side, and the central axis of the semi-transparent semi-reflecting eyeglass and the photodetector is in 45° angle, in the coaxial laser light source
The central axis of the central axis of core and the photodetector is in 90 ° of angles.
The beneficial effects of the utility model are: on the basis of the coaxial laser light source kernel of the utility model, same
The photodetector of the mutatis mutandis included reference gas chamber of integrated wavelength self-correcting is gone back on axis laser, can be driven and be solved by external circuit
It calculates, autonomous calibrated laser wavelength scanning center, realizes the reflexive feedback system of wavelength truly in real time, to guarantee with this
The coaxial laser of utility model is able to achieve long-term non-maintaining calibration-free as the TDLAS gas detection equipment of system source
Function, substantially increase the reliability and convenience of TDLAS gas detection equipment；Wherein, coupled lens, optoisolator and
Semi-transparent semi-reflecting eyeglass is successively coupled with coaxial laser light source kernel optical path.Optoisolator, the primary optical axis of coupled lens and same
The central axis coaxial of axis laser light source kernel, the central axis of semi-transparent semi-reflecting eyeglass and coaxial laser light source kernel are in
45° angle, while the central axis of semi-transparent semi-reflecting eyeglass and photodetector is in 45° angle, the center of coaxial laser light source kernel
At an angle of 90, the coaxial laser of the structure passes through semi-transparent semi-reflecting lens to the central axis of axis and included reference gas chamber photodetector
A part of light energy that piece exports laser is reflected into the photodetector of included reference gas chamber, another part light energy
Externally output, and coupled lens and coaxial laser light source kernel collectively constitute output light path, or be space directional light or be remittance
Optically focused converges in optical fiber.Required by the laser light source for meeting current included wavelength calibration function, fraction of laser light conduct
Measuring beam output, fraction of laser light is used as to be used compared with collimated light beam self calibration；The integral structure considerably reduces original TDLAS and passes
Light channel structure complexity in sensor module improves reliability.The utility model coaxial laser light source kernel and included ginseng
It examines the integral structure of the photodetector of gas chamber, more compact structure, while its frame mode and meets the automatic metaplasia of coaxial BOSA
Production scheme.Relatively traditional separate type photoelectric cell scheme reduces about 1 half or more at instinct, is TDLAS gaseous detection applications
Cost effective and large-scale application lays the foundation；
Wherein, the photodetector for carrying reference gas chamber is the prior art, is specifically repeated no more.
Based on the above technical solution, the utility model can also do following improvement:
Further, the central axis of the primary optical axis of the coupled lens and the coaxial laser light source kernel is in 4 °~8 °
Angle.
The beneficial effect of above-mentioned further scheme is: the primary optical axis of coupled lens and the center of coaxial laser light source kernel
The angle by a small margin of axis, the reflected light that can effectively avoid chip of laser from generating perpendicular to coupled lens enter laser core
It in the resonant cavity of piece, therefore can effectively avoid occurring because of wavelength unstability situation brought by reflecting interference, thus into one
Step improves wavelength stability of the laser when continuing working.
Further, further including protection eyeglass, the protection eyeglass is arranged in the tube body far from the coaxial laser light
One end of source kernel.
Further, the protection eyeglass includes any one of flat window lens, non-spherical lens and spherical lens.
The beneficial effect of above-mentioned further scheme is: using protection eyeglass by optical components all inside laser and phototube
Part air-tight packaging is complete whole at one, prevents external moisture, tested gas, dust from penetrating into from calibrated same of bandgap wavelength
Inside the optical path of axis laser, internal optical component is polluted, the ambient adaptability of laser is substantially increased, increases
Reliability.
Detailed description of the invention
Fig. 1-1 is the positive structure diagram of coaxial laser light source kernel in the utility model embodiment one；
Fig. 1-2 is the side structure schematic view of coaxial laser light source kernel in the utility model embodiment one；
Fig. 2 is the structural schematic diagram of the TO pin of coaxial laser light source kernel in the utility model embodiment one；
Fig. 3 is the sectional structure signal of the coaxial laser light source kernel with TO pipe cap in the utility model embodiment one
Figure；
Fig. 4 is the schematic cross-sectional view that the coaxial laser of wavelength calibration is carried in the utility model embodiment two；
Fig. 5 is that the sectional structure of the coaxial laser of the coupled lens with mounted angle in the utility model embodiment two shows
It is intended to；
Fig. 6 is the schematic cross-sectional view of the coaxial laser with TO pipe cap in the utility model embodiment two；
Fig. 7 is the schematic cross-sectional view of the coaxial laser with protection eyeglass in the utility model embodiment two.
In attached drawing, parts list represented by the reference numerals are as follows:
1, TO tube socket, 2, TEC refrigerator, 3, heat transfer cushion block, 4, aluminium nitride cushion block, 5, chip of laser, 6, temperature-sensitive electricity
Resistance, 7, TO pin, 8, TO pipe cap, 9, pipe cap lens, 10, coaxial laser light source kernel, 11, tube body, 12, coupled lens, 13,
Optoisolator, 14, semi-transparent semi-reflecting eyeglass, 15, photodetector, 16, protection eyeglass, 17, spun gold, the 18, first cushion block, 19, the
Two cushion blocks.
Specific embodiment
The principles of the present invention and feature are described below in conjunction with attached drawing, example is served only for explaining that this is practical
It is novel, it is not intended to limit the scope of the utility model.Based on the embodiments of the present invention, those of ordinary skill in the art
All other embodiment obtained without making creative work, fall within the protection scope of the utility model.
Embodiment one, as shown in Fig. 1-1 and Fig. 1-2, a kind of coaxial laser light source kernel of included wavelength calibration, including
TO tube socket 1, the TEC refrigerator 2 that 1 upper surface of TO tube socket is set, the heat biography that 2 upper surface of TEC refrigerator is set
Cushion block 3 is led, the aluminium nitride cushion block 4 of 3 upper surface of heat transfer cushion block is set and is separately positioned on the aluminium nitride cushion block 4
The chip of laser 5 and thermistor 6 of upper surface；
It further include through the TO pin 7 being arranged on the TO tube socket, the TEC refrigerator 2, the chip of laser 5
It is electrically connected respectively with the TO pin 7 with the thermistor 6, and the primary optical axis of the chip of laser 5 and the TO are managed
The central axis coaxial of seat 1；
The TEC refrigerator 2 includes temperature control huyashi-chuuka (cold chinese-style noodles) and radiating surface, and the upper surface of the TEC refrigerator 2 is that the temperature control is cold
The lower surface in face, the TEC refrigerator 2 is the radiating surface, and the heat transfer cushion block 3 is welded on temperature control cold end face
On；
The heat transfer cushion block 3 includes the first cushion block 18 and the second cushion block 19, and first cushion block 18 is fixed at institute
The upper surface of the second cushion block 19 is stated, the upper surface of the TEC refrigerator 2 is arranged in second cushion block 19, and is made described
The thermal diffusion coefficient of the material of one cushion block 18 is greater than 40mm2/ s, the thermal diffusion coefficient that the material of second cushion block 19 is made are small
In 10mm2/s。
Specifically, the chip of laser 5 in the present embodiment be DFB or Vcsel chip of laser, TO tube socket 1 by TO46,
Any diameter in TO56, TO60, TO80, TO39 is less than 10mm coaxial packaging material and is made；First cushion block 18 uses thermal expansion
It dissipates coefficient and is greater than 40mm2The material of/s, first cushion block 18 of the present embodiment further preferably low material of thermal expansion coefficient, such as tungsten copper,
Second cushion block 19 is less than 10mm with thermal diffusion coefficient2The kovar alloy of/s, the first cushion block 18 is embedded to be welded on the second cushion block 19.
Specifically, the TEC refrigerator 2 in the present embodiment, chip of laser 5 and thermistor 6 pass through spun gold 17 respectively
It is electrically connected with TO pin 7.
The working principle of coaxial laser light source kernel in the present embodiment are as follows:
Since the coaxial laser of field of gas detection should meet the small form factor requirements of coaxial TO encapsulation, it is also necessary to meet
In -10 DEG C to+60 DEG C working environments, the continually and steadily thermal design within the scope of ± 0.01nm of laser wavelength scanning center
And the requirement of Circuit Matching design, therefore chip of laser local environment temperature change is linearly become by thermistor resistance value
Change, carry out the temperature of the temperature control huyashi-chuuka (cold chinese-style noodles) of active current control semiconductor cooler TEC, and passes through heat transfer cushion block and aluminium nitride pad
Block uniform smooth is transmitted on chip of laser, to realize in the variation of ambient temperature of laser, to chip of laser
High stability thermostatic control is carried out, it, can be more preferable with the laser light source of kernel encapsulation to guarantee the central stabilizer of length scanning
Ground is applied in gas detection.
Pass through TEC refrigerator, chip of laser and the thermistor and chip of laser being successively set on TO tube socket
Primary optical axis and TO tube socket central axis coaxial, constitute this coaxial laser light source kernel；Based on knot described in the present embodiment
The heat transfer cushion block of structure, can increase substantially the stability of laser temperature, to improve chip of laser length scanning center
Stability, solve current low-power consumption, small package type laser in TDLAS gas detection equipment in application, concentration indicating value 1% is left
Right wild effect can reach the stability of concentration indicating value 4 ‰ with the laser of the structure heat transfer cushion block, to be more suitable for
TDLAS gas detecting system；
Wherein, the temperature variation (refrigerating capacity or heating capacity) that heat transfer cushion block is used to control TEC refrigerator is uniformly flat
Sliding is transmitted in thermistor and chip of laser, either metal or alloy material, is also possible to non-metallic material, nitrogen
Change the temperature control circuit that aluminium cushion block is used to design chip of laser and thermistor, both can guarantee that temperature variation was transmitted to temperature-sensitive electricity
In resistance and chip of laser, and it can guarantee chip of laser and thermistor mutually insulated.
Specifically, the second cushion block 19 made of kovar alloy is welded by silver paste in the heat transfer cushion block 3 in the present embodiment
It connects on the temperature control huyashi-chuuka (cold chinese-style noodles) of TEC refrigerator 2, the first cushion block 18 is welded on by high-termal conductivity elargol or solder bonding metal solder
On two cushion blocks 19, aluminium nitride cushion block 4 is welded in heat transfer cushion block 3 made of tungsten copper solder bonding metal solder or silver paste
On one cushion block 19, chip of laser 5 and thermistor 6 are welded on aluminium nitride cushion block 4 by solder bonding metal solder, and metal
Brazing solder includes gold-tin eutectic solder, SAC solder, indalloy, bismuth tin alloy solder, terne metal weldering
The pyroconductivity of at least one of material, indium stannum alloy solder, solder bonding metal solder or silver paste is greater than or equal to 40W/ (mK).
Select solder bonding metal solder of the pyroconductivity more than or equal to 40W/ (mK) or silver paste as the first cushion block and
The connection substance of second cushion block, it is ensured that controlled transformation temperature is passed from TEC refrigerator temperature control huyashi-chuuka (cold chinese-style noodles) through the first, second heat
Cushion block is led, then to the travel at high speeds between thermistor and the heat dissipation bottom surface of chip of laser, so that TEC refrigerator is to temperature-sensitive electricity
The temperature acquisition sensitivity of resistance and the control sensitivity of the temperature of chip of laser is all effectively improved, so that laser wave
Long stability improves, and further avoids the unstable situation in laser wavelength scanning center, effectively improves wavelength control precision,
So that the measurement accuracy and stability of the TDLAS gas detection equipment based on the coaxial laser light source kernel in the utility model
Effectively promoted.
Preferably, as shown in Fig. 2, the TO pin 7 is made of copper or copper alloy.
TO pin is changed to copper pipe foot from traditional pin that cuts down, accordingly, the sealing-in glass between TO pin and TO tube socket
Glass, which can correspond to, is changed to compression sealing-in formula copper sealing glass.Impedance can be effectively reduced in copper pipe foot, enable external temperature-adjusting circuit more quasi-
The change in resistance of thermistor really is perceived, and more accurate to the temperature driving of TEC refrigerator, is especially driven in low current
In the case where dynamic, to further ensure the meaning variation of ambient temperature in office of nuclear energy in the coaxial laser light source of the utility model
When export high stable wavelength laser beam.
Preferably, as shown in figure 3, further including TO pipe cap 8, and 8 sealing welding of TO pipe cap is on the TO tube socket 1,
The TEC refrigerator 2, the heat transfer cushion block 3, the aluminium nitride cushion block 4, the chip of laser 5 and the thermistor
6 are arranged in seal chamber made of the TO pipe cap 8 is surrounded with the TO tube socket 1；
The TO pipe cap 8 is equipped with pipe cap lens 9, and in the primary optical axis of the pipe cap lens 9 and the TO tube socket 1
Heart axis coaxle.
Specifically, the pipe cap lens 9 include any one of flat window planar lens, non-spherical lens and spherical lens.
It takes out in space made of being surrounded as TO tube socket with TO pipe cap in the laser light source kernel of the present embodiment coaxial packaging
It being vacuum-treated (being designed to seal chamber), vacuum environment significantly reduces the mutual heat radiation of heat transfer cushion block and environment, from
And further improve temperature stability.Meanwhile the air-tight packaging of the present embodiment laser light source kernel can be avoided effectively
It is possible that high concentration is tested the mistake survey occurred when working under gaseous environment, and air-tight packaging can effectively avoid the dirts such as steam, dust
Dye, further increases the service life of product；
Wherein, by the flat window planar lens on TO pipe cap, it can be achieved that coaxial laser light source kernel maintains laser core
Piece divergent beams characteristic, subsequent optical path scalability are strong.And by non-spherical lens and spherical lens can realize light convergence or
Parallel light output can be docked preferably with external optical system standardization.
Embodiment two, as shown in figure 4, a kind of coaxial laser of included wavelength calibration, including one in the utility model
Kind coaxial laser light source kernel 10, further includes tube body 11, the coaxial laser light source kernel 10 is fixedly welded on the pipe
One end and the TO pin 7 inside body 11 are stretched out outside the tube body 11；
It further include coupled lens 12, optoisolator 13 and the semi-transparent semi-reflecting eyeglass being fixedly welded on inside the tube body 11
14, and the coupled lens 12, the optoisolator 13 and the semi-transparent semi-reflecting eyeglass 14 successively with the coaxial laser
The coupling of 10 optical path of light source kernel, the primary optical axis and the coaxial laser light source of the optoisolator 13, the coupled lens 12
The central axis of the central axis coaxial of kernel 10, the semi-transparent semi-reflecting eyeglass 14 and the coaxial laser light source kernel 10 is in
45° angle；
It further include the photodetector 15 of included reference gas chamber, the photodetector 15 is fixedly welded on the tube body 11
Internal side, and the central axis of the semi-transparent semi-reflecting eyeglass 14 and the photodetector 15 is in 45° angle, it is described coaxial sharp
The central axis of light device light source kernel 10 and the central axis of the photodetector 15 are in 90 ° of angles.
Specifically, the tube body 11 in the present embodiment is round and square tube body.It is visited by the photoelectricity of round and square tube body, included reference gas chamber
The optical element surveyed between device and the coaxial laser light source kernel and each section of the present embodiment constitutes calibrated from bandgap wavelength
The laser of function, more compact structure, technique is simpler, eliminates passive optical components many in original TDLAS system, In
It realizes that laser wavelength scanning center can be under self-alignment function, while improving the reliability of laser and reducing product cost.
Specifically, the coupled lens 12 in the present embodiment, optoisolator 13 and semi-transparent semi-reflecting eyeglass 14 pass through asphalt mixtures modified by epoxy resin
Rouge gluing, and be fixed on inside round and square tube body 11 after carrying out 150 DEG C of bakings, coaxial laser light source kernel 10 and round and square tube body 11
The optical path for carrying out XYZ axis couples adjustment, is adjusted at the 100mm of distal end and hot spot is after diameter is no more than the directional light of 0.4mm
It carries out laser welding to fix, the photodetector 15 of included reference gas chamber couples tune with the optical path that round and square tube body 11 carries out XYZ axis
It is whole, until responsiveness reaches >=0.5mA/mW after it is fixed by laser welding or epoxide-resin glue cementation.Pass through above-mentioned optical path
The parallel laser that the coaxial laser of the present embodiment constituted issues is coupled, a part is exported as measuring beam, another part
The photodetector of included reference gas chamber is reflected into the semi-transparent semi-reflecting eyeglass by the primary optical axis angle 45° angle with light source kernel
It is interior, as compared with collimated light beam.Finally constitute the coaxial laser of included wavelength calibration function.
Specifically, the semi-transparent semi-reflecting eyeglass 14 of the present embodiment includes the light for specified wavelength, and reflectivity and transmissivity is in
A certain proportion of eyeglass, such as the eyeglass of 10% reflection, 90% transmission, 50% reflection, 50% transmission, 90% reflection, 10% transmission
Deng.
The working principle of the coaxial laser of wavelength calibration is carried in the present embodiment are as follows:
On the basis of the coaxial laser light source kernel of embodiment one, included reference is also integrated in coaxial laser
The photodetector of gas chamber, coupled lens, optoisolator, semi-transparent semi-reflecting eyeglass and included reference gas chamber photodetector.Coupling
Light combination lens, optoisolator and semi-transparent semi-reflecting eyeglass are successively coupled with coaxial laser light source kernel optical path, optoisolator, coupling
Close the primary optical axis of lens and the central axis coaxial of coaxial laser light source kernel, semi-transparent semi-reflecting eyeglass and coaxial laser light source
The central axis of kernel is in 45° angle, coaxial laser in 45° angle and the central axis of semi-transparent semi-reflecting eyeglass and photodetector
At an angle of 90, semi-transparent semi-reflecting eyeglass will swash the central axis of the central axis of light source kernel and included reference gas chamber photodetector
A part of light energy of light device output is reflected into the photodetector of included reference gas chamber, as laser wavelength from calibrated
With another part light energy is exported as detection with laser, carries out gas concentration measurement use.To meet to needing to detect
Gas carry out gas concentration detection under the premise of, also achieve the function at autonomous calibrated laser wavelength scanning center, thus
It realizes and integrates the TDLAS gas detection equipment of the light source and exempt from calibrated non-maintaining target.
The coaxial laser of the included wavelength calibration of the present embodiment realizes the reflexive feedback system of wavelength truly, from
And guarantees that TDLAS gas detection equipment using the coaxial laser of the utility model as system source is able to achieve and long-term exempt to tie up
The function of protecting calibration-free, substantially increases the reliability and convenience of TDLAS gas detection equipment；The integral structure is significantly
The light channel structure complexity in original TDLAS sensor module is reduced, reliability, the utility model coaxial laser are improved
The integral structure of the photodetector of light source kernel and included reference gas chamber, more compact structure, while its frame mode meets
Coaxial BOSA automated production scheme reduces about 1 half or more at instinct, is the cost effective and big of TDLAS gaseous detection applications
Scale application lays the foundation；
Wherein, the photodetector for carrying reference gas chamber is the prior art, such as the included ginseng of Wuhan tail feather wind-light-electricity production
The photodetector for examining gas chamber, specifically repeats no more.
Preferably, as shown in figure 5, in the primary optical axis of the coupled lens 12 and the coaxial laser light source kernel 10
Mandrel line is in 4 °~8 ° angles.
The angle by a small margin of the central axis of the primary optical axis and coaxial laser light source kernel of coupled lens, can effectively avoid
The reflected light that chip of laser is generated perpendicular to coupled lens enters in the resonant cavity of chip of laser, therefore can effectively avoid
Because wavelength unstability situation brought by reflecting interference occurs, to further improve laser when continuing working
Wavelength stability.
Wherein, the coaxial laser in the present embodiment includes that the structure of TO pipe cap is as shown in Figure 6.Equally, it is set on TO pipe cap
There are pipe cap lens, and pipe cap lens include any one of flat window planar lens, non-spherical lens and spherical lens.It is managed by TO
The air-tight packaging of cap and pipe cap lens and TO tube socket further can effectively avoid working in the case where high concentration is tested gaseous environment
When the mistake that occurs survey may, and air-tight packaging can effectively avoid steam, dust etc. from polluting, and further increase the use of product
Service life.
Preferably, as shown in fig. 7, further including protection eyeglass 16, the setting of protection eyeglass 16 is separate in the tube body 11
One end of the coaxial laser light source kernel 10.
Specifically, the protection eyeglass 16 includes any one of flat window lens, non-spherical lens and spherical lens.
It is with protection eyeglass that optical components all inside laser and photoelectric device air-tight packaging are complete whole at one
Body prevents external moisture, tested gas, dust from penetrating into from inside the optical path of the calibrated coaxial laser of bandgap wavelength, prevents pair
Internal optics original part pollutes, and substantially increases the ambient adaptability of laser, increases reliability.
The coaxial laser light source kernel of wavelength calibration is carried in the present embodiment does not use up details, reference implementation example one and figure
The specific descriptions of 1-1, Fig. 1-2, Fig. 2 and Fig. 3.
The above is only the preferred embodiment of the present invention, is not intended to limit the utility model, all practical at this
Within novel spirit and principle, any modification, equivalent replacement, improvement and so on should be included in the guarantor of the utility model
Within the scope of shield.
Claims (10)
1. a kind of coaxial laser light source kernel of included wavelength calibration, which is characterized in that including TO tube socket (1), be arranged in institute
State TO tube socket (1) upper surface TEC refrigerator (2), setting TEC refrigerator (2) upper surface heat transfer cushion block (3),
Be arranged heat transfer cushion block (3) upper surface aluminium nitride cushion block (4) and be separately positioned on the aluminium nitride cushion block (4)
The chip of laser (5) and thermistor (6) on surface；
It further include through the TO pin (7) being arranged on the TO tube socket (1), the TEC refrigerator (2), the laser core
Piece (5) and the thermistor (6) are electrically connected with the TO pin (7) respectively, and the primary optical axis of the chip of laser (5)
With the central axis coaxial of the TO tube socket (1)；
The TEC refrigerator (2) includes temperature control huyashi-chuuka (cold chinese-style noodles) and radiating surface, and the upper surface of the TEC refrigerator (2) is that the temperature control is cold
The lower surface in face, the TEC refrigerator (2) is the radiating surface, and the heat transfer cushion block (3) is welded on the temperature control cold end
On face；
The heat transfer cushion block (3) includes the first cushion block (18) and the second cushion block (19), the first cushion block (18) fixed setting
In the upper surface of second cushion block (19), second cushion block (19) is arranged in the upper surface of the TEC refrigerator (2), and
The thermal diffusion coefficient that the material of first cushion block (18) is made is greater than 40mm2The material of second cushion block (19) is made in/s
Thermal diffusion coefficient be less than 10mm2/s。
2. the coaxial laser light source kernel of included wavelength calibration according to claim 1, which is characterized in that described first
Cushion block (18) is weldingly fixed on the upper surface of second cushion block (19), the metal pricker by solder bonding metal solder or silver paste
Weldering solder include gold-tin eutectic solder, SAC solder, indalloy, bismuth tin alloy solder, wiping solder,
At least one of indium stannum alloy solder.
3. the coaxial laser light source kernel of included wavelength calibration according to claim 2, which is characterized in that the metal
The pyroconductivity of brazing solder or silver paste is greater than or equal to 40W/ (mK).
4. the coaxial laser light source kernel of included wavelength calibration according to any one of claims 1 to 3, feature exist
In the TO pin (7) is made of copper or copper alloy.
5. the coaxial laser light source kernel of included wavelength calibration according to any one of claims 1 to 3, feature exist
In, further include TO pipe cap (8), TO pipe cap (8) sealing welding on the TO tube socket (1), and the TEC refrigerator (2),
The heat transfer cushion block (3), the aluminium nitride cushion block (4), the chip of laser (5) and the thermistor (6) are respectively provided with
In seal chamber made of being surrounded in the TO pipe cap (8) and the TO tube socket (1)；
The TO pipe cap (8) is equipped with pipe cap lens (9), and the primary optical axis of the pipe cap lens (9) and the TO tube socket (1)
Central axis coaxial.
6. the coaxial laser light source kernel of included wavelength calibration according to claim 5, which is characterized in that the pipe cap
Lens (9) include any one of flat window planar lens, non-spherical lens and spherical lens.
7. a kind of coaxial laser of included wavelength calibration, which is characterized in that including it is as claimed in any one of claims 1 to 6 from
The coaxial laser light source kernel (10) of bandgap wavelength calibration, further includes tube body (11), the coaxial laser light source kernel (10)
It is fixedly welded on the internal one end of the tube body (11) and the TO pin (7) extend out to the tube body (11) outside；
It further include being fixedly welded on the tube body (11) internal coupled lens (12), optoisolator (13) and semi-transparent semi-reflecting lens
Piece (14), and the coupled lens (12), the optoisolator (13) and the semi-transparent semi-reflecting eyeglass (14) successively with it is described
The coupling of coaxial laser light source kernel (10) optical path, the optoisolator (13), the primary optical axis of the coupled lens (12) and institute
State the central axis coaxial of coaxial laser light source kernel (10), the semi-transparent semi-reflecting eyeglass (14) and the coaxial laser light
The central axis of source kernel (10) is in 45° angle；
It further include the photodetector (15) of included reference gas chamber, the photodetector (15) is fixedly welded on the tube body
(11) internal side, and the semi-transparent semi-reflecting eyeglass (14) and the central axis of the photodetector (15) they are in 45° angle, institute
The central axis of coaxial laser light source kernel (10) and the central axis of the photodetector (15) are stated in 90 ° of angles.
8. the coaxial laser of included wavelength calibration according to claim 7, which is characterized in that the coupled lens (12)
Primary optical axis and the coaxial laser light source kernel (10) central axis be in 4 °~8 ° angles.
9. the coaxial laser of included wavelength calibration according to claim 7, which is characterized in that further include protection eyeglass
(16), protection eyeglass (16) setting is in the one end of the tube body (11) far from the coaxial laser light source kernel (10).
10. the coaxial laser of included wavelength calibration according to claim 9, which is characterized in that the protection eyeglass
It (16) include any one of flat window lens, non-spherical lens and spherical lens.
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| CN201920607192.0U CN209692140U (en) | 2019-04-29 | 2019-04-29 | A kind of coaxial laser and its light source kernel of included wavelength calibration |
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| CN201920607192.0U CN209692140U (en) | 2019-04-29 | 2019-04-29 | A kind of coaxial laser and its light source kernel of included wavelength calibration |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109950788A (en) * | 2019-04-29 | 2019-06-28 | 宋子毅 | A kind of coaxial laser and its light source kernel of included wavelength calibration |
| CN110854669A (en) * | 2019-12-10 | 2020-02-28 | 武汉优信技术股份有限公司 | TO tube seat packaging structure and manufacturing method thereof |
| WO2023000839A1 (en) * | 2021-07-21 | 2023-01-26 | 华为技术有限公司 | Light emitting assembly, packaging method therefor, and related device |
-
2019
- 2019-04-29 CN CN201920607192.0U patent/CN209692140U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109950788A (en) * | 2019-04-29 | 2019-06-28 | 宋子毅 | A kind of coaxial laser and its light source kernel of included wavelength calibration |
| CN109950788B (en) * | 2019-04-29 | 2024-05-03 | 武汉市东湖新技术开发森澜技术中心(个体工商户) | Coaxial laser with wavelength calibration function and light source core thereof |
| CN110854669A (en) * | 2019-12-10 | 2020-02-28 | 武汉优信技术股份有限公司 | TO tube seat packaging structure and manufacturing method thereof |
| WO2023000839A1 (en) * | 2021-07-21 | 2023-01-26 | 华为技术有限公司 | Light emitting assembly, packaging method therefor, and related device |
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