CN209636334U - The plating jet apparatus of combination is inhaled in a kind of spray - Google Patents
The plating jet apparatus of combination is inhaled in a kind of spray Download PDFInfo
- Publication number
- CN209636334U CN209636334U CN201920194612.7U CN201920194612U CN209636334U CN 209636334 U CN209636334 U CN 209636334U CN 201920194612 U CN201920194612 U CN 201920194612U CN 209636334 U CN209636334 U CN 209636334U
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- jet flow
- fixed
- electroplating bath
- plating
- jet
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Abstract
The utility model discloses a kind of sprays to inhale the plating jet apparatus combined, including electroplating bath, cathode jig and anode plate, the side inner wall of the electroplating bath is fixed with cathode jig, the side inner wall of the electroplating bath opposing cathode jig is fixed with anode plate, the interior back welding of the electroplating bath is connected to support web plate, the interior bottom of the electroplating bath is fixed with fixed frame between cathode jig and anode plate, the inside of the fixed frame is fixed with jet flow frame, and the jet flow frame is successively spliced by panel, partition and bottom plate.In the utility model, during jet flow frame use, the jet flow out of spurt hole can be discharged by immersible pump, it is absorbed water by pulsating pump from suction discharge orifice interior suction stream, the type of flow of electroplate liquid is set to become the vortex of horizontal direction by the jet flow of original vertical direction, the frontal impact with plated body itself is avoided, and the thickness of cathodic coating is thinned in such a way that side is vortexed, to improve the density of plating.
Description
Technical field
The utility model relates to industrial electroplating technologies, and in particular to the plating jet apparatus of combination is inhaled in a kind of spray.
Background technique
Semiconductor packaging constantly to light, thin, develop, and brings to many equipment higher by short and small high density direction at present
Requirement.Wherein: 3D encapsulation technology requires to be electroplate with very high available current density；Encapsulation is fanned out to propose electroplating evenness
Very high requirement；Industry plating also wishes very high current density to improve yield.These are all to electroplating evenness and plating
Efficiency proposes new challenge.However, being unable to satisfy the requirement of this respect by the improvement of electroplating liquid medicine itself, need to cooperate
The improvement of electroplating device is to achieve the effect that promote electroplating efficiency and uniformity.Semiconductor/semiconductor encapsulation at present/passive member
Part/printed circuit board/industry plating etc. is in order to improve yield, it is desirable that is electroplate with very high available current density.From the angle of equipment
Degree considers, it is maximally efficient for improving available current density that cathodic coating is thinned.
The way of existing jet anode, jet anode can further the distance of cathode and anode in electroplating bath, reduce electricity
Plating solution resistance improves available current density.But since jet anode directly sprays plated body, plated body needs to bear larger
Resistance is easy to influence electroplating effect.
Utility model content
The purpose of this utility model is that: directly spray plated body to solve jet anode, plated body need to bear compared with
Big resistance is easy the problem of influencing electroplating effect, provides a kind of plating jet apparatus that spray suction combines.
The purpose of this utility model can be achieved through the following technical solutions:
A kind of plating jet apparatus that spray suction combines, including electroplating bath, cathode jig and anode plate, the one of the electroplating bath
Side inner wall is fixed with cathode jig, and the side inner wall of the electroplating bath opposing cathode jig is fixed with anode plate, the electroplating bath
Interior back welding be connected to support web plate, the interior bottom of the electroplating bath is fixed with fixed frame, institute between cathode jig and anode plate
The inside for stating fixed frame is fixed with jet flow frame, and the jet flow frame is successively spliced by panel, partition and bottom plate, wherein described
Panel and partition are divided into second chamber, and the partition and bottom plate are divided into first chamber, the side wall of the panel be provided with
The outlet pipe of second chamber connection, the outlet pipe is connected to by hose with the suction side of web plate lower part pulsating pump is supported, described
The water inlet pipe being connected to first chamber is provided at the back center position of bottom plate, the water inlet pipe passes through hose and support web plate
The immersible pump water outlet of lower part is connected to, and the surface of the panel is uniformly provided with spurt hole, and the surface loop of the panel is around jet flow
Hole angularly offers suction discharge orifice, and the partition corresponds to spurt hole position with respect to the end face of second chamber and is provided with and the
One chamber simultaneously extends through to the jet pipe outside spurt hole.
Root is as a further solution of the present invention: the distance between the support web plate and bottom in electroplating bath are greater than
20cm。
As a further solution of the present invention: the internal diameter of the spurt hole is greater than the internal diameter for inhaling discharge orifice.
As a further solution of the present invention: the panel, partition are identical with the appearance profile of bottom plate three.
As a further solution of the present invention: the fixed frame and jet flow frame are detachable structure.
As a further solution of the present invention: the appearance profile of the jet flow frame is round or rectangular, jet flow frame
Width when being rectangular is that circular diameter is identical with jet flow frame.
The utility model has the beneficial effects that
1, the jet flow frame of conventional platy body is changed to the jet flow frame being made of panel, partition and bottom plate, in panel and partition
Between be provided with second chamber, first chamber is provided between partition and bottom plate, wherein at the back center position of bottom plate
Be provided with the water inlet pipe being connected to first chamber, water inlet pipe is connected to by hose with immersible pump, be provided in the side wall of panel and
The outlet pipe of second chamber connection, outlet pipe is connected to by hose with pulsating pump, and is uniformly provided with jet flow in the front of panel
Hole, while angularly offering suction discharge orifice around spurt hole in the front of panel, be provided on partition with through spurt hole and the
The jet pipe of one chamber during such jet flow frame use, can be discharged the jet flow out of spurt hole by immersible pump, lead to
Pulsating pump water suction is crossed from discharge orifice interior suction stream is inhaled, the type of flow of electroplate liquid is made to become level side by the jet flow of original vertical direction
To vortex, avoid the frontal impact with plated body itself, and the thickness of cathodic coating is thinned in such a way that side is vortexed,
To improve the density of plating.
Detailed description of the invention
The utility model will be further described below with reference to the accompanying drawings.
Fig. 1 is the structural schematic diagram of the utility model plating jet apparatus；
Fig. 2 is the schematic diagram of internal structure of jet flow frame in the utility model；
Fig. 3 is the jet flow frame side view of embodiment 1；
Fig. 4 is the jet flow frame side view of embodiment 2.
In figure: 1, electroplating bath；2, cathode jig；3, fixed frame；4, jet flow frame；41, panel；411, outlet pipe；412, it inhales
Discharge orifice；413, spurt hole；42, partition；421, jet pipe；43, bottom plate；431, water inlet pipe；44, first chamber；45, the second chamber
Room；5, anode plate；6, web plate is supported；7, immersible pump；8, pulsating pump.
Specific embodiment
Below in conjunction with the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear, complete
Site preparation description, it is clear that the described embodiments are only a part of the embodiments of the utility model, instead of all the embodiments.
Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
All other embodiment, fall within the protection scope of the utility model.
Embodiment 1
It please refers to shown in Fig. 1-3, the plating jet apparatus of combination, including electroplating bath 1, cathode jig 2 and sun are inhaled in a kind of spray
Pole plate 5, the side inner wall of electroplating bath 1 are fixed with cathode jig 2, and the side inner wall of 1 opposing cathode jig 2 of electroplating bath is fixed with sun
Pole plate 5, the interior back welding of electroplating bath 1 are connected to support web plate 6, and the interior bottom of electroplating bath 1 is solid between cathode jig 2 and anode plate 5
Surely there is fixed frame 3, the inside of fixed frame 3 is fixed with jet flow frame 4, and jet flow frame 4 is successively spliced by panel 41, partition 42 and bottom plate 43
It forms, wherein panel 41 and partition 42 are divided into second chamber 45, and partition 42 and bottom plate 43 are divided into first chamber 44, panel
41 side wall is provided with the outlet pipe 411 being connected to second chamber 45, and outlet pipe 411 is inhaled by hose and support 6 lower part of web plate
The suction side of water pump 8 is connected to, and is provided with the water inlet pipe 431 being connected to first chamber 44 at the back center position of bottom plate 43, into
Water pipe 431 is connected to by hose with 7 water outlet of immersible pump of 6 lower part of web plate is supported, and the surface of panel 41 is uniformly provided with jet flow
Hole 413, the surface loop of panel 41 is angularly offered around spurt hole 413 inhales discharge orifice 412, end of the partition 42 with respect to second chamber 45
Face, which corresponds to 413 position of spurt hole and is provided with, to be connected to first chamber 44 and extends through to the spray outside spurt hole 413
Flow tube 421.
The distance between bottom in web plate 6 and electroplating bath 1 is supported to be greater than 20cm, fixed frame 3 and jet flow frame 4 are detachable knot
Structure, the internal diameter of spurt hole 413 are greater than the internal diameter for inhaling discharge orifice 412, and the appearance profile of jet flow frame 4 is circle, panel 41,42 and of partition
The appearance profile of 43 three of bottom plate is identical.
The present embodiment spray inhales the plating jet apparatus combined when in use, and the plated body being electroplated will be needed to be fixed on cathode and controlled
On tool 2, to electroplating bath 1 inside inject electroplate liquid, the cathode and just of power supply is then separately connected to cathode jig 2 and anode plate 5
Pole is powered, while will open immersible pump 7 and pulsating pump 8, and immersible pump 7 in the process of work, then electroplate liquid is absorbed
It is injected into the first chamber 44 of jet flow frame 4 by hose, is then sprayed outward by jet pipe 421, and pulsating pump 8 then passes through
Hose adsorbs the liquid in second chamber 45, so that extraneous electroplate liquid is drawn into second chamber 45 out of suction discharge orifice 412
It is interior, vortex is formed at spurt hole 413 and suction discharge orifice 412 in this way, the thickness of cathodic coating is thinned, so that cathode jig 2 is occurring
When reaction, the density of plating is improved.
Embodiment 2
It please refers to shown in Fig. 1, Fig. 2, Fig. 4, the plating jet apparatus combined is inhaled in a kind of spray of the present embodiment, with embodiment 1
Difference be, the appearance profile of jet flow frame 4 be it is rectangular, panel 41, partition 42 are identical with the appearance profile of 43 three of bottom plate, spray
Flowing width when frame is rectangular with jet flow frame is that circular diameter is identical.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one of the utility model
In embodiment or example.In the present specification, schematic expression of the above terms be not necessarily referring to identical embodiment or
Example.Moreover, particular features, structures, materials, or characteristics described can be in any one or more embodiment or examples
In can be combined in any suitable manner.
Above content is only to examples for clearly illustrating the present invention and explanation, affiliated those skilled in the art couple
Described specific embodiment does various modifications or additions or is substituted in a similar manner, without departing from practical new
Type or beyond the scope defined by this claim, all should belong to the protection range of the utility model.
Claims (6)
1. the plating jet apparatus combined, including electroplating bath (1), cathode jig (2) and anode plate (5), the electricity are inhaled in a kind of spray
The side inner wall of coating bath (1) is fixed with cathode jig (2), and the side inner wall of electroplating bath (1) the opposing cathode jig (2) is fixed
Have anode plate (5), which is characterized in that the interior back welding of the electroplating bath (1) be connected to support web plate (6), the electroplating bath (1) it is interior
Bottom, which is located between cathode jig (2) and anode plate (5), is fixed with fixed frame (3), and the inside of the fixed frame (3) is fixed with jet flow
Frame (4), the jet flow frame (4) are successively spliced by panel (41), partition (42) and bottom plate (43), wherein the panel
(41) it is divided into second chamber (45) with partition (42), the partition (42) and bottom plate (43) are divided into first chamber (44), institute
The side wall for stating panel (41) is provided with the outlet pipe (411) being connected to second chamber (45), and the outlet pipe (411) passes through hose
Be connected to, is provided at the back center position of the bottom plate (43) and the with the suction side of support web plate (6) lower part pulsating pump (8)
The water inlet pipe (431) of one chamber (44) connection, the immersible pump that the water inlet pipe (431) passes through hose and support web plate (6) lower part
(7) water outlet is connected to, and the surface of the panel (41) is uniformly provided with spurt hole (413), the surface loop of the panel (41) around
Spurt hole (413), which angularly offers, inhales discharge orifice (412), and the partition (42) corresponds to jet flow with respect to the end face of second chamber (45)
Hole (413) position, which is provided with, is connected to first chamber (44) and extends through to the external jet pipe of spurt hole (413)
(421)。
2. the plating jet apparatus combined is inhaled in a kind of spray according to claim 1, which is characterized in that the support web plate
(6) it is greater than 20cm with the distance between electroplating bath (1) interior bottom.
3. the plating jet apparatus combined is inhaled in a kind of spray according to claim 1, which is characterized in that the spurt hole
(413) internal diameter is greater than the internal diameter for inhaling discharge orifice (412).
4. the plating jet apparatus combined is inhaled in a kind of spray according to claim 1, which is characterized in that the panel (41),
Partition (42) is identical with the appearance profile of bottom plate (43) three.
5. the plating jet apparatus combined is inhaled in a kind of spray according to claim 1, which is characterized in that the fixed frame (3)
It is detachable structure with jet flow frame (4).
6. the plating jet apparatus combined is inhaled in a kind of spray according to claim 1, which is characterized in that the jet flow frame (4)
Appearance profile be it is round or rectangular, width when jet flow frame (4) is rectangular is that circular diameter is identical with jet flow frame (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920194612.7U CN209636334U (en) | 2019-02-13 | 2019-02-13 | The plating jet apparatus of combination is inhaled in a kind of spray |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920194612.7U CN209636334U (en) | 2019-02-13 | 2019-02-13 | The plating jet apparatus of combination is inhaled in a kind of spray |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209636334U true CN209636334U (en) | 2019-11-15 |
Family
ID=68493394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920194612.7U Expired - Fee Related CN209636334U (en) | 2019-02-13 | 2019-02-13 | The plating jet apparatus of combination is inhaled in a kind of spray |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209636334U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114599821A (en) * | 2019-11-22 | 2022-06-07 | 塞姆西斯科有限责任公司 | Distribution body for a process fluid for the chemical and/or electrolytic surface treatment of a substrate |
-
2019
- 2019-02-13 CN CN201920194612.7U patent/CN209636334U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114599821A (en) * | 2019-11-22 | 2022-06-07 | 塞姆西斯科有限责任公司 | Distribution body for a process fluid for the chemical and/or electrolytic surface treatment of a substrate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191115 Termination date: 20220213 |