CN209623977U - Microguide component air tightness checking device - Google Patents
Microguide component air tightness checking device Download PDFInfo
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- CN209623977U CN209623977U CN201920039397.3U CN201920039397U CN209623977U CN 209623977 U CN209623977 U CN 209623977U CN 201920039397 U CN201920039397 U CN 201920039397U CN 209623977 U CN209623977 U CN 209623977U
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- end cap
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- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
A kind of a kind of microguide component air tightness checking device disclosed by the utility model, it is desirable to provide reliable air tightness checking device convenient and simple for operation.The utility model is achieved by following technical proposals: helium mass spectrometer leak detector working chamber is connected to ring flange guide hole, end cap tips upside down on the air guide rubber pad, and the assembly counterbore of examined workpiece is formed on end cap, there is closedtop rubber sheet gasket in upper end, end seal cap and the compressing fixture that clamping is carried out to examined workpiece.Examined workpiece is pressed into the above-mentioned counterbore of end cap by the free end of pressing plate by end seal cap, after compressing fixture assembles examined workpiece, height is adjusted by adjusting screw rod nut, the air guide rubber pad and flangeseal inlayed on end cap, helium mass spectrometer leak detector passes through helium spray gun, inject helium from the glass frit seal position of the examined workpiece, helium stream then enters helium mass spectrometer leak detector working chamber along the airtight pipeline of examined workpiece, air guide rubber pad and ring flange hole path, detection workpiece whether gas leakage.
Description
Technical field
The utility model relates to a kind of microguide component air tightness checking devices.
Background technique
It is now widely used for motor cylinder block, piston, petroleum, coal mine, sebific duct, pressure gauge, air accumulator etc., all trades and professions are adopted
The air-tightness equipment such as low speed running equipment, the closed pressure vessels such as static-pressure system, pump, reaction kettle with complete/static tube, to realize
The stable operation of sealing require carry out gas boosting, hermetic seal end face flow field, air-tight test airtight test, especially
It collects and conveying total pressure, static press device airtight test is the most important link that can not be lacked.In general, no matter which uses
Kind device preparing gas, before complexes assembling finishes and is packed into reactant, it is necessary to the air-tightness of check device, to ensure reality
That tests goes on smoothly.The conventional method that air tight test device uses is: being made up of and seals with the liquid set up gas generator
Closure system, the phenomenon that according to being generated in change system when pressure, such as the generation of bubble, the formation of water column, lifting of liquid level etc. comes
The quality of judgment means air-tightness.During practice examining, since gas generator structure is different, the method for inspection also has
Certain difference.It is being connected to the airtight guide tube assembly part on static pressure hole by static line, the aperture on static pressure hole cannot become
Shape leakage or blocking, once air-tightness fails, static pressure transducer, instrument are shown whole disappearances.In aviation static-pressure system, In
On aircraft, all may there are ram-air pipe and static tube to pass through in pressure cabin and unpressurized bay, static line and its airtight catheter combination
Part leakage shows instrument, the influence of air speed instruction is very big, and therefore, what pipeline and its leakage of airtight guide tube assembly part cause
Consequence depend on leak site positions and dimensions.In general, the static pressure inlet being fixed on static pressure hole is nearly all to be located at entirely
There is no the place of turbulent flow around static tube, static pressure enters instrument through plenum chamber, static pressure inlet and static pressure conduit.Such as Fig. 3, Fig. 4
Shown in static pressure pick-up airtight conduit tube component, be airtight made of being sintered as contact tube 1 with conductive shell 2 and ceramic tube 3
Property element.The sintered location needed after sintering pair carries out airtight test, and since airtight catheter combination part size is small, outlet end is
Abnormal shape, so that checking that the air-tightness at sintering is difficult to operate.The airtight test method used to miniature airtight catheter combination is
Helium mass spectrum leak detection.Conventional method operation: airtight catheter combination is bonded by gasket seal with ring flange, using vacuum silicon grease into
Row sealing, then seals the port of airtight catheter combination with valve rubber, then carries out spray helium, leak detection to the position of glass sintering.
The difficult point of this airtight test method is that detected pieces size is small, and seal is special-shaped, and contact surface is small, and sealing is difficult, technical operation
Difficulty is easy to gas leakage in leak detection, it is difficult to realize airtight test.
Utility model content
The purpose of this utility model is in view of the above-mentioned problems of the prior art, feasible, conveniently, the letter that provides a kind of operation
It is single reliable, the device of airtight test is carried out to microguide component.
In order to achieve the above object, the utility model provides a kind of microguide component air tightness checking device, comprising:
The ring flange 12 of helium mass spectrometer leak detector working chamber is connected, the air guide rubber pad 1 of 12 guide hole of ring flange is connected to and tips upside down on described lead
End cap 2 on gas rubber pad 1, it is characterised in that: counterbore, the sealing examined workpiece 11 of assembly examined workpiece 11 are formed on end cap 2
Closedtop rubber sheet gasket 4, the end seal cap 5 of upper end carry out the clamp jig of clamping to examined workpiece 11.Clamp jig top board 6
Fixing end, be threadably coupled on the adjusting screw rod 8 in 2 circumferential direction of end cap, pressing plate 6 is threadably coupled within end cap 2 by tie down screw 7
Screw hole in, free end by end seal cap 5 by examined workpiece 11 be pressed into end cap 2 above-mentioned counterbore in, compress examined workpiece
After 11, pressing plate 6 is parallel with 2 end face of end cap, and the air guide rubber pad 1 inlayed on end cap and ring flange 12 seal, helium mass spectrometer leak detector
By helium spray gun, helium is injected from the glass frit seal position of the examined workpiece, helium stream is then airtight along examined workpiece
Pipeline hole, air guide rubber pad duct, ring flange hole path enter helium mass spectrometer leak detector working chamber, detect the workpiece whether gas leakage.
The utility model has the following beneficial effects: compared with the prior art
Operability is good.The utility model is using end seal cap, end cap, tie down screw, pressing plate and gasket seal cooperation
Mode comes sealed test piece port, is threadedly coupled with end cap using adjusting screw rod, tie down screw to press pressing plate and end seal cap
Mode is but also part bottom surface is bonded closer, good airproof performance with workpiece, reliably.
The utility model inlays the sealing flange that rubber sheet gasket is connected with helium mass spectrometer leak detector working chamber by end cap 2,
Rubber sheet gasket plays sealing function, by end seal cap 5, underseal and closedtop rubber sheet gasket, pressing plate, tie down screw, adjusting screw rod,
It assembled between washer, nut and airtight catheter combination, adjust stress balance, realized and compress test specimen, guarantee sealing.Helium spray gun is logical
The airflow channel crossed between examined workpiece sealing position and ring flange sprays helium, detect the test specimen whether gas leakage.Solves original
The mode for sealing difference, realizes the sealing and leak detection of airtight catheter combination.
The utility model can to special-shaped outlet, the good sealing function of micro parts sealing position eccentric, sealing surface is small,
It can solve the test specimen air-leakage test problem because of poor sealing or force unbalance.For other homogenous configuration products
Leak detection has reference.
Detailed description of the invention
Fig. 1 is the organigram of the utility model microguide component air tightness checking device.
Fig. 2 is the decomposition diagram of Fig. 1.
Fig. 3 is the airtight catheter combination configuration diagram of examined workpiece.
Fig. 4 is the top view of Fig. 3 examined workpiece.
In Fig. 1: 1 air guide rubber pad, 2 end caps, 3 underseal rubber sheet gaskets, 4 closedtop rubber sheet gaskets, 5 end seal caps, 6 pressing plates, 7
Tie down screw, 8 adjusting screw rods, 9 washers, 10 nuts, 11 examined workpieces, (note: be connected 12 ring flanges helium mass spectrometer leak detector working chamber
Interface)
Specific embodiment
Refering to Fig. 2, Fig. 3.In the embodiment described below, a kind of microguide component air tightness checking device, including
Air guide rubber pad 1, underseal rubber sheet gasket 3, closedtop rubber sheet gasket 4, end seal cap 5, pressing plate 6, tie down screw 7, is adjusted end cap 2
Screw rod 8, washer 9, nut 10 and the helium mass spectrometer leak detector working chamber that is connected ring flange 12, wherein 5 inner hole of end seal cap be equipped with it is close
Seal the closedtop rubber sheet gasket 4 of 11 Upper passage mouth of examined workpiece.2 counterbore base of end cap is equipped with sealing 11 lower end passage of examined workpiece
The underseal rubber sheet gasket 3 of mouth, and be placed on the step of 2 counterbore of end cap.The big nose end of 3.2 air inlet of φ of examined workpiece 11 is placed on
In end cap 2 on underseal rubber sheet gasket 3, the end seal cap 5 of the built-in closedtop rubber sheet gasket 4 of 0.4 gas outlet aperture of other end φ is pressed
Firmly.
The adjusting screw rod 8 being fixed on 2 circumference of end cap, is cased with nut 10 and washer 9 thereon.Pressing plate 6 screws in adjusting screw rod 8
On, end seal cap 5 is pushed down by tie down screw 7, tie down screw 7 screws in end cap 2, guarantees to compress rear fender 6 in parallel or is slightly above
2 end face of end cap, tightens tie down screw 7.Compression end sealing cap lid 5, end seal cap 5 are heavy by built-in closedtop rubber sheet gasket 4 and end cap 2
Underseal rubber sheet gasket 3 built in the bottom of hole is sealed from end to examined workpiece 11, air guide rubber pad 1 and ring flange 12 is compressed.
It is formed with the counterbore of assembly examined workpiece 11 on end cap 2 and the pressing plate that upper end carries out clamping to examined workpiece 11 is set
Fixture, the fixing end of the pressing plate 6 on clamp jig, is threadably coupled on the adjusting screw rod 8 in 2 circumferential direction of end cap, during pressing plate 6 passes through
The tie down screw 7 of portion's screw hole assembly is threadably coupled in the screw hole of end cap 2, and free end passes through end seal cap 5 for examined workpiece
In the above-mentioned counterbore of 11 indentation end caps 2, after compressing examined workpiece 11, pressing plate 6 is parallel or slightly above 2 end face of end cap, inlays on end cap
Embedding air guide rubber pad 1 and ring flange 12 seals, and helium mass spectrometer leak detector is burnt by helium spray gun from the glass of the examined workpiece
It ties sealing position and injects helium, helium stream then enters along the airtight pipeline of examined workpiece, air guide rubber pad duct, ring flange hole path
Helium mass spectrometer leak detector working chamber, detect the workpiece whether gas leakage.
Further, examined workpiece is sealed by the way of the cooperation of end seal cap, adjusting nut, pressing plate and gasket seal
11 ports.It is threadedly coupled using tie down screw 7 and is bonded to press pressing plate and end seal cap 5 with examined workpiece 11.
Further, adjusting screw rod 8 is contacted with end cap 2,10 position of regulating nut, is guaranteed after compressing, and pressing plate 6 is parallel or omits
Higher than 2 end face of end cap, tightening tie down screw 7 makes examined workpiece stress balance.
Further, with stop-leak compound, air guide rubber pad 1 and the ring flange 12 of helium mass spectrum leak detection equipment interface are sealed.Inspection
After surveying the sealing of air guide rubber pad 1 and ring flange, helium is sprayed to examined workpiece 11 with helium spray gun, passes through examined workpiece GT tube
Road, air guide rubber pad duct, ring flange hole path enter helium mass spectrometer leak detector determine examined workpiece 11 whether gas leakage.With helium without
Method enters the working chamber of helium mass spectrometer leak detector by the air inlet and other positions of examined workpiece 11, checks airtight lead with this
Tube assembly glass sintering position air-tightness proves that airtight catheter combination sintered part is airtight if helium mass spectrometer leak detector detects helium
Property check it is unqualified, conversely, then prove products air tightness qualification.
To detect position examined workpiece shown in Fig. 1 --- the air-tightness at airtight 11 glass sintering position of catheter combination needs
The air inlet of contact tube (Fig. 4) is closed, and is compressed closedtop rubber sheet gasket 4 and underseal rubber sheet gasket 3 by end seal cap 5, is reached
Seal the purpose of air inlet.To prevent product and the other contacts site of fixture leak air problem, using pressing plate 6 and tie down screw
7 push down end seal cap 5 to reach sealing purpose.By adjusting screw 8, washer 9,10 nut adjustment height of nut, pressing plate is parallel
Or slightly above end cap, holding examined workpiece stress balance, stabilization make sealed reliable.
Although having been described and describing the implementation example for being counted as the utility model, those skilled in the art will be bright
It is white, various accommodations can be made to it, without departing from the marrow of the utility model.Alternatively, it is also possible to make it is many modification with
Specific condition is fitted to religious doctrine of the invention, without departing from the utility model central concept described herein.So this reality
It is not only restricted to specific embodiment disclosed herein with novel, but the utility model may further include belonging to the scope of the utility model
All embodiments and its equivalent.
Claims (10)
1. a kind of microguide component air tightness checking device, comprising: the ring flange (12) of connection helium mass spectrometer leak detector working chamber,
It is connected to the air guide rubber pad (1) of ring flange (12) guide hole and tips upside down on the end cap (2) on the air guide rubber pad (1), feature
It is: is formed with the counterbore of assembly examined workpiece (11) on end cap (2), seals the closedtop rubber sheet gasket of examined workpiece (11) upper end
(4), end seal cap (5) carry out the clamp jig of clamping to examined workpiece (11)；The fixing end of clamp jig top board (6), spiral shell
Line is connected on the adjusting screw rod (8) in end cap (2) circumferential direction, and pressing plate (6) is threadably coupled within end cap (2) by tie down screw (7)
Screw hole in, free end by end seal cap (5) by examined workpiece (11) indentation end cap (2) above-mentioned counterbore in, compress quilt
After examining workpiece (11), pressing plate (6) is parallel with end cap (2) end face, and the air guide rubber pad (1) and ring flange (12) inlayed on end cap are close
Envelope, helium mass spectrometer leak detector inject helium by helium spray gun, from the glass frit seal position of the examined workpiece, and helium stream is then
Enter helium mass spectrometer leak detector working chamber along the airtight pipeline hole of examined workpiece, air guide rubber pad duct, ring flange hole path, detection should
Workpiece whether gas leakage.
2. microguide component air tightness checking device as described in claim 1, it is characterised in that: be fixed on end cap (2) circle
Adjusting screw rod (8) on week, is cased with nut (10) and washer (9) thereon.
3. microguide component air tightness checking device as claimed in claim 2, it is characterised in that: pressing plate (6), which screws in, to be adjusted
It on screw rod (8), is pushed down end seal cap (5) by tie down screw (7), tie down screw (7) screws in end cap (2), guarantees to press after compressing
Plate (6) is parallel or slightly above end cap (2) end face.
4. microguide component air tightness checking device as claimed in claim 3, it is characterised in that: tie down screw (7) are tightened,
Compression end sealing cap lid (5), end seal cap (5) pass through underseal rubber built in built-in closedtop rubber sheet gasket (4) and end cap (2) counterbore base
From end to examined workpiece (11) are compressed, air guide rubber pad (1) and ring flange (12) seal glue gasket (3).
5. microguide component air tightness checking device as claimed in claim 4, it is characterised in that: end cap is formed with dress on (2)
Counterbore and setting with examined workpiece (11) carry out the clamp jig of clamping in upper end to examined workpiece (11).
6. microguide component air tightness checking device as claimed in claim 5, it is characterised in that: the pressing plate on clamp jig
(6) fixing end is threadably coupled on the adjusting screw rod (8) in end cap (2) circumferential direction, and pressing plate (6) is assembled by middle part screw hole
Tie down screw (7) is threadably coupled in the screw hole of end cap (2), and examined workpiece (11) are pressed by end seal cap (5) in free end
In the above-mentioned counterbore for entering end cap (2).
7. microguide component air tightness checking device as claimed in claim 6, it is characterised in that: using end seal cap, adjust
The mode of nut, pressing plate and gasket seal cooperation is saved to seal examined workpiece (11) port.
8. microguide component air tightness checking device as claimed in claim 7, it is characterised in that: use tie down screw (7)
Threaded connection is bonded to press pressing plate and end seal cap (5) with examined workpiece (11).
9. microguide component air tightness checking device as claimed in claim 8, it is characterised in that: stop-leak compound is used, by air guide
The ring flange (12) of rubber pad (1) and helium mass spectrum leak detection equipment interface seals.
10. microguide component air tightness checking device as claimed in claim 9, it is characterised in that: compress examined workpiece
(11) after, pressing plate (6) is parallel or is higher than end cap (2) end face, and the air guide rubber pad (1) and ring flange (12) inlayed on end cap are close
Envelope, helium mass spectrometer leak detector inject helium by helium spray gun, from the glass frit seal position of the examined workpiece, and helium stream is then
Enter helium mass spectrometer leak detector working chamber along the airtight pipeline of examined workpiece, air guide rubber pad duct, ring flange hole path, detects the work
Part whether gas leakage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920039397.3U CN209623977U (en) | 2019-01-09 | 2019-01-09 | Microguide component air tightness checking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920039397.3U CN209623977U (en) | 2019-01-09 | 2019-01-09 | Microguide component air tightness checking device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209623977U true CN209623977U (en) | 2019-11-12 |
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ID=68449451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920039397.3U Active CN209623977U (en) | 2019-01-09 | 2019-01-09 | Microguide component air tightness checking device |
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| CN (1) | CN209623977U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115371912A (en) * | 2022-07-13 | 2022-11-22 | 沪东中华造船(集团)有限公司 | Tightness detection device and tightness detection method for ship special management |
| CN117168709A (en) * | 2023-10-26 | 2023-12-05 | 中科艾尔(北京)科技有限公司 | Tool and method for detecting air tightness of semiconductor base block |
-
2019
- 2019-01-09 CN CN201920039397.3U patent/CN209623977U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115371912A (en) * | 2022-07-13 | 2022-11-22 | 沪东中华造船(集团)有限公司 | Tightness detection device and tightness detection method for ship special management |
| CN117168709A (en) * | 2023-10-26 | 2023-12-05 | 中科艾尔(北京)科技有限公司 | Tool and method for detecting air tightness of semiconductor base block |
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