CN209606769U - Nano-imprinting device - Google Patents
Nano-imprinting device Download PDFInfo
- Publication number
- CN209606769U CN209606769U CN201822028265.9U CN201822028265U CN209606769U CN 209606769 U CN209606769 U CN 209606769U CN 201822028265 U CN201822028265 U CN 201822028265U CN 209606769 U CN209606769 U CN 209606769U
- Authority
- CN
- China
- Prior art keywords
- nano
- seal operation
- operation room
- nano impression
- transparent cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Abstract
A kind of nano-imprinting device, for the nano-pattern in nano impression component in template to be printed on to the substrate of nano impression component, nano-imprinting device includes seal operation room, offers suction hole and air inlet on the seal operation room；Vacuum pump, the vacuum pump are connected by suction hole with seal operation room；Flexible and transparent cover film, the flexible and transparent cover film is covered on the nano impression component, and across the contacts baseplate behind the edge of the nano impression component with the seal operation room, make the accommodating cavity that an accommodating nano impression component is formed between the flexible and transparent cover film and the bottom plate of the seal operation room.For the nano-imprinting device without using high pressure gas and additional pressurizing device, structure is simple, easy to operate.
Description
Technical field
The utility model relates to machinery field, especially a kind of nano-imprinting device.
Background technique
Nano impression is a kind of completely new pattern transfer technology different from conventional lithographic techniques, can nano graph from
Template is " replicated " on substrate, having the advantages that yield is high, at low cost and simple process.Its manufacturing process are as follows: the shape in template
At the micro-structure for having nanoscale, it is coated with flowable nano impression glue on substrate, template and substrate are stacked, passed through
Pressure enters the nano impression glue on substrate in the nanostructure of template, then makes nanometer by the method for heating or uv-exposure
Imprint adhesive curing molding, so that it may so that the micro-structure in template is " replicated " on substrate.Ultraviolet nanometer coining is usually received ultraviolet
It is completed in rice Embosser, this kind of equipment includes to Barebone, vacuum system, drive system, ultra-violet exposure system and control system
System etc..These device structures are complicated, price is expensive, are unfavorable for the extensive use of nanometer embossing.
Utility model content
The purpose of this utility model is to provide a kind of nano-imprinting devices, and the nano-imprinting device is without using high pressure gas
Body and additional pressurizing device, structure is simple, easy to operate.
The utility model provides a kind of nano-imprinting device, for printing the nano-pattern in nano impression component in template
It is formed on the substrate of nano impression component, including
Seal operation room offers suction hole and air inlet on the seal operation room；
Vacuum pump, the vacuum pump are connected by suction hole with seal operation room；
Flexible and transparent cover film, the flexible and transparent cover film are covered on the nano impression component, and across described
With the contacts baseplate of the seal operation room behind the edge of nano impression component, make the flexible and transparent cover film and the sealing
The accommodating cavity of an accommodating nano impression component is formed between the bottom plate of operating room.
Further, the bottom plate of seal operation room is elastic bottom plate, and the flexible and transparent cover film is across the nanometer pressure
It is in contact after printing the edge of component with the elastic bottom plate.
Further, the flexible and transparent cover film and the elastic bottom plate are silica gel piece.
It further, further include solidification equipment, for providing condition of cure for the nano-imprinting device.
Further, the solidification equipment includes ultraviolet light source, and the ultraviolet light source is set to the seal operation
The top of room, the top of the seal operation room are transparent cover plate.
Further, the substrate in the nano impression component and any of template are set to the nano impression group
Side where part towards the ultraviolet light source, towards the ultraviolet light source side in the nano impression component
The substrate or the template are transparent.
Further, the substrate and/or template are transparent quartz plate, sheet glass or plastic sheet.
Further, the substrate far from ultraviolet light source side or template are nontransparent silicon wafer
Further, the solidification equipment is heating device, and the heating device is set to the bottom of the seal operation room
Portion.
Further, admission air valve and air intake valve are respectively arranged on the suction hole and the air inlet.
In conclusion by the way that flexible and transparent cover film is covered on nano impression component, and across nano impression component
Edge after contacts baseplate with seal operation room, make to form one between flexible and transparent cover film and the bottom plate of seal operation room and hold
Accommodate the accommodating cavity of meter platen assembly.The nano-imprinting device no longer needs to apply high pressure gas into seal operation room, also without
It need to be further added by additional pressurizing device, the process of coining can be completed, therefore, the nano-imprinting device is without using high pressure gas
With additional pressurizing device, structure is simple, easy to operate.
The above description is merely an outline of the technical solution of the present invention, in order to better understand the skill of the utility model
Art means, and being implemented in accordance with the contents of the specification, and in order to allow the above and other purpose, feature of the utility model
It can be more clearly understood with advantage, it is special below to lift preferred embodiment, and cooperate attached drawing, detailed description are as follows.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of nano-imprinting device provided by the embodiment of the utility model.
Fig. 2 is the structural schematic diagram of nano impression component in Fig. 1.
Fig. 3 is the structural schematic diagram of substrate in Fig. 1.
Specific embodiment
Further to illustrate that the utility model is the technical means and efficacy reaching predetermined purpose of utility model and being taken,
Below in conjunction with attached drawing and preferred embodiment, the utility model is described in detail as follows.
The purpose of this utility model is to provide a kind of nano-imprinting devices, and the nano-imprinting device is without using high pressure gas
Body and additional pressurizing device, structure is simple, easy to operate.
Fig. 1 is the structural schematic diagram of nano-imprinting device provided by the embodiment of the utility model, and Fig. 2 is nanometer pressure in Fig. 1
The structural schematic diagram of component is printed, Fig. 3 is the structural schematic diagram of substrate in Fig. 1.As shown in Fig. 1 to Fig. 3, the utility model is implemented
The nano-imprinting device that example provides is used to the nano-pattern in nano impression component 20 in template 21 being printed on nano impression group
On the substrate 22 of part 20, including seal operation room 10, flexible and transparent cover film 40, vacuum pump 60 and solidification equipment 50.Seal work
Make to offer suction hole 11 and air inlet 12 on room 10, suction hole 11 is connected by conduit 31 with vacuum pump 60, flexible and transparent
Cover film 40 is covered on nano impression component 20, and across the bottom behind the edge of nano impression component 20 with seal operation room 10
Plate 13 contacts, and makes to form an accommodating nano impression component between flexible and transparent cover film 40 and the bottom plate of seal operation room 10 13
20 accommodating cavity 14, solidification equipment 50 are that nano impression component 20 provides condition of cure.
In the present embodiment, nano impression component 20 include substrate 22 and template 21, be formed in template 21 in advance at
The nano impression structure 211 of type, spin coating has nano-imprinted layers 221 on substrate 22, and in assembling, substrate 22 and template 21 are folded
Set on together, and it is oppositely arranged nano-imprinted layers 221 with nano impression structure 211.By the way that flexible and transparent cover film 40 is covered
On nano impression component 20, and across being contacted with the bottom plate 13 of seal operation room 10 behind the edge of nano impression component 20,
Make the accommodating cavity that an accommodating nano impression component 20 is formed between flexible and transparent cover film 40 and the bottom plate of seal operation room 10 13
14。
When carrying out nano impression, vacuumize process is carried out to seal operation room 10 by vacuum pump 60 first, so that close
The air pressure sealed in operating room 10 reduces, since the air pressure in seal operation room 10 is lower, and flexible and transparent cover film 40 and bottom plate
13 be only to contact, and therefore, the gas in accommodating cavity 14 can be spilt under the influence of air pressure in seal operation room 10, so that accommodating
Air pressure in chamber 14 becomes smaller, at this time the relationship of air pressure size are as follows: in air pressure > seal operation room 10 in atmospheric pressure > accommodating cavity 14
Air pressure.Then, suction hole 11 is closed, opens the valve of air inlet 12, the air pressure in seal operation room 10 is increased to and atmosphere
Press it is equal, since the air pressure in accommodating cavity 14 at this time is lower, external atmosphere pressure can presses flexible transparent mulch film 40, extraneous sky
Gas will not enter in accommodating cavity 14, and therefore, flexible and transparent cover film 40 can give nano impression component 20 pressure, then to receive
Nano impression structure 211 in rice platen assembly 20 in template 21 is printed on substrate 22, forms nano impression on substrate 22
Pattern.
In the present invention, due to the setting of flexible and transparent cover film 40, it can use flexible and transparent cover film 40
Property, when vacuumizing, air pressure in accommodating cavity 14 reduces, and when air pressure is increased in seal operation room 10, in accommodating cavity 14
Air pressure will not change again, the inside and outside of accommodating cavity 14 just will form a draught head, which will pass through flexible and transparent
Cover film 40 applies active force to nano impression component 20, then completes coining.
In above process, no longer need to apply high pressure gas into seal operation room 10, without be further added by it is additional plus
The process of coining can be completed in pressure device, and therefore, which fills without using high pressure gas and additional pressurization
It sets, structure is simple, easy to operate.
Further, in the present embodiment, the bottom plate 13 of seal operation room 10 can be elastic bottom plate 13, and flexible and transparent covers
Epiphragma 40 is covered on nano impression component 20, and across being in contact behind the edge of nano impression component 20 with elastic bottom plate 13,
By the setting of elastic bottom plate 13, the air pressure in seal operation room 10 can be made when reducing, the gas of accommodating cavity 14 more holds
When air pressure easily from the spilling of accommodating cavity 14, and in seal operation room 10 is increased, it is easier to isolation ambient atmos and enters accommodating cavity
In 14.
In the present embodiment, flexible and transparent cover film 40 and elastic bottom plate 13 are preferably material of the same race, all can be silica gel
Piece.
Further, in order to control the air pressure in seal operation room 10, nano-imprinting device further includes pressure gauge 32, is being taken out
Air pressure in seal operation room 10 is evacuated to 5Pa to 100Pa using vacuum pump 60, in order to make in accommodating cavity 14 by vacuum stages
Air pressure and atmospheric pressure between form draught head.
Further, it is respectively arranged with admission air valve 111 and air intake valve 121 on suction hole 11 and air inlet 12, with
Air inlet and air-breathing are controlled.
When carrying out nano impression, the nano impression structure 211 on nano impression glue can be carried out by a variety of methods
Solidification, in the present embodiment, solidification equipment 50 include ultraviolet light source 51, make nano-imprinted layers by ultraviolet irradiation
Nano impression structure 211 on 221 solidifies.Ultraviolet light source 51 is set to the top of seal operation room 10, for the ease of ultraviolet
The setting of linear light source 51, in the present embodiment, the top of seal operation room 10 can be transparent cover plate 15, in order to ultraviolet light
It injects, it is preferable that transparent cover plate 15 is the cover board of quartz glass.
In the present embodiment, the substrate 22 of nano impression component 20 and the riding position of template 21 are unlimited, namely in nanometer
In platen assembly 20, substrate 22 be can be set in nano impression component 20 towards the side of ultraviolet light source, similarly template 21
Also it can be set in nano impression component 20 towards the side of ultraviolet light source, however, which is set to for substrate 22 and template 21
Nano impression component 20 is towards the side of ultraviolet light source, in order not to block to ultraviolet light, needs for transparent substrate
22 or template 21.Substrate 22 and/or template 21 can be transparent quartz plate, sheet glass or plastic sheet etc., far from ultraviolet
The substrate 22 or template 21 or nontransparent silicon wafer of source side.
In another embodiment, solidification equipment 50 includes heating device 52, by heating receiving in nano-imprinted layers 221
Rice platen assembly 20 is solidified.Preferably, heating device 52 is set to the bottom of seal operation room 10, in order to the biography of heat
It leads.
In conclusion by the way that flexible and transparent cover film 40 is covered on nano impression component 20, and across nano impression
It is contacted behind the edge of component 20 with the bottom plate 13 of seal operation room 10, makes the bottom of flexible and transparent cover film 40 Yu seal operation room 10
The accommodating cavity 14 of an accommodating nano impression component 20 is formed between plate 13.It no longer needs to apply high pressure gas into seal operation room 10
The process of coining can be completed without additional pressurizing device is further added by body, therefore, the nano-imprinting device without using
High pressure gas and additional pressurizing device, structure is simple, easy to operate.
The utility model additionally provides a kind of nano-imprinting method, and this method comprises the following steps:
One template 21 and a substrate 22 are provided, the nano impression structure 211 of preforming is provided in template 21, in base
Nano-imprinted layers 221 are coated on piece 22；
Substrate 22 and template 21 are stacked at together, and contact nano-imprinted layers 221 with nano impression structure 211, with
Form nano impression component 20；
Nano impression component 20 is placed in a seal operation room 10；
One flexible and transparent cover film 40 is provided, flexible and transparent cover film 40 is covered on nano impression component 20, and across
It is contacted after crossing the edge of nano impression component 20 with the bottom plate 13 of seal operation room 10, makes flexible and transparent cover film 40 and sealing work
Make the accommodating cavity 14 that an accommodating nano impression component 20 is formed between the bottom plate 13 of room 10；
The air pressure in seal operation room 10 is reduced, the air pressure in accommodating cavity 14 is made to be less than seal operation room 10 under original state
Interior air pressure；
Increase the air pressure in seal operation room 10, the air pressure in seal operation room 10 made to be greater than the air pressure in accommodating cavity 14,
Namely air pressure in the seal operation room 10 before air pressure is not reduced；
Solidify nano-imprinted layers 221.
In the present embodiment, by covering a flexible and transparent cover film 40 on nano impression component 20, and make the covering
Film across being contacted with the bottom plate 13 of seal operation room 10 behind the edge of nano impression component 20, make flexible and transparent cover film 40 with it is close
It seals between the bottom plate 13 of operating room 10 and forms the accommodating cavity 14 of an accommodating nano impression component 20；First pass through vacuum pump 60 reduce it is close
The air pressure in operating room 10 is sealed, the gas overflowing in accommodating cavity 14 is made, being then less than the air pressure in accommodating cavity 14 does not reduce gas
The air pressure in seal operation room 10 before pressure；Then it increases the air pressure in seal operation room 10, makes in seal operation room 10
Air pressure is greater than the air pressure in accommodating cavity 14, and flexible and transparent cover film 40 can conduct the pressure of gas in seal operation room 10, after
And active force is applied to nano impression component 20, nano impression structure 211 can form nanometer pressure in nano-imprinted layers 221
It is patterned.
Further, in the step of reducing the air pressure in seal operation room 10, work can will be sealed by vacuum pump 60
Make the air pressure in room 10 and is evacuated to 5Pa to 100Pa.
Further, in the step of increasing the air pressure in seal operation room 10, make the inside of seal operation room 10 and outer
Portion's connection, that is, the air pressure in seal operation room 10 and atmospheric pressure are of substantially equal at this time.
Further, in the present embodiment, nano impression component 20 can be solidified by ultraviolet light, and/or logical
Heating is crossed to solidify nano impression component 20.
The above descriptions are merely preferred embodiments of the present invention, not makees in any form to the utility model
Limitation be not intended to limit the utility model although the utility model has been disclosed with preferred embodiment as above, it is any ripe
Professional and technical personnel is known, is not being departed within the scope of technical solutions of the utility model, when in the technology using the disclosure above
Hold the equivalent embodiment made a little change or be modified to equivalent variations, but all without departing from technical solutions of the utility model
Hold, any simple modification, equivalent change and modification made by the above technical examples according to the technical essence of the present invention, still
It is within the scope of the technical solutions of the present invention.
Claims (10)
1. a kind of nano-imprinting device, for the nano-pattern in nano impression component in template to be printed on nano impression component
Substrate on, it is characterised in that: including
Seal operation room offers suction hole and air inlet on the seal operation room；
Vacuum pump, the vacuum pump are connected by suction hole with seal operation room；
Flexible and transparent cover film, the flexible and transparent cover film are covered on the nano impression component, and across the nanometer
With the contacts baseplate of the seal operation room behind the edge of platen assembly, make the flexible and transparent cover film and the seal operation
The accommodating cavity of an accommodating nano impression component is formed between the bottom plate of room.
2. nano-imprinting device according to claim 1, it is characterised in that: the bottom plate of seal operation room is elastic bottom plate,
The flexible and transparent cover film with the elastic bottom plate across being in contact behind the edge of the nano impression component.
3. nano-imprinting device according to claim 2, it is characterised in that: the flexible and transparent cover film and the elasticity
Bottom plate is silica gel piece.
4. nano-imprinting device according to claim 1, it is characterised in that: further include solidification equipment, for being received for described in
Rice imprinting apparatus provides condition of cure.
5. nano-imprinting device according to claim 4, it is characterised in that: the solidification equipment includes ultraviolet light source,
The ultraviolet light source is set to the top of the seal operation room, and the top of the seal operation room is transparent cover plate.
6. nano-imprinting device according to claim 5, it is characterised in that: substrate and mould in the nano impression component
Any of plate is set to the nano impression component towards the side where the ultraviolet light source, the nano impression group
It is transparent in part towards the substrate of the ultraviolet light source side or the template.
7. nano-imprinting device according to claim 6, it is characterised in that: the substrate and/or template are transparent stone
English piece, sheet glass or plastic sheet.
8. nano-imprinting device according to claim 6, it is characterised in that: substrate or mould far from ultraviolet light source side
Plate is nontransparent silicon wafer.
9. nano-imprinting device according to claim 4, it is characterised in that: the solidification equipment is heating device, described
Heating device is set to the bottom of the seal operation room.
10. nano-imprinting device according to claim 1, it is characterised in that: on the suction hole and the air inlet
It is respectively arranged with admission air valve and air intake valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822028265.9U CN209606769U (en) | 2018-12-04 | 2018-12-04 | Nano-imprinting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822028265.9U CN209606769U (en) | 2018-12-04 | 2018-12-04 | Nano-imprinting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209606769U true CN209606769U (en) | 2019-11-08 |
Family
ID=68396469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822028265.9U Active CN209606769U (en) | 2018-12-04 | 2018-12-04 | Nano-imprinting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209606769U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109656097A (en) * | 2018-12-04 | 2019-04-19 | 上海安翰医疗技术有限公司 | Nano-imprinting device and nano-imprinting method |
-
2018
- 2018-12-04 CN CN201822028265.9U patent/CN209606769U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109656097A (en) * | 2018-12-04 | 2019-04-19 | 上海安翰医疗技术有限公司 | Nano-imprinting device and nano-imprinting method |
| CN109656097B (en) * | 2018-12-04 | 2024-04-19 | 上海安翰医疗技术有限公司 | Nanoimprint apparatus and nanoimprint method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105137714B (en) | A kind of device and its method for stamping of large scale wafer full wafer nano impression | |
| JP2004504718A5 (en) | ||
| TWI379154B (en) | Imprint lithography apparatus and method employing an effective pressure | |
| CN106142528B (en) | Method for stamping and imprinting apparatus | |
| CN105159029A (en) | Large-area micro-nano imaging method and device | |
| CN103847096B (en) | Heating in vacuum pressurization building mortion and heating in vacuum pressurization manufacturing process | |
| CN105923599B (en) | Dry adhesive composite structure based on gas actuation and production technology | |
| CN209606769U (en) | Nano-imprinting device | |
| TWI665078B (en) | Method of manufacturing patterned stamp forpatterning contoured surface, patterned stampfor use in imprint lithography process, imprint lithography method, article comprising patterned contoured surface and use of a patterned stamp for imprint lithograph | |
| WO2022217954A1 (en) | Method and device for manufacturing micro-nano structure | |
| CN206788551U (en) | A kind of vacuum nano Embosser | |
| CN207908855U (en) | It is a kind of that the nano-imprinting apparatus uniformly imprinted is realized by idler wheel | |
| CN106990671B (en) | Negative pressure formula nanometer impression equipment | |
| CN109656097A (en) | Nano-imprinting device and nano-imprinting method | |
| CN109609907A (en) | The method that self-priming nano impression prepares metal Nano structure | |
| CN102436141A (en) | Nano hot stamping device | |
| CN112519396A (en) | Vacuum negative-pressure 3D curved surface UV texture transfer printing equipment and transfer printing method thereof | |
| CN209281147U (en) | Nano impression Elastic forming board and nano impression component | |
| TW200819921A (en) | Exposure apparatus | |
| CN113075859B (en) | Negative pressure type nano imprinting equipment and imprinting method thereof | |
| CN207457701U (en) | Pressing shaft type exposes gauge | |
| CN109765687A (en) | The production method and endoscope of hydrophobic coating on curved surface shell | |
| CN109656098A (en) | Production method, nano impression Elastic forming board and the component of nano impression Elastic forming board | |
| CN205112291U (en) | Quick rendition shaping structure | |
| CN106200262A (en) | Vacuum negative pressure nanometer press printing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |