TW201703964A - Manufacturing method of stamper and a jig for making stamper characterized by shorter fabrication time, lower cost, and higher contact efficiency at the time of stamping in comparison with the prior arts - Google Patents

Abstract

The present invention provides a manufacturing method of stamper and a jig for making stamper. The jig comprising a body, pluralities of mold core blocks and a cover plate, where the body has the first surface and the second surface opposite to each other, and the first recess is formed on the first surface, and a plurality of second recesses is located on a bottom surface of the first recess, the mold core block has a concavo-convex surface, and correspondingly is provided on a bottom surface of each of the second recesses to expose the concavo-convex surface at the first recess. The cover plate has a convex portion corresponding to an open end of the first recess, for covering the first surface and for correspondingly sealing the open end of the first recess by the convex portion. Compared to the prior arts, the stamper produced by this invention requires shorter fabrication time and lower cost, and has higher contact efficiency at the time of stamping.

Description

Press molding method and jig for making stamper

The present invention relates to a method for manufacturing a stamper and a jig for making a stamper, and more particularly to a method for producing a stamper having a micro-nano structure and a jig for making the stamper.

Most of the fabrication of conventional microstructures uses semiconductor technology. However, since semiconductor technology is limited by optical diffraction limits in the micro-nano size, it cannot reduce the cost and speeds up the process. Imprint) The technique of making microstructures by using the embossing concept of conventional printing, pressing and softening a soft layer with a stamper having a micro-nano structure, thereby making the soft layer Has a micro-nano structure. The micro-nano imprinting technology is not limited by the optical diffraction limit, but has the advantages of high resolution, high speed and low cost.

Conventional technology generally cooperates with micro-nano embossing in a roll-to-roll process, which winds a thin sheet from a cylindrical roll and is rotated by a roller. The surface of the sheet is embossed with a micro-nano structure, and the sheet is rolled into a cylindrical shape or directly cut.

However, the aforementioned roller embossing method must first process the microstructure on the circumferential surface of the roller, which is difficult to process, and if the microstructure is changed, the roller needs to be replaced, resulting in waste of the overall cost.

Therefore, how to avoid various problems in the above-mentioned prior art is an urgent problem to be solved in the industry.

In view of the above-mentioned deficiencies of the prior art, the present invention provides a jig for making a stamper, comprising: a body having opposite first and second surfaces and a first groove formed on the first surface And a plurality of second recesses, wherein the first recess has a bottom surface and an opposite open end, and the plurality of second recesses are formed on a bottom surface of the first recess; the plurality of die blocks are correspondingly disposed on each a bottom surface of the second recess, and each of the die blocks has a concave-convex surface exposed to the first recess; and a cover having a pair of convex portions corresponding to the open end of the first recess for the cover After the cover is disposed on the first surface, the convex portion correspondingly closes the open end of the first recess.

In the above fixture, the body has a through hole connecting the second surface and the bottom surface of the second groove, and further includes an O-ring disposed between the die block and the bottom surface of the second groove. And further comprising a release layer formed on a surface of the first groove and a surface of the second groove.

The invention provides a method for manufacturing a stamper, comprising: providing a jig comprising: a body having a first surface and a second surface opposite to each other; and a first groove and a second portion formed on the first surface a recess, wherein the first recess has a bottom surface and an opposite open end, and the plurality of second recesses are formed on a bottom surface of the first recess; the plurality of die blocks are correspondingly disposed in each of the second recesses a bottom surface of the groove, and each of the mold core blocks has a concave-convex surface exposed to the first groove; and the cover plate has a pair of convex portions corresponding to the open end of the first groove, wherein the cover plate is disposed on the cover The convex portion is borrowed from the first surface The open end of the first groove should be closed; the first groove and the second groove are filled with a colloid; and the colloid is solidified into a solidified colloid.

In the above method, the body has a through hole connecting the second surface and the second groove, and the fixture further comprises an O-ring disposed between the die block and the bottom surface of the second groove, and A release layer is formed on the surface of the first groove and the surface of the second groove.

According to the method of the above-mentioned stamper, the colloid is cured by heating or irradiating ultraviolet light, and the material forming the colloid is tannin.

In the above method for molding a stamper, the cured colloid has a pair of surfaces that should be convex, and the method comprises the steps of: after curing the colloid, attaching the flexible substrate to the surface of the cured colloid. After the flexible substrate is attached, a plurality of through holes penetrating the cured colloid and the flexible substrate are formed at the opposite long sides of the cured colloid.

In the method of the present invention, the material for forming the flexible substrate is a polymer material, and the polymer material is polyethylene terephthalate.

It can be seen from the above that the present invention directly molds and forms a flexible stamper, so that only a general roller can be used to fabricate a microstructure, so that the stamper of the present invention has the advantages of shorter manufacturing time and lower cost; Since the stamping surface of the stamper produced by the present invention is largely convex, the contact efficiency of the stamp can be improved.

10‧‧‧ Ontology

10a‧‧‧ first surface

10b‧‧‧second surface

100‧‧‧Perforation

101‧‧‧first groove

101a‧‧‧ bottom

101b‧‧‧Open end

102‧‧‧second groove

11‧‧‧Menren block

111‧‧‧ concave surface

12‧‧‧ Cover

121‧‧‧ convex

13‧‧‧O-ring

20‧‧‧ colloid

20'‧‧‧cured colloid

200‧‧‧through hole

201‧‧‧ surface

202‧‧‧Longside

21‧‧‧Flexible substrate

1 is a cross-sectional view of a jig for producing a stamper of the present invention and a state of use thereof; and FIGS. 2A and 2B are respectively a cross-sectional view of the stamper of the present invention and Top view.

The other embodiments of the present invention will be readily understood by those skilled in the art from this disclosure.

It is to be understood that the structure, the proportions, the size, and the like of the present invention are intended to be used in conjunction with the disclosure of the specification, and are not intended to limit the invention. The conditions are limited, so it is not technically meaningful. Any modification of the structure, change of the proportional relationship or adjustment of the size should remain in this book without affecting the effects and the objectives that can be achieved by the present invention. The technical content disclosed in the invention can be covered. In the meantime, the terminology used in the present specification is only for the purpose of illustration, and is not intended to limit the scope of the invention. The change or adjustment of the relative relationship is also considered as The scope of the invention can be implemented.

The figure shown in Fig. 1 is a cross-sectional view of a jig for producing a stamper of the present invention and a state of use thereof. As shown in the figure, the jig for making a stamper of the present invention comprises: a body 10 having opposite first and second surfaces 10a and 10b, and a first recess 101 formed on the first surface 10a. a plurality of second grooves 102, wherein the first groove 101 has a bottom surface 101a and an opposite opening end 101b, and the plurality of second grooves 102 are formed on the bottom surface 101a of the first groove 101; the plurality of mold blocks 11 , having a concave-convex surface 111 corresponding to the bottom surface of each of the second grooves 102 and exposing the concave-convex surface 111 to the first groove 101; and the cover 12 having a The convex portion 121 corresponding to the open end 101b of the first recess 101 is disposed on the first surface 10a of the main body 10, and the open end of the first recess 101 is closed by the convex portion 121. 101b.

In the foregoing jig, the body 10 has a through hole 100 connecting the second surface 10b and the bottom surface of the second groove 102 for pumping, and further includes a die block 11 disposed on the die block 11 An O-ring 13 between the bottom surface of the second recess 102 to provide a gas-tight effect of evacuation, and the composite includes a surface formed on the surface of the first recess 101 and the surface of the second recess 102 A release layer (not shown) to assist in subsequent stripping.

After the jig for making the stamper of the present invention is set as shown in FIG. 1 , the first groove 101 and the second groove 102 are filled with the colloid 20, and the colloid 20 is solidified. Cured colloid 20'.

In the method of forming the stamper, the colloid 20 can be cured by heating or irradiating ultraviolet light, and the material forming the colloid 20 can be tannin.

As shown in Figs. 2A and 2B, respectively, a cross-sectional view and a plan view of the stamper of the present invention. In the method described above, after the colloid 20 is cured into the cured colloid 20', the cured colloid 20' is removed, and the cured colloid 20' has a pair of convex portions 121. a surface 201, and the flexible substrate 21 is attached to the surface 201 of the cured colloid 20', and after the flexible substrate 21 is attached, the opposite two of the cured colloid 20' are included. Each of the long sides 202 forms a plurality of through holes 200 extending through the cured colloid 20' and the flexible substrate 21 for attachment to a subsequent transfer gear (not shown).

In the manufacturing method of the present invention, the material for forming the flexible substrate 21 may be A polymer material, and the polymer material may be polyethylene terephthalate (PET).

In summary, compared with the prior art, since the present invention directly molds the colloid into a integrally formed flexible elongated stamper, the subsequent micro-nano imprinting only needs to be in a general plane. The roller presses the stamper to the squeezable sheet to be embossed, so that the microstructure can be produced, so that the stamper of the invention has the advantages of shorter production time and lower cost; moreover, because the invention is a mold core The block is disposed on the bottom surface of the second recess having a lower position, so that the stamping surface of the stamper formed is largely protruded, thereby improving the contact efficiency of the stamp.

The above embodiments are intended to illustrate the principles of the invention and its effects, and are not intended to limit the invention. Any of the above-described embodiments may be modified by those skilled in the art without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should be as set forth in the appended claims.

10‧‧‧ Ontology

10a‧‧‧ first surface

10b‧‧‧second surface

101‧‧‧first groove

101a‧‧‧ bottom

101b‧‧‧Open end

102‧‧‧second groove

100‧‧‧Perforation

11‧‧‧Menren block

111‧‧‧ concave surface

12‧‧‧ Cover

121‧‧‧ convex

13‧‧‧O-ring

20‧‧‧ colloid

Claims (14)

A jig for making a stamper, comprising: a body having a first surface and a second surface opposite to each other; and a first groove and a plurality of second grooves formed on the first surface, wherein the first The groove has a bottom surface and an opposite open end, and the plurality of second grooves are formed on the bottom surface of the first groove; the plurality of mold core blocks are correspondingly disposed on the bottom surface of each of the second grooves, and each of the holes The die block has a concave-convex surface exposed to the first groove; and the cover has a pair of protrusions corresponding to the open end of the first groove, the cover is disposed on the first surface of the body The convex portion corresponds to close the open end of the first groove. The jig for making a stamper according to the first aspect of the invention, wherein the body has a perforation connecting the second surface and a bottom surface of the second groove. The jig for making a stamper according to the first aspect of the invention, further comprising an O-ring disposed between the die block and a bottom surface of the second groove. The jig for making a stamper according to the first aspect of the invention, further comprising a release layer formed on a surface of the first groove and a surface of the second groove. A method for manufacturing a stamper includes: providing a jig comprising: a body having a first surface and a second surface opposite to each other; and a first groove and a plurality of second recesses formed on the first surface a groove, wherein the first groove has a bottom surface and an opposite opening end, and the plurality of second grooves are formed on a bottom surface of the first groove; the plurality of mold core blocks are correspondingly disposed in each of the second grooves a bottom surface of each of the mold cores having a concave-convex surface exposed to the first recess; and a cover having a pair of convex portions corresponding to the open end of the first recess, wherein the cover is disposed on the cover The first surface is followed by the convex portion correspondingly closing the open end of the first groove; the first groove and the second groove are filled with a colloid; and the colloid is cured as a solidified colloid. The method of manufacturing a stamper according to claim 5, wherein the body has a through hole connecting the second surface and the second groove. The method of manufacturing a stamper according to claim 5, wherein the fixture comprises an O-ring disposed between the die block and a bottom surface of the second groove. The method of manufacturing a stamper according to claim 5, wherein a surface of the first groove and a surface of the second groove are formed with a release layer. The method of manufacturing a stamper according to claim 5, wherein the colloid is cured by heating or irradiating ultraviolet light. The method of manufacturing a stamper according to claim 5, wherein the gum system is silicone. The method of manufacturing a stamper according to claim 5, wherein the cured colloid has a pair of surfaces that should be convex, and the method is After curing the colloid, a flexible substrate is attached to the surface of the cured colloid. The method for manufacturing a stamper according to claim 11, after the flexible substrate is attached, the plurality of long sides of the solidified colloid are respectively formed to form a plurality of solidified colloids and Through hole of the flexible substrate. The method of manufacturing a stamper according to claim 11, wherein the material of the flexible substrate is a polymer material. The method of producing a stamper according to claim 13, wherein the polymer material is polyethylene terephthalate.