CN106409693A - Method for manufacturing pressing die and jig for manufacturing pressing die - Google Patents
Method for manufacturing pressing die and jig for manufacturing pressing die Download PDFInfo
- Publication number
- CN106409693A CN106409693A CN201610230113.XA CN201610230113A CN106409693A CN 106409693 A CN106409693 A CN 106409693A CN 201610230113 A CN201610230113 A CN 201610230113A CN 106409693 A CN106409693 A CN 106409693A
- Authority
- CN
- China
- Prior art keywords
- groove
- preparation
- pressing mold
- colloid
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003825 pressing Methods 0.000 title claims description 41
- 238000004519 manufacturing process Methods 0.000 title abstract description 7
- 238000000034 method Methods 0.000 title description 5
- 239000000084 colloidal system Substances 0.000 claims description 35
- 238000002360 preparation method Methods 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000741 silica gel Substances 0.000 claims description 3
- 229910002027 silica gel Inorganic materials 0.000 claims description 3
- 238000007711 solidification Methods 0.000 claims description 2
- 230000008023 solidification Effects 0.000 claims description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 claims 2
- 150000002148 esters Chemical class 0.000 claims 1
- 229920002521 macromolecule Polymers 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000002086 nanomaterial Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- -1 Polyethylene Terephthalate Polymers 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
Landscapes
- Engineering & Computer Science (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Abstract
The jig comprises a body, a plurality of die core blocks and a cover plate, wherein the body is provided with a first surface and a second surface which are opposite, a first groove formed on the first surface and a plurality of second grooves positioned on the bottom surface of the first groove, the die core blocks are provided with a concave-convex surface and used for being correspondingly arranged on the bottom surface of each second groove and exposing the concave-convex surface to the first groove, and the cover plate is provided with a convex part corresponding to the opening end of the first groove, so that the cover plate is covered on the first surface and then the opening end of the first groove is correspondingly sealed by the convex part. The stamper manufactured by the invention has the advantages of shorter manufacturing time, lower cost and higher contact efficiency during imprinting.
Description
Technical field
The present invention relates to a kind of preparation method of pressing mold and the tool in order to make pressing mold, espespecially a kind of have micro nano structure
The preparation method of pressing mold and the tool in order to make this pressing mold.
Background technology
The manufacture of traditional micro-structural is used mostly semiconductor technology, however, because semiconductor technology is in micro-or nano size portion
Point be limited to the optical diffraction limit and cannot reduces cost and processing procedure speed cannot be accelerated, then develop to imprint (imprint)
Mode makes the technology of micro-structural, and it utilizes the impressing concept of traditional printing art, with a pressing mold with micro nano structure
(stamper) soft layer is pressurizeed and solidify this soft layer, and then make this soft layer have micro nano structure.Micro-nano imprint
Technology is not limited by optics diffraction limit institute, and has that resolution is high, speed is fast and low cost and other advantages.
Prior art generally to coordinate micro-nano imprint in volume to volume processing procedure (roll-to-roll process) mode, its
By by can flexing thin plate after cylindric material volume rolls out, imprint out micro nano structure by roller in this thin sheet surface,
Again this thin plate is rolled into cylindrical shape or directly cuts.
Only, aforesaid roller impressing mode first must process micro-structural on the circumferential surface of roller, being stranded of this processing
Difficulty is high, and if change micro-structural, roller must be changed, cause the waste of holistic cost.
Therefore, how to avoid above-mentioned variety of problems of the prior art, actually industry is badly in need of the problem solving at present.
Content of the invention
In view of the disappearance of above-mentioned prior art, the present invention provides a kind of tool in order to make pressing mold, made pressure
The Production Time of mould is shorter and cost is relatively low, in impressing when and there is higher contacting efficiency.
The tool of the present invention includes:Body, its have relative first surface and second surface and be formed at this first
First groove on surface and multiple second grooves, wherein, this first groove has bottom surface and relative openend, and the plurality of the
Two grooves are formed at the bottom surface of this first groove;Multiple die blocks, it is correspondingly arranged at respectively on the bottom surface of this second groove, and respectively should
Die block has a convex-concave surface exposing to this first groove;And cover plate, its have a pair should the first groove opening
The protuberance at end, is covered on the corresponding openend closing this first groove of this protuberance of mat after on this first surface for this cover plate.
In aforesaid tool, this body also has the perforation connecting this second surface and the bottom surface of this second groove, and
Also include the O-ring located between the bottom surface of this die block and this second groove, and also include being formed at the surface of this first groove
Release layer above and on the surface of this second groove.
The present invention also provides a kind of preparation method of pressing mold, including:There is provided a tool, it includes:Body, it has relative
The first groove and multiple second grooves that one surface with second surface and is formed at this first surface, wherein, this first groove
There is bottom surface and relative openend, and the plurality of second groove is formed at the bottom surface of this first groove;Multiple die blocks, it is right
Should be on the respectively bottom surface of this second groove, and respectively this die block has a convex-concave surface exposing to this first groove;And lid
Plate, its have a pair should the first groove openend protuberance, for this cover plate be covered on this first surface after this protuberance of mat
The corresponding openend closing this first groove;Insert colloid in this first groove and the second groove;And this colloid is solidified
Become cured colloid.
In aforesaid preparation method, this body also has the perforation connecting this second surface and this second groove, and this tool is also
Including the O-ring located between the bottom surface of this die block and this second groove, and on the surface of this first groove with this second groove
Surface on be also formed with release layer.
According to the preparation method of upper described pressing mold, the mode solidifying this colloid is heating or irradiating ultraviolet light, and forms this colloid
Material be silica gel.
Again in the preparation method of aforesaid pressing mold, this cured colloid have a pair should protuberance surface, and this preparation method
After being also included in this colloid of solidification, connect on the surface of this cured colloid and put flexible base plate, and put this pliability in connecing
After substrate, be also included in this cured colloid relatively two long edge positions each formed multiple run through this cured colloid with can
The through hole of flexible substrate.
In the preparation method of the present invention, the material forming this flexible base plate is macromolecular material, and this macromolecular material is
PET.
From the foregoing, it will be observed that the present invention passes through directly to be cast in the flexual pressing mold of shaping, therefore only need to coordinate general roller
Produce micro-structural, thus the pressing mold of the present invention have Production Time shorter with lower-cost advantage;Additionally, because institute of the present invention
The stamping surface of the pressing mold produced significantly is protruded, so the contacting efficiency of impressing can be improved.
Brief description
That shown in Figure 1 is the tool in order to make pressing mold of the present invention and its sectional view of use state;And
Fig. 2A and Fig. 2 B those shown are respectively the sectional view of pressing mold and the top view of the present invention.
Symbol description
10 bodies
10a first surface
10b second surface
100 perforation
101 first grooves
101a bottom surface
101b openend
102 second grooves
11 die blocks
111 convex-concave surfaces
12 cover plates
121 protuberances
13 O-ring
20 colloids
20 ' cured colloids
200 through holes
201 surfaces
202 long sides
21 flexible base plates.
Specific embodiment
Below by way of particular specific embodiment, embodiments of the present invention are described, people skilled in the art can be by this theory
Content disclosed in bright book understands other advantages and effect of the present invention easily.
It should be clear that structure depicted in accompanying drawing appended by this specification, ratio, size etc., all only in order to coordinate specification to be taken off
The content shown, for understanding and the reading of people skilled in the art, is not limited to the enforceable qualifications of the present invention,
Therefore do not have technical essential meaning, and the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting this
Under bright effect that can be generated by and the purpose that can reach, all should still fall and obtain and can cover in disclosed technology contents
In the range of.Meanwhile, cited term in this specification be merely convenient to describe understand, and be not used to limit the present invention can be real
The scope applied, being altered or modified of its relativeness, under no essence change technology contents, enforceable when being also considered as the present invention
Category.
That shown in Figure 1, it is the tool in order to make pressing mold of the present invention and its sectional view of use state.As schemed
Show, the tool in order to make pressing mold of the present invention includes:Body 10, it has relative first surface 10a and second surface 10b
And it is formed at first groove 101 of this first surface 10a and multiple second grooves 102, wherein, this first groove 101 has
Bottom surface 101a and relative openend 101b, and the plurality of second groove 102 is formed at the bottom surface 101a of this first groove 101;
Multiple die blocks 11, it has a convex-concave surface 111, and in order to be correspondingly arranged at respectively on the bottom surface of this second groove 102 and expose
This convex-concave surface 111 is in this first groove 101;And cover plate 12, its have a pair should the first groove 101 openend 101b
Protuberance 121, after being covered on the first surface 10a of this body 10 for this cover plate 12 the corresponding closing of this protuberance 121 of mat this first
The openend 101b of groove 101.
In aforesaid tool, this body 10 also can have the bottom surface of connection this second surface 10b and this second groove 102
Perforation 100, so that pumping is used, and may also include the O-ring located between the bottom surface of this die block 11 and this second groove 102
13, to provide the airtight effect of pumping, and may also include on the surface being formed at this first groove 101 with this second groove 102
Surface on release layer (not shown), to assist follow-up demoulding.
As illustrated in fig. 1 by the present invention in order to make pressing mold tool after setting completed, then in this first groove 101 with
Insert colloid 20 in second groove 102, and this colloid 20 is solidified into cured colloid 20 '.
In the preparation method of described pressing mold, the mode solidifying this colloid 20 can be heating or irradiating ultraviolet light, and formation should
The material of colloid 20 can be silica gel.
As shown in Fig. 2A and Fig. 2 B, the respectively sectional view of the pressing mold of the present invention and top view.According in front described preparation method,
After this colloid 20 is solidified into this cured colloid 20 ', also include taking out this cured colloid 20 ', this is cured
Colloid 20 ' have a pair should protuberance 121 surface 201, and connect on this surface 201 of this cured colloid 20 ' and put
Flexible base plate 21, and after connecing and putting this flexible base plate 21, also it is included in the two long sides relatively of this cured colloid 20 '
At 202, the multiple through holes 200 running through this cured colloid 20 ' and flexible base plate 21 of each formation, follow-up for being placed in
Transmission gear (not shown).
In the preparation method of the present invention, the material forming this flexible base plate 21 can be macromolecular material (polymer), and should
Macromolecular material can be PET (Polyethylene Terephthalate, PET).
In sum, compared to prior art, because the present invention passes through directly to be cast in colloid to be integrally formed shaping
Flexual strip pressing mold, so only need to be pressed to be imprinted with general plane roller by this pressing mold during follow-up micro-nano imprint
Can flexing thin plate, you can produce micro-structural, thus the pressing mold of the present invention to have Production Time shorter and lower-cost excellent
Point;The additionally, because present invention is that die block is arranged on the bottom surface of the second relatively low groove of position, therefore produced pressing mold
Stamping surface significantly protrude, and then can improve impressing contacting efficiency.
The principle only in order to the illustrative present invention for the above-described embodiment and its effect, not for limiting the present invention.Appoint
What those skilled in the art all can modify to above-described embodiment without prejudice under the spirit and the scope of the present invention.Cause
This scope of the present invention, should be as listed by claims.
Claims (14)
1. a kind of tool in order to make pressing mold, it is characterized by, this tool includes:
Body, it has relative first surface and second surface and is formed at the first groove of this first surface and multiple the
Two grooves, wherein, this first groove has bottom surface and relative openend, and the plurality of second groove is formed at this first groove
Bottom surface;
Multiple die blocks, it is correspondingly arranged at respectively on the bottom surface of this second groove, and respectively this die block have one expose to this first
The convex-concave surface of groove;And
Cover plate, its have a pair should the first groove openend protuberance, be covered on the first surface of this body for this cover plate
The corresponding openend closing this first groove of this protuberance of mat after upper.
2. as claimed in claim 1 in order to make the tool of pressing mold, it is characterized by, this body also has this second surface of connection
Perforation with the bottom surface of this second groove.
3. as claimed in claim 1 in order to make the tool of pressing mold, it is characterized by, this tool also include located at this die block with
O-ring between the bottom surface of this second groove.
4. as claimed in claim 1 in order to make the tool of pressing mold, it is characterized by, it is first recessed that this tool also includes being formed at this
On the surface of groove with the surface of this second groove on release layer.
5. a kind of preparation method of pressing mold, it is characterized by, this preparation method includes:
There is provided a tool, it includes:
Body, it has relative first surface and second surface and is formed at the first groove of this first surface and multiple the
Two grooves, wherein, this first groove has bottom surface and relative openend, and the plurality of second groove is formed at this first groove
Bottom surface;
Multiple die blocks, it is correspondingly arranged at respectively on the bottom surface of this second groove, and respectively this die block have one expose to this first
The convex-concave surface of groove;And
Cover plate, its have a pair should the first groove openend protuberance, for this cover plate be covered on this first surface after mat
The corresponding openend closing this first groove of this protuberance;
Insert colloid in this first groove and the second groove;And
Solidifying this colloid is cured colloid.
6. the preparation method of pressing mold as claimed in claim 5, it is characterized by, this body also have connection this second surface with this second
The perforation of groove.
7. the preparation method of pressing mold as claimed in claim 5, it is characterized by, this tool also includes second recessed with this located at this die block
O-ring between the bottom surface of groove.
8. the preparation method of pressing mold as claimed in claim 5, it is characterized by, the table with this second groove on the surface of this first groove
Release layer is also formed with face.
9. the preparation method of pressing mold as claimed in claim 5, it is characterized by, the mode solidifying this colloid is heating or irradiates ultraviolet
Light.
10. the preparation method of pressing mold as claimed in claim 5, it is characterized by, this colloid is silica gel.
The preparation method of 11. pressing molds as claimed in claim 5, it is characterized by, this cured colloid has a pair should protuberance
Surface, and this preparation method also be included in solidification this colloid after, connect on the surface of this cured colloid and put flexible base plate.
The preparation method of 12. pressing molds as claimed in claim 11, it is characterized by, this preparation method after connecing and putting this flexible base plate, also
It is included in the multiple with respect to each formation in two long edge positions of this cured colloid and run through this cured colloid and flexible base plate
Through hole.
The preparation method of 13. pressing molds as claimed in claim 11, it is characterized by, the material forming this flexible base plate is macromolecule material
Material.
The preparation method of 14. pressing molds as claimed in claim 13, it is characterized by, this macromolecular material is poly terephthalic acid second two
Ester.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW104123845 | 2015-07-23 | ||
TW104123845A TW201703964A (en) | 2015-07-23 | 2015-07-23 | Manufacturing method of stamper and a jig for making stamper characterized by shorter fabrication time, lower cost, and higher contact efficiency at the time of stamping in comparison with the prior arts |
Publications (1)
Publication Number | Publication Date |
---|---|
CN106409693A true CN106409693A (en) | 2017-02-15 |
Family
ID=58005499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610230113.XA Pending CN106409693A (en) | 2015-07-23 | 2016-04-14 | Method for manufacturing pressing die and jig for manufacturing pressing die |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN106409693A (en) |
TW (1) | TW201703964A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108914711A (en) * | 2018-07-26 | 2018-11-30 | 永发(河南)模塑科技发展有限公司 | A kind of solid paper pulp molded article surface concave and convex technology |
CN110561839A (en) * | 2019-10-14 | 2019-12-13 | 佛山市天添润彩印有限公司 | production process of deep embossing intaglio and relief plate of paper printed matter |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113883198B (en) * | 2021-09-26 | 2023-03-24 | 株洲时代瑞唯减振装备有限公司 | Vulcanization method of shrinkage pool elastic cushion |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101746105A (en) * | 2008-12-01 | 2010-06-23 | 鸿富锦精密工业(深圳)有限公司 | Die core making method and special die |
TW201242739A (en) * | 2011-04-19 | 2012-11-01 | Hwasunquartek Corp | Method of manufacturing imprint stamp |
US20130134629A1 (en) * | 2011-11-29 | 2013-05-30 | Wistron Corporation | Embossing method and embossing mold |
-
2015
- 2015-07-23 TW TW104123845A patent/TW201703964A/en unknown
-
2016
- 2016-04-14 CN CN201610230113.XA patent/CN106409693A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101746105A (en) * | 2008-12-01 | 2010-06-23 | 鸿富锦精密工业(深圳)有限公司 | Die core making method and special die |
TW201242739A (en) * | 2011-04-19 | 2012-11-01 | Hwasunquartek Corp | Method of manufacturing imprint stamp |
US20130134629A1 (en) * | 2011-11-29 | 2013-05-30 | Wistron Corporation | Embossing method and embossing mold |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108914711A (en) * | 2018-07-26 | 2018-11-30 | 永发(河南)模塑科技发展有限公司 | A kind of solid paper pulp molded article surface concave and convex technology |
CN110561839A (en) * | 2019-10-14 | 2019-12-13 | 佛山市天添润彩印有限公司 | production process of deep embossing intaglio and relief plate of paper printed matter |
Also Published As
Publication number | Publication date |
---|---|
TW201703964A (en) | 2017-02-01 |
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Application publication date: 20170215 |