CN209593773U - Vacuum infrared heating device - Google Patents
Vacuum infrared heating device Download PDFInfo
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- CN209593773U CN209593773U CN201821844603.XU CN201821844603U CN209593773U CN 209593773 U CN209593773 U CN 209593773U CN 201821844603 U CN201821844603 U CN 201821844603U CN 209593773 U CN209593773 U CN 209593773U
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- heating device
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Abstract
The utility model discloses a kind of vacuum infrared heating devices, comprising: cavity；Support plate, setting is in the cavity；Infrared heat lamp is arranged in the cavity, for heating the support plate；Component is adjusted, for adjusting the position of the infrared heat lamp in the cavity.Vacuum infrared heating device provided by the utility model adjusts the position of infrared heat lamp in the cavity by setting adjustment component, when carrying out chip manufacture, temperature adjustment can be carried out in real time, to realize to the best heating effect of chip, improve the processing performance of chip.
Description
Technical field
The utility model relates to solar battery manufacturing technology more particularly to a kind of vacuum infrared heating devices.
Background technique
With the development of semicon industry, vacuum infrared heating device is widely used in many process procedures.
Vacuum infrared heating device in the prior art includes cavity, is provided with support plate and infrared heat lamp in the cavity
Group, bearing wafer on support plate, infrared heating lamp group infrared heat lamp, for heating the chip on support plate.
But in the prior art, the position of infrared heat lamp is fixed, and heating unevenness can be generated by causing to heat support plate
The phenomenon that.
Utility model content
The purpose of the utility model is to provide a kind of vacuum infrared heating devices, heated not to solve support plate in the prior art
Equal problem improves the heated uniformity of support plate, improves the processing performance of chip.
The utility model provides a kind of vacuum infrared heating device, wherein includes:
Cavity；
Support plate, setting is in the cavity；
Infrared heat lamp is arranged in the cavity, for heating the support plate；
Component is adjusted, for adjusting the position of the infrared heat lamp in the cavity.
Preferably, the adjustment component includes handle and connector；
The handle is fixed on the side wall of the cavity；
The first end of the connector is connected with the handle, the second end of the connector and the infrared heat lamp phase
Even.
Preferably, gear is provided on the handle, the connector is rack gear；
The first end of the rack gear is engaged with the gear, and the second end of the rack gear is connected with the infrared heat lamp.
Preferably, sealing block is arranged with outside the infrared heat lamp；
The second end of the rack gear is connected by the sealing block with the infrared heat lamp.
Preferably, the quantity of the infrared heat lamp is three, three infrared heat lamp parallelly distribute ons；The number of the rack gear
Amount is two；
The middle position of the side wall of the cavity is arranged in the handle, and corresponds to three infrared heat lamp middle positions
Infrared heat lamp；
The first end of two rack gears is engaged with the gear, and the second end of two rack gears is located at avris with two respectively
Infrared heat lamp is connected.
It preferably, further include radiation shield, the radiation shield setting in the cavity, and is located at the infrared heat lamp
Around.
It preferably, further include the first infrared radiation thermometer, the second infrared radiation thermometer and third infrared radiation thermometer；
Upper cover is provided at the top of the cavity, the bottom of the cavity is provided with bottom plate；
First infrared radiation thermometer is extend into the cavity from the upper cover；
Second infrared radiation thermometer is extend into the cavity from the bottom plate, and with the first infrared radiation thermometer phase
It is right；
The third infrared radiation thermometer is extend into the cavity from the bottom plate, and is located at second infrared radiation thermometer
Side.
Preferably, coldplate is provided on the upper lid；Lower coldplate is provided on the bottom plate；
The upper coldplate and the lower coldplate are connected with cooling line.
Preferably, the support plate is fixed on the lower coldplate by supporting element.
Preferably, the supporting element is height-adjustable telescopic rod.
Vacuum infrared heating device provided by the utility model adjusts infrared heat lamp in chamber by setting adjustment component
Intracorporal position can carry out temperature adjustment when carrying out chip manufacture in real time, improve the heated uniformity of support plate, to realize
To the best heating effect of chip, the processing performance of chip is improved.
Detailed description of the invention
Fig. 1 is the structural main section view of vacuum infrared heating device provided by the embodiment of the utility model；
Fig. 2 is the perspective view of vacuum infrared heating device provided by the embodiment of the utility model；
Fig. 3 is the main view for adjusting component.
Description of symbols:
1- cavity 2- support plate 3- infrared heat lamp 4- handle 5- connector 6- sealing block 7- radiation shield 8- first is red
On outer the second infrared radiation thermometer of temperature measurer 9- 10- third infrared radiation thermometer 11- upper cover 12- bottom plate 13- under coldplate 14-
Coldplate 15- supporting element 16- interface 17- vacuum gauge
Specific embodiment
The embodiments of the present invention are described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning
Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, and is only used for explaining the utility model, and cannot be construed to the utility model
Limitation.
As depicted in figs. 1 and 2, the utility model embodiment provides a kind of vacuum infrared heating device, including cavity 1,
Support plate 2, infrared heat lamp 3 and adjustment component.
Wherein, cavity 1 provides heating space, can be welded and be formed by stainless steel plate.Support plate 2 is arranged in cavity 1, can
To include graphite plate, for carrying chip to be processed.Infrared heat lamp 3 is arranged in cavity 1, for heating support plate 2.This implementation
In example, infrared heat lamp can be one, be also possible to two or more, infrared heat lamp 3 is tubulose, by emitting infrared light
Support plate 2 is heated, highest can be heated to 1000 DEG C or more.
Adjustment component is for adjusting position of the infrared heat lamp 3 in cavity 1, by adjusting the position of infrared heat lamp 3,
When carrying out chip manufacture, temperature adjustment can be carried out in real time, improves the heated uniformity of support plate, to realize to the best of chip
Heating effect improves the processing performance of chip.
It will be appreciated by persons skilled in the art that the specific structure of adjustment component can there are many, can be for each
The structure of the setting adjustment component of infrared heat lamp 3, is achieved in the position adjustment to single infrared heat lamp 3.For example, adjustment group
Part is that (while the side wall of cavity 1 also has sealing structure, to guarantee the sealing of cavity 1 for the sliding slot that is arranged on the side wall of cavity 1
Property) and infrared heat lamp 3 both ends and sliding slot cooperation sliding block or idler wheel, mode manually or automatically control sliding block or
Movement of the idler wheel in sliding slot, to realize the position adjustment of single infrared heat lamp 3.
Also adjustment component can be set can adjust the even more infrared heat lamps 3 of two infrared heat lamps 3 simultaneously, adjust
Spacing between lamp and lamp.For example, adjustment component is additional link mechanism, when manually or automatically equipment control driving lever movement
When, driving lever drives follower lever, and two or more follower levers connect two or more infrared heat lamps 3, to realize two or more
The position of a infrared heat lamp adjusts.
As shown in figure 3, adjustment component includes handle 4 and connector 5 in the present embodiment.Handle 4 is fixed on the side of cavity 1
On wall, the first end of connector 5 is connected with handle 4, and the second end of connector 5 is connected with infrared heat lamp 3.By the way that handle is arranged
4, handle 4 can on cavity 1, allow the operator to directly, easily swing handle 4, be transmitted to using connector 5 red
Additional thermolamp 3, it can realize the position adjustment of infrared heat lamp 3.
Implementation as one preferred, gear is provided on handle 4, and connector 5 is rack gear.The first end of rack gear with
Gear engagement, the second end of rack gear are connected with infrared heat lamp 3.
Further, sealing block 6 is arranged with outside infrared heat lamp 3, the second end of rack gear passes through sealing block 6 and infrared heating
Lamp 3 is connected.The setting of sealing block 6 not only realizes the sealing of cavity 1, but also can not make what more labyrinths changed
In the case of, the transmission of handle 4, gear, rack gear and infrared heat lamp 3 is set up.
Implementation as one preferred, the quantity of infrared heat lamp 3 are three, and three infrared heat lamps 3 divide in parallel
Cloth, the quantity of rack gear are two.The middle position of the side wall of cavity 1 is arranged in handle 4, and in corresponding three infrared heat lamps 3
Between position infrared heat lamp.The first end of two rack gears is engaged with gear, the second end of two rack gears respectively with two positions
It is connected in the infrared heat lamp of avris.
By setting gear and rack gear, gear rotates while two adjacent infrared heat lamps 3 being driven to act, make two it is red
Additional thermolamp 3 is mobile to be equidistant, and in the temperature adjustment for carrying out cavity 1, improves the efficiency of adjustment.
On the basis of the above embodiments, vacuum infrared heating device provided by the embodiment of the utility model further includes reflection
Screen 7, which is arranged in cavity 1, and is located at around infrared heat lamp 3.The radiation shield 7 can be by resistant to high temperature
Mirror metal board group is at being reflected the infrared light that infrared heat lamp 3 emits by mirror surface, to improve heating efficiency.Instead
The quantity for penetrating screen 7 can be muti-piece, includes 16 pieces of radiation shields 7 in the present embodiment, forms fence, by infrared heat lamp 3 and carries
Plate 2 is trapped among wherein.
Preferably, vacuum infrared heating device provided by the embodiment of the utility model further includes temperature measuring equipment, for testing
Temperature inside cavity 1, temperature measuring equipment acquire the temperature in cavity 1 in real time, and the position of infrared heat lamp 3 is adjusted according to temperature
It sets, achievees the purpose that optimum temperature as early as possible to realize.The data that temperature measuring equipment is surveyed, are handled by host computer, can be real-time
Displays temperature curve.
Preferably, temperature measuring equipment includes the first infrared radiation thermometer 8, the second infrared radiation thermometer 9 and third infrared radiation thermometer 10.
The top of cavity 1 is provided with upper cover 11, and the bottom of cavity 1 is provided with bottom plate 12.First infrared radiation thermometer 8 is extend into from upper cover 11
In cavity 1.Second infrared radiation thermometer 9 is extend into cavity 1 from bottom plate 12, and opposite with the first infrared radiation thermometer 8.Third is infrared
Temperature measurer 10 is extend into cavity 1 from bottom plate 12, and is located at the side of the second infrared radiation thermometer 9.
Three infrared radiation thermometers carry out temperature measurement in difference, so as to the temperature in more accurate reaction cavity 1.
According to the actual situation, thermocouple can also be set and carry out temperature inside reaction cavity 1.Thermocouple can pass through high-temperature plastic or glue
Hydropexis is in the position to thermometric, for example, can be fixed on support plate, can also be fixed on other positions such as upper cover 11 or bottom plate 12
It sets.
Further, it is provided with coldplate 13 in upper cover 11, lower coldplate 14 is provided on bottom plate 12.Upper coldplate 13
It can connect cooling line with lower coldplate 14, cooling line can be processed on the inner wall for being formed in cavity 1, to be passed through cooling
Liquid cools down to cavity 1.The present embodiment in the specific implementation, upper coldplate 13 and lower coldplate 14 with cooling line phase
Connection, is passed through coolant liquid, is vacuumized by interface 16, measured by vacuum gauge 17 to the vacuum degree inside cavity 1,
When vacuum degree reaches demand, starting infrared heat lamp 3 is heated.Host computer passes through the power of control 3 pipe of infrared heat lamp,
Support plate 2 is heated to predetermined temperature.Host computer records the data in heating process, data is depicted as curve, and stored.
After the completion of heating, infrared heat lamp 3 is closed, closes vacuum pump, it will by upper coldplate 13 and lower coldplate 14
1 internal temperature of cavity is down to room temperature, is passed through nitrogen by interface 16, and 1 internal pressure of cavity is increased to atmospheric pressure, closes cooling
Liquid.
Above-mentioned support plate 2 can be directly anchored on bottom plate 12, can also be fixed on lower coldplate 14 by supporting element 15.
Preferably, supporting element 15 is height-adjustable telescopic rod, so as to realize that the distance between support plate 2 and infrared heat lamp 3 can
It adjusts, acquires the temperature data under different distance, further improve the efficiency of test.
The structure, features, and effects of the present invention is described in detail based on the embodiments shown in the drawings, with
Upper described is only the preferred embodiment of the utility model, but the present invention does not limit the scope of implementation as shown in the drawings, it is all according to
Change or equivalent example modified to equivalent change made by conception according to the utility model, still without departing from specification and figure
When showing covered spirit, it should be within the protection scope of the present utility model.
Claims (10)
1. a kind of vacuum infrared heating device characterized by comprising
Cavity；
Support plate, setting is in the cavity；
Infrared heat lamp is arranged in the cavity, for heating the support plate；
Component is adjusted, for adjusting the position of the infrared heat lamp in the cavity.
2. vacuum infrared heating device according to claim 1, which is characterized in that the adjustment component includes handle and company
Fitting；
The handle is fixed on the side wall of the cavity；
The first end of the connector is connected with the handle, and the second end of the connector is connected with the infrared heat lamp.
3. vacuum infrared heating device according to claim 2, which is characterized in that be provided with gear, institute on the handle
Stating connector is rack gear；
The first end of the rack gear is engaged with the gear, and the second end of the rack gear is connected with the infrared heat lamp.
4. vacuum infrared heating device according to claim 3, which is characterized in that be arranged with outside the infrared heat lamp close
Seal block；
The second end of the rack gear is connected by the sealing block with the infrared heat lamp.
5. vacuum infrared heating device according to claim 4, which is characterized in that the quantity of the infrared heat lamp is three
It is a, three infrared heat lamp parallelly distribute ons；The quantity of the rack gear is two；
The middle position of the side wall of the cavity is arranged in the handle, and corresponding three infrared heat lamp middle positions is infrared
Heating lamp；
The first end of two rack gears is engaged with the gear, and the second end of two rack gears is located at the infrared of avris with two respectively
Heating lamp is connected.
6. vacuum infrared heating device according to claim 1-5, which is characterized in that it further include radiation shield, institute
It states radiation shield setting in the cavity, and is located at around the infrared heat lamp.
7. vacuum infrared heating device according to claim 1-5, which is characterized in that further include the first infrared survey
Wen Yi, the second infrared radiation thermometer and third infrared radiation thermometer；
Upper cover is provided at the top of the cavity, the bottom of the cavity is provided with bottom plate；
First infrared radiation thermometer is extend into the cavity from the upper cover；
Second infrared radiation thermometer is extend into the cavity from the bottom plate, and opposite with first infrared radiation thermometer；
The third infrared radiation thermometer is extend into the cavity from the bottom plate, and is located at the side of second infrared radiation thermometer
Side.
8. vacuum infrared heating device according to claim 7, which is characterized in that be provided with cooling on the upper lid
Plate；Lower coldplate is provided on the bottom plate；
The upper coldplate and the lower coldplate are connected with cooling line.
9. vacuum infrared heating device according to claim 8, which is characterized in that the support plate is fixed on by supporting element
On the lower coldplate.
10. vacuum infrared heating device according to claim 9, which is characterized in that the supporting element is height-adjustable
Telescopic rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821844603.XU CN209593773U (en) | 2018-11-09 | 2018-11-09 | Vacuum infrared heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821844603.XU CN209593773U (en) | 2018-11-09 | 2018-11-09 | Vacuum infrared heating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209593773U true CN209593773U (en) | 2019-11-05 |
Family
ID=68376463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821844603.XU Active CN209593773U (en) | 2018-11-09 | 2018-11-09 | Vacuum infrared heating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209593773U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113438754A (en) * | 2021-05-25 | 2021-09-24 | 马鞍山市安马电子设备实业有限公司 | Gear turnover type infrared heating device and heating system thereof |
-
2018
- 2018-11-09 CN CN201821844603.XU patent/CN209593773U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113438754A (en) * | 2021-05-25 | 2021-09-24 | 马鞍山市安马电子设备实业有限公司 | Gear turnover type infrared heating device and heating system thereof |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210121 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |