CN209580125U - A kind of positioning of silicon single crystal rod and Qu Pian mechanism - Google Patents
A kind of positioning of silicon single crystal rod and Qu Pian mechanism Download PDFInfo
- Publication number
- CN209580125U CN209580125U CN201822205497.7U CN201822205497U CN209580125U CN 209580125 U CN209580125 U CN 209580125U CN 201822205497 U CN201822205497 U CN 201822205497U CN 209580125 U CN209580125 U CN 209580125U
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- single crystal
- silicon single
- crystal rod
- vacuum chuck
- pedestal
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Abstract
The utility model discloses a kind of positioning of silicon single crystal rod and Qu Pian mechanisms, including vacuum chuck, pedestal, axial movement driving mechanism, elevating mechanism；Vacuum chuck is connect with elevating mechanism, for sucking the end face of silicon single crystal rod；Elevating mechanism is connect with pedestal, for driving vacuum chuck vertically movable；Axial movement driving mechanism is connect with base drive, for driving the mobile end face to drive vacuum chuck close to or far from silicon single crystal rod of pedestal.Before cutting, elevating mechanism is adjusted at vacuum chuck to the center of the end face of silicon single crystal rod；Then axial movement driving mechanism driving pedestal is mobile, until vacuum chuck abuts against the end face of silicon single crystal rod.After dicing, elevating mechanism driving vacuum chuck is vertically movable, until sheet stock is staggered with silicon single crystal rod completely, then can remove sheet stock.Thus, the utility model may be implemented automation and take piece, without relying on manual adjustment, the advantages of specifically improving processing efficiency, also reduce cost of labor.
Description
Technical field
The utility model relates to hard and brittle material cutting technology field more particularly to a kind of positioning of silicon single crystal rod and take piece machine
Structure.
Background technique
During the processing and manufacturing of silicon wafer, need by manually take piece tooling by the sheet stock of dicing from be located at monocrystalline
It is removed at silicon single crystal rod on silicon rod processing unit (plant).
It includes Magnetic gauge stand, universal support arm and slice sucker, universal support arm one end and magnetism that existing craft, which takes piece tooling,
The other end of gauge stand connection, universal support arm is connect with slice sucker, takes piece tooling can be by magnetic-adsorption in monocrystalline silicon by hand
On the workbench of stick processing dress.Before cutting, the specific absorption position for taking piece tooling by hand is adjusted by artificially moving, then root
Direction and the height of universal support arm are artificially adjusted according to the specific diameter of silicon single crystal rod, so that slice sucker may be at monocrystalline silicon
At the center of the end face of stick, with the end face of adsorption column silicon single crystal rod；After completing cutting, it is also necessary to be taken by hand by artificial movement
Piece tooling, to complete to take the movement of piece, such craft takes piece tooling usage mode cumbersome and inefficiency.
Utility model content
For this reason, it may be necessary to a kind of positioning of silicon single crystal rod and Qu Pian mechanism be provided, to solve to take piece tooling by hand in the prior art
The problem of usage mode is cumbersome and inefficiency.
To achieve the above object, a kind of positioning of silicon single crystal rod and Qu Pian mechanism, including vacuum chuck, bottom are inventor provided
Seat, axial movement driving mechanism, elevating mechanism；
The vacuum chuck is connect with elevating mechanism, for sucking the end face of silicon single crystal rod；
The elevating mechanism is connect with pedestal, for driving vacuum chuck vertically movable；
The axial movement driving mechanism is connect with base drive, for driving pedestal mobile to drive vacuum chuck close
Or the end face far from silicon single crystal rod.
Further, the elevating mechanism includes lifting support and telescoping mechanism, and the lifting support is connect with pedestal, institute
It states telescoping mechanism to be vertically arranged at lifting support, the vacuum chuck is connect with telescoping mechanism.
Further, the telescoping mechanism is cylinder, oil cylinder or linear motor, and the output shaft of telescoping mechanism is provided with cunning
Dynamic seat board, the vacuum chuck are set at sliding seat board.
It further, further include positioning column and fixing seat；The fixing seat is connect with elevating mechanism, the positioning column and solid
Reservation connection, and the axis of fixed column and pedestal moving direction track are arranged with direction；The vacuum chuck is set to fixed column
Endface.
Further, the bottom surface of the pedestal offers sliding slot, and the axial direction of the sliding slot and silicon single crystal rod clamping device is set
The line slide rail set is adapted.
Further, the vacuum chuck is provided at least two.
Further, the axial movement driving machine includes servo motor and speed reducer, the speed reducer and servo motor
Connection, the output shaft of the servo motor are drive lead screw.
It is different from the prior art, the positioning of silicon single crystal rod described in above-mentioned technical proposal and Qu Pian mechanism, including vacuum chuck,
Pedestal, axial movement driving mechanism, elevating mechanism；The vacuum chuck is connect with elevating mechanism, for sucking silicon single crystal rod
End face；The elevating mechanism is connect with pedestal, for driving vacuum chuck vertically movable；The axial movement driving mechanism and bottom
Seat transmission connection, for driving the mobile end face to drive vacuum chuck close to or far from silicon single crystal rod of pedestal.By monocrystalline silicon
When stick positioning and Qu Pian mechanism are set at silicon single crystal rod clamping device, need to make the perpendicular of the end face of vacuum chuck and silicon single crystal rod
Straight middle line is opposite.Before cut silicon single crystal rod, elevating mechanism adjusts vacuum chuck, until vacuum chuck is located at silicon single crystal rod
At the center of end face；Then axial movement driving mechanism driving pedestal is moved axially along silicon single crystal rod clamping device, until true
Suction disk, which abuts against the end face of silicon single crystal rod and adsorbs, to be stopped.After completing cutting, elevating mechanism drives vacuum chuck vertical
It is mobile, until the sheet stock of vacuum chuck absorption is staggered with silicon single crystal rod completely, sheet stock can then be taken from vacuum chuck at this time
Under.Thus, the silicon single crystal rod positioning of this programme and Qu Pian mechanism then may be implemented automation and take piece, without relying on manual adjustment,
Processing efficiency is improved, cost of labor is also reduced.
Detailed description of the invention
Fig. 1 is the structure chart of silicon single crystal rod positioning and Qu Pian mechanism that an embodiment of the present invention is related to；
Fig. 2 is the local structural graph of silicon single crystal rod positioning and Qu Pian mechanism that an embodiment of the present invention is related to；
Fig. 3 is the usage state diagram of silicon single crystal rod positioning and Qu Pian mechanism that an embodiment of the present invention is related to.
Description of symbols:
1, pedestal；
100, sliding block；
2, servo motor；
3, speed reducer；
4, drive lead screw；
5, cylinder；
6, lifting support；
7, upper sliding seat board；
8, fixing seat；
9, positioning column；
10, vacuum chuck；
11, silicon single crystal rod clamping device；
1100, line slide rail；
12, silicon single crystal rod.
Specific embodiment
Technology contents, construction feature, the objects and the effects for detailed description technical solution, below in conjunction with specific reality
It applies example and attached drawing is cooperated to be explained in detail.
It please refers to Fig.1 to Fig.3, the utility model provides a kind of positioning of silicon single crystal rod and Qu Pian mechanism, in saw blade cutting
When the silicon single crystal rod 12 clamped by silicon single crystal rod clamping device 11 cuts in mechanism, the fixed end to be cut for being cut into material of silicon single crystal rod 12
Portion, and after completing slice, the sheet stock adsorbed with silicon single crystal rod 12 is removed, it especially may not need by artificial auxiliary
It helps, be automatically completed positioning and take piece.
In the particular embodiment, the silicon single crystal rod positioning and Qu Pian mechanism include vacuum chuck 10, pedestal 1, axial direction
Moving drive mechanism, elevating mechanism.Wherein, the vacuum chuck 10 is used to suck the end face of silicon single crystal rod 12, can be used poly-
The materials such as urethane, nitrile rubber or the polymer containing vinyl manufacture vacuum chuck 10, for the surface for avoiding silicon single crystal rod 12
It is scratched, is preferably made of fourth of nitrile rubber.The elevating mechanism is vertically moved for driving vacuum chuck 10 before cutting
Dynamic, to complete the contraposition of vacuum chuck 10 and silicon single crystal rod 12, driving vacuum chuck 10 is vertically movable after completing cutting, with complete
At the separation of sheet stock and silicon single crystal rod 12.The axial movement driving mechanism is for driving pedestal 1 mobile to drive vacuum chuck
10 close to or far from silicon single crystal rod 12 end face, to guarantee needing to position and before taking piece, vacuum chuck 10 can adsorb to obtain
Silicon single crystal rod 12.
The vacuum chuck 10 is connect with elevating mechanism, and such setting allows elevating mechanism to drive vacuum chuck 10
It is mobile.The elevating mechanism is connect with pedestal 1, and specifically, the elevating mechanism can connect the lateral position with pedestal 1, can also
To be set at the top surface of pedestal 1, and it is arranged perpendicular to the bottom surface of pedestal 1.The axial movement driving mechanism and pedestal 1 are driven
Connection, such setting, which allows, to be moved axially the driving mechanism and drives pedestal 1 mobile, allows pedestal 1 with lifting
10 synchronizing moving of mechanism and vacuum chuck.
Vacuum chuck 10 is connected by adapter tube and vacuum equipment, and auxiliary line saw cut mechanism is being needed to cut silicon single crystal rod 12
When, then it can star vacuum equipment suction, make to generate negative pressure in vacuum chuck 10, so that the end face of silicon single crystal rod 12 be inhaled
Positioning is then played the role of when online saw cut mechanism cutting silicon single crystal rod 12 in jail, after completing slice, moves up and down vacuum suction
Disk 10 can then play the role of taking piece.
In a further embodiment, the elevating mechanism includes lifting support 6 and telescoping mechanism, the lifting support 6
It is connect with pedestal 1, the telescoping mechanism is vertically arranged at lifting support 6, and the vacuum chuck 10 is connect with telescoping mechanism.In
When needing that vacuum chuck 10 is driven to move up, telescoping mechanism elongation then can drive vacuum chuck 10 to move up.It is needing
When driving vacuum chuck 10 moves down, telescoping mechanism shortens, then vacuum chuck 10 can be driven to move down.
In a further embodiment, the telescoping mechanism is cylinder 5, oil cylinder or linear motor, the output of telescoping mechanism
Axis is provided with sliding seat board 7, and the vacuum chuck 10 is set at sliding seat board 7.Specifically, the body of telescoping mechanism with
Lifting support 6 is connected and fixed.When needing that vacuum chuck 10 is driven to move up, the output shaft of cylinder 5, oil cylinder or linear motor
Elongation, then can drive vacuum chuck 10 to move up.When needing that vacuum chuck 10 is driven to move down, cylinder 5, oil cylinder or
The output shaft of linear motor shortens, then vacuum chuck 10 can be driven to move down.
Referring to Fig. 2, in a further embodiment, the silicon single crystal rod positioning and Qu Pian mechanism further include positioning column 9
And fixing seat 8.The fixing seat 8 is connect with elevating mechanism, and specifically, one end of fixing seat 8 is connect with upper sliding seat board 7.Institute
It states positioning column 9 to connect with fixing seat 8, and the axis of fixed column and 1 moving direction track of pedestal are arranged with direction；The vacuum is inhaled
Disk 10 is set to the endface of fixed column.Such setting can interfere 10 operation of vacuum chuck to avoid elevating mechanism, be also convenient for
The installation of vacuum chuck 10.
In a further embodiment, the positioning column 9 is provided with channel, and the port of the vacuum chuck 10 is located at channel
Single port at, the adapter tube for being connected to vacuum chuck 10 and vacuum equipment can be through to from the suction inlet of vacuum chuck 10 from channel,
Vacuum chuck 10 is connected to vacuum equipment.
In a further embodiment, the bottom surface of the pedestal 1 offers sliding slot, and the sliding slot and silicon single crystal rod clamping fill
11 line slide rail 1100 being axially arranged is set to be adapted.Specifically, sliding block 100, the sliding block can be set in the pedestal 1
100 are provided with sliding slot.Such setting can not only limit the track of silicon single crystal rod axial movement, can also reduce silicon single crystal rod
Friction when positioning and Qu Pian mechanism are moved along silicon single crystal rod clamping device 11.
In order to guarantee that the stability of the end face of silicon single crystal rod is adsorbed in silicon single crystal rod positioning and Qu Pian mechanism, further real
It applies in example, the vacuum chuck 10 is provided at least two.The particular number of vacuum chuck 10 can be according to the straight of silicon single crystal rod
Diameter setting.
In a further embodiment, the axial movement driving machine includes servo motor 2 and speed reducer 3, the deceleration
Machine 3 is connect with servo motor 2, and the output shaft of the servo motor 2 is drive lead screw 4.Under this setting, silicon single crystal rod clamping dress
Transmission nut can be set in the bottom for setting 11, and the drive lead screw 4 of servo motor 2 passes through transmission nut, needing to drive 1 edge of pedestal
Silicon single crystal rod clamping device 11 it is mobile when, starting axial movement driving mechanism, so that drive lead screw 4 rotates, in drive lead screw 4
Under the screw-driven of transmission nut, pedestal 1 can be moved along silicon single crystal rod clamping device 11, so that vacuum chuck 10 is close
Or the end face of the silicon single crystal rod clamped far from silicon single crystal rod clamping device 11.
It should be noted that being not intended to limit although the various embodiments described above have been described herein
The scope of patent protection of the utility model.Therefore, based on the innovative idea of the utility model, embodiment described herein is carried out
Change and modification or equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, directly
Or above technical scheme is used in other related technical areas indirectly, it is included in the patent protection model of the utility model
Within enclosing.
Claims (7)
1. a kind of silicon single crystal rod positioning and Qu Pian mechanism, which is characterized in that including vacuum chuck, pedestal, axial movement driving machine
Structure, elevating mechanism；
The vacuum chuck is connect with elevating mechanism, for sucking the end face of silicon single crystal rod；
The elevating mechanism is connect with pedestal, for driving vacuum chuck vertically movable；
The axial movement driving mechanism is connect with base drive, drives vacuum chuck close for driving pedestal mobile or remote
End face from silicon single crystal rod.
2. silicon single crystal rod positioning according to claim 1 and Qu Pian mechanism, which is characterized in that the elevating mechanism includes rising
Descending branch frame and telescoping mechanism, the lifting support are connect with pedestal, and the telescoping mechanism is vertically arranged at lifting support, described
Vacuum chuck is connect with telescoping mechanism.
3. silicon single crystal rod positioning according to claim 2 and Qu Pian mechanism, which is characterized in that the telescoping mechanism is gas
Cylinder, oil cylinder or linear motor, the output shaft of telescoping mechanism are provided with sliding seat board, and the vacuum chuck is set to sliding seat
At plate.
4. silicon single crystal rod positioning according to claim 1 and Qu Pian mechanism, which is characterized in that further include positioning column and fixation
Seat；The fixing seat is connect with elevating mechanism, and the positioning column is connect with fixing seat, and the axis of fixed column and pedestal movement side
To track with direction setting；The vacuum chuck is set to the endface of fixed column.
5. silicon single crystal rod positioning according to claim 1 and Qu Pian mechanism, which is characterized in that the bottom surface of the pedestal opens up
There is sliding slot, the sliding slot is adapted with the line slide rail of silicon single crystal rod clamping device being axially arranged.
6. silicon single crystal rod positioning according to claim 1 and Qu Pian mechanism, which is characterized in that the vacuum chuck is provided with
At least two.
7. silicon single crystal rod positioning according to claim 1 and Qu Pian mechanism, which is characterized in that the axial movement driving machine
Including servo motor and speed reducer, the speed reducer is connect with servo motor, and the output shaft of the servo motor is drive lead screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822205497.7U CN209580125U (en) | 2018-12-26 | 2018-12-26 | A kind of positioning of silicon single crystal rod and Qu Pian mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822205497.7U CN209580125U (en) | 2018-12-26 | 2018-12-26 | A kind of positioning of silicon single crystal rod and Qu Pian mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209580125U true CN209580125U (en) | 2019-11-05 |
Family
ID=68379079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822205497.7U Active CN209580125U (en) | 2018-12-26 | 2018-12-26 | A kind of positioning of silicon single crystal rod and Qu Pian mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209580125U (en) |
-
2018
- 2018-12-26 CN CN201822205497.7U patent/CN209580125U/en active Active
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