CN209571389U - A kind of thin film wafers separator - Google Patents
A kind of thin film wafers separator Download PDFInfo
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- CN209571389U CN209571389U CN201822235096.6U CN201822235096U CN209571389U CN 209571389 U CN209571389 U CN 209571389U CN 201822235096 U CN201822235096 U CN 201822235096U CN 209571389 U CN209571389 U CN 209571389U
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- suction disc
- fixing seat
- latch
- actuator
- thin film
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Abstract
The utility model relates to technical field of solar batteries, more particularly to a kind of thin film wafers separator, including absorption rotary components, jacking component and locking assembly, adsorbing rotary components includes suction disc, fixing seat and rotary drive, one end of suction disc is connecting pin, one end is free end, and connecting pin and fixing seat are rotatablely connected, and the lower surface of suction disc is used to adsorb the film on chip；Jacking component is located at the lower section of free end, and jacking component drives suction disc to move upwards, so that film is separated with container portion；Locking assembly is set in fixing seat, and for suction disc to be locked, rotary drive is connect with fixing seat, to drive fixing seat to drive suction disc rotation.The utility model setting jacks component to assist separating, and cracks the liquid tension between film and chip, can effectively improve the success rate of separation, and the time caused by reduction separation failure wastes, raising production capacity.
Description
Technical field
The utility model relates to technical field of solar batteries more particularly to a kind of thin film wafers separators.
Background technique
The thin film wafers separating mechanism of the prior art drives the vacuum chuck in shaft to rotate by motor, to make vacuum
The thin film separation adsorbed on the chip and vacuum chuck of chip fork absorption.Because there is remaining liquid on the surface of film and chip,
After liquid enters vacuum line, suction disc is smaller than theoretical value to the actual suction of film and chip, at the same film and chip it
Between have liquid tension, if liquid tension be greater than separation when suction disc to the tilting force of film, will result in cannot be separately thin
Film and chip, namely separation failure.
Utility model content
(1) technical problems to be solved
There are liquid tension, existing thin film wafers point between the technical problems to be solved in the utility model film and chip
When being not enough to overcome liquid tension from tilting force of the device to film, the problem of separation fails will lead to.
(2) technical solution
In order to solve the above-mentioned technical problem, the utility model provides a kind of thin film wafers separator, including absorption rotation
Turning component, jacking component and locking assembly, the absorption rotary components includes suction disc, fixing seat and rotary drive, the suction
One end of plate is connecting pin, and one end is free end, and the connecting pin and the fixing seat are rotatablely connected, the lower surface of the suction disc
For adsorbing the film on chip；The jacking component is located at the lower section of the free end, and the jacking component drives the suction
Plate moves upwards, so that the film is separated with the container portion；The locking assembly is set in the fixing seat, is used for
The suction disc is locked, the rotary drive is connect with the fixing seat, to drive the fixing seat to drive the suction
Plate rotation.
Wherein, the locking assembly includes latch and the first actuator, and the latch is set to the outer of the suction disc
Side is parallel to the free end to the connecting pin line direction of the suction disc, and the latch, which has, locks the suction disc
Locking state and unlock the unlocked state of the suction disc, first actuator is fixed on the fixing seat, and with it is described
Latch connection, to drive the latch to lock the suction disc or the unlock suction disc.
Wherein, the latch is equipped with locking slot, and the suction disc is equipped with the protrusion matched with the locking slot, institute
Stating the first actuator drives the latch to move forward or back, and makes the protrusion insertion or exits the locking slot.
Wherein, the locking slot is L-type slot, including crosspiece slot and perpendicular section slot, and first actuator drives the locking
When plate advances, described protrude out into the crosspiece slot makes the latch lock the suction disc, the first actuator driving
When the latch retreats, the protrusion, which exits the crosspiece slot, unlocks the suction disc into the perpendicular section slot, the jacking
When component jacks up the suction disc, the protrusion can be moved along the perpendicular section slot.
Wherein, the fixing seat is equipped with overturning seat and/or the first actuator mounting plate, and first actuator is fixed on
On the overturning seat and/or the first actuator mounting plate.
Wherein, the locking assembly further includes mounting plate, and first actuator passes through the mounting plate and the locking
Plate connection, the mounting plate are equipped with guide rod, and the fixing seat is equipped with sliding sleeve, and the guide rod passes axially through the cunning
Set, and can be moved along the sliding sleeve.
Wherein, fixed plate is equipped between the latch and the suction disc, the fixed plate is fixed in the fixing seat,
The fixed plate is equipped with the groove cooperated with the raised position, and the protrusion can move in the groove.
Wherein, the rotary drive includes the second actuator and shaft, and second actuator is connect with the shaft
And the shaft is driven to rotate, the fixing seat is connect with the shaft by overturning seat.
Wherein, the end of the shaft is equipped with the angular transducer for detecting the shaft rotation angle.
Wherein, first actuator is cylinder, and second actuator is motor, and the motor passes through shaft coupling and institute
State shaft connection.
It wherein, further include chip fork, the chip fork is set to the lower section of the suction disc, with chip described in support.
(3) beneficial effect
The above-mentioned technical proposal of the utility model has the advantages that the utility model thin film wafers separator setting top
Component is risen, suction disc adsorbs the film on chip, after the free end of suction disc is jacked up certain altitude upwards by jacking component, suction disc and thin
Film rises an angle together, and the connecting pin of suction disc is connect with fixing seat, when the free end of suction disc tilts certain angle, connection
End can rotate in fixing seat, so that the film adsorbed on suction disc is left chip with this, to make the liquid between film and chip
Tension is abolished, then is fixed the tilting position of suction disc by locking assembly, drives fixing seat rotation by rotary drive, thus
Suction disc rotation is driven to be kept completely separate film from chip, setting jacks component to assist separating, and cracks between film and chip
Liquid tension, can effectively improve the success rate of separation, reduce waste caused by separation failure, improve production capacity.
In addition to the utility model described above solve the technical issues of, composition technical solution technical characteristic and
Have except advantage brought by the technical characteristic of these technical solutions, the other technical characteristics of the utility model and these technologies are special
The advantages of sign is brought, will further illustrate in conjunction with attached drawing.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model embodiment thin film wafers separator；
Fig. 2 is that the locking assembly of the utility model embodiment thin film wafers separator and the structure of absorption rotary components are shown
It is intended to；
Fig. 3 is the locking assembly of the utility model embodiment thin film wafers separator and the structural schematic diagram of suction disc；
Fig. 4 is the structural schematic diagram of the S1 of the utility model embodiment thin film wafers separator in use；
Fig. 5 is the structural schematic diagram of the S2 of the utility model embodiment thin film wafers separator in use；
Fig. 6 is the structural schematic diagram of the S3 of the utility model embodiment thin film wafers separator in use；
Fig. 7 is the structural schematic diagram of the S4 of the utility model embodiment thin film wafers separator in use；
Fig. 8 is the structural schematic diagram of the S5 of the utility model embodiment thin film wafers separator in use.
In figure: 1: jacking component；2: locking assembly；3: absorption rotary components；4: film；5: chip；6: overturning seat；7: angle
Spend sensor；8: fixed plate；9: chip fork；10: rack；21: latch；22: the first actuators；23: mounting plate；31: suction disc；
32: fixing seat；33: rotary drive；31a: free end；31b: connecting pin；81: groove；211: locking slot；231: guide rod；
311: protrusion；321: the first actuator mounting plates；322: sliding sleeve；331: the second actuators；332: shaft.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is a part of the embodiment of the utility model, instead of all the embodiments.Based on the reality in the utility model
Apply example, those of ordinary skill in the art's every other embodiment obtained without making creative work, all
Belong to the range of the utility model protection.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
In addition, in the description of the present invention, unless otherwise indicated, " multiple ", " more ", " multiple groups " are meant that two
A or more than two, " several ", " several ", " several groups " are meant that one or more.
As shown in Figure 1, Figure 2, Figure 3 and Figure 4, thin film wafers separator provided by the embodiment of the utility model, including inhale
Attached rotary components 3, jacking component 1 and locking assembly 2, absorption rotary components 3 include suction disc 31, fixing seat 32 and rotary drive
33, one end of suction disc 31 is connecting pin 31b, and one end is free end 31a, and connecting pin 31b and fixing seat 32 are rotatablely connected, suction disc 31
Lower surface be used to adsorb film 4 on chip 5；Jacking component 1 is located at the lower section of free end 31a, and jacking component 1 drives suction disc
31 move upwards, so that film 4 is partially separated with chip 5, locking assembly 2 is set in fixing seat 32, for locking suction disc 31
It fastens, rotary drive 33 is connect with fixing seat 32, to drive fixing seat 32 that suction disc 31 is driven to rotate.
The utility model thin film wafers separator setting jacking component, suction disc adsorb the film on chip, jack component
After the free end of suction disc is jacked up certain altitude upwards, suction disc and film rise an angle together, the connecting pin of suction disc and solid
Reservation connection, when the free end of suction disc tilts certain angle, connecting pin can rotate in fixing seat, make to adsorb on suction disc with this
Film leave chip, so that the liquid tension between film and chip be made to abolish, then by locking assembly by the tilting of suction disc
Position is fixed, and drives fixing seat rotation by rotary drive, so that suction disc rotation is driven to be kept completely separate film from chip,
Setting jacks component to assist separating, and cracks the liquid tension between film and chip, can effectively improve the success rate of separation,
Waste caused by separation failure is reduced, production capacity is improved.In the present embodiment, the connecting pin of suction disc can be hinged with fixing seat.
Wherein, locking assembly 2 includes latch 21 and the first actuator 22, and latch 21 is along the horizontal plane where suction disc 31
It is set to the outside of suction disc 31, is parallel to the free end 31a of suction disc 31 to connecting pin 31b line direction, latch 21 has lock
The locking state of tight suction disc 31 and the unlocked state of unlock suction disc 31, the first actuator 22 are fixed in fixing seat 32, and with lock
Tight plate 21 connects, to drive latch 21 to lock suction disc 31 or unlock suction disc 31.
In the present embodiment, latch 21 is equipped with locking slot 211, and suction disc 31 is convex equipped with matching with locking slot 211
311 are played, the first actuator 22 is fixed in fixing seat 32, and is connect with latch 21, to drive latch 21 to move forward or back,
Make 311 insertion of protrusion or exits locking slot 211.Latch is set up in suction disc side, this is laterally and free end to connecting pin
The perpendicular horizontal direction in line direction, and there is the locking slot for the male cooperation being arranged with suction disc side on latch, it is pushing up
It after rising the free end certain altitude that component jacks up suction disc, drives latch to advance by the first actuator, makes protrusion insertion locking
In slot, so that latch be made to play fixed function to suction disc, it is integrally formed latch with suction disc, in the driving of rotary drive
Under can rotate together.It drives latch to retreat by the first actuator, protrusion can be made to exit locking slot, make the locking solution of suction disc
It removes, jacking component can jack up the free end of suction disc.The fixed structure that locking assembly changes suction disc is set, as needed individually control
The clamping fixed of suction disc processed and be released from by.
Wherein, locking slot 211 is L-type slot, including crosspiece slot and perpendicular section slot, and the first actuator 22 drives latch 21 to advance
When, protrusion 311, which enters in crosspiece slot, makes latch 21 lock suction disc 31, convex when the first actuator 22 drives latch 21 to retreat
Playing 311 and exiting crosspiece slot and enter perpendicular section slot unlocks suction disc 31, and when jacking component 1 jacks up suction disc 31, protrusion 311 can be along perpendicular section slot
It is mobile.L-type locking slot self-locking plate upper surface extends downwardly setting, and protrusion is embedded in locking slot, when protrusion is still located at locking slot
Crosspiece slot range in, suction disc cannot lift or be only capable of to lift the angle of very little by jacking component, and the first actuator can be straight
It connects driving latch to advance, is caught in protrusion in crosspiece slot, latch locks suction disc；When protrusion is moved out crosspiece along perpendicular section slot
The range of slot, jacking component can jack up suction disc, and rotary drive can drive locking assembly to turn an angle；When the first driving
Component drives latch to advance again, is caught in protrusion in crosspiece slot, and latch locks suction disc.
The present embodiment protrusions are pin, and the two sides of suction disc are equipped with latch, and the two sides of suction disc are respectively provided with 2 pins,
First actuator uses cylinder, and when cylinder stretches out, pin is locked plate limitation, and suction disc is fixed, can be in rotary drive
Drive under rotate；When cylinders retract, pin suction disc is in free state, and the free end of suction disc can be by jacking component top
It rises.
Wherein, fixing seat 32 is equipped with overturning seat 6 and the first actuator mounting plate 321, and the first actuator 22 is fixed on the
On one actuator mounting plate 321.In the present embodiment, overturning seat and the first actuator mounting plate, the first driving are set in fixing seat
Part is mounted in fixing seat by the first actuator mounting plate, and fixing seat, locking assembly and suction disc are formed one, is driven in rotation
Under the driving of moving part, suction disc, locking assembly rotate together.
Wherein, locking assembly 2 further includes mounting plate 23, and the first actuator 22 is connect by mounting plate 23 with latch 21,
Mounting plate 23 is equipped with guide rod 231, and fixing seat 32 is equipped with sliding sleeve 322, and guide rod 231 passes axially through sliding sleeve 322, and can
It is moved along sliding sleeve 322.Latch is connect by mounting plate with the first actuator, is the connection installation of the first actuator in the present embodiment
In the middle part of plate, mounting plate another side connects two latch.Mounting plate is equipped with guide rod, can move in the sliding sleeve in fixing seat
It is dynamic, in the movement of the first actuator drive installation plate, play the role of guide support for mounting plate, latch, reduces mobile offset
And error.
Wherein, fixed plate 8 is equipped between latch 21 and suction disc 31, fixed plate 8 is fixed in fixing seat 32, fixed plate 8
It is equipped with the groove 81 with raised 311 positions cooperation, protrusion 311 can move in groove 81.It is fluted in fixed plate, suction disc side
Protrusion on face extends in the locking slot of latch by groove, the groove only vertical direction downward by the upper surface of fixed plate
Setting plays the role of motion guide limit to protrusion.
Wherein, rotary drive 33 includes the second actuator 331 and shaft 332, and the second actuator 331 connects with shaft 332
It connects and drive shaft 332 rotates, fixing seat 32 is connect with shaft 332 by overturning seat 6.The second actuator is electricity in the present embodiment
Machine is connect by shaft coupling with shaft, and overturning seat one end is connected and fixed seat, and the other end connects shaft, and motor-driven rotatable shaft rotates,
To drive overturning seat and fixing seat to rotate.One overturning seat of motor driven can also use the multiple overturning seats of motor driven,
Multi-disc film and chip are realized while being separated, production capacity is improved.
Wherein, the end of shaft 332 is equipped with the angular transducer 7 that detection shaft 332 rotates angle.Angular transducer can be with
The rotational angle of shaft, that is, rotation angle of the suction disc under the driving of the second actuator are detected, convenient for the second actuator of monitoring
Driving situation, according to the testing result of angular transducer control the second actuator driving rotate angle.
Wherein, the utility model thin film wafers separator further includes chip fork 9, and chip fork 9 is set under suction disc 31
Side, with support chip 5.After chip after etching has interior take out from wet process column by Qu Pian mechanism or the separator, it is placed on
Between suction disc and chip fork, after vacuum air-channel is opened, vacuum suction is formed between suction disc and film, between chip fork and chip
Form vacuum suction.
In use, the rack 10 of the present embodiment be it is fixed, the straight line mould group of rack 10 can also be replaced, realize separation
Device has interior automatic sheet-fetching from wet process column.It jacks component and uses jacking cylinder, jacking cylinder is adjusted according to different chips in time
Top lifting height and speed, reach better thin film separation effect.
S1, as shown in figure 4, suction disc and chip fork clamp film and chip, suction disc after taking out chip in wet process column tool
Horizontality, the component that is locked locking, cannot overturn.
S2 drives mounting plate and latch to retract, the protrusion on suction disc is cancelled limit as shown in figure 5, locking cylinder retracts
The connecting pin of system, suction disc can be rotated with the junction of fixing seat.
S3 drives suction disc and film certain around shaft rotation together as shown in fig. 6, jacking cylinder stretches out certain length
Angle, the tension between film and chip is cracked at this time, the two separation.
S4 drives latch rotation angle identical as suction disc rotation angle, locks gas as shown in fig. 7, motor driven rotates
Cylinder stretches out, and drives mounting plate and latch to stretch out, is in the protrusion on suction disc in the locking slot of latch, limits suction again
The rotation of plate.
S5 drives suction disc rotation as shown in figure 8, then motor rotates, and jacking cylinder retracts original position, finally realizes film
It is separated with the chip of chip, facilitates and carry out following process.
The film of the application can be the film grown on chip, and suction disc directly adsorbs the film grown on chip, by it
By being removed on chip, the transfer substrate film used during can also being removed for the film and chip grown on chip, such as
PET film, PET film are located at the side of the separate chip of the film grown on chip, and the area of the area ratio chip of PET film is big, when
The PET film on component jack-up suction disc free end and free end is jacked, rotary drive drives suction disc overturning, to make PET film band
Epitaxial growth film by being removed on chip.
In conclusion the utility model thin film wafers separator setting jacking component, suction disc adsorb the film on chip,
After the free end of suction disc is jacked up certain altitude upwards by jacking component, suction disc and film rise an angle, the company of suction disc together
It connects end to connect with fixing seat, when the free end of suction disc tilts certain angle, connecting pin can rotate in fixing seat, make to inhale with this
The film adsorbed on plate leaves chip, so that the liquid tension between film and chip be made to abolish, then will be inhaled by locking assembly
The tilting position of plate is fixed, and drives fixing seat rotation by rotary drive, to drive suction disc rotation by film from chip
It is kept completely separate, setting jacks component to assist separating, and cracks the liquid tension between film and chip, can effectively improve separation
Success rate, reduce separation failure caused by waste, improve production capacity.
Finally, it should be noted that above embodiments are only to illustrate the technical solution of the utility model, rather than its limitations；
Although the utility model is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that:
It is still possible to modify the technical solutions described in the foregoing embodiments, or part of technical characteristic is carried out etc.
With replacement；And these are modified or replaceed, various embodiments of the utility model technology that it does not separate the essence of the corresponding technical solution
The spirit and scope of scheme.
Claims (10)
1. a kind of thin film wafers separator, it is characterised in that: including absorption rotary components, jacking component and locking assembly, institute
Stating absorption rotary components includes suction disc, fixing seat and rotary drive, and one end of the suction disc is connecting pin, and one end is freely
End, the connecting pin and the fixing seat are rotatablely connected, and the lower surface of the suction disc is used to adsorb the film on chip；The top
The lower section that component is located at the free end is risen, the jacking component drives the suction disc to move upwards, so that the film and institute
State container portion separation；The locking assembly is set in the fixing seat, for the suction disc to be locked, the rotation
Actuator is connect with the fixing seat, to drive the fixing seat to drive the suction disc rotation.
2. thin film wafers separator according to claim 1, it is characterised in that: the locking assembly include latch and
First actuator, the latch are set to the outside of the suction disc, are parallel to the free end to the company of the suction disc
End line direction is connect, the latch has the locking state for locking the suction disc and unlocks the unlocked state of the suction disc, institute
It is fixed on the fixing seat to state the first actuator, and is connect with the latch, to drive the latch to lock the suction
Plate or the unlock suction disc.
3. thin film wafers separator according to claim 2, it is characterised in that: the latch is equipped with locking slot,
The suction disc is equipped with the protrusion that matches with the locking slot, first actuator drive the latch advance or after
It moves back, make the protrusion insertion or exits the locking slot.
4. thin film wafers separator according to claim 3, it is characterised in that: the locking slot is L-type slot, including cross
Section slot and perpendicular section slot, when first actuator drives the latch to advance, described protrude out into the crosspiece slot makes institute
It states latch and locks the suction disc, when first actuator drives the latch to retreat, the protrusion exits the crosspiece
Slot, which enters the perpendicular section slot, unlocks the suction disc, and when the jacking component jacks up the suction disc, the protrusion can be along described perpendicular
Section slot is mobile.
5. thin film wafers separator according to claim 2, it is characterised in that: the fixing seat is equipped with overturning seat
And/or the first actuator mounting plate, first actuator are fixed on the overturning seat and/or the first actuator mounting plate
On.
6. thin film wafers separator according to claim 2, it is characterised in that: the locking assembly further includes installation
Plate, first actuator are connect by the mounting plate with the latch, and the mounting plate is equipped with guide rod, described solid
Reservation is equipped with sliding sleeve, and the guide rod passes axially through the sliding sleeve, and can move along the sliding sleeve.
7. thin film wafers separator according to claim 3, it is characterised in that: between the latch and the suction disc
Equipped with fixed plate, the fixed plate is fixed in the fixing seat, and the fixed plate, which is equipped with, to be cooperated with the raised position
Groove, the protrusion can move in the groove.
8. thin film wafers separator according to claim 1, it is characterised in that: the rotary drive includes the second drive
Moving part and shaft, second actuator connect with the shaft and the shaft are driven to rotate, the fixing seat with described turn
Axis is connected by overturning seat.
9. thin film wafers separator according to claim 8, it is characterised in that: the end of the shaft is equipped with detection institute
State the angular transducer of shaft rotation angle.
10. thin film wafers separator according to claim 1, it is characterised in that: it further include chip fork, the chip fork
It is set to the lower section of the suction disc, with chip described in support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822235096.6U CN209571389U (en) | 2018-12-28 | 2018-12-28 | A kind of thin film wafers separator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822235096.6U CN209571389U (en) | 2018-12-28 | 2018-12-28 | A kind of thin film wafers separator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209571389U true CN209571389U (en) | 2019-11-01 |
Family
ID=68331073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822235096.6U Active CN209571389U (en) | 2018-12-28 | 2018-12-28 | A kind of thin film wafers separator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209571389U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113299576A (en) * | 2020-02-21 | 2021-08-24 | 济南晶正电子科技有限公司 | Mechanical film separating device |
-
2018
- 2018-12-28 CN CN201822235096.6U patent/CN209571389U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113299576A (en) * | 2020-02-21 | 2021-08-24 | 济南晶正电子科技有限公司 | Mechanical film separating device |
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Effective date of registration: 20191128 Address after: 518112 Room 403, unit 2, building C, Dongfang Shengshi, Jinpai community, Buji street, Longgang District, Shenzhen City, Guangdong Province Patentee after: Shenzhen yongshenglong Technology Co., Ltd Address before: 102200 room A129-1, Zhongxing Road, Changping District science and Technology Park, Beijing, China, 10 Patentee before: Dongtai Hi-Tech Equipment Technology Co., Ltd. |
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| TR01 | Transfer of patent right |
Effective date of registration: 20210225 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room 403, unit 2, building C, Dongfang Shengshi, Jinpai community, Buji street, Longgang District, Shenzhen, Guangdong 518112 Patentee before: Shenzhen yongshenglong Technology Co.,Ltd. |
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