CN209558927U - A kind of practical diffusion furnace pressure sensor protection system - Google Patents
A kind of practical diffusion furnace pressure sensor protection system Download PDFInfo
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- CN209558927U CN209558927U CN201920143849.2U CN201920143849U CN209558927U CN 209558927 U CN209558927 U CN 209558927U CN 201920143849 U CN201920143849 U CN 201920143849U CN 209558927 U CN209558927 U CN 209558927U
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- pressure sensor
- nitrogen inlet
- type pipeline
- detection chambers
- diffusion furnace
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a kind of practical diffusion furnace pressure sensors to protect system; belong to photovoltaic apparatus production technical field; purpose is that the acid tail gas for solving the problem of that prior art generates easily causes the caused production process of corrosion and damage cancel closedown occur pressure sensor electrical structure.It includes the detection chambers of pressure sensor and pressure sensor lower part, it is additionally provided with T-type pipeline, the upper end of the vertical segment of T-type pipeline is connected to the opening of detection chambers lower end, the lower end of the vertical segment of T-type pipeline offers vacuum detecting mouth, nitrogen inlet channel is offered in the horizontal segment of T-type pipeline, nitrogen inlet duct is provided in the vertical segment of T-type pipeline, one end of nitrogen inlet duct is protruded into detection chambers, the other end of nitrogen inlet duct is connected to nitrogen inlet channel, is also equipped with pneumatic operated valve in the horizontal segment of T-type pipeline.The utility model is protected suitable for diffusion furnace pressure sensor.
Description
Technical field
The utility model belongs to photovoltaic apparatus production technical field, and in particular to a kind of practical diffusion furnace pressure sensor
Protection system.
Background technique
With the rapid development of photovoltaic industry, solar energy and photovoltaic cell goods producer's is continuously increased, most enterprise
The cost control of manufacture is required to become higher and higher, people tend to the capital equipment of solar-energy photo-voltaic cell production
Production domesticization, the research utility model of equipment composition components and manufacturing cost tend to gradually reduce, succinct flexible operational
It can be at the principal concern for numerous battery product manufacturers.
For diffusion furnace, especially low pressure diffusion furnace, the pressure detecting inside boiler tube especially always because same
Inside a boiler tube, chamber inner volume is constant, and in the case that temperature is constant, pressure size and phosphorus atoms diffusion rate are directly proportional, is
The phosphorus atom concentration that silicon chip surface can be made to spread is uniform as far as possible, using low pressure diffusion then at inexorable trend, and furnace
The detection of pipe internal pressure, directly influences the transformation efficiency of yield made of product and later period cell piece；Meanwhile vacuum system exists
While vacuumizing, channel interior can be will test and be also pumped into environment under low pressure, the sour gas that boiler tube internal-response generates can be broken
It when vacuum, is acted on down by atmospheric pressure, returns to pressure sensor inside, pressure sensor is chronically at acidic environment, can be right
Sensor internal electronic component causes to corrode, and leads to sensor degradation, if abnormal in pressure sensor detection feedback parameter,
Boiler tube Product Process failure can be then directly resulted in, a large amount of defective products and human cost waste are generated.Meanwhile diffusion furnace producer exists
When vacuum pump type selecting, the development reasons of domestic vacuum system are limited to, variable frequency pump is generally used external famous brand, this just makes
At the feature that the spare parts purchasing period is long, once pressure sensor spare part damages, and without spare part in the case where, then can at least make
At 4-8 weeks downtime, production capacity and temporal huge waste are caused.
Utility model content
The purpose of this utility model is that: a kind of practical diffusion furnace pressure sensor protection system is provided, is solved existing
The acid tail gas that technique generates easily causes corrosion and damage to pressure sensor electrical structure, and abnormal stop occurs in caused production process
The problem of machine.
The technical solution adopted in the utility model is as follows:
A kind of practical diffusion furnace pressure sensor protection system, the inspection including pressure sensor and pressure sensor lower part
Chamber is surveyed, is additionally provided with T-type pipeline, the upper end of the vertical segment of the T-type pipeline is connected to the opening of detection chambers lower end, institute
The lower end for stating the vertical segment of T-type pipeline offers vacuum detecting mouth, and it is logical that nitrogen air inlet is offered in the horizontal segment of the T-type pipeline
Road, nitrogen inlet duct is provided in the vertical segment of the T-type pipeline, and one end of the nitrogen inlet duct passes through detection chambers lower end
Opening and protrude into detection chambers, the other end of the nitrogen inlet duct is connected to nitrogen inlet channel, the T-type pipeline
Horizontal segment on be also equipped with for control nitrogen inlet channel opening and closing pneumatic operated valve.
Further, the nitrogen inlet duct is L-type air inlet pipe.
Further, the vertical segment length of the L-type air inlet pipe is greater than the horizontal section length of L-type air inlet pipe.
In conclusion by adopting the above-described technical solution, the beneficial effects of the utility model are:
1, in the utility model, by improving gas path pipe, increase a nitrogen inlet duct, In in pressure sensor lower end
When the door opened taking-up silicon wafer of boiler tube, pneumatic operated valve is opened, blows out nitrogen through nitrogen inlet duct again from nitrogen inlet channel, thus
Detection chambers are purged, sour gas inside discharge detection chambers, to reduce corruption of the sour gas to pressure sensor
Erosion, effectively protects pressure sensor, improves the service life of pressure sensor, solves prior art generation
Acid tail gas easily causes corrosion and damage to pressure sensor electrical structure, and the problem of cancel closedown occurs in caused production process.
Improve each spare part be made waste, manpower waste and long-time delay machine caused by capacity loss the phenomenon that.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is Tthe utility model system structure chart；
Marked in the figure: 1- detection chambers, 2- pressure sensor, 3-T type pipeline, 31- vertical segment, 32- horizontal segment, 4- vacuum
Detection mouth, 5- nitrogen inlet channel, 6- nitrogen inlet duct.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only to explain this
Utility model is not used to limit the utility model.
A kind of practical diffusion furnace pressure sensor protection system, the inspection including pressure sensor and pressure sensor lower part
Chamber is surveyed, is additionally provided with T-type pipeline, the upper end of the vertical segment of the T-type pipeline is connected to the opening of detection chambers lower end, institute
The lower end for stating the vertical segment of T-type pipeline offers vacuum detecting mouth, and it is logical that nitrogen air inlet is offered in the horizontal segment of the T-type pipeline
Road, nitrogen inlet duct is provided in the vertical segment of the T-type pipeline, and one end of the nitrogen inlet duct passes through detection chambers lower end
Opening and protrude into detection chambers, the other end of the nitrogen inlet duct is connected to nitrogen inlet channel, the T-type pipeline
Horizontal segment on be also equipped with for control nitrogen inlet channel opening and closing pneumatic operated valve.
Further, the nitrogen inlet duct is L-type air inlet pipe.
Further, the vertical segment length of the L-type air inlet pipe is greater than the horizontal section length of L-type air inlet pipe.
The utility model is in implementation process, by improving gas path pipe, increases a nitrogen in pressure sensor lower end
Air inlet pipe opens pneumatic operated valve, makes nitrogen from nitrogen inlet channel again through nitrogen inlet duct in the door opened taking-up silicon wafer of boiler tube
Blowout, to purge to detection chambers, sour gas inside discharge detection chambers passes pressure to reduce sour gas
The corrosion of sensor, effectively protects pressure sensor, improves the service life of pressure sensor, solves existing work
The acid tail gas that skill generates easily causes corrosion and damage to pressure sensor electrical structure, and cancel closedown occurs in caused production process
The problem of.Improve each spare part be made waste, manpower waste and long-time delay machine caused by capacity loss the phenomenon that.
Embodiment 1
A kind of practical diffusion furnace pressure sensor protection system, the inspection including pressure sensor and pressure sensor lower part
Chamber is surveyed, is additionally provided with T-type pipeline, the upper end of the vertical segment of the T-type pipeline is connected to the opening of detection chambers lower end, institute
The lower end for stating the vertical segment of T-type pipeline offers vacuum detecting mouth, and it is logical that nitrogen air inlet is offered in the horizontal segment of the T-type pipeline
Road, nitrogen inlet duct is provided in the vertical segment of the T-type pipeline, and one end of the nitrogen inlet duct passes through detection chambers lower end
Opening and protrude into detection chambers, the other end of the nitrogen inlet duct is connected to nitrogen inlet channel, the T-type pipeline
Horizontal segment on be also equipped with for control nitrogen inlet channel opening and closing pneumatic operated valve.
By improving gas path pipe, increases a nitrogen inlet duct in pressure sensor lower end, broken using in boiler tube chamber
After the completion of vacuum, in the door opened taking-up silicon wafer of boiler tube, the valve V12 action signal being communicated with the atmosphere is opened, its signal is taken
Pneumatic operated valve V14 is opened, blows out nitrogen through nitrogen inlet duct again from nitrogen inlet channel, so that detection chambers are purged,
Sour gas inside detection chambers is discharged, so that corrosion of the sour gas to pressure sensor is reduced, effectively to pressure sensing
Device is protected, and the service life of pressure sensor is improved, and the acid tail gas for solving prior art generation easily passes pressure
Sensor electrical structure causes corrosion and damage, and the problem of cancel closedown occurs in caused production process.It improves each spare part and wave is made
Take, manpower waste and long-time delay machine caused by capacity loss the phenomenon that.
Embodiment 2
On the basis of embodiment 1, the nitrogen inlet duct is L-type air inlet pipe.
Embodiment 3
On the basis of the above embodiments, the vertical segment length of the L-type air inlet pipe is greater than the horizontal segment length of L-type air inlet pipe
Degree.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (3)
1. a kind of practical diffusion furnace pressure sensor protects system, which is characterized in that passed including pressure sensor (2) and pressure
The detection chambers (1) of sensor (2) lower part, are additionally provided with T-type pipeline (3), the upper end of the vertical segment (31) of the T-type pipeline (3)
It is connected to the opening of detection chambers (1) lower end, the lower end of the vertical segment (31) of the T-type pipeline (3) offers vacuum detecting
Mouth (4), the horizontal segment (32) of the T-type pipeline (3) is interior to be offered nitrogen inlet channel (5), the vertical tube of the T-type pipeline (3)
It is provided with nitrogen inlet duct (6) in section (31), one end of the nitrogen inlet duct (6) passes through the opening of detection chambers (1) lower end
Place simultaneously protrudes into detection chambers (1), and the other end of the nitrogen inlet duct (6) is connected to nitrogen inlet channel (5), the T-type
The pneumatic operated valve for controlling nitrogen inlet channel (5) opening and closing is also equipped in the horizontal segment (32) of pipeline (3).
2. the practical diffusion furnace pressure sensor of one kind described in accordance with the claim 1 protects system, which is characterized in that the nitrogen
Gas air inlet pipe (6) is L-type air inlet pipe.
3. a kind of practical diffusion furnace pressure sensor protects system according to claim 2, which is characterized in that the L
The vertical segment length of type air inlet pipe is greater than the horizontal section length of L-type air inlet pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920143849.2U CN209558927U (en) | 2019-01-28 | 2019-01-28 | A kind of practical diffusion furnace pressure sensor protection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920143849.2U CN209558927U (en) | 2019-01-28 | 2019-01-28 | A kind of practical diffusion furnace pressure sensor protection system |
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| Publication Number | Publication Date |
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| CN209558927U true CN209558927U (en) | 2019-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920143849.2U Active CN209558927U (en) | 2019-01-28 | 2019-01-28 | A kind of practical diffusion furnace pressure sensor protection system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109654899A (en) * | 2019-01-28 | 2019-04-19 | 通威太阳能（成都）有限公司 | A kind of practical diffusion furnace pressure sensor protection system |
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2019
- 2019-01-28 CN CN201920143849.2U patent/CN209558927U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109654899A (en) * | 2019-01-28 | 2019-04-19 | 通威太阳能（成都）有限公司 | A kind of practical diffusion furnace pressure sensor protection system |
| CN109654899B (en) * | 2019-01-28 | 2024-03-29 | 通威太阳能（成都）有限公司 | Practical diffusion furnace pressure sensor protection system |
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