CN209502195U - Ultrasonic transducer - Google Patents
Ultrasonic transducer Download PDFInfo
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- CN209502195U CN209502195U CN201822049456.3U CN201822049456U CN209502195U CN 209502195 U CN209502195 U CN 209502195U CN 201822049456 U CN201822049456 U CN 201822049456U CN 209502195 U CN209502195 U CN 209502195U
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Abstract
This application discloses a kind of ultrasonic transducers, the ultrasonic transducer includes: the first ultrasound transducer array, and the first ultrasound transducer array is phase array transducer array comprising multiple independent first array elements, multiple independent first array elements are in planar arrangement, for detecting plane；Second ultrasound transducer array, second ultrasound transducer array is convex array transducer array, it includes multiple independent second array elements, multiple independent second array element arrangements in curved surface, for detecting curved surface, it is able to detect the defect of irregular shape workpiece by the ultrasonic transducer, improves the sensitivity of detection.
Description
Technical field
This application involves transducer technology fields, more particularly to a kind of ultrasonic transducer.
Background technique
In terms of ultrasonic non-destructive inspection techniques, the common ultrasonic probe frequency that detects is lower, much within 10MHz,
Middle single probe occupies the majority, and part probe is phased array probe.The design of common ultrasonic phase array probe is based on Huygen's principle,
Popping one's head in, there is the array elements for being in the azimuth direction in one dimensional arrangement, mutually indepedent between each array element, according to certain electronic delay
Each array element is motivated, to form a new ultrasonic wave fronts, by applying different electronic delays, can to surpass
Beam of sound deflects, to meet various detection needs.
Present inventor has found in long-term research, when workpiece to be detected there are cylinder hole and needs to detect column
When fine defects near face, existing frequency probe is not high enough, and by other surfaces on workpiece ultrasonic wave can only be arrived
Up near cylinder, to be detected indirectly to the defect near cylinder, that is to say, that existing sensor sensitivity is not high enough,
And resolution ratio is inadequate.
Utility model content
In view of this, the application provides a kind of ultrasonic transducer, it is able to detect the workpiece of irregular shape, detection is provided
Sensitivity.
In order to solve the above technical problems, the technical solution that the application uses is: providing a kind of ultrasonic transducer, wrap
It includes:
First ultrasound transducer array, first ultrasound transducer array are phase array transducer array comprising more
A independent first array element, multiple independent first array elements are in planar arrangement, for detecting plane；
Second ultrasound transducer array, second ultrasound transducer array are convex array transducer array comprising multiple
Independent second array element, multiple independent second array element arrangements in curved surface, for detecting curved surface.
The beneficial effect of the application is: the ultrasonic transducer in the application includes the phase array transducer battle array in planar arrangement
Column and the convex array transducer array of curved surface arrangement, can detect the defect in plane and curved surface simultaneously, be able to detect shape not
The workpiece of rule can be improved the sensitivity of detection compared with prior art.
Detailed description of the invention
In order to more clearly explain the technical solutions in the embodiments of the present application, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, the drawings in the following description are only some examples of the present application, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.Wherein:
Fig. 1 is the structural schematic diagram of one embodiment of the application ultrasonic transducer；
Fig. 2 is cross-sectional view of the ultrasonic transducer in Fig. 1 along the direction A-A；
Fig. 3 is cross-sectional view of the ultrasonic transducer in Fig. 1 along the direction B-B.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of embodiments of the present application, rather than whole embodiments.Based on this
Embodiment in application, those of ordinary skill in the art are obtained every other under the premise of not making creative labor
Embodiment shall fall in the protection scope of this application.
It is the structural schematic diagram of one embodiment of the application ultrasonic transducer to Fig. 3, Fig. 1 refering to fig. 1, Fig. 2 is in Fig. 1
For ultrasonic transducer along the cross-sectional view in the direction A-A, Fig. 3 is cross-sectional view of the ultrasonic transducer in Fig. 1 along the direction B-B.The ultrasound is changed
Energy device 100 includes the first ultrasound transducer array 10 and the second ultrasound transducer array 20, the first ultrasound transducer array 10
For phase array transducer array 10, the second ultrasound transducer array 20 is convex array transducer array 20.
In the prior art, phase array transducer array 10 is used in phased array probe, and convex array transducer array 20 is used in
In convex array probe.
First ultrasound transducer array 10 is for detecting plane, including multiple independent first array elements 11, and plurality of the
One array element 11 is in planar arrangement, wherein the quantity of the first array element 11 can be to be multiple, for example, 5,8 etc.；Second ultrasound is changed
Energy device array 20 is for detecting curved surface, including multiple independent second array elements 21, multiple independent second array elements 21 row in curved surface
Cloth, wherein the quantity of the second array element 21 be also it is multiple, such as 64,128,256 etc., in this application to the first array element 11
With no restrictions with the quantity of the second array element 21.
First ultrasound transducer array 10 is different with the working principle of the second ultrasound transducer array 20, the first ultrasonic transduction
Device array 10 applies independent pumping signal to each first array element 11 at work, according to certain delay；Second ultrasound is changed
Can device array 20 at work, it is assumed that it includes 128 the second array elements 21, if 1~No. 8 second array element 21 is 1 work song battle array, 2~9
Number the second array element is 2 work song battle arrays, and 3~No. 10 second array elements are that 3 work song battle array ..., 121~No. 128 second array elements are 121 work songs
Battle array, the sequence of entire scan period are that ultrasonic wave is received in 1 work song paroxysm, and 2 work song battle arrays go completing hair, receiving ultrasonic wave for task, then
It is the work that 3 work song battle arrays carry out that hair receives ultrasonic wave, sequentially goes on, after 121 work song battle arrays complete hair receipts ultrasonic wave task,
Complete a scan period.It should be noted that the scanning mode of the second ultrasound transducer array 20 can also be that interval is swept
Mode is retouched, herein with no restrictions.In the prior art, convex array transducer array 20 is generally used on medical instrument, can be right
Tissue is imaged, and tissue is soft, checks equipment when checking and after human contact, tissue can generate shape
Become, tissue can be considered curved surface at this time, while the wave surface that convex array transducer array 20 generates also is curved surface, that is to say, that
Convex array transducer array 20 works well to Curved dectection.
Therefore in the present embodiment, set ultrasonic transducer 100 to include the phased array transducing for being used to detect plane
Device array 10 and convex array transducer array 20 for detecting curved surface, it is in irregular shape such as to be detected when workpiece to be detected
Workpiece both includes plane, and when also including curved surface, the first ultrasound transducer array 10 can detecte the planar section on the workpiece, the
Two ultrasound transducer arrays 20 can detecte the curvature portion on the workpiece, that is to say, that compared with prior art, using the application
In ultrasonic transducer 100 can directly detect the curved surface on workpiece, and do not have to using the method detected indirectly, therefore can mention
The sensitivity of high detection.
With continued reference to Fig. 1, multiple independent first array elements 11 are arranged into disc 12, made of multiple second array elements 21 are arranged
Curved surface 22 surrounds the circumference of disc 12 and extends to a side direction of vertical disc 12, i.e. the side wall of curved surface 22 from disc 12 is vertical
Thirty years of age.
Specifically, the ultrasonic transducer 100 of the first ultrasound transducer array 10 and the second ultrasound transducer array 20 composition
It is cylindrical.When, there are when cylinder hole, which can go deep into the cylinder hole being detected on workpiece to be detected,
Wherein the first ultrasound transducer array 10 can detecte the defect of the cylinder hole bottom surface, and the second ultrasound transducer array 20 can be with
Detect the defect of the cylinder hole cylinder.
Wherein, curved surface 22 made of multiple second array elements 21 are arranged surrounds the circumference of disc 12, thus on detection workpiece
Cylinder hole when, the second ultrasound transducer array 20 can disposably detect the entire cylinder of cylinder hole.Certainly
In other embodiments, the curved surface 22 that multiple second array elements 21 are formed can also partially surround what multiple first array elements 11 were formed
Disc 12 can be completed to whole in cylinder hole at this time when detecting cylinder hole by way of rotary ultrasonic energy converter 100
The detection of a cylinder.
Wherein, multiple first array elements 21 are distributed in a ring according to concentric circles, and multiple second array elements 22 are side by side and along separate circle
The direction in face 12 extends, i.e., the extending direction of multiple second array elements 22 is vertical with disc 12.Certainly in other embodiments, more
A first array element 11 can also be arranged along the diametrical direction of disc 12 side by side, and multiple second array elements 22 can also be circumferentially square side by side
To setting, i.e., single second array element 21 is an annular, for the arranged relative of the first array element 11, the second array element 22 in the application
Mode is with no restrictions.
With continued reference to Fig. 1, ultrasonic transducer 100 further includes substrate 30, substrate 30 around disc 12 circumference and to vertical
One side direction of disc 12 extends, wherein the second ultrasound transducer array 20 is fixed on substrate on 30, that is, solid by substrate 30
Fixed, the first ultrasound transducer array 10 of support and the second ultrasound transducer array 20.
Wherein, the material of substrate 30 can be homogenous material, be also possible to composite material.Specifically, material can be
Metal, polyimides etc. have preferable material flexible, have preferable flexile epoxy resin after being also possible to solidification.It is answered one
It is electrically connected with that can be made on substrate 30 in scene with the first ultrasound transducer array 10 and the second ultrasound transducer array 20
Ground wire.
Referring to Fig.2, the first ultrasound transducer array 11 includes the first back sheet 111, covers the first of the first back sheet 111
Transducer layer 112 and the first matching layer 113 for covering first transducer layer 112, while multiple first notch 114 are from first
The first back sheet 111 is extended to layer 113 and forms multiple independent first array elements 11.
In the preparation, flowable, curable backing layer and first transducer layer can be allowed by way of perfusion
By in adhesive bonding to first transducer layer 112 after 112 combinations or the first back sheet of pre-production 111.First back
111 acoustic impedance of lining is uniformly or along sound wave direction of the launch gradual change.
Wherein, the first back sheet 111 is solid layer 111, is filled with solid filling or gaseous state in multiple first notch 114
Filler is filled with solid filling in multiple first notch 114 or, the first back sheet 111 is gas blanket 111.
Specifically, the material of the first back sheet 111 is homogenous material or composite material, and homogenous material includes but is not limited to gold
Category, epoxy resin, zirconium oxide, aluminium oxide etc., composite material include being suspended in epoxy resin or other flowable, curable liquids
Microballoon in state substance, the material of the microballoon can be metal, silica, aluminium oxide, zirconium oxide, rubber or other materials,
The microballoon can be the hollow solid microballoon including surrounding or encapsulating gas (gases such as air or the hydrocarbon gas), be also possible to solid solid
Body microballoon, the microballoon can in different proportions with epoxy resin or mixed with polymers, so that obtaining has different consistency and close
The composite material of degree.The material filled in multiple first notch 114 can be homogenous material, be also possible to composite material, single
Material includes but is not limited to the curable filler such as epoxy resin, silicon rubber, and composite material includes being suspended in epoxy resin
Or other are flowable, the microballoon in curable liquid substance, the material of the microballoon can be metal, silica, aluminium oxide,
Zirconium oxide, rubber or other materials, the microballoon can be including surrounding or encapsulating the hollow of gas (gases such as air or the hydrocarbon gas)
Microspheres with solid is also possible to solid microballoon, the microballoon can in different proportions with epoxy resin or mixed with polymers, from
And obtain the composite material with different consistency and density.It can also be filled filled with gaseous state in plurality of first notch 114
Object, the gaseous state filler filled at this time can be a kind of gas, be also possible to mixed gas.It is worth noting that, when first
Back sheet 111 is gas blanket 111, and at this time in order to fix multiple first array elements 11, multiple first notch 114 interior must be filled with
Solid filling.
The width of plurality of first notch 114 is roughly the same, and width is between 10-100 μm, and multiple first notch
Filler acoustic impedance in 114 is uniformly or along sound wave direction of the launch gradual change.
First transducer layer 112 includes that one or more is configured to emit with (hundred megahertzs or more) of center frequency of operation
The element of transducer of ultrasonic energy.In an application scenarios, first transducer layer 112 is film layer, and material is
K0.5Na0.5NbO3/Bi0.5Na0.5TiO3(KNN/BNT, potassium-sodium niobate/bismuth-sodium titanate), LiNbO3(lithium niobate),
Ba0.5Na0.5TiO3One of (BNT, barium titanate sodium), can be very thin by first transducer layer 112 prepared by these materials, leads to
Chang Houdu only has tens microns, and the ultrasonic wave of very high frequency can be generated in vibration, can reach hundred megahertzs or more,
To can be improved the resolution ratio of ultrasonic transducer 100, in an application scenarios, first transducer layer 112 compared with prior art
It is made by using sol-gel method.Certainly in other application scenarios, first transducer layer 112 can also be other
The material of piezoelectric membrane can be made, or prepared using other preparation processes, herein with no restrictions.
First matching layer 113 is less than the acoustic impedance of first transducer layer 112, simultaneously because the first transducing in present embodiment
The ultrasonic frequency that device layer 112 generates is very high, and the thickness of the first matching layer 113 can very little.In an application scenarios, it can pass through
Including but not limited to the technique of vacuum coating directly forms the first matching layer 113 on first transducer layer 112, or passes through
The first matching layer 113 being prepared separately is adhered to first transducer using the curable adhesive of the types such as epoxy resin
On the surface of layer 112.
In an application scenarios, the first matching layer 113 includes multiple sub- matching layers being stacked, with two stratons in Fig. 2
Matching layer 1131,1132 is illustrated.Wherein, along the sound wave direction of the launch, the acoustic impedance of the sub- matching layer of multilayer is gradually reduced,
That is acoustic impedance of the acoustic impedance in the middle layer Fig. 2 1132 less than layer 1131.
The first back sheet 111, first transducer layer 112 and the first matching layer 113 combine after, using photoetching,
The technique of chemical etching, ion etching or blade machine cuts forms from the first matching layer 113 and extends to the first back sheet 111
Multiple first notch 114 and form multiple independent first array elements 11.In an application scenarios, multiple first notch 114 prolong
The first back sheet 111 is extended to, but not through the first back sheet 111.
Wherein, to guarantee that the electrical impedance of multiple first array elements 11 is suitable, the sound wave emission area phase of multiple first array elements 11
Together.
Refering to Fig. 3, the second ultrasound transducer array 20 includes the second back sheet 211 being fixed on substrate 30, covering the
The second transducer layers 212 of two back sheets 211 and the second matching layer 213 for covering second transducer layer 212, while multiple the
Two incisions 214 extend to the second back sheet 211 from the second matching layer 213 and form multiple independent second array elements 21.
Second ultrasound transducer array 20 is similar with the preparation method of the first ultrasound transducer array 10, herein no longer in detail
It states.Wherein the second back sheet 211 in the second ultrasound transducer array 20, second transducer layer 212 and the second matching layer 213 with
The effect pair of first back sheet 111, first transducer layer 112 and the first matching layer 113 in first ultrasound transducer array 10
Answer identical, and the range that the range of choice of every layer material is selected with layer material every in the first ultrasound transducer array 10 is generally corresponding to
It is identical, it is detailed in reference can be made to above-mentioned, details are not described herein.The wherein attribute of each layer of the second ultrasound transducer array 20, thickness and
Attribute, the thickness of each layer of one ultrasound transducer array 10 can be the same or different, such as when the first ultrasound transducer array
10 with the frequency difference of the second ultrasound transducer array 20 transmitting ultrasonic wave when, first transducer layer 112 and second transducer layer
212 material properties, thickness may be different, thus material properties, the thickness of the first back sheet 111 and the second back sheet 211
Different, material properties, the thickness of the first matching layer 113 and the second matching layer 213 are different.
It is worth noting that, multiple second notch 214 can be from the second matching layer in the second ultrasound transducer array 20
213 extend to the second back sheet 211, the second back sheet 211 can also be extended through from the second matching layer 213, to prolong
Substrate 30 is extended to, but substrate 30 cannot be run through at this time, wherein the material selection range and the first notch of the filling of the second notch 214
The material selection range filled in 114 is roughly the same, is not repeating herein, while the acoustic resistance of the material of the second notch 214 filling
Resist uniformly or along sound wave direction of the launch gradual change.Wherein the width of the second notch 214 is also between 10-100 microns.
Simultaneously in the second ultrasound transducer array 20, the second back sheet 20 is solid layer 20, and the second notch 214 is filled
There are solid filling or gaseous state filler, that is to say, that unlike the first ultrasound transducer array 10, the second back sheet
211 material cannot be gas.
As the first ultrasound transducer array 10, the sound wave emission area of multiple second array elements 21 is identical, guarantees multiple
The electrical impedance of second array element 21 is identical；The acoustic impedance of second transducer layer 212 is greater than the acoustic impedance of the second matching layer 213, simultaneously
Second matching layer 213 also includes multiple sub- matching layers, is illustrated in Fig. 3 with 2 straton matching layers 2131,2132, simultaneously
Along the sound wave direction of the launch, the acoustic impedance of sub- matching layer is gradually reduced, i.e. acoustic resistance of the acoustic impedance in the middle layer Fig. 3 2132 less than layer 2131
It is anti-.
To sum up, the ultrasonic transducer 100 in the application include in planar arrangement phase array transducer array 10 with
And the convex array transducer array 20 of curved surface arrangement, the defect in plane and curved surface can be detected simultaneously, be able to detect shape and do not advised
Workpiece then can be improved the sensitivity of detection compared with prior art.
The foregoing is merely presently filed embodiments, are not intended to limit the scope of the patents of the application, all to utilize this
Equivalent structure or equivalent flow shift made by application specification and accompanying drawing content, it is relevant to be applied directly or indirectly in other
Technical field similarly includes in the scope of patent protection of the application.
Claims (10)
1. a kind of ultrasonic transducer characterized by comprising
First ultrasound transducer array, first ultrasound transducer array are phase array transducer array comprising multiple only
The first vertical array element, multiple independent first array elements are in planar arrangement, for detecting plane；
Second ultrasound transducer array, second ultrasound transducer array are convex array transducer array comprising multiple independences
The second array element, multiple independent second array element arrangements in curved surface, for detecting curved surface.
2. ultrasonic transducer according to claim 1, which is characterized in that
Multiple independent first array elements are arranged into disc, and the curved surface made of multiple second array element arrangements surrounds institute
It states the circumference of disc and extends to a side direction of the vertical disc.
3. ultrasonic transducer according to claim 2, which is characterized in that
The curved surface made of multiple second array element arrangements surrounds the circumference of the disc, while multiple first array elements
It is distributed in a ring according to concentric circles, multiple second array elements extend side by side and along the direction far from the disc.
4. ultrasonic transducer according to claim 2, which is characterized in that
The ultrasonic transducer includes: substrate, the substrate around the disc circumference and to the side of the vertical disc
Direction extends, wherein second ultrasound transducer array is fixed over the substrate；
First ultrasound transducer array include the first back sheet, covering first back sheet first transducer layer and
The first matching layer of the first transducer layer is covered, while multiple first notch extend to described from first matching layer
One back sheet and form multiple independent first array elements；
Second ultrasound transducer array includes fixed the second back sheet over the substrate, covering second back sheet
Second transducer layer and the covering second transducer layer the second matching layer, while multiple second notch are from described second
Matching layer extends to second back sheet and forms multiple independent second array elements.
5. ultrasonic transducer according to claim 4, which is characterized in that
The acoustic impedance of the first transducer layer is greater than the acoustic impedance of first matching layer, the acoustic resistance of the second transducer layer
The anti-acoustic impedance greater than second matching layer, while first matching layer/second matching layer includes the multilayer being stacked
Sub- matching layer, and along the direction of sound wave transmitting, the acoustic impedance of the sub- matching layer of multilayer is gradually reduced.
6. ultrasonic transducer according to claim 4, which is characterized in that
Multiple first notch not through first back sheet, multiple second notch through second back sheet and
The substrate is extended to, but multiple second notch are not through the substrate.
7. ultrasonic transducer according to claim 4, which is characterized in that
First back sheet is solid layer, is filled with solid filling or gaseous state filler in multiple first notch, or,
First back sheet is gas blanket, is filled with solid filling in multiple first notch；
Second back sheet is solid layer, and second notch is filled with solid filling or gaseous state filler.
8. ultrasonic transducer according to claim 4, which is characterized in that the first transducer layer/second transducer layer
Material be one of potassium-sodium niobate/bismuth-sodium titanate, lithium niobate, barium titanate sodium.
9. ultrasonic transducer according to claim 4, which is characterized in that the first transducer layer/second transducer layer
It is made by using sol-gel method.
10. ultrasonic transducer according to claim 1, which is characterized in that
The sound wave emission area of multiple first array elements is identical, and the sound wave emission area of multiple second array elements is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822049456.3U CN209502195U (en) | 2018-12-06 | 2018-12-06 | Ultrasonic transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822049456.3U CN209502195U (en) | 2018-12-06 | 2018-12-06 | Ultrasonic transducer |
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| Publication Number | Publication Date |
|---|---|
| CN209502195U true CN209502195U (en) | 2019-10-18 |
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ID=68194767
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| Application Number | Title | Priority Date | Filing Date |
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| CN201822049456.3U Active CN209502195U (en) | 2018-12-06 | 2018-12-06 | Ultrasonic transducer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109622345A (en) * | 2018-12-06 | 2019-04-16 | 深圳先进技术研究院 | Ultrasonic transducer |
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2018
- 2018-12-06 CN CN201822049456.3U patent/CN209502195U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109622345A (en) * | 2018-12-06 | 2019-04-16 | 深圳先进技术研究院 | Ultrasonic transducer |
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