CN209500854U - Subliming furnace - Google Patents
Subliming furnace Download PDFInfo
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- CN209500854U CN209500854U CN201920106079.4U CN201920106079U CN209500854U CN 209500854 U CN209500854 U CN 209500854U CN 201920106079 U CN201920106079 U CN 201920106079U CN 209500854 U CN209500854 U CN 209500854U
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- vacuum
- heating
- lifting support
- vacuum cavity
- waiting area
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Abstract
The utility model relates to a kind of subliming furnace, which includes: multiple vacuum cavities, for placing multiple materials；Accreditation Waiting Area is set to the side of subliming furnace, and the multiple material is stored for multiple materials to be placed in multiple vacuum cavities, with vacuum state in Accreditation Waiting Area；Heating zone is connected with Accreditation Waiting Area, heating module is equipped in heating zone, heating module is for heating multiple materials；Cooling zone is connected with heating zone, and cooling zone is used for the cooling of multiple materials；Multiple first lifting support frames, one end are correspondingly connected with multiple vacuum cavities, and multiple first lifting support frames are for driving multiple vacuum cavities to go up and down；And mobile device, it is connect with the other end of multiple first lifting support frames, mobile device is connect by multiple first lifting support frames with multiple vacuum cavities.The utility model one subliming furnace of realization is fed, heated up, distilled simultaneously and cooling action, reduces waiting time when operator's actual production, increases production efficiency.
Description
Technical field
The utility model relates to a kind of subliming furnaces, be used to continuously heat up to multiple materials more particularly to one kind,
Distillation and cooling subliming furnace.
Background technique
The subliming furnace of the prior art is typically only capable to successively to feed single boiler tube, vacuumizes, heat up, distilling, cooling down,
Rewinding, clean movement, and operator can only wait previous movement just to can be carried out next movement after the completion, since boiler tube is being taken out
The used time is more when vacuum, heating and cooling, accounts for the 10~30% of entire distillation material time.
Therefore lead to operator's most of the time all and be waiting vacuumizing, heat up and cooling down for boiler tube, waste compared with
More production times, and then cause production efficiency low.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of subliming furnaces, to solve the above technical problems, specifically
Technical solution it is as follows: a kind of subliming furnace, for continuously multiple materials to be heated up, distilled and are cooled down, wherein subliming furnace
It include: multiple vacuum cavities, for placing multiple materials；Accreditation Waiting Area is set to the side of subliming furnace, and Accreditation Waiting Area is used for will be multiple
Material is placed in multiple vacuum cavities, stores multiple materials with vacuum state；Heating zone is connected with Accreditation Waiting Area, in heating zone
Equipped with heating module, heating module is for heating multiple materials；Cooling zone is connected with heating zone, and cooling zone is used for multiple materials
Cooling；Multiple first lifting support frames, one end are correspondingly connected with multiple vacuum cavities, and multiple first lifting support frames are used for band
Move multiple vacuum cavity liftings；And mobile device, it is connect with the other end of multiple first lifting support frames, mobile device passes through
Multiple first lifting support frames are connect with multiple vacuum cavities, and mobile device is driven multiple true by multiple first lifting support frames
Cavity body is moved to heating zone by Accreditation Waiting Area and is moved to cooling zone by heating zone.
Wherein, after one of material in multiple materials is placed in one of vacuum cavity, a vacuum
Cavity is moved in the heating module in heating zone by mobile device and the first lifting support frame, and heating module heats an object
Material, and another material in multiple materials is placed in another one vacuum cavity in Accreditation Waiting Area；When an object
After material heating, distillation, a vacuum cavity is moved to cooling zone by mobile device and the drive of the first lifting support frame, another
Vacuum cavity is moved in the heating module in heating zone by mobile device and the first lifting support frame by Accreditation Waiting Area, heated mould
Group heats another material.
In a kind of possible design, subliming furnace further include: vacuum evacuation device connect with multiple vacuum cavities, vacuumizes
Device is for vacuumizing multiple vacuum cavities；And multiple vacuum valves, it is correspondingly arranged in multiple vacuum cavities and vacuumizes
Between device, multiple vacuum valves for controlling vacuumizing for multiple vacuum cavities respectively.
It further include multiple vacuum hoses in a kind of possible design, vacuum evacuation device passes through multiple vacuum hoses and more
A vacuum cavity connection, multiple vacuum valves are correspondingly arranged on multiple vacuum hoses.
In a kind of possible design, further include manipulator, be set in Accreditation Waiting Area, manipulator is for putting multiple materials
It sets in multiple vacuum cavities.
In a kind of possible design, heating module is tubular heater.
In a kind of possible design, tubular heater includes: multiple second lifting support frames, one end be fixed on table top or
On ground；Fixed bell, connect with the other end of multiple second lifting support frames, and fixed bell passes through multiple second lifting supports
Frame drives and goes up and down；Side turn over bell is set to one end connection that stationary furnace covers the fixed bell of Fang Bingyu, and side turn over bell can
It is overturn around the junction of itself and fixed bell；And electric heating wire, it is set in fixed bell and side turn over bell, electric heating
Silk is used for heating, vacuum cavity.
In a kind of possible design, mobile device is sliding rail, and the sliding block on multiple first lifting support frames and sliding rail connects
It connects, multiple first lifting support frames are driven by sliding block and moved along sliding rail.
In a kind of possible design, the first lifting support frame includes support portion and the lifting unit that connect with support portion, branch
Support part is used to support vacuum cavity, and lifting unit drives vacuum cavity to go up and down by support portion.
Further include fan in a kind of possible design, be set to cooling zone, fan is used to accelerate the cooling of material.
The utility model has had the advantage that compared with prior art:
The utility model is by mobile device and multiple first lifting support frames by multiple vacuum cavities successively from Accreditation Waiting Area
It is moved to heating zone and cooling zone, realizes that multiple vacuum cavities place material in Accreditation Waiting Area, is heated up in heating zone, sublimate
Material, in the cooling material in cooling zone, and Accreditation Waiting Area, heating zone and cooling zone can be operated simultaneously, and then realize a distillation
Furnace is fed, heated up, distilled simultaneously and cooling action, reduces waiting time when operator's actual production, increases production effect
Rate.
Detailed description of the invention
Using attached drawing, the utility model is described in further detail, but the content in attached drawing does not constitute and appoints to the utility model
What is limited.
Fig. 1 is the schematic top plan view of the subliming furnace of the utility model first embodiment.
Fig. 2 is the schematic side view of the subliming furnace of the utility model first embodiment.
Fig. 3 is the structural schematic diagram of the heating module heating, vacuum cavity of the utility model first embodiment.
Fig. 4 is the flow diagram of the application method of the subliming furnace of the utility model second embodiment.
Specific embodiment
About its " first " used herein, " second " etc., the meaning of order or cis-position is not especially censured, also non-use
The component described with limiting the application just for the sake of difference with same technique term or operation.
A kind of subliming furnace 1 is disclosed in the first embodiment of the utility model, is please referred to shown in Fig. 1-3, for continuously
Multiple materials are heated up, distilled and cooled down, subliming furnace 1 includes multiple vacuum cavities 2, Accreditation Waiting Area 3, heating zone 4, cooling zone
5, multiple first lifting support frames 6 and mobile device 7, in which:
It please refers to shown in Fig. 1-3, multiple vacuum cavities 2 are placed for placing multiple materials, a preferred vacuum cavity 2
One material, but be not limited thereto.Multiple materials in the utility model can be a kind of material, or a variety of objects
Material, vacuum cavity 2 mainly makes material heat up, distil under vacuum conditions, in the present invention for the choosing of vacuum cavity 2
Selecting can be without particular/special requirement, referring to the conventional selection of those skilled in the art.
Please refer to Fig. 1, shown in 2, Accreditation Waiting Area 3 is set to the side of subliming furnace 1, in the utility model for Accreditation Waiting Area 3
Selection can not have particular/special requirement, and those skilled in the art can select to facilitate into vacuum cavity 2 according to actual production demand
The position of fill material is Accreditation Waiting Area 3, and Accreditation Waiting Area 3 disclosed in the present embodiment is the side that table top 8 is arranged in.Accreditation Waiting Area 3
For multiple materials to be placed in multiple vacuum cavities 2, store multiple materials with vacuum state, modes of emplacement can be
By the way that manually material is placed in vacuum cavity 2, material can also be placed on by vacuum by manipulator (not shown)
It in cavity 2, but is not limited thereto, those skilled in the art can also select other suitably to place according to actual production demand
Mode.
Please refer to Fig. 1, shown in 2, heating zone 4 is connected with Accreditation Waiting Area 3, and heating zone 4 disclosed in the present embodiment is arranged in table top 8
Middle position, but be not limited thereto.Heating module 41 is equipped in heating zone 4, heating module 41 is for heating multiple objects
Expect, heating module 41 disclosed in the present embodiment is tubular heater, but is not limited thereto, and those skilled in the art can basis
Practical distillation demand selects other suitable heating modules 41.
In a preferred embodiment, it please refers to shown in Fig. 3, tubular heater includes multiple second lifting support frames 411, consolidates
Determine bell 412, side turn over bell 413 and electric heating wire, table top 8 or ground are fixed in one end of multiple second lifting support frames 411
On face, fixed bell 412 is connect with the other end of multiple second lifting support frames 411, preferred multiple second lifting support frames
411 are located at the lower section of fixed bell 412, and are set to the two sides of fixed bell 412, to guarantee the stability of fixed bell 412,
But it is not limited thereto.Fixed bell 412 is driven by multiple second lifting support frames 411 to be gone up and down, when the second lifting support
Frame 411 drives fixed bell 412 to decline, and being equivalent to reduces the height that the first lifting support frame 6 drives vacuum cavity 2 to rise,
And then the height of subliming furnace 1 can be reduced, side turn over bell 413 be set to fixed 412 top of bell and with fixed bell 412
One end connection, side turn over bell 413 can be overturn around the junction of itself and fixed bell 412, side turn over bell 413 and stationary furnace
The connection type of lid 412 can be through hinge or shaft connection, but be not limited thereto.Electric heating wire is set to fixed bell
412 and side turn over bell 413 in (not shown), electric heating wire is used for heating, vacuum cavity 2, and then heated material makes object
Material heating, distillation.
Please refer to Fig. 1, shown in 2, cooling zone 5 is connected with heating zone 4, the utility model can for the selection of cooling zone 5
With no particular/special requirement, those skilled in the art can select to facilitate vacuum cavity 2 and material cooling according to actual production demand
Position be cooling zone 5, the other side of table top 8 is arranged in Accreditation Waiting Area 3 disclosed in the present embodiment, and cooling zone 5 is for multiple
The cooling of material, the type of cooling can be air-cooled, can also be dried by fan (not shown) to vacuum cavity 2 cold
But, but be not limited thereto, those skilled in the art can also introduction according to the present utility model selection other are suitable cooling
Mode.
Please refer to Fig. 1, shown in 2, multiple first lifting support frame, 6 one end are correspondingly connected with multiple vacuum cavities 2, this implementation
The signified mode that is correspondingly connected with is the lower end two sides that two the first lifting support frames 6 are set to one with vacuum cavity 2 in example, but
It is not limited thereto, those skilled in the art also can choose other and suitably be correspondingly connected with mode.Multiple first lifting supports
Frame 6 for driving multiple vacuum cavities 2 to go up and down, the first lifting support frame 6 disclosed in the present embodiment include support portion 61 and with branch
The lifting unit 62 of support part connection, support portion 61 are used to support vacuum cavity 2, and lifting unit 62 drives vacuum cavity by support portion 61
2 liftings.Further disclosed lifting unit 62 is lifting cylinder to the present embodiment, and support portion 61 includes arc support rod 611 and setting
In the vertical support rod 612 in 611 lower end of arc support rod, vacuum cavity 2 is set on arc support rod 611, lifting cylinder setting
In on vertical support rod 612, the structure of right support portion 61 and lifting unit 62 is not limited thereto, and those skilled in the art can also be with
Introduction according to the present utility model selects other suitable structures as support portion 61 and lifting unit 62.
It please refers to shown in Fig. 1-3, mobile device 7 is connect with the other end of multiple first lifting support frames 6, and the present embodiment is public
The mobile device 7 opened is sliding rail, and multiple first lifting support frames 6 are connect with the sliding block on sliding rail, multiple first lifting support frames 6
It is driven by sliding block and is moved along sliding rail, right mobile device 7 is not limited thereto, and those skilled in the art can also be according to reality
Production requirement selects other suitable mobile devices 7.Mobile device 7 drives multiple vacuum by multiple first lifting support frames 6
Cavity 2 is moved to heating zone 4 by Accreditation Waiting Area 3 and is moved to cooling zone 5 by heating zone 4, and sliding rail disclosed in the present embodiment is successively worn
Accreditation Waiting Area 3, heating zone 4 and cooling zone 5 are crossed, but is not limited thereto.
It please refers to Fig. 1, shown in 2, is placed in one of vacuum cavity 2 when by one of material in multiple materials
Afterwards, a vacuum cavity 2 is moved in the heating module 41 in heating zone 4 by mobile device 7 and the first lifting support frame 6,
Heating module 41 heats a material, and in Accreditation Waiting Area 3 that another material placement in multiple materials is another wherein
In a vacuum cavity 2.
After material heating, a distillation, a vacuum cavity 2 is driven by mobile device 7 and the first lifting support frame 6
It is moved to cooling zone 5, another vacuum cavity 2, which is moved to by mobile device 7 and the first lifting support frame 6 by Accreditation Waiting Area 3, to be added
In heating module 41 in hot-zone 4, heating module 41 heats another material, and reciprocation cycle, realization will be more in the manner described above
A vacuum cavity 2 is successively moved to heating zone 4 and cooling zone 5 from Accreditation Waiting Area 3, and then realizes multiple vacuum cavities 2 in Accreditation Waiting Area 3
Material is placed, heating zone 4 is heated up, distil material, in the cooling material in cooling zone 5, and Accreditation Waiting Area 3, heating zone 4 and cold
But area 5 can be operated simultaneously, realized a subliming furnace 1 while being fed, being heated up, distilled and cooling action, and operation is reduced
Waiting time when person's actual production increases production efficiency.
In a preferred embodiment, Fig. 2 is please referred to, shown in 3, subliming furnace 1 further includes vacuum evacuation device 9 and multiple vacuum valves
Door 10, vacuum evacuation device 9 is connect with multiple vacuum cavities 2, and vacuum evacuation device 9 is multiple for vacuumizing multiple vacuum cavities 2
Vacuum valve 10 is correspondingly arranged between multiple vacuum cavities 2 and vacuum evacuation device 9, and multiple vacuum valves 10 for controlling respectively
Multiple vacuum cavities 2 vacuumize, and can not have for the selection of vacuum evacuation device 9 and vacuum valve 10 in the present invention
Particular/special requirement, referring to the conventional selection of those skilled in the art.Further disclosed subliming furnace 1 further includes more to the present embodiment
A vacuum hose 11, vacuum evacuation device 9 are connect by multiple vacuum hoses 11 with multiple vacuum cavities 2, multiple vacuum valves 10
It is correspondingly arranged on multiple vacuum hoses 11, but is not limited thereto.
Correspondingly, a kind of application method 12 of subliming furnace 1 is disclosed in the second embodiment of the utility model, please refers to figure
Shown in 4 and Fig. 1-3, wherein the application method 12 of subliming furnace 1 includes the following steps 121~126.
Step 121: providing just like the subliming furnace 1 disclosed in above-mentioned first embodiment；
Step 122: one of material in multiple materials being placed on one of vacuum cavity 2 in Accreditation Waiting Area 3
It is interior；
Step 123: a vacuum cavity 2 being moved in heating zone 4 by mobile device 7, and passes through the first lifting branch
One vacuum cavity 2 is placed in heating module 41 by support 6；
Step 124: starting heating module 41 heats a material, makes a material heating distillation, meanwhile, in Accreditation Waiting Area 3
Interior another material by multiple materials is placed in another one vacuum cavity 2；
Step 125: after material heating, a distillation, closing heating module 41, a vacuum cavity 2 passes through first liter
Descending branch support 6 removes heating module 41, and a vacuum cavity 2 is moved in cooling zone 5 by mobile device 7, carries out cold
But, meanwhile, another vacuum cavity 2 is moved in heating zone 4 by mobile device 7 by another vacuum cavity 2, and passes through the
Another vacuum cavity 2 is placed in heating module 41 by one lifting support frame 6；
Step 126: step 124 and step 125 are repeated, until completing heating, distillation and the cooling of multiple materials.
Specifically, multiple materials (namely a material described above and another material) in above-mentioned steps are placed on
Mode in multiple vacuum cavities 2 (namely a vacuum cavity 2 described above and another vacuum cavity 2) can be manually
It places, is also possible to place by manipulator, and after material is placed in vacuum cavity 2, it will be true by vacuum evacuation device 9
It is vacuumized in cavity body 2.
Meanwhile multiple vacuum cavities 2 in above-mentioned steps (namely a vacuum cavity 2 described above and another vacuum
Cavity 2) step that multiple vacuum cavities 2 is placed sequentially in heating module 41 by the first lifting support frame 6 includes: first
Lifting support frame 6 drives vacuum cavity 2 to rise, and vacuum cavity 2 is moved to above heating module 41 by mobile device 7, and first liter
Descending branch support 6 drives vacuum cavity 2 to decline, and is placed on vacuum cavity 2 in heating module 41.
Further, when mobile device 7 drives vacuum cavity 2 to when moving above heating module 41, the second lifting branch
Support 411 drives heating module 41 to decline, to reduce the lifting height of vacuum cavity 2.
The foregoing is merely the preferred embodiment of the utility model, the interest field that is not intended to limit the utility model；
Above description simultaneously, should can be illustrated and implement for the special personage of correlative technology field, therefore other are practical without departing from this
The lower equivalent change or modification completed of novel disclosed spirit, should be included in claim.
Claims (9)
1. a kind of subliming furnace, for continuously multiple materials to be heated up, distilled and cooled down, which is characterized in that the distillation
Furnace includes:
Multiple vacuum cavities, for placing the multiple material；
Accreditation Waiting Area, is set to the side of the subliming furnace, and the Accreditation Waiting Area is the multiple for the multiple material to be placed on
In vacuum cavity, the multiple material is stored with vacuum state；
Heating zone is connected with the Accreditation Waiting Area, and heating module is equipped in the heating zone, and the heating module is described for heating
Multiple materials；
Cooling zone is connected with the heating zone, and the cooling zone is used for the cooling of the multiple material；
Multiple first lifting support frames, one end are correspondingly connected with the multiple vacuum cavity, the multiple first lifting support frame
For driving the multiple vacuum cavity to go up and down；And
Mobile device is connect with the other end of the multiple first lifting support frame, and the mobile device passes through the multiple the
One lifting support frame is connect with the multiple vacuum cavity, and the mobile device is driven by the multiple first lifting support frame
The multiple vacuum cavity is moved to the heating zone by the Accreditation Waiting Area and is moved to the cooling zone by the heating zone；
Wherein, described after one of material in the multiple material is placed in one of vacuum cavity
One vacuum cavity is moved to the heating in the heating zone by the mobile device and first lifting support frame
In mould group, the heating module heats one material, and will be another in the multiple material in the Accreditation Waiting Area
A material is placed in the another one vacuum cavity；After the heating of one material, distillation, one vacuum chamber
Body is moved to the cooling zone, another described vacuum cavity by the mobile device and first lifting support frame drive
The heating being moved to by the mobile device and first lifting support frame by the Accreditation Waiting Area in the heating zone
In mould group, the heating module heats another described material.
2. subliming furnace according to claim 1, which is characterized in that the subliming furnace further include:
Vacuum evacuation device is connect with the multiple vacuum cavity, and the vacuum evacuation device is for taking out the multiple vacuum cavity
Vacuum；And
Multiple vacuum valves are correspondingly arranged between the multiple vacuum cavity and the vacuum evacuation device, the multiple vacuum
Valve for controlling vacuumizing for the multiple vacuum cavity respectively.
3. subliming furnace according to claim 2, which is characterized in that further include multiple vacuum hoses, the vacuum evacuation device
It is connect by the multiple vacuum hose with the multiple vacuum cavity, the multiple vacuum valve is correspondingly arranged in the multiple
On vacuum hose.
4. subliming furnace according to claim 1, which is characterized in that further include manipulator, is set in the Accreditation Waiting Area, institute
Manipulator is stated for the multiple material to be placed in the multiple vacuum cavity.
5. subliming furnace according to claim 1, which is characterized in that the heating module is tubular heater.
6. subliming furnace according to claim 5, which is characterized in that the tubular heater includes:
Multiple second lifting support frames, one end are fixed on table top or ground；
Fixed bell, connect with the other end of the multiple second lifting support frame, and the fixed bell passes through the multiple the
Two lifting support frames drive and go up and down；
Side turn over bell is set to the stationary furnace and covers one end connection for fixing bell described in Fang Bingyu, the side turn over furnace
Lid can be overturn around the junction of itself and the fixed bell；And
Electric heating wire is set in the fixed bell and the side turn over bell, and the electric heating wire is described true for heating
Cavity body.
7. subliming furnace according to claim 1, which is characterized in that the mobile device be sliding rail, the multiple first liter
Descending branch support is connect with the sliding block on the sliding rail, and the multiple first lifting support frame is driven by the sliding block along described
Sliding rail is mobile.
8. subliming furnace according to claim 1, which is characterized in that first lifting support frame include support portion and with institute
The lifting unit of support portion connection is stated, the support portion is used to support the vacuum cavity, and the lifting unit passes through the support portion
The vacuum cavity is driven to go up and down.
9. subliming furnace according to claim 1, which is characterized in that further include fan, be set to the cooling zone, the wind
Fan the cooling for accelerating the material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920106079.4U CN209500854U (en) | 2019-01-22 | 2019-01-22 | Subliming furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920106079.4U CN209500854U (en) | 2019-01-22 | 2019-01-22 | Subliming furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209500854U true CN209500854U (en) | 2019-10-18 |
Family
ID=68201802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920106079.4U Expired - Fee Related CN209500854U (en) | 2019-01-22 | 2019-01-22 | Subliming furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209500854U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111450566A (en) * | 2019-01-22 | 2020-07-28 | 陕西坤同半导体科技有限公司 | Sublimation furnace and use method thereof |
-
2019
- 2019-01-22 CN CN201920106079.4U patent/CN209500854U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111450566A (en) * | 2019-01-22 | 2020-07-28 | 陕西坤同半导体科技有限公司 | Sublimation furnace and use method thereof |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191018 Termination date: 20210122 |