CN209445998U - A kind of extensive splicing focus planar detector flatness inspection devices - Google Patents
A kind of extensive splicing focus planar detector flatness inspection devices Download PDFInfo
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Abstract
This patent discloses a kind of extensive splicing focus planar detector flatness inspection devices.Its measuring device includes small F number point light source convergent light source component and high-accuracy position adjustment.In test process, fixed extensive splicing detector is motionless, it opens extensive splicing detector and carries out real time monitoring signals, adjust light source assembly position, light source is set to converge at the scheduled field positions of detector focal plane, and its response signal on the detector is reached maximum by intense adjustment position, the position coordinates of the record system of high precision position adjustment at this time, it is adjusted later to the next field positions point in detector focal plane and operates and record in this way, until light source assembly position traversal covering detector focal plane full filed range, plane fitting processing is carried out to the position coordinates of high precision position adjustment system later, and then obtain the photosurface flatness of detector focal plane.This method principle is simple, easy to operate.
Description
Technical field
This patent belongs to field of optical detection, provides a kind of extensive splicing focus planar detector measuring device.
Background technique
On the one hand it is the application demand of the big visual field high-resolution camera in space, is on the one hand ultra-large focal plane detector development
There is the connection scheme of extensive focal plane to solve this to contradiction in technical bottleneck, i.e., detects multiple extensive focal planes
Device is spliced, and realizes that more massive focus planar detector, such as the detector of 4 pieces of 2K × 2K splice to obtain 1 piece of 8K × 8K
Detector, but multiple detector photosurfaces are difficult in splicing in the same plane, especially for needing
Just workable extensive detector is wanted after cryogenic refrigeration, splicing test is carried out at normal temperatures and pressures, freezes by vacuum and low temperature
Plane can deformation occurs for splicing afterwards, and then affects the photosurface flatness of extensive splicing detector, and in vacuum and low temperature
It is difficult to implement measurement using contact measurement equipment under environment.
This patent provides a kind of splicing focus planar detector flatness inspection devices and measurement method on a large scale, utilizes detection
The optical signal responding ability of device itself assembles the small F number point light source with high-accuracy position adjustment being placed in front of it
Light source assembly position is detected, and by recording small F number point light source convergent light source component high precision position, inversion reckoning is extensive
The photosurface flatness for splicing focus planar detector, with non-cpntact measurement, measurement range is big, use scope is wide, test philosophy
Simply, easy-operating advantage.
Summary of the invention
This patent discloses a kind of extensive splicing focus planar detector flatness inspection devices, utilizes the light of detector itself
Signal responding ability, it is burnt to the small F number point light source convergent light source component with high-accuracy position adjustment being placed in front of it
Point position is responded and is fed back, and the position of small F number point light source convergent light source component is recorded by high-accuracy position adjustment,
And then inversion reckoning splices the photosurface flatness of focus planar detector on a large scale, to complete extensive splicing focal plane detection
The purpose of the photosurface measurement of planeness of device, specific features are mainly manifested in the following aspects:
1) splicing focus planar detector flatness inspection devices includes small F number point light source convergent light source component and height on a large scale
Precision positions adjust system, wherein the focus planar detector of the operating spectrum band covering predetermined detection of light source assembly responds spectral coverage；Light
The back work distance of source component meets extensive splicing focus planar detector measurement of planeness demand, and light source assembly uses pin hole target
It is spot source, the scale and focus planar detector grid cell size sizableness of point light source in the convergence of its position of focal plane light beam；It is high-precision
Close position adjustment is rigidly fixed with small F number point light source convergent light source component and is linked, and the position of high precision position adjustment system
It sets measurement accuracy and meets extensive splicing focus planar detector measurement of planeness demand；
2) extensive to splice focus planar detector and extensive splicing focus planar detector flatness inspection devices before measuring
Docking, and small F number point light source convergent light source component focus is made to reach extensive splicing focus planar detector photosurface position；
3) in test process, fixed extensive splicing detector is motionless, opens extensive splicing detector and carries out signal
Real-time monitoring adjusts light source assembly position, so that light source focus is converged at the scheduled field positions of detector focal plane, and fine
Its response signal on the detector is reached maximum by adjustment position, and the position for recording the system of high precision position adjustment at this time is sat
Mark adjusts later to the next field positions point in detector focal plane and operates and record in this way, until light source assembly position traverses
Detector focal plane full filed range is covered, the position coordinates of high precision position adjustment system are carried out at plane fitting later
Reason, and then obtain the photosurface flatness of detector focal plane.
This method principle is simple, easy to operate.
Detailed description of the invention
Fig. 1: focus planar detector method measuring flatness schematic diagram.
Fig. 2: ultra-large infrared detector method measuring flatness schematic diagram.
Fig. 3: ultra-large infrared detector measurement of planeness data.
Fig. 4: ultra-large infrared detector deviations from planarity.
Specific embodiment
Photosurface flatness is carried out for certain extensive splicing medium-wave infrared detector to be surveyed.Infrared detector work
Wave band is medium-wave infrared wave band, and operating temperature 90K, splicing scale is that 16 512 × 1 submodules are successively arranged according to according to isosceles triangle
Column splice, and splicing is in installation base plate under room temperature atmospheric environment, and is packaged in Dewar, install on Dewar wall before detector photosurface
With saturating operating spectrum band, and size covers and exceeds the dewar window of detector photosurface size, as shown in Figure 2.According to above-mentioned
Measurement method will be assembled detector Dewar component that is intact and having taken out vacuum and is fixed in test station, and front is placed extensive
Splice focus planar detector flatness inspection devices, the service band of light source assembly meets the response demand of detector, and rear work
Make away from meeting required distance of the dewar window to detector photosurface.Detector Dewar component is freezed to the work of detector assembly
Make temperature, open infrared detector and carry out real time monitoring signals, adjustment high precision position adjusts system, converges light source assembly
Point light source converge at the scheduled field positions of detector focal plane, its response on the detector is believed in intense adjustment position
Number reach maximum, the position coordinates of the record system of high precision position adjustment at this time adjust high precision position later and adjust system, light
Point light source to the next field positions point in detector focal plane of source component convergence is operated in this way and is recorded, until light source assembly position
Traversal covering detector focal plane full filed range is set, measured data values are as shown in figure 3, adjust system to high precision position later
Position coordinates carry out plane fitting processing, and then the photosurface flatness of detector focal plane is calculated as shown in figure 4, flat
Face degree maximum deviation is 0.056mm, average deviation 0.012mm.The measuring accuracy of this method is about 0.01mm.
Claims (1)
1. a kind of extensive splicing focus planar detector flatness inspection devices, including small F number point light source convergent light source component and
High-accuracy position adjustment, it is characterised in that:
The operating spectrum band of light source assembly covers pre- regular inspection in the extensive splicing focus planar detector flatness inspection devices
The focus planar detector of survey responds spectral coverage；The back work distance of light source assembly meets extensive splicing focus planar detector flatness and surveys
Amount demand；High-accuracy position adjustment is rigidly fixed with small F number point light source convergent light source component and is linked, and high precision position tune
The positional accuracy measurement of whole system meets extensive splicing focus planar detector measurement of planeness demand.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920245548.0U CN209445998U (en) | 2019-02-27 | 2019-02-27 | A kind of extensive splicing focus planar detector flatness inspection devices |
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| CN201920245548.0U CN209445998U (en) | 2019-02-27 | 2019-02-27 | A kind of extensive splicing focus planar detector flatness inspection devices |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109708593A (en) * | 2019-02-27 | 2019-05-03 | 中国科学院上海技术物理研究所 | A kind of splicing focus planar detector flatness inspection devices and measurement method on a large scale |
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2019
- 2019-02-27 CN CN201920245548.0U patent/CN209445998U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109708593A (en) * | 2019-02-27 | 2019-05-03 | 中国科学院上海技术物理研究所 | A kind of splicing focus planar detector flatness inspection devices and measurement method on a large scale |
| CN109708593B (en) * | 2019-02-27 | 2023-11-07 | 中国科学院上海技术物理研究所 | Flatness measuring device and method for large-scale spliced focal plane detector |
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