CN209428600U - Plated film support plate and coating system - Google Patents
Plated film support plate and coating system Download PDFInfo
- Publication number
- CN209428600U CN209428600U CN201920061944.8U CN201920061944U CN209428600U CN 209428600 U CN209428600 U CN 209428600U CN 201920061944 U CN201920061944 U CN 201920061944U CN 209428600 U CN209428600 U CN 209428600U
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- sash
- plated film
- plated
- support plate
- film support
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- 238000000576 coating method Methods 0.000 title claims abstract description 29
- 239000011248 coating agent Substances 0.000 title claims abstract description 20
- 239000012528 membrane Substances 0.000 claims abstract description 49
- 238000004891 communication Methods 0.000 claims abstract description 5
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
The utility model provides a kind of plated film support plate and coating system, belongs to coating technique field.Plated film support plate includes plate, plate includes the first surface and second surface mutually deviated from, sash is concavely provided in the first surface of plate, the depth of sash is less than the thickness of plate, boss is respectively arranged in the side of sash, boss is used to support membrane to be plated, keep membrane surface to be plated parallel with the bottom surface of sash and there is interval, it is additionally provided with through-hole on plate, the open at one end of through-hole is located at that first surface, another end opening is located at the side of sash so that the clearance space between membrane to be plated and the bottom surface of sash is in communication with the outside.Coating system includes above-mentioned plated film support plate.The plated film support plate and coating system of the utility model can be balanced the air pressure of membrane two sides to be plated when plated film by the through-hole that is arranged on plated film support plate, reduce the case where membrane to be plated is damaged.
Description
Technical field
The utility model relates to coating technique fields, in particular to a kind of plated film support plate and coating system.
Background technique
In the production process of solar battery sheet, need to carry out cell piece coating film treatment to improve solar battery sheet
The utilization rate to sunlight, and then improve solar energy conversion ratio.
PECVD (plasma enhanced chemical vapor deposition method, Plasma Enhanced Chemical are generally used at present
Vapor Deposition) technique progress coating film treatment.In the technique, need to use plated film support plate as solar battery sheet
Plated film carrying tool, solar battery sheet is put into plated film support plate is transported in process cavity again in plated film support plate and carries out plated film.
Plated film support plate generally includes carrying battery panel region and support plate region.Wherein, carrying battery panel region is for putting
Set solar battery sheet, generally hollow design.But hollow design can inevitably cause cell piece in coating process
The back side is occurred by the case where plated film, so existing frequently-used plated film support plate can will carry a face closure of battery panel region, but such as
Since air pressure change unevenness causes cell piece to damage when this setting may result in plated film.
Utility model content
The purpose of this utility model is to provide a kind of plated film support plate and coating systems, can be by setting on plated film support plate
The air pressure of membrane two sides to be plated, reduces the case where membrane to be plated is damaged when the through-hole balance plated film set.
The embodiments of the present invention are achieved in that
The one side of the utility model embodiment provides a kind of plated film support plate, comprising: plate, plate include mutually deviating from
First surface and second surface, be concavely provided with sash in the first surface of plate, the depth of sash is less than the thickness of plate,
The side of sash is respectively arranged with boss, and boss is used to support membrane to be plated, keeps membrane surface to be plated parallel with the bottom surface of sash
And there is interval, through-hole, the side open at one end for being located at sash positioned at first surface, another end opening of through-hole are additionally provided on plate
Face is so that the clearance space between membrane to be plated and the bottom surface of sash is in communication with the outside.
Optionally, through-hole includes between both ends open and interconnected first passage and second channel, and first is logical
There is angle between the extending direction in road and the extending direction of second channel.
Optionally, the diameter of through-hole is between 1mm to 4mm.
Optionally, through-hole is multiple, and multiple through-holes are uniformly arranged in the side of sash.
Optionally, the extending direction of first passage and the angle of first surface are between 20 ° to 40 °, and second channel prolongs
The angle for stretching direction and bottom surface is between 0 ° to 20 °.
Optionally, sash includes multiple, and multiple sashes are in cells arranged in matrix on the first surface of plate.
Optionally, the side with bottom surface of sash are mutually perpendicular to, and the shape of bottom surface is rectangle.
Optionally, through-hole is correspondingly arranged in the corner location of sash.
Optionally, plated film support plate further includes handle, and handle is set to the edge of first surface.
The another aspect of the utility model embodiment provides a kind of coating system, and the plated film including above-mentioned any one carries
Plate.
The beneficial effect of the utility model embodiment includes:
A kind of plated film support plate provided by the embodiment of the utility model, including having the first surface and the second table that mutually deviate from
The plate in face and recessed sash on the first surface of the plate, and the depth of sash is less than the thickness of plate.In reality
Border use the plated film support plate when, membrane to be plated is accommodated in sash, the side of sash is provided with boss, by boss support to
Film-coated part, to make to form clearance space between the bottom surface of membrane and sash to be plated.It is additionally provided on plate outer for being connected to
The through-hole on boundary and clearance space, the through-hole it is open at one end on the first surface, another end opening be located at the side of sash.It is logical
It crosses through-hole and the external world is connected with clearance space, in coating process, the air pressure in clearance space can be with coating apparatus technique
Air pressure in chamber is rapidly achieved balance, to make membrane to be plated in coating process, causes to damage since air pressure change is uneven
Bad situation is reduced.And sash there is bottom surface and and it is non-through, so capableing of the isolation membrane to be plated of relative efficiency
The contact at non-coated surface (i.e. the back side) and process cavity environment reaches balanced above-mentioned clearance space by the way that through-hole is arranged on plate
With the purpose of ambient pressure, plated film gas is not easily accessible in clearance space in coating process, to reduce membrane to be plated
The back side is occurred by the case where plated film.The structure of the plated film support plate is relatively easy, is easily worked so manufacturing cost is relatively low.
A kind of coating system provided by the embodiment of the utility model can be by plated film using above-mentioned plated film support plate
The air pressure of membrane two sides to be plated, reduces the back of membrane damage to be plated and membrane to be plated when the through-hole balance plated film being arranged on support plate
Face is occurred by the case where plated film.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be by
Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also
To obtain other relevant attached drawings according to these attached drawings.
Fig. 1 is one of the structural schematic diagram of plated film support plate provided by the embodiment of the utility model；
Fig. 2 is one of the gridiron structure schematic diagram of plated film support plate provided by the embodiment of the utility model；
Fig. 3 is the two of the gridiron structure schematic diagram of plated film support plate provided by the embodiment of the utility model；
Fig. 4 is the second structural representation of plated film support plate provided by the embodiment of the utility model.
Icon: 110- plate；120- sash；121- boss；130- through-hole；131- first passage；132- second channel；
140- handle；210- membrane to be plated.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Usually here in attached drawing description and
The component of the utility model embodiment shown can be arranged and be designed with a variety of different configurations.
Therefore, requirement is not intended to limit to the detailed description of the embodiments of the present invention provided in the accompanying drawings below
The scope of the utility model of protection, but it is merely representative of the selected embodiment of the utility model.Based in the utility model
Embodiment, every other embodiment obtained by those of ordinary skill in the art without making creative efforts, all
Belong to the range of the utility model protection.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
It is in the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, or
The utility model product using when the orientation or positional relationship usually put, be merely for convenience of description the utility model and letter
Change description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific orientation construct and
Operation, therefore should not be understood as limiting the present invention.In addition, term " first ", " second ", " third " etc. are only used for area
Divide description, is not understood to indicate or imply relative importance.
In addition, the terms such as term "horizontal", "vertical" are not offered as requiring component abswolute level or pendency, but can be slightly
Low dip.It is not to indicate that the structure has been had to if "horizontal" only refers to that its direction is more horizontal with respect to for "vertical"
It is complete horizontal, but can be slightly tilted.
In the description of the present invention, it should also be noted that, unless otherwise clearly defined and limited, term " is set
Set ", " installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection,
Or it is integrally connected；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, intermediary can also be passed through
It is indirectly connected, can be the connection inside two elements.For the ordinary skill in the art, it can be managed with concrete condition
Solve the concrete meaning of above-mentioned term in the present invention.
The utility model embodiment provides a kind of plated film support plate, as shown in Figure 1, comprising: plate 110, plate 110 include phase
The first surface and second surface mutually deviated from are concavely provided with sash 120 in the first surface of plate 110, and the depth of sash 120 is small
In the thickness of plate 110, as shown in Fig. 2, be respectively arranged with boss 121 in the side of sash 120, boss 121 be used to support to
Film-coated part 210 keeps 210 surface of membrane to be plated parallel with the bottom surface of sash 120 and has interval, is additionally provided with through-hole on plate 110
130, the open at one end of through-hole 130 is located at the side of sash 120 so that membrane to be plated 210 positioned at first surface, another end opening
Clearance space between the bottom surface of sash 120 is in communication with the outside.
It should be noted that first, it is opened as shown in Fig. 2, boss 121 is generally arranged at 120 side of sash close to sash 120
The position of mouth, enables membrane 210 to be plated that the surface of plated film and the first surface of plate 110 to be needed to flush.Certainly, it is actually answering
In, boss 121 can also be arranged in any position of side, and can connect can not also for boss 121 and 120 bottom surface of sash
Connection, herein for boss 121 specific setting without limitation, as long as can support membrane 210 to be plated make membrane to be plated 210 and
120 bottom surface of sash is capable of forming clearance space.Illustratively, as shown in figure 3, boss 121 setting 120 side of sash and with
The bottom surface of sash 120 is in contact.
Second, in the utility model embodiment, through-hole 130 is located at the specific setting open at one end of 120 side of sash
Position can be determined according to the set-up mode and position of boss 121, be not specifically limited herein.When the setting of boss 121 exists
The side of sash 120 and when being in contact with the bottom surface of sash 120, the open at one end of through-hole 130 is located on first surface, the other end
Opening, which is then located at, to be arranged on the boss 121 of 120 side of sash, so that through-hole 130 can be by membrane 210 to be plated and sash 120
The clearance space formed between bottom surface is in communication with the outside.
Third at least needs to guarantee the opening of sash 120 to guarantee that membrane 210 to be plated can be accommodated in sash 120
Space is greater than the outer dimension of membrane 210 to be plated, it is contemplated that improves the demand of plating membrane efficiency, needs to be arranged on plate 110 multiple
Sash 120 is simultaneously just to spend multiple membrane 210 to be plated, therefore, in order to which the space saved on plate 110 is to the greatest extent may be used
Sash 120 is arranged in the multiple rows of cloth of energy, and the size and shape that usual sash 120 is open is approximately uniform with membrane 210 to be plated, so as to be plated
Membrane 210 can be just accommodated in sash 120.
4th, in coating process, in order to avoid plated film gas to generate at the both ends open of through-hole 130 as far as possible
Air-flow, the uniformity for treating 210 plated film of film-coated part have an impact, and the position of the both ends open setting of usual through-hole 130 is remote as far as possible
From membrane 210 to be plated.
5th, through-hole 130 can be the structure being made of the channel of multiple connections between both ends open, can also be with
It is a complete overall structure.For example, the extension shape of through-hole 130 is serpentine overall structure, the extension shape of through-hole 130 is
Linear path etc..
A kind of plated film support plate provided by the embodiment of the utility model, including having the first surface and the second table that mutually deviate from
The plate 110 in face and recessed sash 120 on the first surface of the plate 110, and the depth of sash 120 is less than plate
110 thickness.When actually using the plated film support plate, membrane 210 to be plated is accommodated in sash 120, wherein film surface court to be plated
To the side far from 120 bottom surface of sash.The side of sash 120 is provided with boss 121, membrane to be plated is supported by boss 121
210, to make to form clearance space between membrane 210 to be plated and the bottom surface of sash 120.Be additionally provided on plate 110 for
Connection is extraneous and the through-hole 130 of clearance space, the through-hole 130 it is open at one end be located on first surface, another end opening is located at
The side of sash 120.The external world is connected with clearance space by through-hole 130, the air pressure in coating process, in clearance space
It can be rapidly achieved balance with the air pressure in coating apparatus process cavity, to make membrane 210 to be plated in coating process, due to gas
Bucklingization is uneven and causes to be reduced the case where damage.And sash 120 have bottom surface and and it is non-through, so being capable of phase
Contact to the non-coated surface (i.e. the back side) and process cavity environment that effectively completely cut off membrane 210 to be plated, by being set on plate 110
Through-hole 130 is set to achieve the purpose that balanced above-mentioned clearance space and ambient pressure, plated film gas is not easily accessible in coating process
Into clearance space, occurred to reduce 210 back side of membrane to be plated by the case where plated film.The structure of the plated film support plate is relatively simple
It is single, it is easily worked so manufacturing cost is relatively low.
Optionally, as shown in figure 3, through-hole 130 includes 131 He of first passage between both ends open and interconnected
Second channel 132 has angle between the extending direction of first passage 131 and the extending direction of second channel 132.
It should be noted that first passage 131 and the generally-straight shape of second channel 132, so that first passage 131 and
The processing in two channels 132 is more convenient to be easy.Angle between first passage 131 and the extending direction of second channel 132 is usual
It is arranged between 90 ° to 160 °, for example, 90 °, 120 °, 140 ° and 160 ° etc..Certainly, in the utility model embodiment, the
Angle between one channel 131 and the extending direction of second channel 132 can also be other angles, as long as can be by through-hole 130
Both ends open connection can be not particularly limited herein.
It sets through-hole 130 to the first passage 131 and second channel 132 being interconnected between both ends open, reduces
The technology difficulty that through-hole 130 is processed, thereby reduces the manufacturing cost of the plated film support plate.
Optionally, the diameter of through-hole 130 is between 1mm to 4mm.
The diameter of through-hole 130 is set as between 1mm to 4mm, and illustratively diameter can be, 1mm, 2mm, 3mm and 4mm
Deng.Preferably, the diameter of through-hole 130 is set as 2mm.The diameter of through-hole 130 is arranged between 1mm to 4mm, so that through-hole
130 can make the air pressure Fast-Balance of clearance space and external environment, and plated film gas be not easily accessible it is right in clearance space
Coating quality impacts.
Optionally, through-hole 130 is multiple, and multiple through-holes 130 are uniformly arranged in the side of sash 120.
Through-hole 130 is set as multiple, makes the air pressure balance process of clearance space and external environment more rapidly and efficiently, thus
Further decrease the incidence for causing membrane 210 to be plated to be damaged since air pressure is uneven.
Optionally, as shown in figure 3, the extending direction of first passage 131 and the angle of first surface are between 20 ° to 40 °,
The extending direction of second channel 132 and the angle of bottom surface are between 0 ° to 20 °.
The extending direction of first passage 131 and the angle of first surface be between 20 ° to 40 °, illustratively, can be 20 °,
25 °, 30 °, 35 ° and 40 ° etc..Preferably,
The extending direction of first passage 131 and the angle of first surface are 30 °.
The extending direction of second channel 132 and the angle of bottom surface be between 0 ° to 20 °, illustratively, can be 0 °, 5 °,
10 °, 15 ° and 20 ° etc..Preferably, the extending direction of second channel 132 and the angle of bottom surface are 10 °.
By the extending direction of the angle and second channel 132 of the extending direction of first passage 131 and first surface and bottom
The angle in face is set as in above range, is made the both ends open of through-hole 130 rather moderate at a distance from membrane 210 to be plated, is made out
The coating influence that air-flow at mouthful treats film-coated part 210 is relatively small.
Optionally, as shown in Figure 1, sash 120 is including multiple, multiple sashes 120 are in cells arranged in matrix in plate 110
On first surface.
Sash 120 makes this on the first surface of plate 110 in cells arranged in matrix including multiple, by multiple sashes 120
Plated film support plate can carry out plated film processing to multiple membrane 210 to be plated simultaneously when in use, to improve the plating of membrane 210 to be plated
Membrane efficiency.
Optionally, as shown in Fig. 2, the side of sash 120 is mutually perpendicular to bottom surface, the shape of bottom surface is rectangle.
It is rectangle by the bottom surface of sash 120, and the side of sash 120 is mutually perpendicular to bottom surface, is in this makes it possible to obtain whole
The sash 120 of cuboid processes simpler be easy.
Optionally, as shown in figure 4, through-hole 130 is correspondingly arranged in the corner location of sash 120.
Through-hole 130 is arranged in the corner location of the sash 120 in cuboid, makes the spacing between adjacent sash 120
Influenced by through-hole 130 smaller, sash 120 can arrange even closer.
Optionally, as shown in Figure 1, plated film support plate further includes handle 140, handle 140 is set to the edge of first surface.
It should be noted that the edge of first surface is arranged in handle 140, usually apart from setting as far as possible far from sash
120 and through-hole 130 opening, its function and to be coated in sash 120 is realized to through-hole 130 to avoid handle 140
210 coating process of part generates adverse effect.
Handle 140 is set on the plated film support plate, convenient for the mobile plated film support plate of user, improves the shifting of the plated film support plate
Dynamic property and ease for use.
The another aspect of the utility model embodiment provides a kind of coating system, and the plated film including above-mentioned any one carries
Plate.
The coating system uses above-mentioned plated film support plate, can be plated by the balance of through-hole 130 being arranged on plated film support plate
The air pressure of 210 two sides of membrane to be plated when film reduces the back side of the damage of membrane 210 to be plated and membrane to be plated 210 by the feelings of plated film
Condition occurs.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this
For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model
Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.
Claims (10)
1. a kind of plated film support plate characterized by comprising plate, the plate include the first surface mutually deviated from and second
Surface is concavely provided with sash in the first surface of the plate, and the depth of the sash is less than the thickness of the plate, described
The side of sash is respectively arranged with boss, and the boss is used to support membrane to be plated, makes the membrane surface to be plated and the frame
The bottom surface of lattice is parallel and has interval, and through-hole is additionally provided on the plate, and the open at one end of the through-hole is located at first table
Face, another end opening are located at the side of the sash so that clearance space between the membrane to be plated and the bottom surface of the sash
It is in communication with the outside.
2. plated film support plate as described in claim 1, which is characterized in that the through-hole includes between both ends open and mutual
The first passage and second channel of connection, have between the extending direction of the first passage and the extending direction of the second channel
There is angle.
3. plated film support plate as claimed in claim 2, which is characterized in that the diameter of the through-hole is between 1mm to 4mm.
4. plated film support plate as claimed in claim 3, which is characterized in that the through-hole be it is multiple, the multiple through-hole is laid
It is placed in the side of the sash.
5. plated film support plate as claimed in claim 4, which is characterized in that the extending direction of the first passage and first table
The angle in face is between 20 ° to 40 °, and the angle of the extending direction of the second channel and the bottom surface is between 0 ° to 20 °.
6. plated film support plate as claimed in claim 5, which is characterized in that the sash include it is multiple, multiple sashes be in square
Formation formula is arranged on the first surface of the plate.
7. plated film support plate as claimed in claim 6, which is characterized in that the side of the sash is mutually perpendicular to bottom surface, described
The shape of bottom surface is rectangle.
8. plated film support plate as claimed in claim 7, which is characterized in that the through-hole is correspondingly arranged in the quadrangle position of the sash
It sets.
9. plated film support plate as claimed in any one of claims 1 to 8, which is characterized in that the plated film support plate further includes handle, institute
State the edge that handle is set to the first surface.
10. a kind of coating system, which is characterized in that the plated film support plate including any one of such as claim 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920061944.8U CN209428600U (en) | 2019-01-14 | 2019-01-14 | Plated film support plate and coating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920061944.8U CN209428600U (en) | 2019-01-14 | 2019-01-14 | Plated film support plate and coating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209428600U true CN209428600U (en) | 2019-09-24 |
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ID=67976242
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| Application Number | Title | Priority Date | Filing Date |
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| CN201920061944.8U Expired - Fee Related CN209428600U (en) | 2019-01-14 | 2019-01-14 | Plated film support plate and coating system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112652679A (en) * | 2020-12-11 | 2021-04-13 | 晋能清洁能源科技股份公司 | Plate-type TCO film-coating carrier plate structure |
-
2019
- 2019-01-14 CN CN201920061944.8U patent/CN209428600U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112652679A (en) * | 2020-12-11 | 2021-04-13 | 晋能清洁能源科技股份公司 | Plate-type TCO film-coating carrier plate structure |
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