CN209425389U - A kind of space six-freedom micro displacement platform - Google Patents
A kind of space six-freedom micro displacement platform Download PDFInfo
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- CN209425389U CN209425389U CN201822185058.4U CN201822185058U CN209425389U CN 209425389 U CN209425389 U CN 209425389U CN 201822185058 U CN201822185058 U CN 201822185058U CN 209425389 U CN209425389 U CN 209425389U
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- flexible hinge
- piezoelectric sheet
- driver
- sheet driver
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 18
- 239000003381 stabilizer Substances 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 2
- 230000003447 ipsilateral effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004091 panning Methods 0.000 description 1
- 239000013500 performance material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The utility model discloses a kind of space six-freedom micro displacement platform, including silent flatform, moving platform, flexible hinge and thin slice driver；Annular flexible hinge is provided between silent flatform and moving platform；Upper layer flexible hinge is vertically arranged on the upper surface of annular flexible hinge；Lower layer's flexible hinge is vertically arranged on the lower end surface of annular flexible hinge；Cross flexible hinge is provided in annular flexible hinge；The lower end surface of four stabilizer blades of cross flexible hinge is provided with piezoelectric sheet driver A；Piezoelectric sheet driver B is provided on the side of the same direction of four stabilizer blades of cross flexible hinge；The other side face of one stabilizer blade of cross flexible hinge is provided with piezoelectric sheet driver C；The other side face of a stabilizer blade adjacent with piezoelectric sheet driver C is provided with piezoelectric sheet driver D.The utility model is compact-sized, small volume；It is driven using piezoelectric sheet driver, there is bidirectional-movement control ability；Realize the adjustment of space six degree of freedom.
Description
Technical field
The utility model relates to a kind of micromotion platform, especially a kind of compact fine motion in the adjustment of space six degree of freedom is flat
Platform.
Background technique
Precise jiggle platform is in microelectronic engineering, optical precision engineering, high-precision manufacture system, nanometer science and technology etc.
There is important application in field.Piezoelectric micromotion platform because its precision is high, without friction, control method is simple and compact-sized the advantages that.
Micromotion platform basic structure in currently available technology is mainly by silent flatform, moving platform, flexible hinge, four part of piezoelectric actuator
Composition, traditional 6DOF platform normal direction generally use 6 branching rod structures, and the structure of 6 piezo electric stacks has volume ratio biggish
Disadvantage.
Utility model content
The utility model aim is: providing one kind can be controlled with bidirectional-movement, compact-sized, realize space six degree of freedom
The micromotion platform of adjustment.
The technical solution of the utility model is: a kind of space six-freedom micro displacement platform, including silent flatform, moving platform are soft
Property hinge and thin slice driver；Flexible hinge includes annular flexible hinge, cross flexible hinge, upper layer flexible hinge, lower layer
Flexible hinge, thin slice driver include piezoelectric sheet driver A, piezoelectric sheet driver B, piezoelectric sheet driver C and piezoelectricity
Thin slice driver D；Annular flexible hinge is provided between the silent flatform and moving platform；The upper surface of the annular flexible hinge
Edge on be vertically arranged with upper layer flexible hinge, and the lower end surface of upper layer flexible hinge and moving platform connects；The annular is soft
Property hinge lower end surface edge on be vertically arranged with lower layer's flexible hinge, and the upper surface of lower layer's flexible hinge and silent flatform connects
It connects；Cross flexible hinge is provided in the annular flexible hinge；The lower end of four stabilizer blades of the cross flexible hinge
Face is provided with piezoelectric sheet driver A；It is all provided on the side of the same direction of four stabilizer blades of the cross flexible hinge
It is equipped with piezoelectric sheet driver B；The other side face of one stabilizer blade of the cross flexible hinge is provided with piezoelectric sheet drive
Dynamic device C；The other side face of a stabilizer blade adjacent with piezoelectric sheet driver C is provided with piezoelectric sheet driver D.
Preferably, the thin slice driver is the material with expansion performance.
Preferably, the upper layer flexible hinge and lower layer's flexible hinge are interspersed.
Preferably, there are four the upper layer flexible hinges, vertical is evenly distributed on annular flexible hinge edge.
Preferably, there are four lower layer's flexible hinges, vertical is evenly distributed on annular flexible hinge edge.
The utility model has the advantages that:
1. design structure is compact, small volume；
2. driving using piezoelectric sheet driver, there is bidirectional-movement control ability；
3. realizing the adjustment of space six degree of freedom.
Detailed description of the invention
The utility model is further described with reference to the accompanying drawings and embodiments:
Fig. 1 is a kind of schematic view of the front view of space six-freedom micro displacement platform of the utility model；
Fig. 2 is the schematic cross-sectional view in the face A-A in attached drawing 1；
Fig. 3 is the schematic cross-sectional view in the face B-B in attached drawing 1；
Fig. 4 is a kind of schematic perspective view of space six-freedom micro displacement platform of the utility model；
Fig. 5 is that a kind of piezoelectric sheet driver A of space six-freedom micro displacement platform of the utility model or piezoelectric sheet drive
The schematic diagram of dynamic device B8 or piezoelectric sheet driver C9 or piezoelectric sheet driver D10；
Fig. 6 is that a kind of piezoelectric sheet driver A of space six-freedom micro displacement platform of the utility model or piezoelectric sheet drive
The energization of dynamic device B8 or piezoelectric sheet driver C9 or piezoelectric sheet driver D10 generates the schematic diagram of moment of flexure；
Fig. 7 be a kind of moving platform of space six-freedom micro displacement platform of the utility model along z to panning effect schematic diagram；
Fig. 8 is what a kind of moving platform of space six-freedom micro displacement platform of the utility model was rotated or rotated around x axis around y-axis
Effect diagram；
Fig. 9 is a kind of moving platform of space six-freedom micro displacement platform of the utility model around z-axis rotates effe schematic diagram；
Figure 10 be a kind of moving platform of space six-freedom micro displacement platform of the utility model along y to translation or along x to translation
Effect diagram；
Wherein: 1, silent flatform；2, moving platform；3, annular flexible hinge；4, cross flexible hinge；5, upper layer flexible hinge
Chain；6, lower layer's flexible hinge；7, piezoelectric sheet driver A；8, piezoelectric sheet driver B；9, piezoelectric sheet driver C；10, it presses
Electric thin slice driver D.
Specific embodiment
Embodiment:
As shown in Figs 1-4, a kind of space six-freedom micro displacement platform, including silent flatform 1, moving platform 2, flexible hinge and thin
Piece driver；Flexible hinge includes annular flexible hinge 3, cross flexible hinge 4, upper layer flexible hinge 5, lower layer's flexible hinge
6；Thin slice driver includes piezoelectric sheet driver A7, piezoelectric sheet driver B8, piezoelectric sheet driver C9 and piezoelectric sheet
Driver D10；Annular flexible hinge 3 is provided between the silent flatform 1 and moving platform 2；The upper end of the annular flexible hinge 3
Upper layer flexible hinge 5 is vertically arranged on the edge in face, and upper layer flexible hinge 5 is connect with the lower end surface of moving platform 2；The ring
Lower layer's flexible hinge 6, and lower layer's flexible hinge 6 and silent flatform 1 are vertically arranged on the edge of the lower end surface of shape flexible hinge 3
Upper surface connection；The upper layer flexible hinge 5 and lower layer's flexible hinge 6 are interspersed, and angle is 45 °；The upper layer is flexible
There are four hinges 5, the vertical edge for being evenly distributed on annular flexible hinge 3；There are four lower layer's flexible hinges 6, vertically
The edge for being evenly distributed on annular flexible hinge 3；Cross flexible hinge 4 is provided in the annular flexible hinge 3；It is described
The lower end surface of four stabilizer blades of cross flexible hinge 4 is provided with piezoelectric sheet driver A7；The cross flexible hinge 4
Four stabilizer blades the same direction side on be provided with piezoelectric sheet driver B8；The one of the cross flexible hinge 4
The other side face of a stabilizer blade is provided with piezoelectric sheet driver C9；A stabilizer blade adjacent with piezoelectric sheet driver C9 it is another
Outer one side is provided with piezoelectric sheet driver D10.
As seen in figs. 5-6, the thin slice driver can be piezoelectric material, and magnetostriction materials etc. have expansion performance
Material.When the utility model cases of design is tested, using piezoelectric sheet driver；The piezoelectric sheet driver A7, pressure
Electric thin slice driver B8, piezoelectric sheet driver C9 and piezoelectric sheet driver D10 generate moment of flexure by control voltage；Such as Fig. 7
It is shown, the lower end surface piezoelectric sheet driver A7 collective effect of four four stabilizer blades that cross flexible hinge 4 is set, driving
Annular flexible hinge 3, cross flexible hinge 4 and upper layer flexible hinge 5 push moving platform 2 along z to translation, wherein dotted line frame
3 ' indicate that annular flexible hinge initial positions, moving platform 2 are along z to the position after translation；As shown in figure 8, opposite piezoelectricity is thin
Piece driver A7 is acted on two-by-two, drives annular flexible hinge 3, cross flexible hinge 4 and upper layer flexible hinge 5, is pushed dynamic flat
Platform 2 is rotated or is rotated around x axis around y-axis, and wherein dotted line frame 3 ' indicates that annular flexible hinge initial position, moving platform 2 are around y-axis
Position after rotating or rotating around x axis；As shown in figure 9, four four stabilizer blades for being arranged in cross flexible hinge 4 is identical
Piezoelectric sheet driver B8 collective effect on the side in direction, drives annular flexible hinge 3, cross flexible hinge 4 and upper
Layer flexible hinge 5, pushes moving platform 2 to rotate around z-axis, and wherein solid box 3 ' indicates annular flexible hinge initial position, moving platform 2
For around the postrotational position of z-axis；As shown in Figure 10, the piezoelectric sheet driver C9 and ipsilateral piezoelectric sheet driver B8 in opposite is total
Same-action drives annular flexible hinge 3, cross flexible hinge 4 and upper layer flexible hinge 5, pushes moving platform 2 along y to translation,
Piezoelectric sheet driver D10 and the ipsilateral piezoelectric sheet driver B8 collective effect in opposite drive annular flexible hinge 3, cross
Shape flexible hinge 4 and upper layer flexible hinge 5 push moving platform 2 along x to translation, and wherein dotted line frame 5 ' indicates upper layer shape flexible hinge
Chain initial position, moving platform 2 are to translation or along x along y to the position after translation.
The above embodiments are only illustrative of the principle and efficacy of the utility model, and not for limitation, this is practical new
Type.Any person skilled in the art can all carry out above-described embodiment under the spirit and scope without prejudice to the utility model
Modifications and changes.Therefore, such as those of ordinary skill in the art without departing from the revealed of the utility model
All equivalent modifications or change completed under spirit and technical idea, should be covered by the claim of the utility model.
Claims (5)
1. a kind of space six-freedom micro displacement platform, it is characterised in that: driven including silent flatform, moving platform, flexible hinge and thin slice
Dynamic device；Flexible hinge includes annular flexible hinge, cross flexible hinge, upper layer flexible hinge, lower layer's flexible hinge, thin slice drive
Dynamic device includes piezoelectric sheet driver A, piezoelectric sheet driver B, piezoelectric sheet driver C and piezoelectric sheet driver D；It is described
Annular flexible hinge is provided between silent flatform and moving platform；It is vertically arranged on the edge of the upper surface of the annular flexible hinge
There is upper layer flexible hinge, and the lower end surface of upper layer flexible hinge and moving platform connects；The lower end surface of the annular flexible hinge
Lower layer's flexible hinge is vertically arranged on edge, and the upper surface of lower layer's flexible hinge and silent flatform connects；The annular flexible
Cross flexible hinge is provided in hinge；It is thin that the lower end surface of four stabilizer blades of the cross flexible hinge is provided with piezoelectricity
Piece driver A；Piezoelectric sheet driving is provided on the side of the same direction of four stabilizer blades of the cross flexible hinge
Device B；The other side face of one stabilizer blade of the cross flexible hinge is provided with piezoelectric sheet driver C；With piezoelectric sheet
The other side face of a driver C adjacent stabilizer blade is provided with piezoelectric sheet driver D.
2. a kind of space six-freedom micro displacement platform according to claim 1, it is characterised in that: the thin slice driver is
Material with expansion performance.
3. a kind of space six-freedom micro displacement platform according to claim 1, it is characterised in that: the upper layer flexible hinge
It is interspersed with lower layer flexible hinge.
4. a kind of space six-freedom micro displacement platform according to claim 1, it is characterised in that: the upper layer flexible hinge
There are four, vertical is evenly distributed on annular flexible hinge edge.
5. a kind of space six-freedom micro displacement platform according to claim 1, it is characterised in that: lower layer's flexible hinge
There are four, vertical is evenly distributed on annular flexible hinge edge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822185058.4U CN209425389U (en) | 2018-12-25 | 2018-12-25 | A kind of space six-freedom micro displacement platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822185058.4U CN209425389U (en) | 2018-12-25 | 2018-12-25 | A kind of space six-freedom micro displacement platform |
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| Publication Number | Publication Date |
|---|---|
| CN209425389U true CN209425389U (en) | 2019-09-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822185058.4U Withdrawn - After Issue CN209425389U (en) | 2018-12-25 | 2018-12-25 | A kind of space six-freedom micro displacement platform |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109531519A (en) * | 2018-12-25 | 2019-03-29 | 西交利物浦大学 | A kind of space six-freedom micro displacement platform |
-
2018
- 2018-12-25 CN CN201822185058.4U patent/CN209425389U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109531519A (en) * | 2018-12-25 | 2019-03-29 | 西交利物浦大学 | A kind of space six-freedom micro displacement platform |
| CN109531519B (en) * | 2018-12-25 | 2024-04-02 | 西交利物浦大学 | Spatial six-degree-of-freedom micro-motion platform |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20190924 Effective date of abandoning: 20240402 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20190924 Effective date of abandoning: 20240402 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |