CN209383857U - Cleaning device for substrate conveying fixture - Google Patents
Cleaning device for substrate conveying fixture Download PDFInfo
- Publication number
- CN209383857U CN209383857U CN201822038730.7U CN201822038730U CN209383857U CN 209383857 U CN209383857 U CN 209383857U CN 201822038730 U CN201822038730 U CN 201822038730U CN 209383857 U CN209383857 U CN 209383857U
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- CN
- China
- Prior art keywords
- substrate conveying
- cabinet
- connect
- conveying fixture
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model discloses a kind of cleaning devices for substrate conveying fixture, including cabinet, pedestal, gas collecting tube, slide bar, sliding block, telescopic cylinder and manipulator, pedestal is set in cabinet and connect with the inner wall of cabinet, chloroazotic acid rinse bath and two reverse osmosis water rinse baths are successively arranged on pedestal, hanging basket is set in chloroazotic acid rinse bath, for placing substrate conveying fixture；Slide bar is equipped in cabinet, the cylinder barrel of telescopic cylinder is connect by sliding block with slide bar, and the telescopic rod of telescopic cylinder is connect with manipulator, is used for hanged hanging basket；The opposite sides face of cabinet is equipped with combining glass, and the top of combining glass offers multiple ventholes, and each venthole passes through escape pipe and connect with gas collecting tube, and gas collecting tube is connect with pneumatic filter.The utility model can not only wash remaining gold in substrate conveying fixture, and substrate conveying fixture is recycled, and can recycle gold, can be handled exhaust gas, not can cause environmental pollution by pneumatic filter.
Description
Technical field
The utility model belongs to Hazardous Chemical Substances processing technology field, in particular to a kind of for the clear of substrate conveying fixture
Cleaning device.
Background technique
Would generally be gold-plated on substrate, gold plated substrate is transported to next process, therefore, meeting by substrate conveying clamp
Many gold are remained on substrate conveying clamp, if remaining gold is built up, not only will affect the conveying to substrate, but also gold is
Precious metal, unrenewable words will cause serious waste.Cleaned at present to substrate conveying member is when gold to recycle
What exposure carried out in air, not only recycling is not thorough, and the exhaust gas generated does not allow easily collecting otherwise processed, causes atmosphere dirt
Dye, endangers ambient enviroment and human health.
Utility model content
For the technical problems in the prior art, the utility model provides a kind of cleaning for substrate conveying fixture
Device.
In order to solve the above technical problems, the technical solution adopted in the utility model is:
A kind of cleaning device for substrate conveying fixture, cabinet, pedestal, gas collecting tube, slide bar, sliding block including rectangle,
Telescopic cylinder and manipulator, the pedestal are rectangle, are set in cabinet and connect with the inner wall of cabinet, on the pedestal successively
Equipped with chloroazotic acid rinse bath and two reverse osmosis water rinse baths, hanging basket is set in the chloroazotic acid rinse bath, for placing substrate conveying clamp
Tool；Slide bar is equipped in the cabinet, the cylinder barrel of the telescopic cylinder is connect by sliding block with slide bar, and the telescopic cylinder stretches
Bar is connect with manipulator, is used for hanged hanging basket；The opposite sides face of the cabinet is equipped with combining glass, the combining glass
Top offers multiple ventholes, and each venthole passes through escape pipe and connect with gas collecting tube, and the gas collecting tube is set to cabinet
Top, and be located in cover, the top of the cover is equipped with pneumatic filter.
Preferably, the outside of the cylinder barrel of the telescopic cylinder is socketed with anticorrosion cover, the outer wall and cunning of the shield
Block connection, the anticorrosion cover are connected by the cylinder barrel of screw and telescopic cylinder.
Preferably, the sliding block has n shape slot.
Preferably, the lower end of the anticorrosion cover has tapped opening, for the protective case that is spirally connected, the protection
The inner wall of set is equipped with groove, and for placing sealing ring, the sealing ring is contacted with the telescopic rod of telescopic cylinder.
Preferably, the gas collecting tube is set as two, two gas collecting tubes pass through intermediate tube respectively and appendix connects
It connects.
Preferably, the top of the pneumatic filter is equipped with three layer filtration cotton.
Preferably, the material of the manipulator, slide bar and sliding block is anticorrosion material.
This practical new novel cleaning device for substrate conveying fixture, has the advantages that the utility model
It is by telescopic cylinder cooperative mechanical hand that the hanging basket for holding substrate conveying fixture is successively reverse osmosis clear in chloroazotic acid rinse bath and two
It is impregnated in washing trough, can not only wash remaining gold in substrate conveying fixture, substrate conveying fixture is recycled, and
Gold can be recycled.In addition impregnating the exhaust gas generated during substrate conveying fixture can be handled by pneumatic filter, will not
It pollutes the environment.
Detailed description of the invention
Fig. 1 is the schematic view of the front view of the cleaning device for substrate conveying fixture in the utility model；
Fig. 2 is the A enlarged structure schematic diagram in Fig. 1；
Fig. 3 is the slide bar of the cleaning device for substrate conveying fixture in the utility model and the side view knot of anticorrosion set
Structure schematic diagram；
Fig. 4 is the sectional structure signal of the protective case of the cleaning device for substrate conveying fixture in the utility model
Figure；
Fig. 5 is the schematic diagram of the hanging basket of the cleaning device for substrate conveying fixture in the utility model.
Specific embodiment
It is with reference to the accompanying drawing and specific real to make those skilled in the art better understand the technical solution of the utility model
Example is applied to elaborate to the utility model.
As shown in Figures 1 to 5, a kind of cleaning device for substrate conveying fixture, cabinet 1, pedestal 2 including rectangle,
Gas collecting tube 3, slide bar 4, telescopic cylinder 5 and manipulator 6, pedestal 2 are rectangle, are set in cabinet 1 and connect with the inner wall of cabinet 1
It connects, is successively arranged chloroazotic acid rinse bath 7 and the first RO water rinse bath 8, the 2nd RO water rinse bath 9 on pedestal 2, in chloroazotic acid rinse bath 7
If hanging basket 10, for placing substrate conveying fixture；Slide bar 4 is equipped in cabinet 1, the cylinder barrel of telescopic cylinder 5 by sliding block 12 and is slided
Bar 4 connects, and the telescopic rod of telescopic cylinder 5 is connect with manipulator 6, is used for hanged hanging basket 10.Manipulator 6, slide bar 4 and sliding block 12
Material is anticorrosion material.Chloroazotic acid rinse bath 7 and the first RO water rinse bath 8, the 2nd RO water rinse bath 9 are respectively equipped with feed liquor
Mouth and liquid outlet (not shown)；The opposite sides face of cabinet 1 is equipped with combining glass 15, and the top of combining glass 15 opens up
Have multiple ventholes (being not shown due to blocking), each venthole passes through escape pipe 16 and connect with gas collecting tube 3, gas collecting tube 3
It set on the top of cabinet 1, is placed in cover 11, the top of cover 11 is equipped with pneumatic filter 13, the top of pneumatic filter 13
Portion is equipped with three layer filtration cotton 8 and further decreases the pollution to environment to achieve the purpose that further to purify gas.
In the present embodiment, the outside of the cylinder barrel of telescopic cylinder 5 is socketed with anticorrosion cover 14, corrodes flexible gas to avoid gas
The outer wall of the cylinder barrel of cylinder, anticorrosion cover 14 is connect with sliding block 12, and anticorrosion cover 14 is connected by the cylinder barrel of screw 19 and telescopic cylinder 5
It connects.Sliding block 12 has n shape slot.
In order to further strengthen the anticorrosion ability of telescopic cylinder, the lower end of anticorrosion cover 14 has tapped spacious
Mouthful, for the protective case 16 that is spirally connected, the inner wall of protective case 16 is equipped with groove, for placing sealing ring 17, sealing ring 17 and flexible gas
The telescopic rod of cylinder 5 contacts.
In the present embodiment, gas collecting tube 3 is set as two, and two gas collecting tubes 3 pass through intermediate tube 18 and pneumatic filter respectively
13 connections.
The cleaning device for substrate conveying fixture in the utility model when in use, chloroazotic acid rinse bath 7 and the first RO
Chloroazotic acid and reverse osmosis water are each led into water rinse bath 8, the 2nd RO water rinse bath 9, will first hold the hanging basket of substrate conveying fixture
10 are placed in chloroazotic acid rinse bath 7, are put into the first RO after then slinging hanging basket 10 by control manipulator 6 and telescopic cylinder 5
Water rinse bath 8 impregnates, then hanging basket 10 is put into the 2nd RO water rinse bath 9 and is impregnated, and finally opens the taking-up of cabinet 1 and holds and has dissolved
Fall the hanging basket 10 of the substrate conveying fixture of gold, chloroazotic acid rinse bath 7 and the first RO water rinse bath 8, the 2nd RO water rinse bath 9 can be determined
Phase recycles gold.For hanging basket 10 in soaking process, the gas generated in cabinet 1 enters gas collecting tube 3 by escape pipe 16, then
Enter pneumatic filter 13 by intermediate tube 18, purified gas is discharged into atmosphere.
Above embodiments are only the exemplary embodiment of the utility model, are not used in limitation the utility model, this is practical new
The protection scope of type is defined by the claims.Those skilled in the art can be in the essence and protection scope of the utility model
It is interior, various modifications or equivalent replacements are made to the utility model, this modification or equivalent replacement also should be regarded as falling in originally practical new
In the protection scope of type.
Claims (7)
1. a kind of cleaning device for substrate conveying fixture, which is characterized in that cabinet, pedestal including rectangle, gas collecting tube, cunning
Bar, sliding block, telescopic cylinder and manipulator, the pedestal are rectangle, are set in cabinet and connect with the inner wall of cabinet, the bottom
It is successively arranged chloroazotic acid rinse bath and two reverse osmosis water rinse baths on seat, hanging basket is set in the chloroazotic acid rinse bath, for placing base
Plate conveying fixture；Slide bar is equipped in the cabinet, the cylinder barrel of the telescopic cylinder is connect by sliding block with slide bar, the flexible gas
The telescopic rod of cylinder is connect with manipulator, is used for hanged hanging basket；The opposite sides face of the cabinet is equipped with combining glass, described
Top depending on glass offers multiple ventholes, and each venthole passes through escape pipe and connect with gas collecting tube, and the gas collecting tube is set
In the top of cabinet, and it is located in cover, the top of the cover is equipped with pneumatic filter.
2. the cleaning device according to claim 1 for substrate conveying fixture, which is characterized in that the telescopic cylinder
The outside of cylinder barrel is socketed with anticorrosion cover, and the outer wall of the anticorrosion cover is connect with sliding block, the anticorrosion cover by screw with
The cylinder barrel of telescopic cylinder connects.
3. the cleaning device according to claim 2 for substrate conveying fixture, which is characterized in that the sliding block has n
Shape slot.
4. the cleaning device according to claim 2 for substrate conveying fixture, which is characterized in that the anticorrosion cover
Lower end has tapped opening, and for the protective case that is spirally connected, the inner wall of the protective case is equipped with groove, for placing sealing
Circle, the sealing ring are contacted with the telescopic rod of telescopic cylinder.
5. a kind of cleaning device for substrate conveying fixture according to claim 1, which is characterized in that the gas collecting tube
Two are set as, two gas collecting tubes pass through intermediate tube respectively and connect with appendix.
6. the cleaning device according to claim 1 for substrate conveying fixture, which is characterized in that the pneumatic filter
Top be equipped with three layer filtration cotton.
7. the cleaning device according to any one of claims 1 to 6 for substrate conveying fixture, which is characterized in that described
The material of manipulator, slide bar and sliding block is anticorrosion material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822038730.7U CN209383857U (en) | 2018-12-05 | 2018-12-05 | Cleaning device for substrate conveying fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822038730.7U CN209383857U (en) | 2018-12-05 | 2018-12-05 | Cleaning device for substrate conveying fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209383857U true CN209383857U (en) | 2019-09-13 |
Family
ID=67870753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822038730.7U Active CN209383857U (en) | 2018-12-05 | 2018-12-05 | Cleaning device for substrate conveying fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209383857U (en) |
-
2018
- 2018-12-05 CN CN201822038730.7U patent/CN209383857U/en active Active
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