CN209344127U - A kind of on-line monitoring equipment of perovskite manufacture of solar cells - Google Patents
A kind of on-line monitoring equipment of perovskite manufacture of solar cells Download PDFInfo
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- CN209344127U CN209344127U CN201822232691.4U CN201822232691U CN209344127U CN 209344127 U CN209344127 U CN 209344127U CN 201822232691 U CN201822232691 U CN 201822232691U CN 209344127 U CN209344127 U CN 209344127U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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Abstract
The utility model relates to a kind of on-line monitoring equipments of perovskite manufacture of solar cells, including color analysis application and/or temperature testing device and data processing feedback system, color analysis application includes color detection head, and temperature testing device includes temperature probe.Perovskite solar cell substrates, which are placed in vacuum sealing cabin, carries out vapor deposition processing, the evaporation source for being evaporated control system control is provided in sealed compartment, color detection head and temperature probe are respectively aligned to perovskite solar cell substrates surface or rear surface regions, the analysis data feedback of data processing feedback system to evaporation control system.The utility model controls its reaction process by all kinds of performance parameters in monitoring perovskite thin film production process, improves the repeatability of each batch perovskite thin film production.
Description
Technical field
The utility model relates to the technical field of perovskite manufacture of solar cells equipment, in particular to a kind of perovskite is too
The on-line monitoring equipment of positive energy battery production.
Background technique
Solar battery is a kind of electrooptical device, is converted solar energy into electrical energy using the photovoltaic effect of semiconductor.
It is developed so far, solar power generation has become the most important renewable energy in addition to hydroelectric generation and wind-power electricity generation.It is current in
Commercialized semiconductor has monocrystalline silicon, polysilicon, amorphous silicon, cadmium telluride, copper indium gallium selenide etc., but energy consumption is high, at high cost mostly.
In recent years, a kind of perovskite solar battery receives significant attention, and this perovskite solar battery is with organic gold
Category halide is light absorbing layer.Perovskite is ABX3The cuboctahedron structure of type.The thin film solar electricity of such material preparation
Pool process is easy, production cost is low, stable and high conversion rate.So far from 2009, photoelectric conversion efficiency is promoted to 22% from 3.8%
More than, it has been higher than commercialized crystal silicon solar batteries and there is biggish cost advantage.
Various perovskite solar battery thin film moulding process can be divided into two major classes: solwution method and vapor phase method.Solwution method behaviour
Make simplicity, but film uniformity, poor repeatability, influences the efficiency of battery.Vapor phase method has double source coevaporation method, gas phase assisted solution
The methods of method, chemical vapor deposition (CVD), wherein it is thick can to prepare uniform crystal grain, big crystal grain size, surface for gas phase solution auxiliary law
The small perovskite thin film of rugosity, but the repeatability of each batch is to be improved.
Utility model content
Technical problem to be solved by the utility model is to provide a kind of online prisons of perovskite manufacture of solar cells
Measurement equipment, all kinds of performance parameters in production process by monitoring perovskite thin film, controls its reaction process, improves each batch
The repeatability of perovskite thin film production.
The utility model is realized in this way providing a kind of on-line monitoring equipment of perovskite manufacture of solar cells, wrap
The color analysis application for analyzing perovskite solar cell substrates surface or back side color is included, and/or too for perovskite
The temperature testing device and data processing feedback system of positive energy cell substrate surface or back temperature measurement, the color point
Analysis apparatus includes color detection head and color signal processor, and the color data of the color detection head measurement passes through color signal
It is transmitted to data processing feedback system after processor processing, the temperature testing device includes temperature probe and processes temperature signal
Device, the temperature data of the temperature probe measurement are transmitted to data processing feedback system after handling by temperature signal processor.
The perovskite solar cell substrates, which are placed in vacuum sealing cabin, carries out vapor deposition processing, in the vacuum sealing cabin
It is provided with the heating device of heating perovskite solar cell substrates, and is evaporated the evaporation source of control system control, the face
Color detecting head and temperature probe are respectively aligned to perovskite solar cell substrates surface or rear surface regions, the data processing feedback
The analysis data feedback of system is to evaporation control system.
Further, the color analysis application is RGB color degree instrument, and the color detection head is that RGB detects camera, institute
Stating color signal processor is rgb signal processor, and the RGB detection camera includes LED light circle and camera, the LED
The outer ring of camera is arranged in lamp ring.
Further, the temperature testing device is infrared radiation thermometer, and the temperature probe is infrared temperature probe, described
Temperature signal processor is infrared temperature processor.
Further, the on-line monitoring equipment further includes velocity sensor, and the velocity sensor is placed in evaporation source
Between RGB detection camera, the velocity sensor is connect with evaporation control system.
Further, the on-line monitoring equipment further includes thickness transducer, and the thickness transducer is placed in evaporation source
Between RGB detection camera, the thickness transducer is connect with evaporation control system.
Compared with prior art, the on-line monitoring equipment of the perovskite manufacture of solar cells of the utility model, to calcium titanium
The film that its surface deposition generates in the vapor deposition production process of mine solar cell substrates carries out interim or continuity test, leads to
Data processing feedback system automatic adjustment evaporation plating parameter is crossed, to reach control vapor deposition reaction process, improves each batch perovskite
The repeated purpose of film production.The utility model can prepare perovskite solar battery thin in conjunction with all kinds of gas evaporation equipment
Film, all kinds of performance parameters in different moments or interim monitoring perovskite thin film production process, to control the change of film
Reaction process is learned, makes metal halide and halide vapor fully reacting, while controlling the homogeneity of film thickness, improves simultaneously
The repeatability of each batch perovskite thin film production.
Detailed description of the invention
Fig. 1 is that the solid of one preferred embodiment of on-line monitoring equipment of the utility model perovskite manufacture of solar cells is shown
It is intended to；
Fig. 2 is the end view of the color detection head in Fig. 1；
The curve that the position Fig. 3 RGB parameter changes over time.
Specific embodiment
In order to which technical problem to be solved in the utility model, technical solution and beneficial effect is more clearly understood, with
Lower combination accompanying drawings and embodiments, the present invention will be further described in detail.It should be appreciated that specific reality described herein
It applies example to be only used to explain the utility model, is not used to limit the utility model.
Illustrate the production method of existing perovskite solar battery thin film first.
The first step deposits transport layer or transport layer and one or more metal halide BX on the glass substrate first2It is thin
Film, metal halide BX2Film can be prepared using the methods of spin coating, blade coating, printing, vacuum deposition.
Perovskite solar cell substrates prepared by the first step are put into vacuum sealing cabin and carry out vapor deposition processing by second step,
One or more evaporation source evaporation reactant AX and/or BX are placed in lower section in sealed compartment2, evaporation reactant AX and metal halide
Object BX2It carries out chemical reaction and generates ABX3Type film, BX2It may be from the metal halide film prepared in the first step or evaporation source.
Perovskite solar cell substrates, which are taken out, after the completion of third step, vapor deposition carries out following process.
In the first step and/or second step, B is divalent metal, can for lead, tin, tungsten, copper, zinc, gallium, germanium, arsenic,
Selenium, rhodium, palladium, silver, cadmium, indium, antimony, osmium, iridium, platinum, gold, mercury, thallium, bismuth, any one cation in polonium, X be iodine, bromine, chlorine, in astatine
Any one anion.BX2Film thickness is in 80nm ~ 300nm.
In second step, A is arbitrary a kind of cation in caesium, rubidium, amido, amidino groups or alkali family, X be iodine, bromine, chlorine,
Any one anion in astatine.The perovskite ABX of preparation3Type film thickness is 100nm ~ 500nm.
It please refers to shown in Fig. 1, the preferable implementation of the on-line monitoring equipment of the utility model perovskite manufacture of solar cells
Example is suitable for preparing perovskite solar battery and other photoelectric devices above-mentioned.The utility model perovskite solar battery
The on-line monitoring equipment of production includes for analyzing the color analysis application 1 of 6 surface color of perovskite solar cell substrates, using
Substance is evaporated in the temperature testing device 2 of 6 surface temperature measurement of perovskite solar cell substrates, for monitoring evaporation source 9
The rate of climb velocity sensor 3, be evaporated at the thickness transducer 4 and data of substance thickness for monitoring evaporation source 9
Manage feedback system 5.
The color analysis application 1 includes color detection head 11 and color signal processor 12.The color detection head 11
The color data of measurement is transmitted to data processing feedback system 5 after handling by color signal processor 12.In the present embodiment,
The color analysis application 1 is RGB color degree instrument, and the color detection head 11 is that RGB detects camera, the color signal processing
Device 12 is rgb signal processor.The RGB detection camera includes LED light circle 13 and camera 14, and the LED light circle 13 is set
It sets in the outer ring of camera 14, as shown in Figure 2.
The temperature testing device 2 includes temperature probe 21 and temperature signal processor 22.The temperature probe 21 measures
Temperature data by temperature signal processor 22 handle after be transmitted to data processing feedback system 5.
The perovskite solar cell substrates 6, which are placed in vacuum sealing cabin 7, carries out vapor deposition processing.Described true
Heating device 8 is provided at the top of the inner wall of empty sealed compartment 7.The substrate 6 of the perovskite solar battery is placed on heating device 8
Lower part.The evaporation source 9 for being evaporated control system control is provided in the inner wall bottom surface in the vacuum sealing cabin 7.In this implementation
In example, multiple evaporation sources 9 are provided in the vacuum sealing cabin 7.The color detection head 11 and temperature probe 21 are respectively set
In the lower section of perovskite solar cell substrates 6, and it is respectively aligned to 6 surface region of perovskite solar cell substrates.The number
According to the analysis data feedback of processing feedback system 5 to evaporation control system (not shown).
In the present embodiment, the temperature testing device 2 is infrared radiation thermometer, and the temperature probe 21 is infrared measurement of temperature spy
Head, the temperature signal processor 22 are infrared temperature processor.
The velocity sensor 3 is placed on the top of evaporation source 9 and is located between evaporation source 9 and RGB detection camera, institute
Velocity sensor 3 is stated to connect with evaporation control system.
The thickness transducer 4 is placed on the top of evaporation source 9 and is located between evaporation source 9 and RGB detection camera, institute
Thickness transducer 4 is stated to connect with evaporation control system.
Color analysis application 1 and temperature testing device 2 can collectively or individually use in various vapo(u)rization systems, can also be with it
He is used in combination test method.Color analysis application 1 and temperature testing device 2 testing time during the reaction and between the time
Every can be arranged in data processing feedback system 5.
With the progress of reaction, perovskite solar cell substrates thickness gradually thickens, perovskite solar cell substrates
Color gradually deepens brown or close to black, rgb signal processor can analyze color by transparent, provide RGB and/or
Thickness parameter versus time curve, and by this data feedback in vapo(u)rization system, to automatically control reaction process.
Illustrate that the on-line monitoring of perovskite manufacture of solar cells in the utility model is set combined with specific embodiments below
Standby monitoring device and its monitoring method.
Example 1
A kind of monitoring device of the on-line monitoring equipment of perovskite manufacture of solar cells, please refer to shown in attached Fig. 1 and 2
Line monitoring device structural schematic diagram, uses following steps to be monitored:
(1) by 10*10cm2Ito glass plate successively through dish washing liquid, deionized water, acetone, each cleaning of isopropanol ultrasound
30min, then use N210min is handled through UV O-zone after drying.
(2) PEDOT:PSS film is prepared as hole transmission layer by knife coating, 90 DEG C ~ 150 DEG C drying 5min ~
20min。
(3) PbI is separately added into two evaporation sources in vacuum sealing cabin2And MAI, by the perovskite solar-electricity of preparation
Pond substrate 6 is placed in vacuum sealing cabin 7, and control cabinet air pressure is in 10-5Pa~105Pa opens the evaporation source 9 in vacuum sealing cabin 7
Chemical substance vapor deposition processing, PbI are carried out to perovskite solar cell substrates 62Evaporation rate with MAI is 0.5-0.8A/s.
(4) color analysis application 1 is opened, the color detection head 11 shoots perovskite solar battery base in real time
The color on 6 surface of piece and by 12 reception of color signal processor handle after be transmitted to data processing feedback system 5, the color
Signal processor 12 is analyzed by RGB color understands each 6 surface of stage perovskite solar cell substrates deposition in reaction process
The color change of film is compared and analyzed using the film color of known color change rule and captured in real-time and judges calcium titanium
The extent of reaction of 6 surface film of mine solar cell substrates, when film thickness and RGB parameter reach system setting, by substrate from
Vapor deposition takes out in cabin.
(5) redeposited electron transfer layer PCBM, thick 20-50nm on substrate.
(7) perovskite solar battery is made in evaporation metal conductive layer Ag electrode.
Such as Fig. 3, for the curve that RGB parameter in system and film thickness change over time, when reaction to 100min, RGB and
Film thickness parameter reaches system setting range, and reaction stops, substrate is taken out out of sealed compartment.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (5)
1. a kind of on-line monitoring equipment of perovskite manufacture of solar cells, which is characterized in that including for analyzing perovskite too
It is positive can cell substrate surface or back side color color analysis application, and/or for perovskite solar cell substrates surface or
The temperature testing device and data processing feedback system, the color analysis application of back temperature measurement include color detection
Head and color signal processor, the color data of the color detection head measurement are transmitted to after being handled by color signal processor
Data processing feedback system, the temperature testing device include temperature probe and temperature signal processor, and the temperature probe is surveyed
The temperature data of amount is transmitted to data processing feedback system, the perovskite solar-electricity after handling by temperature signal processor
Pond substrate, which is placed in vacuum sealing cabin, carries out vapor deposition processing, and heating perovskite is provided in the vacuum sealing cabin too
The heating device of positive energy cell substrate, and it is evaporated the evaporation source of control system control, the color detection head and temperature probe
It is respectively aligned to perovskite solar cell substrates surface or rear surface regions, the analysis data feedback of the data processing feedback system
To evaporation control system.
2. the on-line monitoring equipment of perovskite manufacture of solar cells as described in claim 1, which is characterized in that the color
Analytical equipment is RGB color degree instrument, and the color detection head is that RGB detects camera, and the color signal processor is rgb signal
Processor, the RGB detection camera includes LED light circle and camera, and the outer ring of camera is arranged in the LED light circle.
3. the on-line monitoring equipment of perovskite manufacture of solar cells as described in claim 1, which is characterized in that the temperature
Test device is infrared radiation thermometer, and the temperature probe is infrared temperature probe, and the temperature signal processor is infrared temperature
Processor.
4. the on-line monitoring equipment of perovskite manufacture of solar cells as described in claim 1, which is characterized in that described online
Monitoring device further includes velocity sensor, and the velocity sensor is placed between evaporation source and RGB detection camera, the speed
Degree sensor is connect with evaporation control system.
5. the on-line monitoring equipment of perovskite manufacture of solar cells as described in claim 1, which is characterized in that described online
Monitoring device further includes thickness transducer, and the thickness transducer is placed between evaporation source and RGB detection camera, the thickness
Degree sensor is connect with evaporation control system.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201822232691.4U CN209344127U (en) | 2018-12-28 | 2018-12-28 | A kind of on-line monitoring equipment of perovskite manufacture of solar cells |
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| CN201822232691.4U CN209344127U (en) | 2018-12-28 | 2018-12-28 | A kind of on-line monitoring equipment of perovskite manufacture of solar cells |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109449300A (en) * | 2018-12-28 | 2019-03-08 | 杭州纤纳光电科技有限公司 | A kind of on-line monitoring equipment and its monitoring method of perovskite manufacture of solar cells |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109449300A (en) * | 2018-12-28 | 2019-03-08 | 杭州纤纳光电科技有限公司 | A kind of on-line monitoring equipment and its monitoring method of perovskite manufacture of solar cells |
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