CN109449300A - A kind of on-line monitoring equipment and its monitoring method of perovskite manufacture of solar cells - Google Patents
A kind of on-line monitoring equipment and its monitoring method of perovskite manufacture of solar cells Download PDFInfo
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- CN109449300A CN109449300A CN201811623253.9A CN201811623253A CN109449300A CN 109449300 A CN109449300 A CN 109449300A CN 201811623253 A CN201811623253 A CN 201811623253A CN 109449300 A CN109449300 A CN 109449300A
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- perovskite
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 60
- 238000001704 evaporation Methods 0.000 claims abstract description 57
- 230000008020 evaporation Effects 0.000 claims abstract description 56
- 238000012545 processing Methods 0.000 claims abstract description 40
- 238000006243 chemical reaction Methods 0.000 claims abstract description 31
- 238000012360 testing method Methods 0.000 claims abstract description 28
- 238000001514 detection method Methods 0.000 claims abstract description 27
- 239000000523 sample Substances 0.000 claims abstract description 21
- 238000007789 sealing Methods 0.000 claims abstract description 20
- 238000007740 vapor deposition Methods 0.000 claims abstract description 16
- 230000008859 change Effects 0.000 claims description 12
- 238000007747 plating Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 238000012806 monitoring device Methods 0.000 claims description 5
- 238000009529 body temperature measurement Methods 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 2
- 238000010835 comparative analysis Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 abstract description 12
- 239000010408 film Substances 0.000 description 24
- 229910001507 metal halide Inorganic materials 0.000 description 5
- 150000005309 metal halides Chemical class 0.000 description 5
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- 150000001450 anions Chemical class 0.000 description 2
- 229910052789 astatine Inorganic materials 0.000 description 2
- RYXHOMYVWAEKHL-UHFFFAOYSA-N astatine atom Chemical compound [At] RYXHOMYVWAEKHL-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229920000144 PEDOT:PSS Polymers 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- MCEWYIDBDVPMES-UHFFFAOYSA-N [60]pcbm Chemical compound C123C(C4=C5C6=C7C8=C9C%10=C%11C%12=C%13C%14=C%15C%16=C%17C%18=C(C=%19C=%20C%18=C%18C%16=C%13C%13=C%11C9=C9C7=C(C=%20C9=C%13%18)C(C7=%19)=C96)C6=C%11C%17=C%15C%13=C%15C%14=C%12C%12=C%10C%10=C85)=C9C7=C6C2=C%11C%13=C2C%15=C%12C%10=C4C23C1(CCCC(=O)OC)C1=CC=CC=C1 MCEWYIDBDVPMES-UHFFFAOYSA-N 0.000 description 1
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 125000003368 amide group Chemical group 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
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- 230000005540 biological transmission Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical group [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 125000003739 carbamimidoyl group Chemical group C(N)(=N)* 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
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- 229910052802 copper Inorganic materials 0.000 description 1
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- 238000004851 dishwashing Methods 0.000 description 1
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- 238000005265 energy consumption Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052699 polonium Inorganic materials 0.000 description 1
- HZEBHPIOVYHPMT-UHFFFAOYSA-N polonium atom Chemical compound [Po] HZEBHPIOVYHPMT-UHFFFAOYSA-N 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical group [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/70—Testing, e.g. accelerated lifetime tests
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of on-line monitoring equipment of perovskite manufacture of solar cells, including color analysis application and/or temperature testing device and data processing feedback system, color analysis application includes color detection head, and temperature testing device includes temperature probe.Perovskite solar cell substrates, which are placed in vacuum sealing cabin, carries out vapor deposition processing, the evaporation source for being evaporated control system control is provided in sealed compartment, color detection head and temperature probe are respectively aligned to perovskite solar cell substrates surface or rear surface regions, the analysis data feedback of data processing feedback system to evaporation control system.The present invention also provides a kind of monitoring methods of the on-line monitoring equipment of perovskite manufacture of solar cells.The present invention controls its reaction process by all kinds of performance parameters in monitoring perovskite thin film production process, improves the repeatability of each batch perovskite thin film production.
Description
Technical field
The present invention relates to the technical field of perovskite manufacture of solar cells equipment, in particular to a kind of perovskite solar energy
The on-line monitoring equipment and its monitoring method of battery production.
Background technique
Solar battery is a kind of electrooptical device, is converted solar energy into electrical energy using the photovoltaic effect of semiconductor.
It is developed so far, solar power generation has become the most important renewable energy in addition to hydroelectric generation and wind-power electricity generation.It is current in
Commercialized semiconductor has monocrystalline silicon, polysilicon, amorphous silicon, cadmium telluride, copper indium gallium selenide etc., but energy consumption is high, at high cost mostly.
In recent years, a kind of perovskite solar battery receives significant attention, and this perovskite solar battery is with organic gold
Category halide is light absorbing layer.Perovskite is ABX3The cuboctahedron structure of type.The thin film solar electricity of such material preparation
Pool process is easy, production cost is low, stable and high conversion rate.So far from 2009, photoelectric conversion efficiency is promoted to 22% from 3.8%
More than, it has been higher than commercialized crystal silicon solar batteries and there is biggish cost advantage.
Various perovskite solar battery thin film moulding process can be divided into two major classes: solwution method and vapor phase method.Solwution method behaviour
Make simplicity, but film uniformity, poor repeatability, influences the efficiency of battery.Vapor phase method has double source coevaporation method, gas phase assisted solution
The methods of method, chemical vapor deposition (CVD), wherein it is thick can to prepare uniform crystal grain, big crystal grain size, surface for gas phase solution auxiliary law
The small perovskite thin film of rugosity, but the repeatability of each batch is to be improved.
Summary of the invention
Technical problem to be solved by the present invention lies in the on-line monitoring for providing a kind of perovskite manufacture of solar cells is set
Standby and its monitoring method, all kinds of performance parameters in production process by monitoring perovskite thin film, controls its reaction process, mentions
The repeatability of high each batch perovskite thin film production.
The invention is realized in this way a kind of on-line monitoring equipment of perovskite manufacture of solar cells is provided, including with
In analysis perovskite solar cell substrates surface or the color analysis application of back side color, and/or it is used for perovskite solar energy
The temperature testing device and data processing feedback system of cell substrate surface or back temperature measurement, the color analysis dress
It sets including color detection head and color signal processor, the color data of the color detection head measurement is handled by color signal
Data processing feedback system is transmitted to after device processing, the temperature testing device includes temperature probe and temperature signal processor,
The temperature data of the temperature probe measurement is transmitted to data processing feedback system after handling by temperature signal processor.It is described
Perovskite solar cell substrates, which are placed in vacuum sealing cabin, carries out vapor deposition processing, is arranged in the vacuum sealing cabin
There is the heating device of heating perovskite solar cell substrates, and be evaporated the evaporation source of control system control, the color is visited
Gauge head and temperature probe are respectively aligned to perovskite solar cell substrates surface or rear surface regions, the data processing feedback system
Analysis data feedback to evaporation control system.
Further, the color analysis application is RGB color degree instrument, and the color detection head is that RGB detects camera, institute
Stating color signal processor is rgb signal processor, and the RGB detection camera includes LED light circle and camera, the LED
The outer ring of camera is arranged in lamp ring.
Further, the temperature testing device is infrared radiation thermometer, and the temperature probe is infrared temperature probe, described
Temperature signal processor is infrared temperature processor.
Further, the on-line monitoring equipment further includes velocity sensor, and the velocity sensor is placed in evaporation source
Between RGB detection camera, the velocity sensor is connect with evaporation control system.
Further, the on-line monitoring equipment further includes thickness transducer, and the thickness transducer is placed in evaporation source
Between RGB detection camera, the thickness transducer is connect with evaporation control system.
The invention is realized in this way also providing a kind of on-line monitoring equipment of above-mentioned perovskite manufacture of solar cells
Monitoring method, comprising the following steps:
S1, the perovskite solar cell substrates are placed in vacuum sealing cabin, open the evaporation source pair in vacuum sealing cabin
Perovskite solar cell substrates carry out chemical substance vapor deposition processing；
S2, the color analysis application is opened, the color detection head shoots the perovskite sun after Chemistry Deposition in real time
Energy cell substrate surface or back side color change, and data processing feedback is transmitted to after handling by the reception of color signal processor
System, the color signal processor can be appreciated that each stage perovskite solar battery in reaction process by RGB color analysis
The color change at substrate surface or the back side, or carried out pair using the substrate color of known color change rule and captured in real-time
Than the extent of reaction for analyzing and determining perovskite solar cell substrates surface film, and feed back in the evaporation control system, from
And other evaporation plating parameters are adjusted by the evaporation control system, control reaction process；
And/or S3, the unlatching temperature testing device, the temperature probe test perovskite solar cell substrates table in real time
Then thus the temperature data at face or the back side is simultaneously transmitted to data processing feedback system after handling by temperature signal processor reception,
System feedback is in evaporation control system, to adjust other evaporation plating parameters by the evaporation control system, controls reaction process；
After processing is completed, communicated band or other modes are from vacuum sealing cabin for S4, perovskite solar cell substrates vapor deposition
It is interior to take out the perovskite solar cell substrates being deposited.
Further, in the reaction process of step S2 and/or S3, the color analysis application and/or temperature test dress
The testing time and time interval set are arranged by data processing feedback system.
Compared with prior art, the on-line monitoring equipment of perovskite manufacture of solar cells of the invention and its monitoring side
Method carries out the film that its surface deposition generates in the vapor deposition production process of perovskite solar cell substrates interim or continuous
Property test, by data processing feedback system automatically adjust evaporation plating parameter, thus reach control vapor deposition reaction process, improve each batch
The repeated purpose of secondary perovskite thin film production.The present invention can prepare perovskite solar-electricity in conjunction with all kinds of gas evaporation equipment
Pond film, all kinds of performance parameters in different moments or interim monitoring perovskite thin film production process, to control film
Chemical reaction course, make metal halide and halide vapor fully reacting, while controlling the homogeneity of film thickness, simultaneously
Improve the repeatability of each batch perovskite thin film production.
Detailed description of the invention
Fig. 1 is the three-dimensional signal of one preferred embodiment of on-line monitoring equipment of perovskite manufacture of solar cells of the present invention
Figure；
Fig. 2 is the end view of the color detection head in Fig. 1；
The curve that the position Fig. 3 RGB parameter changes over time.
Specific embodiment
In order to which technical problems, technical solutions and advantages to be solved are more clearly understood, tie below
Accompanying drawings and embodiments are closed, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only
To explain the present invention, it is not intended to limit the present invention.
Illustrate the production method of existing perovskite solar battery thin film first.
The first step deposits transport layer or transport layer and one or more metal halide BX on the glass substrate first2It is thin
Film, metal halide BX2Film can be prepared using the methods of spin coating, blade coating, printing, vacuum deposition.
Perovskite solar cell substrates prepared by the first step are put into vacuum sealing cabin and carry out vapor deposition processing by second step,
One or more evaporation source evaporation reactant AX and/or BX are placed in lower section in sealed compartment2, evaporation reactant AX and metal halide
Object BX2It carries out chemical reaction and generates ABX3Type film, BX2It may be from the metal halide film prepared in the first step or evaporation source.
Perovskite solar cell substrates, which are taken out, after the completion of third step, vapor deposition carries out following process.
In the first step and/or second step, B is divalent metal, can for lead, tin, tungsten, copper, zinc, gallium, germanium, arsenic,
Selenium, rhodium, palladium, silver, cadmium, indium, antimony, osmium, iridium, platinum, gold, mercury, thallium, bismuth, any one cation in polonium, X be iodine, bromine, chlorine, in astatine
Any one anion.BX2Film thickness is in 80nm ~ 300nm.
In second step, A is arbitrary a kind of cation in caesium, rubidium, amido, amidino groups or alkali family, X be iodine, bromine, chlorine,
Any one anion in astatine.The perovskite ABX of preparation3Type film thickness is 100nm ~ 500nm.
It please refers to shown in Fig. 1, the preferred embodiment of the on-line monitoring equipment of perovskite manufacture of solar cells of the present invention, fits
It is used to prepare perovskite solar battery and other photoelectric devices above-mentioned.Perovskite manufacture of solar cells of the present invention it is online
Monitoring device includes for analyzing the color analysis application 1 of 6 surface color of perovskite solar cell substrates, being used for perovskite too
The temperature testing device 2 of positive energy 6 surface temperature measurement of cell substrate, the rate of climb for being evaporated substance for monitoring evaporation source 9
Velocity sensor 3, the thickness transducer 4 and data processing feedback system that are evaporated substance thickness for monitoring evaporation source 9
5。
The color analysis application 1 includes color detection head 11 and color signal processor 12.The color detection head 11
The color data of measurement is transmitted to data processing feedback system 5 after handling by color signal processor 12.In the present embodiment,
The color analysis application 1 is RGB color degree instrument, and the color detection head 11 is that RGB detects camera, the color signal processing
Device 12 is rgb signal processor.The RGB detection camera includes LED light circle 13 and camera 14, and the LED light circle 13 is set
It sets in the outer ring of camera 14, as shown in Figure 2.
The temperature testing device 2 includes temperature probe 21 and temperature signal processor 22.The temperature probe 21 measures
Temperature data by temperature signal processor 22 handle after be transmitted to data processing feedback system 5.
The perovskite solar cell substrates 6, which are placed in vacuum sealing cabin 7, carries out vapor deposition processing.Described true
Heating device 8 is provided at the top of the inner wall of empty sealed compartment 7.The substrate 6 of the perovskite solar battery is placed on heating device 8
Lower part.The evaporation source 9 for being evaporated control system control is provided in the inner wall bottom surface in the vacuum sealing cabin 7.In this implementation
In example, multiple evaporation sources 9 are provided in the vacuum sealing cabin 7.The color detection head 11 and temperature probe 21 are respectively set
In the lower section of perovskite solar cell substrates 6, and it is respectively aligned to 6 surface region of perovskite solar cell substrates.The number
According to the analysis data feedback of processing feedback system 5 to evaporation control system (not shown).
In the present embodiment, the temperature testing device 2 is infrared radiation thermometer, and the temperature probe 21 is infrared measurement of temperature spy
Head, the temperature signal processor 22 are infrared temperature processor.
The velocity sensor 3 is placed on the top of evaporation source 9 and is located between evaporation source 9 and RGB detection camera, institute
Velocity sensor 3 is stated to connect with evaporation control system.
The thickness transducer 4 is placed on the top of evaporation source 9 and is located between evaporation source 9 and RGB detection camera, institute
Thickness transducer 4 is stated to connect with evaporation control system.
Color analysis application 1 and temperature testing device 2 can collectively or individually use in various vapo(u)rization systems, can also be with it
He is used in combination test method.Color analysis application 1 and temperature testing device 2 testing time during the reaction and between the time
Every can be arranged in data processing feedback system 5.
With the progress of reaction, perovskite solar cell substrates thickness gradually thickens, perovskite solar cell substrates
Color gradually deepens brown or close to black, rgb signal processor can analyze color by transparent, provide RGB and/or
Thickness parameter versus time curve, and by this data feedback in vapo(u)rization system, to automatically control reaction process.
The present invention also provides a kind of monitoring method of the on-line monitoring equipment of above-mentioned perovskite manufacture of solar cells, packets
Include following steps:
S1, the perovskite solar cell substrates 6 are placed in vacuum sealing cabin 7, open the evaporation source in vacuum sealing cabin 7
9 pairs of perovskite solar cell substrates 6 carry out chemical substance vapor deposition processing.
S2, the color analysis application 1 is opened, the color detection head 11 shoots perovskite solar battery base in real time
The color on 6 surface of piece and by 12 reception of color signal processor handle after be transmitted to data processing feedback system 5, the color
Signal processor 12 can be appreciated that each 6 surface of stage perovskite solar cell substrates is heavy in reaction process by RGB color analysis
The color change of product film, or compare and analyze and sentence using the film color of known color change rule and captured in real-time
The extent of reaction and/or film thickness of disconnected 6 surface film of perovskite solar cell substrates, and feed back in the evaporation control system
System controls reaction process to adjust other evaporation plating parameters by the evaporation control system.
And/or S3, the unlatching temperature testing device 2, the temperature probe 21 test perovskite solar-electricity in real time
The temperature data on 6 surface of pond substrate and by 22 reception of temperature signal processor handle after be transmitted to data processing feedback system 5,
Thus system feedback is in evaporation control system again, to adjust other evaporation plating parameters by the evaporation control system, control is anti-
Answer process.
Utilize 21 stage of temperature probe or periodical test 6 surface temperature of perovskite solar cell substrates, it may be appreciated that
The temperature change of 6 surface deposition film of perovskite solar cell substrates in reaction process, so that evaporation plating parameter is adjusted, such as calcium titanium
The heating temperature etc. of mine solar cell substrates 6, to obtain optimized parameter condition；Known temperature variation curve can also be used
And sample temperature analysis in real time speculates the extent of reaction of 6 film of perovskite solar cell substrates in reaction, so that control is anti-
Answer process.
After processing is completed, communicated band or other modes are close from vacuum for S4, the perovskite solar cell substrates 6 vapor deposition
The perovskite solar cell substrates 6 being deposited are taken out in batten down 7.
In the reaction process of step S2 and/or S3, the test of the color analysis application 1 and/or temperature testing device 2
Number and time interval are arranged by data processing feedback system 5.
Illustrate the on-line monitoring equipment of perovskite manufacture of solar cells in the present invention combined with specific embodiments below
Monitoring device and its monitoring method.
Example 1
A kind of monitoring device of the on-line monitoring equipment of perovskite manufacture of solar cells, please refers to and supervises online shown in attached Fig. 1 and 2
Measurement equipment structural schematic diagram, uses following steps to be monitored:
(1) by 10*10cm2Ito glass plate successively through dish washing liquid, deionized water, acetone, each cleaning 30min of isopropanol ultrasound,
N is used again210min is handled through UV O-zone after drying.
(2) PEDOT:PSS film is prepared as hole transmission layer by knife coating, 90 DEG C ~ 150 DEG C drying 5min ~
20min。
(3) PbI is separately added into two evaporation sources in vacuum sealing cabin2And MAI, by the perovskite solar-electricity of preparation
Pond substrate 6 is placed in vacuum sealing cabin 7, and control cabinet air pressure is in 10-5Pa~105Pa opens the evaporation source 9 in vacuum sealing cabin 7
Chemical substance vapor deposition processing, PbI are carried out to perovskite solar cell substrates 62Evaporation rate with MAI is 0.5-0.8A/s.
(4) color analysis application 1 is opened, the color detection head 11 shoots perovskite solar battery base in real time
The color on 6 surface of piece and by 12 reception of color signal processor handle after be transmitted to data processing feedback system 5, the color
Signal processor 12 is analyzed by RGB color understands each 6 surface of stage perovskite solar cell substrates deposition in reaction process
The color change of film is compared and analyzed using the film color of known color change rule and captured in real-time and judges calcium titanium
The extent of reaction of 6 surface film of mine solar cell substrates, when film thickness and RGB parameter reach system setting, by substrate from
Vapor deposition takes out in cabin.
(5) redeposited electron transfer layer PCBM, thick 20-50nm on substrate.
(7) perovskite solar battery is made in evaporation metal conductive layer Ag electrode.
Such as Fig. 3, for the curve that RGB parameter in system and film thickness change over time, when reaction to 100min, RGB and
Film thickness parameter reaches system setting range, and reaction stops, substrate is taken out out of sealed compartment.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (7)
1. a kind of on-line monitoring equipment of perovskite manufacture of solar cells, which is characterized in that including for analyzing perovskite too
It is positive can cell substrate surface or back side color color analysis application, and/or for perovskite solar cell substrates surface or
The temperature testing device and data processing feedback system, the color analysis application of back temperature measurement include color detection
Head and color signal processor, the color data of the color detection head measurement are transmitted to after being handled by color signal processor
Data processing feedback system, the temperature testing device include temperature probe and temperature signal processor, and the temperature probe is surveyed
The temperature data of amount is transmitted to data processing feedback system, the perovskite solar-electricity after handling by temperature signal processor
Pond substrate, which is placed in vacuum sealing cabin, carries out vapor deposition processing, and heating perovskite is provided in the vacuum sealing cabin too
The heating device of positive energy cell substrate, and it is evaporated the evaporation source of control system control, the color detection head and temperature probe
It is respectively aligned to perovskite solar cell substrates surface or rear surface regions, the analysis data feedback of the data processing feedback system
To evaporation control system.
2. the on-line monitoring equipment of perovskite manufacture of solar cells as described in claim 1, which is characterized in that the color
Analytical equipment is RGB color degree instrument, and the color detection head is that RGB detects camera, and the color signal processor is rgb signal
Processor, the RGB detection camera includes LED light circle and camera, and the outer ring of camera is arranged in the LED light circle.
3. the on-line monitoring equipment of perovskite manufacture of solar cells as described in claim 1, which is characterized in that the temperature
Test device is infrared radiation thermometer, and the temperature probe is infrared temperature probe, and the temperature signal processor is infrared temperature
Processor.
4. the on-line monitoring equipment of perovskite manufacture of solar cells as described in claim 1, which is characterized in that described online
Monitoring device further includes velocity sensor, and the velocity sensor is placed between evaporation source and RGB detection camera, the speed
Degree sensor is connect with evaporation control system.
5. the on-line monitoring equipment of perovskite manufacture of solar cells as described in claim 1, which is characterized in that described online
Monitoring device further includes thickness transducer, and the thickness transducer is placed between evaporation source and RGB detection camera, the thickness
Degree sensor is connect with evaporation control system.
6. a kind of on-line monitoring equipment of the perovskite manufacture of solar cells as described in any one of claim 1 to 5
Monitoring method, which comprises the following steps:
S1, the perovskite solar cell substrates are placed in vacuum sealing cabin, open the evaporation source pair in vacuum sealing cabin
Perovskite solar cell substrates carry out chemical substance vapor deposition processing；
S2, the color analysis application is opened, the color detection head shoots after Chemistry Deposition perovskite too in real time
Positive energy cell substrate surface or back side color change, and it is anti-to be transmitted to data processing after handling by the reception of color signal processor
Feedback system, the color signal processor can be appreciated that each stage perovskite solar-electricity in reaction process by RGB color analysis
The color change at pond substrate surface or the back side, or carried out using known color change rule and the substrate color of captured in real-time
Comparative analysis judges the extent of reaction of perovskite solar cell substrates surface film, and feeds back in the evaporation control system,
To adjust other evaporation plating parameters by the evaporation control system, reaction process is controlled；
And/or S3, the unlatching temperature testing device, the temperature probe test perovskite solar cell substrates table in real time
Then thus the temperature data at face or the back side is simultaneously transmitted to data processing feedback system after handling by temperature signal processor reception,
System feedback is in evaporation control system, to adjust other evaporation plating parameters by the evaporation control system, controls reaction process；
After processing is completed, communicated band or other modes are from vacuum sealing cabin for S4, perovskite solar cell substrates vapor deposition
It is interior to take out the perovskite solar cell substrates being deposited.
7. the monitoring method of the on-line monitoring equipment of perovskite manufacture of solar cells as claimed in claim 6, feature exist
In, in the reaction process of step S2 and/or S3, the testing time of the color analysis application and/or temperature testing device with
Time interval is arranged by data processing feedback system.
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