CN209029418U - The on-line monitoring equipment of perovskite manufacture of solar cells process - Google Patents
The on-line monitoring equipment of perovskite manufacture of solar cells process Download PDFInfo
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- CN209029418U CN209029418U CN201821861158.8U CN201821861158U CN209029418U CN 209029418 U CN209029418 U CN 209029418U CN 201821861158 U CN201821861158 U CN 201821861158U CN 209029418 U CN209029418 U CN 209029418U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to a kind of on-line monitoring equipment of perovskite manufacture of solar cells process, including X-ray photoelectron spectroscopic analysis system, electronic system and analysis statistical system, X-ray photoelectron spectroscopic analysis system includes x-ray source, electron lens and electron energy analyzer, electron detector is set in electron energy analyzer, the x-ray bombardment of x-ray source transmitting generates light induced electron to perovskite solar cell substrates surface, electron lens receives above-mentioned photoelectron and is transmitted to electron detector, the photoelectron signal detected is transmitted to analysis statistical system by electronic system by electron detector, the analysis data feedback of statistical system is analyzed to evaporation control system.The performance parameter in production process that the utility model passes through monitoring perovskite thin film, controls its reaction process, improves the repeatability of each batch perovskite thin film production.
Description
Technical field
The utility model relates to the technical field of manufacture of solar cells equipment, in particular to a kind of perovskite solar-electricity
The on-line monitoring equipment of pond production process.
Background technique
Solar battery is a kind of electrooptical device, is converted solar energy into electrical energy using the photovoltaic effect of semiconductor.
It is developed so far, solar power generation has become the most important renewable energy in addition to hydroelectric generation and wind-power electricity generation.It is current in
Commercialized semiconductor has monocrystalline silicon, polysilicon, amorphous silicon, cadmium telluride, copper indium gallium selenide etc., but energy consumption is high, at high cost mostly.
In recent years, a kind of perovskite solar battery receives significant attention, and this perovskite solar battery is with organic gold
Category halide is light absorbing layer, crystalline structure ABX3The cuboctahedron structure of type.The film sun of such material preparation
Energy battery process is easy, production cost is low, stable and high conversion rate.So far from 2009, photoelectric conversion efficiency is mentioned from 3.8%
23% or more is risen to, shows huge commercial value.
Various perovskite solar battery thin film moulding process can be divided into two major classes: solwution method and vapor phase method.Solwution method behaviour
Make simplicity, but film uniformity, poor repeatability, influences the efficiency of battery.Vapor phase method has double source coevaporation method, gas phase assisted solution
The methods of method, chemical vapor deposition (CVD), wherein gas phase solution auxiliary law can prepare that crystal grain is uniform, crystallite dimension is big, surface is thick
The small perovskite thin film of rugosity, but the repeatability of each batch is to be improved.
Utility model content
Technical problem to be solved by the utility model is to provide a kind of perovskite manufacture of solar cells processes to exist
Line monitoring device, all kinds of performance parameters in production process by monitoring perovskite thin film, controls its reaction process, improves each
The repeatability of batch perovskite thin film production.
The utility model is realized in this way the on-line monitoring for providing a kind of perovskite manufacture of solar cells process is set
It is standby, including X-ray photoelectron spectroscopic analysis system, electronic system and analysis statistical system, the x-ray photoelectron spectroscopy
The x-ray photoelectron spectroscopy data of analysis system are transmitted to analysis statistical system, the x-ray photoelectron by electronic system
Energy spectrum analysis system includes x-ray source, electron lens and electron energy analyzer, is arranged in the electron energy analyzer
Electron detector, the x-ray source and electron lens are separately positioned on the both sides in vacuum sealing cabin, in the vacuum sealing
It is provided with the warm table of heating perovskite solar cell substrates in cabin, and is evaporated the evaporation source of control system control, institute
The x-ray bombardment for stating x-ray source transmitting generates light induced electron, the light induced electron warp to perovskite solar cell substrates surface
Electron lens receives and is transmitted to electron detector, and the photoelectron signal detected is passed through electronics system by the electron detector
System is transmitted to analysis statistical system, the analysis data feedback for analyzing statistical system to evaporation control system.
Further, the testing time of the X-ray photoelectron spectroscopic analysis system and time interval are by analyzing department of statistic
System setting.
Compared with prior art, the on-line monitoring equipment of the perovskite manufacture of solar cells process of the utility model, benefit
With x-ray bombardment perovskite solar cell substrates film, so that the inner electron or valence of molecule or atom electricity in thin-film material
Son obtains photoelectron spectroscopy by excitation-emission photoelectrons, by test light electron energy.Photoelectron spectroscopy can analyze calcium titanium
Information in terms of the element composition and content, chemical state, molecular structure, chemical bond of mine film, so as to analyze to obtain difference
The compounds content of film and the change curve of the extent of reaction under the stage of reaction or reaction condition, thus obtain it is optimal reaction or
Working condition obtains rule.Simultaneously in combination with known photoelectron spectroscopy, the extent of reaction of certain stage perovskite thin film is understood,
And by after analysis information feed back in evaporation control system, thus control perovskite solar cell substrates film reaction process or
Evaporation plating parameter understands the difference of each batch perovskite thin film, improves the repeatability of each batch perovskite thin film production.This is practical new
Type can prepare perovskite solar battery thin film in conjunction with all kinds of gas evaporation equipment, in different moments or interim monitoring calcium titanium
All kinds of performance parameters of mine film manufacturing processes make metal halide and halide to control the chemical reaction course of film
Steam reaction is complete.
Detailed description of the invention
Fig. 1 is the vertical of one preferred embodiment of on-line monitoring equipment of the utility model perovskite manufacture of solar cells process
Body schematic diagram；
Fig. 2 is that the XPS of lead element in perovskite thin film scans spectrogram.
Specific embodiment
In order to which technical problem to be solved in the utility model, technical solution and beneficial effect is more clearly understood, with
Lower combination accompanying drawings and embodiments, the present invention will be further described in detail.It should be appreciated that specific reality described herein
It applies example to be only used to explain the utility model, is not used to limit the utility model.
By taking solution auxiliary Meteorological Act prepares perovskite thin film as an example, preparation process divides the following steps.
The first step deposits one or more metals first with the methods of spin coating, blade coating, vacuum deposition on the glass substrate
Halide BX2Film.
Perovskite solar cell substrates made of the first step are put into metal sealing cabin and carry out vapor deposition processing by second step,
One or more evaporation source evaporation reactant AX, evaporation reactant AX and perovskite solar battery base are placed in lower section in sealed compartment
The metal halide BX of on piece2It carries out chemical reaction and generates ABX3Type film.
Third step, vapor deposition take out perovskite solar cell substrates after the completion and carry out following process.
In the first step, B is divalent metal, can for lead, tin, tungsten, copper, zinc, gallium, germanium, arsenic, selenium, rhodium, palladium, silver,
Cadmium, indium, antimony, osmium, iridium, platinum, gold, mercury, thallium, bismuth, any one cation in polonium, X be iodine, bromine, chlorine, in astatine any one yin from
Son.BX2Film thickness is in 80nm ~ 300nm.
In second step, A is arbitrary a kind of cation in caesium, rubidium, amido, amidino groups or alkali family, X be iodine, bromine, chlorine,
Any one anion in astatine.The perovskite ABX of preparation3Type film thickness is 100nm ~ 500nm.
Please refer to shown in Fig. 1, the on-line monitoring equipment of the utility model perovskite manufacture of solar cells process it is preferable
Embodiment is suitable for preparing perovskite solar battery and other photoelectric devices above-mentioned.The utility model perovskite solar energy
The preferred embodiment of the on-line monitoring equipment of cell production process, including X-ray photoelectron spectroscopic analysis system, electronic system
1 and analysis statistical system 2, the x-ray photoelectron spectroscopy data of the X-ray photoelectron spectroscopic analysis system pass through electronics
System 1 is transmitted to analysis statistical system 2.
The X-ray photoelectron spectroscopic analysis system includes x-ray source 4, electron lens 5 and electron energy analyzer 6.
Electron detector 7 is set in the electron energy analyzer 6.The x-ray source 4 and electron lens 5 are separately positioned on very
The both sides of empty sealed compartment 8.The warm table of heating perovskite solar cell substrates 9 is provided in the vacuum sealing cabin 8
10, and it is evaporated the evaporation source 3 of control system control.In the present embodiment, multiple steamings are provided in the vacuum sealing cabin 8
Rise 3.
The X-ray that the x-ray source 4 emits projects 9 surface of perovskite solar cell substrates and generates light induced electron, institute
Electron lens 5 is stated to receive above-mentioned light induced electron and be transmitted to the reception of electron detector 7.The electron detector 7 will detect
Photoelectron signal by electronic system 1 be transmitted to analysis statistical system 2.The analysis data of the analysis statistical system 2 are anti-
Be fed to evaporation control system (not shown), thus by the evaporation control system adjust evaporation plating parameter, control react into
Journey.
Specific embodiment:
(1) the ito glass plate of 5 × 5cm is successively respectively cleaned by ultrasonic through dish washing liquid, deionized water, acetone, isopropanol
30min, then use N210min is handled through UV O-zone after drying.
(2) PEDOT:PSS aqueous solution is scratched on above-mentioned ito glass, prepares hole transmission layer.
(3) preparing metal halide film precursor liquid: the PbI2 of 461mg is dissolved in the DMF solution of 1mL
(1mmol), 60 DEG C of heating stirring 2h are stand-by after dissolution.
(4) PbI is prepared by slot coated using the precursor liquid prepared2Film.
(5) metal halide film obtained is placed in vacuum evaporation cabin, using vacuum pump control pressure 10-5Pa~
105Pa, evaporation source are methylpyridinium iodide ammonia (MAI), and at 80 DEG C ~ 300 DEG C, substrate heating temperature control exists the control of heating evaporation temperature
30 DEG C ~ 150 DEG C, MAI gas molecule and PbI2Film reaction generates perovskite thin film MAPbI3。
(6) in above-mentioned reaction process, primary X-ray is irradiated to perovskite solar cell substrates surface per minute, is made
The perovskite thin film on surface generates light induced electron, and the electron lens 5 receives above-mentioned photoelectron and is transmitted to electron detection
Device 7.The photoelectron number detected is transmitted to analysis statistical system 2 according to by electronic system 1 by the electron detector 7, and
The XPS scanning spectrogram of lead element in attached perovskite thin film shown in Fig. 2 is obtained, this map, can by taking most typical lead element as an example
The response situation of current perovskite thin film is judged in conjunction with the relative intensity of ordinate, thus by correlation analysis data feedback to evaporation
Control system adjusts evaporation plating parameter, controls reaction process.
(7) main line when perovskite thin film reacts completely just, in perovskite thin film in the XPS scanning spectra of lead element
Relative intensity is maximum, and peak width is minimum, and symmetry is best, and deposition system will be automatically stopped vapor deposition at this time, and vapor deposition process terminates, and obtains
Required perovskite thin film.
The real-time watch device of the utility model can be in the vapo(u)rization system of various manufacture perovskite batteries collectively or individually
It uses, can also be used in combination with other test methods.The testing time of the X-ray photoelectron spectroscopic analysis system and between the time
It is arranged every by analysis statistical system 2.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (2)
1. a kind of on-line monitoring equipment of perovskite manufacture of solar cells process, which is characterized in that including x-ray photoelectron energy
Spectrum analysis system, electronic system and analysis statistical system, the X-ray photoelectricity of the X-ray photoelectron spectroscopic analysis system
Sub- gamma-spectrometric data is transmitted to analysis statistical system by electronic system, and the X-ray photoelectron spectroscopic analysis system includes that X is penetrated
Line source, electron lens and electron energy analyzer, are arranged electron detector in the electron energy analyzer, and the X is penetrated
Line source and electron lens are separately positioned on the both sides in vacuum sealing cabin, and heating calcium titanium is provided in the vacuum sealing cabin
The warm table of mine solar cell substrates, and it is evaporated the evaporation source of control system control, the X of the x-ray source transmitting is penetrated
Line is irradiated to perovskite solar cell substrates surface and generates light induced electron, and the light induced electron is received and transmitted through electron lens
To electron detector, the photoelectron signal detected is transmitted to analysis department of statistic by electronic system by the electron detector
System, the analysis data feedback for analyzing statistical system to evaporation control system.
2. the on-line monitoring equipment of perovskite manufacture of solar cells process as described in claim 1, which is characterized in that described
The testing time and time interval of X-ray photoelectron spectroscopic analysis system are arranged by analysis statistical system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821861158.8U CN209029418U (en) | 2018-11-13 | 2018-11-13 | The on-line monitoring equipment of perovskite manufacture of solar cells process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821861158.8U CN209029418U (en) | 2018-11-13 | 2018-11-13 | The on-line monitoring equipment of perovskite manufacture of solar cells process |
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| CN209029418U true CN209029418U (en) | 2019-06-25 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114594121A (en) * | 2022-03-04 | 2022-06-07 | 南开大学 | High-flux XPS device, detection method and application |
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2018
- 2018-11-13 CN CN201821861158.8U patent/CN209029418U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114594121A (en) * | 2022-03-04 | 2022-06-07 | 南开大学 | High-flux XPS device, detection method and application |
| WO2023165148A1 (en) * | 2022-03-04 | 2023-09-07 | 南开大学 | High throughput xps equipment, detection method, and application |
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