CN209311578U - A kind of silicon core mechanism for testing - Google Patents
A kind of silicon core mechanism for testing Download PDFInfo
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- CN209311578U CN209311578U CN201822151985.4U CN201822151985U CN209311578U CN 209311578 U CN209311578 U CN 209311578U CN 201822151985 U CN201822151985 U CN 201822151985U CN 209311578 U CN209311578 U CN 209311578U
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- silicon core
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- test probe
- test
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The utility model provides a kind of silicon core mechanism for testing for improving testing efficiency, and the test probe including the silicon core support for placing silicon core and for detecting silicon core, test probe orientation is upward, and the silicon core in silicon core support can press the position of touching by self weight.Test probe is arranged on probe mounting frame and test probe upper and lower position is adjustable.Probe is set on test probe, and probe is located at test probe upper end and direction is upward.The card slot of silicon core is placed in setting in silicon core support, and card slot is adjustable for the width of square groove and card slot.After the utility model side's silicon core is placed into correct position, it is not required to employee and the probe of test probe is taken to press and fix at square silicon core pressure point one by one, directly carry out pressing probe tip using the self weight of silicon core, be tested.
Description
Technical field
The utility model belongs to silicon core production field, and in particular to a kind of silicon core mechanism for testing.
Background technique
The measurement of silicon core resistivity is necessary process flow in polysilicon production process.By taking square silicon core as an example, pass through survey
Amount side's silicon core resistivity, can judge output side, institute silicon core conductivity degree how, and the impurity content of judgement side's silicon in-core
Range.Before reduction furnace carries out polycrystalline silicon rod production, need to guarantee that the resistivity of the square silicon core in each reduction furnace is more equal
It is even, and belong to same conductivity model, therefore, quickly and accurately the resistivity of the side's of measuring silicon core has the production of polysilicon
There is important meaning.
Existing two test instrument probes used, are furnished with the higher constant-current source of precision, guarantee that measurement electric current is highly stable, measurement
Electric current is passed in and out from square silicon core both ends, and voltage at each pressure point of test side's silicon core respectively of popping one's head in is tested, according to electric current, voltage, square silicon
The relationships such as core size calculate resistivity at each pressure point automatically.Two test instrument probe is visited by a test bracket, a test
Head and a signal transmission computing system composition, each test bracket fix a test probe, and the test probe other end has phase
The transmission line answered is connected with signal transmission computing system.When test, square silicon core is directly placed at the clean desktop of test platform
On, without special Fang Gui core support.Traditional test process are as follows: the take square silicon core of elongated strip of two employees is placed into bracket
On, apply stabling current on square silicon core both sides, it is total in counterparty's silicon core then successively to hold a test probe by an employee
Pressing test is carried out vertically downward at long 20%, 50%, 80%, and probe pressure is fixed probe after reaching standard, at this time in addition
One employee begins through signal transmission computing system end computer successively to 3 resistivity value typing test macros.Square silicon core is real
In the placement process of border, since silicon core is up to 2400mm-3200mm, it is qualified that employee is difficult to disposably place, i.e., square silicon core total length
20%, 50%, 80% at be just aligned with test badge point.Square silicon core belongs to high purity product, and purity requirements are very strict,
It cannot directly make marks in silicon wicking surface, method is at present: remember each three, length side's silicon core tests out in test table surface subscript
Point position, different length side's silicon core need employee to adjust corresponding test badge point, need two employees while repeatedly being adjusted.Side
After silicon core is placed into correct position, needs employee to take one and test probe pressure and fixation at square silicon core test point one by one, into
Row test, this process waste employee's a large amount of operating times；Every square silicon core requires to unclamp test probe fixing bracket,
Circulation action is tightened, is not only wasted time, but also substantially increases the damage risk of probe fixing bracket.
It is 65s, Yuan Gongyi the time required to traditional test procedural test complete one square silicon core during actual production operation
Its net time on duty is 7h, the test assignment of one day only achievable 387 square silicon core resistivity, and efficiency is lower.Daily at least
1000 square silicon core yield, this needs a kind of increase side far beyond the maximum capacity of square silicon core resistivity measurement speed
The mechanism of silicon core resistivity measurement efficiency.
Utility model content
The utility model provides a kind of silicon core mechanism for testing for improving testing efficiency.
The purpose of this utility model is achieved in that a kind of Gui Xin resistivity measurement mechanism, including for putting
The silicon core support of silicon core and the test probe for detecting silicon core are set, test probe orientation is upward, in silicon core support
Silicon core can press the position of touching by self weight.
Test probe is arranged on probe mounting frame and test probe upper and lower position is adjustable.
Probe is set on test probe, and probe is located at test probe upper end and direction is upward.
The card slot of silicon core is placed in setting in silicon core support, and card slot is adjustable for the width of square groove and card slot.
Silicon core support includes bracket base, and two screw holes are arranged in bracket base top, and setting adjusts bolt in threaded hole；
Two sliding blocks are arranged in bracket base top, constitute card slot between two sliding blocks；Long hole is set on sliding block, adjusts bolt and passes through long hole
Pressed slider and bracket base.
3 tests are arranged in supporting table to pop one's head in and 3 Ge Gui core supports.
The beneficial effects of the utility model are: regulating silicon core support top card in advance according to the side's of test silicon core side length
Groove width is, it can be achieved that employee is disposably precisely put into when silicon core is placed.After silicon core is placed into correct position, be not required to employee by
A probe that test probe is taken at silicon core test point presses vertically downward and fixes, and directly press using the self weight of silicon core vertical
Straight upward probe tip, is tested.In addition, the distance good using cradle top card slot preset in advance, can play certain
Detection effect, the silicon core of only corresponding side length can just be put into, and the silicon core of different side length specifications is prevented to be mixed into the batch products.
All probe mounting frame is unclamped without every silicon core, tightens circulation action, reduces the damage risk of probe mounting frame.Change
It deals with problems arising from an accident, the entire testing time of Dan Zhifang silicon core is reduced to improved 25s by 65s before, and square silicon core resistivity measurement produces
1008/day can be promoted to by 387/day before, testing efficiency promotes 160%.
Detailed description of the invention
Fig. 1 is the utility model principle schematic diagram.
Fig. 2 is silicon core support schematic diagram.
Wherein, 1 be supporting table, 2 be test probe, 3 be probe, 4 be silicon core support, 6 be probe mounting frame, 7 be silicon core,
40 be bracket base, 41 be adjust bolt, 42 be sliding block, 43 be long hole, 44 be card slot.
Specific embodiment
As shown in Figs. 1-2, a kind of silicon core mechanism for testing, including the silicon core support 4 and connecting detection system for placing silicon core
The test probe 2 of system.2 directions of test probe are upward, positioned at the position that silicon core can press touching test probe 2 to be detected by self weight
It sets.Probe 3 is usually set on test probe 2, and the upper end of test probe 2 is arranged in probe 3.It is preferred that test probe 2 is vertically upward,
It needs the position by test probe 2 to be adjusted to silicon core 7 when use to survey by the probe 3 that self weight can press test probe 2
Examination, slightly above 44 bottom surface of card slot, probe 3 is flexible on probe 3 top at this time, the pressure certain to probe 3 of silicon core 7.Test is visited
First 2 other end has the signal transmission computing system of signal wire connecting detection resistivity.The utility model can be used for utilizing survey
Probe header 2 carries out the mechanism of other detections.
Test probe 2 is arranged on probe mounting frame 6 and 2 upper and lower positions of test probe are adjustable.The upper downward of test probe 2
There are many section modes, and the mode for adjusting position up and down of rack-and-pinion can be used in test probe 2.It is set on probe mounting frame 6
The gear setting vertical rack gear and being engaged with rack.Gear rotation move up and down rack gear, test probe 2 be connected with rack gear simultaneously one
Play movement.It is of course also possible to which other common reciprocating mechanisms are arranged.
Card slot 44 for placing silicon core is set in silicon core support 4.Here silicon core 7 is also adapted to the most commonly used is square silicon core
In the silicon core of other shapes.Card slot 44 is adjustable for the width of square groove and card slot 44.Silicon core support 4 includes bracket base
40, two screw holes are arranged in 40 top of bracket base, and setting adjusts bolt 41 in threaded hole；40 top of bracket base is arranged two
Sliding block 42 constitutes card slot 44 between two sliding blocks 42.Long hole 43 is set on sliding block 42, adjusts bolt 41 and passes through the compression cunning of long hole 43
Block 42 and bracket base 40.When needing to adjust 44 width of card slot, loosen and adjust bolt 41, mobile two sliding blocks 42 to suitably away from
From, screw adjust bolt 42.The adjustable range of card slot 44 can be 5 to 20 millimeters.This is current square silicon core section side size range.
It can be put into the silicon core 7 of different size in card slot 44, the silicon core of other shapes can also be placed.
Further include supporting table 1, on probe mounting frame 6 and silicon core support 4 may be located in supporting table 1.In supporting table 1
At least two parallel silicon core supports 4 are set, it is preferential to select three tests probes 2 of setting and three Ge Gui core supports in supporting table 1
4.Sliding rail is set on branch fastener, and test probe 2 and silicon core support 4 can slide on the slide rail, so that adjusting position adapts to difference
The needs of length silicon core 7.Test probe 2 is respectively in 20%, 50%, 80% position of 7 total length of silicon core.Or it is arranged in supporting table 1
Pedestal, setting test probe 2 and silicon core support 4 on pedestal, 4 lower end of silicon core support is L-shaped, and wire hole is designed in bottom, with pedestal
It is connected with.3 pedestals of setting are slided by guide rail in supporting table.Test probe 2 and silicon core branch on such a pedestal
Frame 4 can move together.
When it is implemented, adjusting the width of card slot 44 and spy in silicon core support 4 according to the length and width of silicon core 7 to be tested
The position of head mounting rack 6.Then adjustment test probe 2 height to silicon core 7 by be self-possessed can press vertically downward probe 3 into
Row test, starts to test and record.When test silicon core 7, being placed directly into silicon core support 4 just be can satisfy, and be not required to adjust again
The height of test probe 2.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
Claims (7)
1. a kind of silicon core mechanism for testing, the test probe including the silicon core support for placing silicon core and for detecting silicon core,
Be characterized in that: the silicon core of the test probe orientation upwards, in silicon core support can press the position of touching by self weight.
2. a kind of silicon core mechanism for testing according to claim 1, it is characterised in that: the test probe setting is installed in probe
On frame and test probe upper and lower position is adjustable.
3. a kind of silicon core mechanism for testing according to claim 2, it is characterised in that: probe is arranged on the test probe, visits
The upper end of test probe is arranged in needle.
4. a kind of silicon core mechanism for testing according to claim 2, it is characterised in that: silicon core is placed in setting in the silicon core support
Card slot, card slot is that the width of square groove and card slot is adjustable.
5. a kind of silicon core mechanism for testing according to claim 4, it is characterised in that: the silicon core support includes bracket base,
Two screw holes are arranged in bracket base top, and setting adjusts bolt in threaded hole；Two sliding blocks of bracket base top setting, two
Card slot is constituted between sliding block；Long hole is set on sliding block, adjusts bolt and passes through long hole pressed slider and bracket base.
6. according to a kind of any silicon core mechanism for testing of claim 2-5, it is characterised in that: it further include supporting table, the silicon
Core support and probe mounting frame are slidably arranged in supporting table.
7. a kind of silicon core mechanism for testing according to claim 6, it is characterised in that: 3 tests are arranged in the supporting table and visit
Head and 3 Ge Gui core supports.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822151985.4U CN209311578U (en) | 2018-12-21 | 2018-12-21 | A kind of silicon core mechanism for testing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822151985.4U CN209311578U (en) | 2018-12-21 | 2018-12-21 | A kind of silicon core mechanism for testing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209311578U true CN209311578U (en) | 2019-08-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201822151985.4U Active CN209311578U (en) | 2018-12-21 | 2018-12-21 | A kind of silicon core mechanism for testing |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115962871A (en) * | 2022-12-30 | 2023-04-14 | 中航光电华亿(沈阳)电子科技有限公司 | Diffusion silicon core testing device |
-
2018
- 2018-12-21 CN CN201822151985.4U patent/CN209311578U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115962871A (en) * | 2022-12-30 | 2023-04-14 | 中航光电华亿(沈阳)电子科技有限公司 | Diffusion silicon core testing device |
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