CN209311539U - Test machine - Google Patents
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- CN209311539U CN209311539U CN201821974297.1U CN201821974297U CN209311539U CN 209311539 U CN209311539 U CN 209311539U CN 201821974297 U CN201821974297 U CN 201821974297U CN 209311539 U CN209311539 U CN 209311539U
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- 238000012360 testing method Methods 0.000 title claims abstract description 88
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Abstract
The utility model discloses a kind of test machine.Test machine includes: article carrying platform, including loading end, and can move along the direction for being parallel to the loading end and rotate around the shaft perpendicular to the loading end；Probe card is provided with more to the probe stretched out close to the article carrying platform side；Align component, comprising: at least two first laser emitters can emit multi beam first laser beam, and the first laser beam is arranged successively along the direction perpendicular to the loading end；Second laser emitter can emit multi beam second laser beam, and the second laser beam is arranged successively along the direction perpendicular to the loading end, and the second laser beam is perpendicular to the first laser beam.It is aligned using this test machine, it is relatively accurate to align between probe card and device under test, while also reducing the artificial time for placing probe card, improves the accuracy being aligned between probe card and device under test, avoids the damage of probe card.
Description
Technical field
The utility model relates generally to a kind of semiconductor processing technology field, in particular to a kind of test machine.
Background technique
Wafer is tested before being packaged into complete chip, to filter out undesirable wafer, to reduce encapsulation
Cost.Test machine is used to carry out electrical performance testing to unencapsulated wafer.Test machine includes article carrying platform and probe card.Loading
Platform is for carrying wafer.Probe card is the interface of test machine connection wafer.Multiple probes, multiple probes are provided in probe card
It is directly contacted with multiple weld pads on wafer to guide electric signal simultaneously.Test equipment on test machine is by analyzing the electric signal
To obtain the electric property of wafer.
However, after wafer is placed on article carrying platform, it is right between probe card and wafer since the weld pad on wafer is very small
Position difficulty is big, needs labor costs' longer time to align, inefficiency.Especially, the probe in probe card is more crisp
Weak, when aligning inaccuracy, probe is easy top and to other positions probe and wafer is damaged.
Above- mentioned information are only used for reinforcing the understanding to the background of the utility model disclosed in the background technology part, because
This it may include the information not constituted to the prior art known to persons of ordinary skill in the art.
Utility model content
A series of concept of reduced forms is introduced in utility model content part, this will be in specific embodiment part
Middle further description.The content of the present invention part is not meant to attempt to limit technical solution claimed
Key feature and essential features, do not mean that the protection scope for attempting to determine technical solution claimed more.
One main purpose of the utility model is to overcome at least one defect of the above-mentioned prior art, provides a kind of survey
Test-run a machine comprising: article carrying platform, including loading end, and can move and along the direction for being parallel to the loading end around perpendicular to institute
State the shaft rotation of loading end；Probe card, is arranged in the top of the article carrying platform, can be along being parallel to the loading end and vertical
Mobile and around the shaft rotation perpendicular to the loading end in the direction of the loading end, the probe card includes more to leaning on
The probe that the nearly article carrying platform side is stretched out；Align component, comprising: at least two first laser emitters can emit flat
The loading end of the row in the article carrying platform and the multi beam first laser beam higher than the loading end, the first laser beam edge
It is arranged successively perpendicular to the direction of the loading end；Second laser emitter can emit the institute for being parallel to the article carrying platform
It states loading end and is higher than the multi beam second laser beam of the loading end, the second laser beam is along the side perpendicular to the loading end
To being arranged successively, and the second laser beam is perpendicular to the first laser beam；Wherein, the first laser emitter energy edge
The direction for being parallel to the second laser beam is mobile, and second laser emitter energy edge is parallel to the first laser beam
Direction is mobile.
One embodiment according to the present utility model, the contraposition component further include video camera and third Laser emission dress
It sets, the position for video camera can be moved away from the side of the article carrying platform and along the loading end direction is parallel in the probe card
Dynamic, the third laser beam emitting device is installed on the video camera, and the camera shooting function is imaged towards article carrying platform side, described
Third laser beam emitting device can emit third laser beam to close to the article carrying platform side, and the third laser beam is perpendicular to institute
State loading end.
One embodiment according to the present utility model, the probe card further include partly or entirely transparent probe base；
The probe extends from the probe base to the side close to the article carrying platform, the peace of probe described at least one
Mounted in the transparent part of the probe base.
One embodiment according to the present utility model, the contraposition component further includes laser receiver；
The quantity of the laser receiver is identical as the quantity of the first laser emitter, the laser pick-off dress
It sets and is arranged in a one-to-one correspondence with the first laser emitter, the laser of the first laser emitter corresponding thereto
Reception device is located at the two sides of the article carrying platform；The first laser emitter is to the laser corresponding thereto
Reception device emits the first laser beam, and the laser receiver is for incuding whether receive the first laser beam.
One embodiment according to the present utility model, the test machine further include platform moving mechanism, the platform movement
The bottom of the article carrying platform is arranged in mechanism, and the platform moving mechanism includes: first straight line executing agency；Second straight line is held
Row mechanism, the second straight line executing agency are mounted in the first straight line executing agency；First rotation driving mechanism, it is described
First rotation driving mechanism is mounted in the second straight line executing agency, and the article carrying platform is mounted on first rotation and holds
In row mechanism；Wherein, the first straight line executing agency is for driving described second to hold linear rows mechanism along being parallel to described the
The direction of dual-laser beam is mobile, and the second straight line executing agency is for driving the first rotation driving mechanism edge to be parallel to institute
The direction for stating first laser beam is mobile, and first rotation driving mechanism is for driving the article carrying platform to hold around perpendicular to described
The axis of section rotates.
One embodiment according to the present utility model, the test machine further include probe movement mechanism, the probe motion
The top of the article carrying platform is arranged in mechanism, and the probe movement mechanism includes: third straight line executing mechanism；4th straight line is held
Row mechanism, the 4th straight line executing mechanism are mounted on the third straight line executing mechanism；Elevating mechanism, the elevating mechanism
It is mounted on the 4th straight line executing mechanism；Second rotation driving mechanism, second rotation driving mechanism are mounted on described
On elevating mechanism, the probe card is mounted on second rotation driving mechanism；Wherein, the third straight line executing mechanism
For driving the 4th straight line executing mechanism to move along the direction for being parallel to the second laser beam, the described 4th
Straight line executing mechanism is used to that the elevating mechanism to be driven to move along the direction for being parallel to the first laser beam, the elevating mechanism
For driving the rotation driving mechanism along the direction perpendicular to the loading end far from or close to the loading end, described second
Rotation driving mechanism is used to that the probe card to be driven to rotate around the axis in the direction perpendicular to the loading end.
One embodiment according to the present utility model, the contraposition component further include the camera motion mechanism, the phase
The side that the probe card deviates from the article carrying platform is arranged in machine movement mechanism, and the camera motion mechanism includes: the 5th straight
Line executing agency；6th straight line executing mechanism, the 6th straight line executing mechanism are mounted on the 5th straight line executing mechanism,
The video camera is mounted on the 6th straight line executing mechanism；Wherein, the 5th straight line executing mechanism is described for driving
6th straight line executing mechanism is moved along the direction for being parallel to the second laser beam, and the 6th straight line executing mechanism is for driving
The video camera is moved along the direction for being parallel to the first laser beam.
One embodiment according to the present utility model, the contraposition component further include: the first guide rail of vertical bar shaped is parallel to
The second laser beam；Multiple first sliding blocks being mounted on first guide rail can be slided along first guide rail；Vertical bar shaped
The second guide rail, be parallel to the first laser beam；Multiple second sliding blocks being mounted on second guide rail, can be along described
The sliding of two guide rails；Wherein, the first laser emitter is arranged in a one-to-one correspondence with first sliding block, and each described first swashs
Light emitting devices is arranged on corresponding first sliding block, the second laser emitter and second sliding block one
One is correspondingly arranged, and each second laser emitter is arranged on corresponding second sliding block.
One embodiment according to the present utility model, the contraposition component further include: the third guide rail of vertical bar shaped is parallel to
First guide rail；The multiple third sliding blocks being mounted on the third guide rail can be slided along the third guide rail；The third
The quantity of sliding block is identical as the quantity of the laser receiver, and the third sliding block and the laser receiver correspond
Setting, each laser receiver are mounted on the corresponding third sliding block.
One embodiment according to the present utility model, the contraposition component further include: connection frame, the connection frame connect respectively
The third sliding block for connecing first sliding block and aligning with first sliding block；7th straight line executing mechanism, the described 7th is straight
Line executing agency connects one to one with the connection frame, for driving the connection frame corresponding thereto described along being parallel to
The direction of first guide rail is mobile.
One embodiment according to the present utility model, the first laser beam, the color of the second laser beam are and institute
The color for stating third laser beam is different.
As shown from the above technical solution, it the advantages of the test machine of the utility model and has the active effect that
It, can be first to be sent out described in first laser emitter when carrying out first step contraposition using the test machine in the utility model
The second laser beam that the first laser beam and second laser emitter penetrated are launched is that graticule visits two in probe card
Needle is aligned respectively with two weld pads on device under test, and it is relatively accurate to align between probe card and device under test, is also reduced simultaneously
The artificial time for placing probe card, the accuracy being aligned between probe card and device under test is improved, the damage of probe card is avoided
It is bad.
Detailed description of the invention
Consider the detailed description of the following preferred embodiment to the utility model in conjunction with the accompanying drawings, the utility model it is each
Kind target, feature and advantage will become apparent.Attached drawing is only the exemplary diagram of the utility model, is not necessarily
It is drawn to scale.In the accompanying drawings, same appended drawing reference always shows same or similar component.Wherein:
Fig. 1 is a kind of structural schematic diagram of test machine shown according to an illustrative embodiments；
Fig. 2 is the schematic diagram according to the platform moving mechanism shown in an illustrative embodiments；
Fig. 3 is the schematic diagram according to the probe movement mechanism shown in an illustrative embodiments；
Fig. 4 is a kind of for calibrating the stream of the method for probe card and device under test shown according to an exemplary embodiment
Cheng Tu；
Fig. 5 is aligned under state according to laser beam and the probe in first step contraposition shown in an illustrative embodiments
Test machine schematic diagram；
Fig. 6 is aligned under state according to laser beam and the weld pad in first step contraposition shown in an illustrative embodiments
Test machine schematic diagram；
Fig. 7 is the state that is in contact according to probe after the completion of first step contraposition shown in an illustrative embodiments with weld pad
Under test machine schematic diagram；
Fig. 8 is the structural schematic diagram according to the camera motion mechanism shown in an illustrative embodiments；
Fig. 9 is according to being aligned at second step contraposition middle probe center with third laser beam shown in an illustrative embodiments
The schematic diagram of test machine under state；
Figure 10 is according to weld pad center and the third laser beam pair in second step contraposition shown in an illustrative embodiments
The schematic diagram of test machine under quasi- state；
Figure 11 is the shape that is in contact according to probe after the completion of second step contraposition shown in an illustrative embodiments with weld pad
The schematic diagram of test machine under state；
Figure 12 is the structural schematic diagram according to connection frame and the 7th straight line executing mechanism shown in an illustrative embodiments.
Specific embodiment
Example embodiment is described more fully with reference to the drawings.However, example embodiment can be with a variety of shapes
Formula is implemented, and is not understood as limited to embodiment set forth herein；On the contrary, thesing embodiments are provided so that this is practical new
Type will be full and complete, and the design of example embodiment is comprehensively communicated to those skilled in the art.It is identical in figure
Appended drawing reference indicates same or similar structure, thus the detailed description that will omit them.
Referring to Fig.1, Fig. 1 shows the structure of one of the present embodiment test machine 1.The test machine 1 is to be measured for testing
The electric property of device 2, the device under test 2 can be wafer or chip.Multiple weld pads 21 are provided on device under test 2.The survey
Test-run a machine 1 include article carrying platform 11, platform moving mechanism 15 (referring to Fig. 2), probe card 12, probe movement mechanism 16 (referring to Fig. 3),
Align component 13.
Article carrying platform 11 can be rectangular platform or circular platform.Article carrying platform 11 includes loading end 111.Loading end 111
The top of article carrying platform 11 is set.Loading end 111 is plane, for carrying device under test 2.Loading end 111 can be in water
Flat setting.When device under test 2 is placed on loading end 111, the weld pad 21 of device under test 2 is upward.
Component 13 is aligned to swash including the first guide rail 132, the second guide rail 136, the first sliding block 133, the second sliding block 137, first
Light emitting devices 131 and second laser emitter 135.First guide rail 132 and the second guide rail 136 are vertical bar shaped.First leads
The side of article carrying platform 11 is arranged in rail 132, and the second guide rail 136 is arranged in article carrying platform 11 adjacent to first laser emitter
131 other side.First guide rail 132 and the second guide rail 136 are each parallel to loading end 111.First guide rail 132 and the second guide rail
136 are mutually perpendicular to.First sliding block 133 is arranged on the first guide rail 132 and can slide along the first guide rail 132.Second sliding block 137 is set
It sets on the second guide rail 136 and can be slided along the second guide rail 136.
First laser emitter 131 is at least arranged two.The quantity and first laser emitter of first sliding block 133
131 quantity is identical, and first laser emitter 131 is arranged in a one-to-one correspondence with the first sliding block 133, each first laser transmitting dress
It sets on the first sliding block 133 that 131 are arranged in corresponding thereto.Since the first sliding block 133 can be slided along the first guide rail 132, two
First laser emitter 131 can be also moved along the first guide rail 132 come between adjusting between two first laser emitters 131
Away from.Second laser emitter 135 is mounted on the second sliding block 137, and second laser emitter 135 can be along the second guide rail 136
It is mobile.
First laser emitter 131 and second laser emitter 135 include along the direction perpendicular to loading end 111
The multiple laser (not shown) being arranged successively, each laser can launch beam of laser.First laser emitter 131
Emit multi beam first laser beam 138 towards the direction close to 11 side of article carrying platform.First laser beam 138 is parallel to loading end 111.
The multi beam first laser beam 138 that each first laser emitter 131 is emitted on the direction perpendicular to loading end 111 successively
Arrangement.Orthographic projection of a plurality of first laser beam 138 that the same first laser emitter 131 is launched on article carrying platform 11
It overlaps.First laser beam 138 is each parallel to the second guide rail 136.Second laser emitter 135 is towards close to article carrying platform
The direction of 11 sides emits multi beam second laser beam 139.Second laser beam 139 is parallel to loading end 111.Second laser beam 139
It also is normal to first laser beam 138 and is parallel to the first guide rail 132.The multi beam second that second laser emitter 135 is emitted
Laser beam 139 is arranged successively on the direction perpendicular to loading end 111.Second laser emitter 135 launch a plurality of
Orthographic projection of the dual-laser beam 139 on article carrying platform 11 overlaps.First laser beam 138 and the equal energy of second laser beam 139
It is passed through above article carrying platform 11.
Two first laser emitters 131 are separately positioned on two the first sliding blocks 133, can be by adjusting two the
The distance between one laser beam emitting device 131 adjusts the spacing between two beam first laser beams 138, to adapt to device under test 2
Spacing and various sizes of probe card 12 between the specification and weld pad 21 of upper weld pad 21.
Referring to Fig. 2, the bottom of article carrying platform 11 is arranged in platform moving mechanism 15.Platform moving mechanism 15 is carried for driving
Object platform 11 moves and along loading end 111 is parallel to around the shaft rotation perpendicular to loading end 111.Platform moving mechanism 15 wraps
Include first straight line executing agency 151, second straight line executing agency 154 and the first rotation driving mechanism 157.Article carrying platform 11 is arranged
On the first rotation driving mechanism 157, the first rotation driving mechanism 157 is for driving article carrying platform 11 around perpendicular to loading end
111 shaft rotation.First rotation driving mechanism 157 can be motor, the main shaft 158 of the motor perpendicular to loading end 111 and
It is connected to the bottom of article carrying platform 11, the main shaft 158 of motor rotates energy band and moves article carrying platform 11 around turn perpendicular to loading end 111
Axis rotation.
First rotation driving mechanism 157 is mounted in second straight line executing agency 154, and second straight line executing agency 154 uses
It is moved in the first rotation driving mechanism 157 of driving along the direction for being parallel to first laser beam 138.Second straight line executing agency 154
It is mounted in first straight line executing agency 151, first straight line executing agency 151 is for driving 154 edge of second straight line executing agency
The direction for being parallel to second laser beam 139 is mobile.
In the present embodiment, first straight line executing agency 151 and second straight line executing agency 154 are disposed as electric cylinders.The
One straight line executing mechanism 151 includes the first cylinder body 152 and the first telescopic rod 153, and the first telescopic rod 153 can be with retraction or stretching
In the first cylinder body 152.Second straight line executing agency 154 includes the second cylinder body 155 and the second telescopic rod 156, the second telescopic rod
156 with retraction or can stretch out in the second cylinder body 155.
Second cylinder body 155 is mounted on the first telescopic rod 153,153 retraction of the first telescopic rod or stretches out in the first cylinder body 152
Direction it is parallel with second laser beam 139.First rotation driving mechanism 157 is mounted on the second telescopic rod 156, the second telescopic rod
156 retractions or the direction for stretching out in the second cylinder body 155 are parallel with first laser beam 138.
By flexible, the second cylinder body 155 of drive moves first telescopic rod 153 along the direction for being parallel to second laser beam 139,
And then article carrying platform 11 is driven to move along the direction for being parallel to second laser beam 139.Second telescopic rod 156 is by flexible, drive
First rotation driving mechanism 157 is moved along the direction for being parallel to first laser beam 138, and then drives article carrying platform 11 along being parallel to
The direction of first laser beam 138 moves.
Referring to Fig. 3, probe card 12 is the interface that test machine 1 connects device under test 2.Probe card 12 is arranged in article carrying platform 11
Top.Probe card 12 includes probe base 121 and Duo Gen probe 122.Probe base 121 is plate, is parallel to loading end 111.It visits
Needle stand 121 can be printed circuit board (pcb board).Probe 122 is stretched from probe base 121 and towards close to 11 side of article carrying platform
Out.Loading end 111 of the probe 122 perpendicular to article carrying platform 11.Probe 122 is in contact with the weld pad 21 of device under test 2 and can draw
The electric signal that device under test 2 issues.The beam diameter of first laser beam 138 and second laser beam 139 is less than the straight of probe 122
Diameter.
Probe 122 in probe card 12 is arranged in a one-to-one correspondence with the weld pad 21 on device under test 2, when test, each probe
122 needle point needs corresponding weld pad 21 to be in contact.When multiple arrangement in a row on device under test 2 of weld pad 21, probe
122 in probe card 12 also arrangement in a row.
The top of article carrying platform 11 is arranged in probe movement mechanism 16, and probe movement mechanism 16 includes that third straight line executes machine
Structure 161, the 4th straight line executing mechanism 164, elevating mechanism 167 and the second rotation driving mechanism 160.Probe card 12 is mounted on second
On rotation driving mechanism 160, probe card 12 is located at the lower section of the second rotation driving mechanism 160.Second rotation driving mechanism 160 is used
In driving probe card 12 around the axis rotation perpendicular to loading end 111.Second rotation driving mechanism 160 can be motor, motor
Main shaft stretched out perpendicular to loading end 111 and to the direction close to 11 side of article carrying platform, the probe base 121 of probe card 12 is installed
On main shaft 1601, which can drive probe card 12 around vertical perpendicular to main shaft 1601, the rotation of main shaft 1601 of motor
It is rotated in the axis of loading end 111.
Second rotation driving mechanism 160 is mounted on elevating mechanism 167.Elevating mechanism 167 is for driving the second rotation to hold
Row mechanism 160 along the direction perpendicular to loading end 111 far from or close to loading end 111.Elevating mechanism 167 is mounted on the 4th straight line
In executing agency 164.4th straight line executing mechanism 164 is for driving elevating mechanism 167 along the side for being parallel to first laser beam 138
To movement.4th straight line executing mechanism 164 is mounted on third straight line executing mechanism 161.Third straight line executing mechanism 161 is used for
The 4th straight line executing mechanism 164 is driven to move along the direction for being parallel to second laser beam 139.
In the present embodiment, third straight line executing mechanism 161, the 4th straight line executing mechanism 164, elevating mechanism 167 are all provided with
It is set to electric cylinders.Third straight line executing mechanism 161 includes third cylinder body 162 and third telescopic rod 163, and third telescopic rod 163 can
With retraction or stretch out in third cylinder body 162.4th straight line executing mechanism 164 includes the 4th cylinder body 165 and the 4th telescopic rod
166, the 4th telescopic rod 166 with retraction or can stretch out in the 4th cylinder body 165.Elevating mechanism 167 includes the 8th cylinder body 168 and the
Eight telescopic rods 169, the 8th telescopic rod 169 with retraction or can stretch out in the 8th cylinder body 168.
4th cylinder body 165 is mounted on third telescopic rod 163,163 retraction of third telescopic rod or stretches out in third cylinder body 162
Direction it is parallel with second laser beam 139.8th cylinder body 168 is mounted on the 4th telescopic rod 166,166 retraction of the 4th telescopic rod
Or stretch out in the 4th cylinder body 165 direction it is parallel with first laser beam 138.Second rotation driving mechanism 160 is mounted on the 8th and stretches
On contracting bar 169,169 retraction of the 8th telescopic rod or the direction of the 8th cylinder body 168 is stretched out in perpendicular to loading end 111.
By flexible, the 4th cylinder body 165 of drive moves third telescopic rod 163 along the direction for being parallel to second laser beam 139,
And then probe card 12 is driven to move along the direction for being parallel to second laser beam 139.4th telescopic rod 166 carries out flexible drive the 8th
Cylinder body 168 is moved along the direction for being parallel to first laser beam 138, and then drives probe card 12 along being parallel to first laser beam 138
Direction movement.8th telescopic rod 169 is by flexible, and the second rotation driving mechanism 160 of drive is along the side perpendicular to loading end 111
To far from or close to loading end 111, and then drive probe card 12 along the direction perpendicular to loading end 111 far from or close to loading end
111。
Referring to Fig. 4, the present embodiment also proposed a kind of method for calibrating probe card 12 Yu device under test 2.It is using
Before 1 device under test 2 of test machine is tested, first probe card 12 is aligned with device under test 2 using this method.This method includes
Following steps:
Step S10: using first laser beam and second laser beam as graticule by two probes in probe card respectively with it is to be measured
Two weld pads on device align.
Step S10 includes step S11~S14:
Step S11, first laser beam array and second laser beam array are set between device under test and probe card.
Device under test 2 is placed on a loading end 111, multiple groups first are set between device under test 2 and probe card 12
Laser array and second laser array, first laser array include multi beam first laser beam 138, and second laser array includes multi beam
Second laser beam 139, first laser beam 138 and second laser beam 139 are mutually perpendicular to and each parallel to loading ends 111, and same
Projection of the multi beam first laser beam 138 on loading end 111 in one laser array is overlapped, and multi beam second laser beam 139 is being held
Projection on section 111 is overlapped.
Referring to Fig.1, first device under test 2 is placed on article carrying platform 11, device under test 2 is provided with to the side of weld pad 21
Upward.It opens first laser emitter 131 and second laser emitter 135, first laser emitter 131 is launched more
Beam first laser beam 138, all first laser beams 138 that each first laser emitter 131 is launched composition one group the
One laser array, second laser emitter 135 launch multi beam second laser beam 139, and second laser emitter 135 is sent out
All second laser beams 139 projected form a second laser array.First laser beam 138 and the equal position of second laser beam 139
Between device under test 2 and probe card 12.
Step S12, the distance between probe card and loading end are adjusted.
Probe card 12 is mobile to close 111 direction of loading end, so that the needle point of probe 12 is located most closely to loading end 111
And farthest away between the first laser beam 138 of loading end 111, while being also located near loading end 111 and farthest away from loading end
Between 111 second laser beam 139.
Referring to Fig. 5, probe movement mechanism 16 drives probe card 12 close to loading end 111, until the needle point of probe 122 is higher than
The first laser beam 138 and second laser beam 139 of bottommost and the first laser beam 138 and second laser beam for being lower than top
139。
Step S13, probe is aligned with first laser beam and second laser beam.
Mobile first laser array, second laser array and probe card 12 so that in two first laser arrays farthest away from
The first laser beam 138 of loading end 111 is blocked by two probes 122 respectively, and farthest away from loading end in second laser array
111 second laser beam 139 is blocked by two probes 122 respectively.
Referring to Fig. 5, the position of probe card 12, first laser emitter 131 and second laser emitter 135 is adjusted,
So that the first laser beam 138 for the top that two first laser emitters 131 are launched respectively is hidden by two probes 122
Gear, while the second laser beam 139 of top that second laser emitter 135 is launched is just by two probes 122
One blocked, the needle point of another probe 122 is aligned with the second laser beam 139 of bottommost.
Step S14, weld pad is aligned with first laser beam and second laser beam.
Mobile loading end 111 make two weld pads 21 respectively in two first laser arrays near loading end 111
First laser beam 138 aligns, and aligns with the second laser beam 139 in second laser array near loading end.
Referring to Fig. 6, movable object-carrying stage 11, so that two weld pads corresponding with this two probes 122 on device under test 2
The first laser beam 138 of 21 bottommosts emitted respectively with two first laser emitters 131 aligns, and the two
Weld pad 21 also aligns with the second laser beam of bottommost 139.
This completes the first step contrapositions between probe card 12 and device under test 2 to complete the first step referring to Fig. 7
Continue to drive after contraposition probe 122 close to loading end 111 can make the needle point of each probe 122 corresponding thereto in weld pad 21
It offsets, it is more accurate to align.
Further, the probe base 121 of probe card 12 is arranged to all-transparent or partially transparent.An at least probe 122
It is mounted on the transparent part of probe base 121.Aligning component 13 further includes video camera 143, third laser beam emitting device 144 and camera
Movement mechanism 17.Video camera 143, third laser beam emitting device 144 and camera motion mechanism 17 are arranged at probe card 12 and deviate from
The side of article carrying platform 11.Third laser beam emitting device 144 is fixed on video camera 143.Third laser beam emitting device 144 is to leaning on
The nearly article carrying platform side emits third laser beam 145, and third laser beam 145 is perpendicular to loading end.Video camera 143 is towards loading
The camera shooting of platform side.Image captured by video camera 143 can be played in real time by external-connection displayer.Captured by video camera 143
Image be preferably enlarged drawing.Video camera 143 can be charge coupling camera (CCD Camera).
Referring to Fig. 8, video camera 143 is mounted in camera motion mechanism 17, and camera motion mechanism 17 is for driving camera edge
It is parallel on the direction of loading end 111 and moves.Camera motion mechanism 17 includes that the 5th straight line executing mechanism 171 and the 6th straight line are held
Row mechanism 174.6th straight line executing mechanism 174 is mounted on the 5th straight line executing mechanism 171.Video camera 143 is mounted on the 6th
On straight line executing mechanism 174.
5th straight line executing mechanism 171 is for driving the 6th straight line executing mechanism 174 along being parallel to second laser beam
139 direction movement, the 6th straight line executing mechanism 174 is for actuated camera 143 with third laser beam emitting device 144 along parallel
It is moved in the direction of the first laser beam 138.
5th straight line executing mechanism 171 and the 6th straight line executing mechanism 174 are disposed as electric cylinders.5th straight line executing mechanism
171 include the 5th cylinder body 172 and the 5th telescopic rod 173, and the 5th telescopic rod 173 with retraction or can stretch out in the 5th cylinder body 172.
6th straight line executing mechanism 174 includes the 6th cylinder body 175 and the 6th telescopic rod 176, and the 6th telescopic rod 176 with retraction or can be stretched
For the 6th cylinder body 175.
6th cylinder body 175 is mounted on the 5th telescopic rod 173,173 retraction of the 5th telescopic rod or stretches out in the 5th cylinder body 172
Direction is parallel with second laser beam 139.Video camera 143 is mounted on the 6th telescopic rod 176,176 retraction of the 6th telescopic rod or is stretched
Direction for the 6th cylinder body 175 is parallel with first laser beam 138.
By flexible, the 6th cylinder body 175 of drive moves 5th telescopic rod 173 along the direction for being parallel to second laser beam 139,
And then it is moved with video camera 143 and third laser beam emitting device 144 along the direction for being parallel to second laser beam 139.6th is flexible
Bar 176 is by flexible, and the video camera 143 and third laser beam emitting device 144 of drive are along the direction for being parallel to first laser beam 138
Movement.
After probe card 12 and device under test 2 are carried out first step contraposition, second step contraposition can also be carried out so that visiting
Align more acurrate between needle card 12 and device under test 2, i.e., the probe 122 in probe card 12 is located at the weld pad 21 on device under test 2
Central area.
Method for calibrating probe card 12 and device under test 2 further includes step S20.
Step S20: being arranged the third laser beam 145 perpendicular to loading end 111, is graticule by one with third laser beam 145
The center of root probe 122 is aligned with the center of a weld pad 21.Step S20 includes step S21~S22.
Step S21, by the center of third laser beam alignment probe, and the position of probe card is recorded.
Referring to Fig. 9, the position of probe card 12 after first step contraposition is recorded, third laser beam emitting device 144, third are opened
Laser beam emitting device 144 emits third laser beam 145 to the direction close to loading end 111.It is watched captured by video camera 143 on one side
Image, on one side by operation camera motion mechanism 17 adjust video camera 143 and third laser beam emitting device 144 position, make
Obtain the center that the third laser beam 145 that third laser beam emitting device 144 is launched is just aligned a probe 122.In this implementation
In example, since the probe base 121 of probe card 12 is arranged to all-transparent or partially transparent, and the transparent part of probe base 121
It is provided with probe 122, third laser beam 145 can be directed at the probe 122.
Step S22, probe card is removed, translation loading end is directed at the center of weld pad 21 with third laser beam.
Behind the center that third laser beam 145 is directed at the probe 122, by operating probe movement mechanism 16 for probe card 12
It removes so that third laser beam 145 can be irradiated to device under test 2.Referring to Fig.1 0, then, video camera 143 is watched on one side and is clapped
The image taken the photograph, on one side by operating platform movement mechanism 15 translate article carrying platform 11 make on device under test 2 with 122 phase of probe
The center of a corresponding weld pad 21 is aligned with third laser beam 145.
Step S23, probe card transfer is returned to recorded position.
Probe card 12 is moved back into the position after first step contraposition.This completes probe card 12 and device under test 2 it
Between second step contraposition.
During second step contraposition, since third laser beam emitting device 144 abuts video camera 143, from video camera 143
The angle of camera lens is observed when being irradiated to the center of probe 122 to observe third laser beam 145 or be irradiated to the center of weld pad 21
Result and actual result between error it is small, probe 122 can more accurately align with weld pad 21.Complete second step contraposition
Afterwards, the needle point of probe 122 can be aligned with the center of the weld pad 21 of device under test 2.Referring to Fig.1 1, continue to drive probe card 12 close
The needle point of loading end 111, the probe 122 in probe card 12 is inserted into the center of weld pad 21 corresponding thereto, reduces and manually puts
The time for setting probe card 12 improves the accuracy being aligned between probe card 12 and device under test 2, avoids the damage of probe card 12
It is bad.
Further, the color of first laser beam 138, second laser beam 139 and third laser beam 145 can be identical, example
It such as can be red, blue or green.
First laser beam 138, the color of second laser beam 139 can also be not identical as third laser beam 145, for example,
First laser beam 138 and second laser beam 139 are blue, and third laser beam 145 is red.By first laser beam 138 and
The color of dual-laser beam 139 be arranged to the color of third laser beam 145 is not identical can be significantly more by third laser beam 145
It is distinguished with first laser beam 138 and second laser beam 139.
First laser beam 138, the color of second laser beam 139, the color of third laser beam 145 are different.First swashs
Green can be set into light beam 138, and au bleu can be set in second laser beam 139, and third laser beam 145 can be set into red
Color.In this way, the color of three kinds of laser beams is different, it is not easy to obscure.
Further, referring to Fig.1 2, contraposition component 13 further includes that laser receiver 140, third guide rail 141 and third are sliding
Block 142.The quantity of laser receiver 140 and the quantity of third sliding block 142 with the quantity phase of first laser emitter 131
Together.Third guide rail 141 is parallel with the first guide rail 132.Third sliding block 142 is arranged on third guide rail 141.Third sliding block 142
It can be slided along third guide rail 141.Laser receiver 140 is arranged in a one-to-one correspondence with third sliding block 142, laser receiver 140
It is mounted on corresponding third sliding block 142.Laser receiver 140 can adjust position along third guide rail 141.
Laser receiver 140 is arranged in a one-to-one correspondence with first laser emitter 131, by laser receiver 140
The first laser emitter 131 that position is adjusted to corresponding aligns, and laser receiver 140 can receive corresponding thereto
In the first laser beam 138 launched of first laser emitter 131.
Laser receiver 140 includes multiple photosensitive sensor (not shown), and multiple photosensitive sensors are along perpendicular to carrying
The direction in face 111 is arranged successively Cheng Yilie.Photosensitive sensor is arranged in laser receiver 140 towards first laser emitter
131 side.Photosensitive sensor first laser hair corresponding with the laser receiver 140 on laser receiver 140
First laser beam 138 that injection device 131 is launched corresponds, and photosensitive sensor receives and incude corresponding thereto first sharp
Light beam 138.
Method for calibrating probe card and device under test further includes step S30.
Whether step S30: probe card 12 and loading end 111 are drawn close, by observation first laser beam 138 all by probe
122 block to judge whether probe 122 is in contact with weld pad 21.
After the completion of second step contraposition, driving probe card 12 moves so that probe 122 to the direction close to loading end 111
It is in contact with the weld pad 21 of device under test 2, if laser receiver 140 can also receive first laser beam 138, shows probe
122 not in contact with weld pad 21 is arrived, and probe card 12 is simultaneously not moved to position.Meanwhile 1 proactive dissemination of test machine is for reminding tester to visit
Needle 122 can be reduced tester and checked the time whether probe touches device under test, improved not in contact with the alarm of weld pad 21
Testing efficiency.
Further, referring to Fig.1 2, contraposition component 13 further includes connection frame 181 and the 7th straight line executing mechanism 182.Even
The quantity of the quantity, the 7th straight line executing mechanism 182 that connect frame 181 is identical as the quantity of the first sliding block 133.Each connection frame
181 interconnect the first sliding block 133 third sliding block 142 corresponding with first sliding block 133 so that first swashs
The laser receiver 140 corresponding with the first laser emitter 131 of light emitting devices 131 aligns.
7th straight line executing mechanism 182 is arranged in a one-to-one correspondence with connection frame 181, and the 7th straight line executing mechanism 182 is for driving
Dynamic connection frame 181 is moved along the direction for being parallel to the first guide rail 132.7th straight line executing mechanism 182 is electric cylinders, and the 7th straight line is held
Row mechanism 182 includes the 7th cylinder body 183 and can stretch out or retraction is in the 7th telescopic rod 184 of the 7th cylinder body 183.
7th telescopic rod 184 is connected to connection frame 181, is preferably attached to the middle part of connection frame 181, the 7th telescopic rod 184
It stretches out or retraction is when seven cylinder bodies 183, the first sliding block 133 and third sliding block 142 can be driven to move simultaneously.In this way, adjusting
The position of laser receiver 140 can be adjusted when the position of first laser emitter 131 simultaneously so that first laser emits
The first laser beam 138 that device 131 is launched can be received always by laser receiver 140.
Contraposition component can also include one and (not show in figure for receiving the laser receiver of second laser beam 139
Out), the laser receiver and second laser emitter 135 are separately positioned on the opposite sides of article carrying platform 11.The laser
Reception device can follow the movement of second laser emitter 135 and mobile so that the laser receiver is in always to receive
The position of second laser beam 139.
After the completion of second step contraposition, driving probe card 12 moves so that probe 122 to the direction close to loading end 111
It is in contact with the weld pad 21 of device under test 2, if laser receiver can also receive second laser beam 139, shows probe 122 not
Weld pad 21 is touched, probe card 12 is simultaneously not moved to position.Meanwhile 1 proactive dissemination of test machine is for reminding tester's probe 122
Not in contact with the alarm of weld pad 21, this can be reduced tester and has checked the time whether probe touches device under test 2, has improved
Testing efficiency.
In the present embodiment, first straight line executing agency 151, second straight line executing agency 154, third straight line are executed into machine
Structure 161, the 4th straight line executing mechanism 164, the 5th straight line executing mechanism 171, the 6th straight line executing mechanism 174, the 7th straight line are held
It is most preferred one embodiment that row mechanism 182 and elevating mechanism 167, which are arranged to electric cylinders, it is possible to understand that ground, it can also be by first
Straight line executing mechanism 151, second straight line executing agency 154, third straight line executing mechanism 161, the 4th straight line executing mechanism 164,
5th straight line executing mechanism 171, the 6th straight line executing mechanism 174, the 7th straight line executing mechanism 182 and elevating mechanism 167 are arranged
At straight line executing mechanism well known to other, such as gear and rack teeth mechanism, electric putter, lead screw, oil cylinder or cylinder.
It should be understood that multiple examples described above can along multiple directions (such as inclination, reverse, horizontal, vertical, etc.) and
It is utilized with multiple constructions, without departing from the principles of the present invention.Embodiment shown in the accompanying drawings is only used as the utility model
Principle the example effectively applied and be shown and described, the utility model is not limited to these examples any specific
Details.
Certainly, once thinking over the above description of representative embodiment, those skilled in the art are just it will be readily understood that can
A variety of remodeling, addition, substitution, deletion and other variations are made to these specific embodiments, and these variations are in this reality
In the range of novel principle.Therefore, the detailed description of front should be clearly understood that it is only with explanation and exemplary side
Come what is provided, the spirit and scope of the utility model are only limited by the appended claims and its equivalent formula.
Claims (11)
1. a kind of test machine characterized by comprising
Article carrying platform, including loading end, and can move and along the direction for being parallel to the loading end around perpendicular to the loading end
Shaft rotation；
Probe card, is arranged in the top of the article carrying platform, and energy edge is parallel to the loading end and perpendicular to the loading end
Direction is mobile and around the shaft rotation perpendicular to the loading end, and the probe card includes more to close to the article carrying platform
The probe that side is stretched out；
Align component, comprising:
At least two first laser emitters can emit the loading end for being parallel to the article carrying platform and be higher than described hold
The multi beam first laser beam of section, the first laser beam are arranged successively along the direction perpendicular to the loading end；
Second laser emitter can emit the loading end for being parallel to the article carrying platform and be higher than the more of the loading end
Beam second laser beam, the second laser beam is arranged successively along the direction perpendicular to the loading end, and the second laser beam
Perpendicular to the first laser beam；
Wherein, the first laser emitter can be moved along the direction for being parallel to the second laser beam, the second laser
Emitter can be moved along the direction for being parallel to the first laser beam.
2. test machine according to claim 1, which is characterized in that the contraposition component further includes video camera and third laser
Emitter, the position for video camera deviate from the side of the article carrying platform and energy edge in the probe card and are parallel to the loading end
Direction is mobile, and the third laser beam emitting device is installed on the video camera,
The camera shooting function is imaged towards article carrying platform side, and the third laser beam emitting device can be to close to the article carrying platform one
Side emits third laser beam, and the third laser beam is perpendicular to the loading end.
3. test machine according to claim 1, which is characterized in that the probe card further includes partly or entirely transparent spy
Needle stand；
The probe extends from the probe base to the side close to the article carrying platform, and probe described at least one is mounted on
The transparent part of the probe base.
4. test machine according to any one of claim 1 to 3, which is characterized in that the contraposition component further includes laser
Reception device；
The quantity of the laser receiver is identical as the quantity of the first laser emitter, the laser receiver with
The first laser emitter is arranged in a one-to-one correspondence, the laser pick-off of the first laser emitter corresponding thereto
Device is located at the two sides of the article carrying platform；
The first laser emitter emits the first laser beam to the laser receiver corresponding thereto, described
Laser receiver is for incuding whether receive the first laser beam.
5. test machine according to claim 1, which is characterized in that the test machine further includes platform moving mechanism, described
The bottom of the article carrying platform is arranged in platform moving mechanism, and the platform moving mechanism includes:
First straight line executing agency；
Second straight line executing agency, the second straight line executing agency are mounted in the first straight line executing agency；
First rotation driving mechanism, first rotation driving mechanism are mounted in the second straight line executing agency, the load
Object stage+module is on first rotation driving mechanism；
Wherein, the first straight line executing agency is for driving the second straight line executing agency edge to be parallel to the second laser
The direction of beam is mobile, and the second straight line executing agency is for driving the first rotation driving mechanism edge to be parallel to described first
The direction of laser beam is mobile, and first rotation driving mechanism is for driving the article carrying platform around perpendicular to the loading end
Axis rotation.
6. test machine according to claim 5, which is characterized in that the test machine further includes probe movement mechanism, described
The top of the article carrying platform is arranged in probe movement mechanism, and the probe movement mechanism includes:
Third straight line executing mechanism；
4th straight line executing mechanism, the 4th straight line executing mechanism are mounted on the third straight line executing mechanism；
Elevating mechanism, the elevating mechanism are mounted on the 4th straight line executing mechanism；
Second rotation driving mechanism, second rotation driving mechanism are mounted on the elevating mechanism, the probe card installation
On second rotation driving mechanism；
Wherein, the third straight line executing mechanism is for driving the 4th straight line executing mechanism edge to be parallel to the second laser
The direction of beam is mobile, and the 4th straight line executing mechanism is for driving the elevating mechanism edge to be parallel to the first laser beam
Direction is mobile, and the elevating mechanism is used to drive the rotation driving mechanism separate along the direction perpendicular to the loading end or lean on
The nearly loading end, second rotation driving mechanism is for driving the probe card around the direction perpendicular to the loading end
Axis rotation.
7. test machine according to claim 2, which is characterized in that the contraposition component further includes camera motion mechanism, institute
It states camera motion mechanism and the side that the probe card deviates from the article carrying platform is set, the camera motion mechanism includes:
5th straight line executing mechanism；
6th straight line executing mechanism, the 6th straight line executing mechanism is mounted on the 5th straight line executing mechanism, described to take the photograph
Camera is mounted on the 6th straight line executing mechanism；
Wherein, the 5th straight line executing mechanism is for driving the 6th straight line executing mechanism edge to be parallel to the second laser
The direction of beam is mobile, and the 6th straight line executing mechanism is used to drive the video camera along the side for being parallel to the first laser beam
To movement.
8. test machine according to claim 4, which is characterized in that the contraposition component further include:
First guide rail of vertical bar shaped, is parallel to the second laser beam；
Multiple first sliding blocks being mounted on first guide rail can be slided along first guide rail；
Second guide rail of vertical bar shaped, is parallel to the first laser beam；
Multiple second sliding blocks being mounted on second guide rail can be slided along second guide rail；
Wherein, the first laser emitter is arranged in a one-to-one correspondence with first sliding block, each first laser transmitting
Device is arranged on corresponding first sliding block, and the second laser emitter and second sliding block correspond
Setting, each second laser emitter are arranged on corresponding second sliding block.
9. test machine according to claim 8, which is characterized in that the contraposition component further include:
The third guide rail of vertical bar shaped is parallel to first guide rail；
The multiple third sliding blocks being mounted on the third guide rail can be slided along the third guide rail；
The quantity of the third sliding block is identical as the quantity of the laser receiver, the third sliding block and the laser pick-off
Device is arranged in a one-to-one correspondence, and each laser receiver is mounted on the corresponding third sliding block.
10. test machine according to claim 9, which is characterized in that the contraposition component further include:
Connection frame, the third sliding block that the connection frame is separately connected first sliding block and aligns with first sliding block；
7th straight line executing mechanism, the 7th straight line executing mechanism connect one to one with the connection frame, for drive with
Its corresponding described connection frame is moved along the direction for being parallel to first guide rail.
11. test machine according to claim 2, which is characterized in that the face of the first laser beam, the second laser beam
Color is different from the color of the third laser beam.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821974297.1U CN209311539U (en) | 2018-11-28 | 2018-11-28 | Test machine |
| PCT/CN2019/119528 WO2020108352A1 (en) | 2018-11-28 | 2019-11-19 | Tester and method for calibrating probe card and device under testing (dut) |
| US17/321,248 US11852657B2 (en) | 2018-11-28 | 2021-05-14 | Tester and method for calibrating probe card and device under testing (DUT) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821974297.1U CN209311539U (en) | 2018-11-28 | 2018-11-28 | Test machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209311539U true CN209311539U (en) | 2019-08-27 |
Family
ID=67674658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821974297.1U Withdrawn - After Issue CN209311539U (en) | 2018-11-28 | 2018-11-28 | Test machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209311539U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020108352A1 (en) * | 2018-11-28 | 2020-06-04 | Changxin Memory Technologies, Inc. | Tester and method for calibrating probe card and device under testing (dut) |
| CN111239448A (en) * | 2018-11-28 | 2020-06-05 | 长鑫存储技术有限公司 | Testing machine and method for calibrating probe card and device to be tested |
-
2018
- 2018-11-28 CN CN201821974297.1U patent/CN209311539U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020108352A1 (en) * | 2018-11-28 | 2020-06-04 | Changxin Memory Technologies, Inc. | Tester and method for calibrating probe card and device under testing (dut) |
| CN111239448A (en) * | 2018-11-28 | 2020-06-05 | 长鑫存储技术有限公司 | Testing machine and method for calibrating probe card and device to be tested |
| US11852657B2 (en) | 2018-11-28 | 2023-12-26 | Changxin Memory Technologies, Inc. | Tester and method for calibrating probe card and device under testing (DUT) |
| CN111239448B (en) * | 2018-11-28 | 2024-05-03 | 长鑫存储技术有限公司 | Test machine and method for calibrating probe card and device under test |
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