CN209282169U - Auxiliary device is thinned with wafer in a kind of power electronic devices chip production - Google Patents
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production Download PDFInfo
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- CN209282169U CN209282169U CN201821719665.8U CN201821719665U CN209282169U CN 209282169 U CN209282169 U CN 209282169U CN 201821719665 U CN201821719665 U CN 201821719665U CN 209282169 U CN209282169 U CN 209282169U
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Abstract
The utility model relates to the technical fields of chip production equipment auxiliary equipment, auxiliary device is thinned with wafer more particularly to a kind of power electronic devices chip production, the precision of its thickness thinning that wafer can be improved reduces the influence that human factor processes wafer；And the flatness in face is thinned in wafer during polishing wheel can be improved to wafer processing movement；Including station, motor, fine polishing halo, rough polishing halo, wafer and fixed station, the output end of motor is provided with connection buckle；It further include four groups of regulating rods, four groups of telescopic rods, balance plate, power rail, power gear, two groups of support frames, two groups of mounting racks and knob, the inside of four groups of regulating rods is respectively arranged with four groups of telescopic cavities, and the circumferential side wall of forward right side telescopic rod is provided with graduated scale；Further include two groups of supports, transverse slat, sliding panel, left hanging rod, right hanging rod and snap ring, horizontal slide rail is internally provided on the left of transverse slat, the top area of sliding panel is provided with sliding shoe.
Description
Technical field
The utility model relates to the technical fields of chip production equipment auxiliary equipment, more particularly to a kind of power electronics device
Auxiliary device is thinned with wafer in part chip production.
Background technique
It is well known that in integrated circuit fabrication, for semiconductor silicon material since its is resourceful, manufacturing cost is low, technique
Property is good, becomes the important basis material of integrated circuit, from the point of view of integrated circuit section structure, most of integrated circuit is in silicon
It is manufactured in the superficial surface layer of basis material, it is clean to the dimensional accuracy, geometric accuracy, surface of chip due to the requirement of manufacturing process
Cleanliness and surface crystallites lattice structure propose very high request, therefore in several hundred road process flows, relatively thin chip not can be used,
It can only be transmitted in technical process using certain thickness chip and flow needs usually before integrated antenna package to chip
The extra basis material in the back side removes certain thickness, and this technical process is referred to as back surface of the wafer reduction process, electric power electricity
It is one kind during power electronic devices chip production that auxiliary device, which is thinned, with wafer in sub- device chip production, for removing
The device of the extra basis material in the wafer back side has obtained widely making in the field of power electronic devices chip manufacture
With；Existing power electronic devices chip production with wafer be thinned auxiliary device include station, it is motor, fine polishing halo, thick
Polishing wheel, wafer and fixed station, the bottom end of the fixed station and the top middle portion region of station connect, the wafer card
Mounted in the top middle portion region of fixed station, the output end of the motor is provided with connection buckle；Existing power electronic devices core
With wafer auxiliary device is thinned in use, being commercially available motor, rough polishing halo and fine polishing halo on the market first in piece production,
Then wafer is installed on the fixed station of station, it will be thick first, in accordance with the instruction for mounting of rough polishing halo purchase when institute band
Polishing wheel is mounted on the connection buckle of motor output end, the operation instruction of institute's band when then staff buys according to motor
Motor is accessed power supply and drives rough polishing halo to carry out polishing to wafer by motor and is thinned by book, to wafer thickness
After reaching demand thickness, then stops rough polishing halo and wafer is polished, at this moment torn open on the connection buckle of the output end of motor
Then lower rough polishing halo changes fine polishing halo and continues to polish wafer, until the state of the processing request of wafer is right
After send to next process；Existing power electronic devices chip production is thinned in auxiliary device use with wafer to be found,
Personnel are operated first when operating motor drive polishing wheel to wafer processing, due to the influence of human factor, operation
Personnel are difficult the thickness thinning of accurate control wafer, so as to cause using limitation higher；And operator is operating
During motor drives polishing wheel mobile to wafer processing, it is difficult to ensure that the flatness in face is thinned in wafer, to lead
Cause practicability poor.
Utility model content
In order to solve the above technical problems, the utility model provides a kind of precision of thickness thinning that wafer can be improved,
The influence that human factor processes wafer is reduced, to reduce using limitation；And polishing wheel can be improved to wafer
The flatness in face is thinned in wafer during processing is mobile, and the power electronic devices chip production for enhancing practicability is subtracted with wafer
Thin auxiliary device.
Auxiliary device, including station, electricity is thinned with wafer in a kind of power electronic devices chip production of the utility model
Motivation, fine polishing halo, rough polishing halo, wafer and fixed station, the output end of the motor are provided with connection buckle；It further include four
Group regulating rod, four groups of telescopic rods, balance plate, power rail, power gear, two groups of support frames, two groups of mounting racks and knob, described four
The bottom end of group regulating rod is connect with the front left side on the top of station, left rear side, forward right side and right lateral side respectively, four groups of tune
The inside of control lever is respectively arranged with four groups of telescopic cavities, and the top of four groups of telescopic cavities is provided with and respectively communicated with four groups of telescopic mouths,
The bottom end of four groups of telescopic rods passes through four groups of telescopic mouths and be respectively protruding into four groups from the upside of four groups of regulating rods respectively stretches
The inside of contracting chamber, the bottom end of four groups of telescopic rods are respectively arranged with four groups of limit films, the top difference of four groups of telescopic rods
It is connect with the front left side of the bottom end of balance plate, left rear side, forward right side and right lateral side, the center bottom region of the balance plate and dynamic
The top of power bar connects, and the left end of the power rail is provided with gear bar, the bottom end of two groups of support frames with station
The connection of top middle portion region, the central region of the power gear are provided with operating shaft, the rear end of the operating shaft and rear side institute
The upside rotation suit of support frame is stated, is provided through communication port on the upside of the front end of front side support frame as described above, the operating shaft
Front end passes through communication port from the rear side of front side support frame as described above and extend out to the front side of front side support frame as described above, the knob
Rear end and the front end of operating shaft connect, and the bottom end of two groups of mounting racks connects with the front side on the top of balance plate and rear side respectively
It connects, the circumferential side wall of telescopic rod described in forward right side is provided with graduated scale；It further include two groups of supports, transverse slat, sliding panel, left extension
Bar, right hanging rod and snap ring, the bottom end of two groups of supports connect with the left and right side central region on the top of station respectively
It connects, the bottom end left and right side of the transverse slat is connect with the top of two groups of supports respectively, setting inside the left side of the transverse slat
There is horizontal slide rail, the top area of the sliding panel is provided with sliding shoe, and the sliding shoe and horizontal slide rail sliding clamp, described
The left and right side of the bottom section of sliding panel is respectively arranged with left regulating tank and right regulating tank, the top right side of the left hanging rod
It is clamped respectively with left regulating tank and the sliding of right regulating tank with the top left hand of right hanging rod, the low side right side of the left hanging rod and right extension
It is connect respectively with the left end of snap ring and right end on the left of the bottom end of bar, the snap ring and motor circumferential side wall central region fixing card
Dress, the bottom end of the connection buckle of the output end bottom of the motor is connect with the top of rough polishing halo.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including auxiliary sliding panel, the left hanging rod of auxiliary, the right hanging rod of auxiliary, auxiliary snap ring and stand-by motor, set inside the right side of the transverse slat
Be equipped with auxiliary horizontal slide rail, the top area of the auxiliary sliding panel is provided with auxiliary sliding shoe, the auxiliary sliding shoe with it is auxiliary
Horizontal slide rail sliding is helped to clamp, the left and right side of the bottom section of the auxiliary sliding panel is respectively arranged with the left regulating tank of auxiliary
With assist right regulating tank, on the right side of the top of the left hanging rod of auxiliary and assist the top left hand of right hanging rod respectively with the left adjusting of auxiliary
Slot and the sliding of right regulating tank is assisted to clamp, on the right side of the low side of the left hanging rod of auxiliary and assist the bottom end left side of right hanging rod respectively with
The left end of auxiliary snap ring is connected with right end, and the bottom end of the auxiliary motor is provided with auxiliary connection buckle, the auxiliary motor
The bottom end of auxiliary connection buckle of output end bottom connect with the top of fine polishing halo.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including preceding adjusting block, rear adjusting block, front limit plate and rear position margining plate, the rear end of the preceding adjusting block and the front end point of rear adjusting block
It is not connect with the front-end and back-end central region of fixed station, the bottom end of the bottom end of the front limit plate and rear position margining plate is respectively with two
The top middle portion region connection of group mounting rack, the front center of the front limit plate and the front center of rear position margining plate extend through
Sliding rail and aft ramp before being provided with, the left and right side top area of the front side mounting rack are fixed before being respectively arranged with two groups
Slot, the top of fixing groove is connected to the left and right side at advancing slip rail bottom end respectively before described two groups, a left side for the rear side mounting rack
Fixing groove after side and right hand top region are respectively arranged with two groups, after described two groups the top of fixing groove respectively with aft ramp bottom end
Left and right side connection, the preceding adjusting block and rear adjusting block respectively with the left side preceding fixing groove and left side it is described after it is fixed
Slot clamps.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including stop nut, external screw thread, the stop nut and front left side institute are provided on the circumferential side wall of telescopic rod described in front left side
Telescopic rod spiral shell dress is stated, the bottom end of the stop nut is close to the top of regulating rod described in front left side.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including preceding handle and rear handle, the rear end of the preceding handle and the front end of rear handle are adjusted with the front end of preceding adjusting block and afterwards respectively
The rear end of block connects.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including left extension spring, right extension spring, left splint, right splint, left driven rod and right belt lever, the left side on the fixed station top
Portion region and right areas are respectively arranged with left sliding groove and right sliding groove, and the front side of the left sliding groove and rear side are respectively communicated with
Two groups of left card slots are provided with, the left driven rod and the sliding of left sliding groove clamp, and the right end of the left driven rod is provided with left steady
Gu block, the front-end and back-end of the left firm block are clamped with two groups of left card slots slidings respectively, the middle part bottom end of the left clamp with
The left side top of left driven rod connects, and the left end of the left extension spring is connect with the right end of left firm block, and the Zola stretches bullet
The right end of spring is connect with the right end of left sliding groove, and the front side of the right sliding groove and rear side are provided with and respectively communicated with two groups of right cards
Slot, the right belt lever and the sliding of right sliding groove clamp, and the left end of the right belt lever is provided with right firm block, described right firm
The front-end and back-end of block are clamped with two groups of right card slot slidings respectively, and the middle part bottom end of the right clamping plate and the right side of right belt lever are pushed up
End connection, the right end of the right extension spring are connect with the left end of right firm block, the left end of the right extension spring and right sliding
The left end of slot connects, and the left side of the circumferential side wall of the wafer is close to the right end of left clamp, the circumference of the wafer
It is close to the left end of right clamping plate on the right side of wall.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including four groups of supporting legs, the top of four groups of supporting legs is respectively and behind the front left side of the bottom end of station, left rear side, forward right side and the right side
Side connection.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including stop collar, the left end of the stop collar is provided with two groups of supporting legs, the left end of two groups of supporting legs respectively with two groups of branch
The right end central region of support connects, and two groups of stop collars and power rail sliding are set with.
Compared with prior art the utility model has the following beneficial effects: first by turning knob, while knob drives and moves
Powershift gear rotates between two groups of support frames, the then gear bar rotation on two groups of power gear occlusion power rails, while gear
Item drives power rail to move up and down, and at this moment the top of power rail equally drives balance plate longitudinal movement, at the same time balance plate
Four angles drive extension elongation of four groups of telescopic rods respectively in the four of four groups of regulating rods groups of telescopic cavities to change, while can be with
The length that four groups of telescopic rods stretch out four groups of telescopic cavities respectively is controlled by the graduated scale on the telescopic rod of observation forward right side, at this moment
Fixed station just drives wafer to follow balance plate longitudinal movement by two groups of mounting racks to adjust the machining accuracy of wafer, thus
By improving the precision of the thickness thinning of wafer, the influence that human factor processes wafer is reduced, to reduce using office
It is sex-limited；And during wafer is thinned, left hanging rod can be held, while left and right pushes left hanging rod, at this moment left hanging rod band
Dynamic sliding panel horizontally slips on the downside of transverse slat, then can push left hanging rod with front and back, while motor follows a left side by snap ring
Hanging rod and right hanging rod slide back and forth on sliding panel, just realize the Level tune that motor drives rough polishing halo in this way, thus
The flatness in face is thinned in wafer during by improving polishing wheel to wafer processing movement, enhances practicability.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the fixed station of the utility model and the attachment structure schematic diagram of adjusting block；
Fig. 3 is the extension spring of the utility model and the attachment structure schematic diagram of driven rod；
Fig. 4 is the partial enlargement structural representation of the A of the utility model；
It is attached marked in the figure: 1, station；2, motor；3, fine polishing halo；4, rough polishing halo；5, wafer；6, fixed station；
7, four groups of regulating rods；8, four groups of telescopic rods；9, balance plate；10, power rail；11, power gear；12, two groups of support frames；13, two
Group mounting rack；14, knob；15, two groups of supports；16, transverse slat；17, sliding panel；18, left hanging rod；19, right hanging rod；20, snap ring；
21, sliding panel is assisted；22, left hanging rod is assisted；23, right hanging rod is assisted；24, snap ring is assisted；25, stand-by motor；26, preceding adjusting
Block；27, front limit plate；28, stop nut；29, preceding handle；30, left extension spring；31, left clamp；32, left driven rod；33,
Four groups of supporting legs；34, stop collar.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below
Embodiment is not intended to limit the scope of the present invention for illustrating the utility model.
As shown in Figures 1 to 4, auxiliary dress is thinned in a kind of power electronic devices chip production of the utility model wafer
It sets, including station 1, motor 2, fine polishing halo 3, rough polishing halo 4, wafer 5 and fixed station 6, the output end of motor 2 are set
It is equipped with connection buckle；It further include 11, two groups of four groups of regulating rods, 7, four groups of telescopic rods 8, balance plate 9, power rail 10, power gear supports
12, two groups of mounting racks 13 of frame and knob 14, the bottom end of four groups of regulating rods 7 respectively with the front left side on the top of station 1, left back
Side, forward right side are connected with right lateral side, and the inside of four groups of regulating rods 7 is respectively arranged with four groups of telescopic cavities, the top of four groups of telescopic cavities
Four groups of telescopic mouths are provided with and respectively communicated with, the bottom end of four groups of telescopic rods 8 passes through four groups from the upside of four groups of regulating rods 7 respectively and stretches
Mouthful and be respectively protruding into the inside of four groups of telescopic cavities, the bottom end of four groups of telescopic rods 8 is respectively arranged with four groups of limit films, and four groups are stretched
The top of contracting bar 8 is connect with the front left side of the bottom end of balance plate 9, left rear side, forward right side and right lateral side respectively, the bottom of balance plate 9
End central region is connect with the top of power rail 10, and the left end of power rail 10 is provided with gear bar, the bottom end of two groups of support frames 12
Connect with the top middle portion region of station 1, the central region of power gear 11 is provided with operating shaft, the rear end of operating shaft with
The upside of Backside support frame rotates suit, communication port is provided through on the upside of the front end of front side support frame, the front end of operating shaft is certainly
The rear side of front side support frame passes through communication port and extend out to the front side of front side support frame, before the rear end of knob 14 and operating shaft
End connection, the bottom end of two groups of mounting racks 13 are connect with the front side on the top of balance plate 9 and rear side respectively, the circle of forward right side telescopic rod
All side walls are provided with graduated scale；It further include two groups of supports 15, transverse slat 16, sliding panel 17, left hanging rod 18, right hanging rod 19 and snap ring
20, the bottom end of two groups of supports 15 is connect with the left and right side central region on the top of station 1 respectively, the bottom end of transverse slat 16
Left and right side is connect with the top of two groups of supports 15 respectively, and the left side of transverse slat 16 is internally provided with horizontal slide rail, sliding panel
17 top area is provided with sliding shoe, and sliding shoe and horizontal slide rail sliding clamp, the left side of the bottom section of sliding panel 17 and
Right side is respectively arranged with left regulating tank and right regulating tank, on the right side of the top of left hanging rod 18 and the top left hand of right hanging rod 19 respectively with
Left regulating tank and the sliding of right regulating tank clamp, on the right side of the low side of the left hanging rod 18 and bottom end of right hanging rod 19 left side respectively with snap ring
20 left end is connected with right end, snap ring 20 and the fixed clamping of 2 circumferential side wall central region of motor, the output end bottom of motor 2
The bottom end of the connection buckle in portion is connect with the top of rough polishing halo 4；First by turning knob, while knob drives power gear to exist
It is rotated between two groups of support frames, then the gear bar rotation on two groups of power gear occlusion power rails, while gear bar drives and moves
Power bar moves up and down, and at this moment the top of power rail equally drives balance plate to vertically move, at the same time the four of balance plate angle band
Dynamic extension elongation of four groups of telescopic rods respectively in the four of four groups of regulating rods groups of telescopic cavities changes, while can pass through observation
Graduated scale on the telescopic rod of forward right side controls the length that four groups of telescopic rods stretch out four groups of telescopic cavities respectively, and at this moment fixed station is just
Wafer is driven to follow balance plate longitudinal movement to adjust the machining accuracy of wafer by two groups of mounting racks, to pass through raising
The precision of the thickness thinning of wafer reduces the influence that human factor processes wafer, to reduce using limitation；And
During wafer is thinned, left hanging rod can be held, while left and right pushes left hanging rod, at this moment left hanging rod drives sliding panel to exist
It horizontally slips on the downside of transverse slat, then can push left hanging rod with front and back, while motor follows left hanging rod and right extension by snap ring
Bar slides back and forth on sliding panel, just realizes the Level tune that motor drives rough polishing halo in this way, to be thrown by improving
The flatness in face is thinned in wafer during halo is mobile to wafer processing, enhances practicability.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including auxiliary sliding panel 21, the left hanging rod 22 of auxiliary, the right hanging rod 23 of auxiliary, auxiliary snap ring 24 and stand-by motor 25, the right side of transverse slat 16
Side is internally provided with auxiliary horizontal slide rail, and the top area of auxiliary sliding panel 21 is provided with auxiliary sliding shoe, auxiliary sliding shoe with
It assists horizontal slide rail sliding to clamp, the left and right side of the bottom section of sliding panel 21 is assisted to be respectively arranged with the left regulating tank of auxiliary
With assist right regulating tank, assist on the right side of the top of left hanging rod 22 and assist the top left hand of right hanging rod 23 respectively with the left adjusting of auxiliary
Slot and the sliding of right regulating tank is assisted to clamp, assist on the right side of the low side of left hanging rod 22 and assist the bottom end left side of right hanging rod 23 respectively with
The left end of auxiliary snap ring 24 is connected with right end, and the bottom end of stand-by motor 25 is provided with auxiliary connection buckle, the output of stand-by motor 25
The bottom end of the auxiliary connection buckle of bottom is held to connect with the top of fine polishing halo 3；It is auxiliary by adding during wafer is thinned
It helps motor that rough polishing wheel and fine polishing halo can be made to realize to be switched fast, and the left hanging rod of auxiliary can be held, while left and right pushes away
At this moment the left hanging rod of dynamic auxiliary is assisted left hanging rod band dynamic auxiliary sliding panel to horizontally slip on the downside of transverse slat, then can be pushed away with front and back
The left hanging rod of dynamic auxiliary, while stand-by motor is by assisting snap ring to follow the left hanging rod of auxiliary and assisting right hanging rod on auxiliary sliding panel
It slides back and forth, the Level tune that stand-by motor drives fine polishing halo is just realized in this way, to reduce using limitation.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including preceding adjusting block 26, rear adjusting block, front limit plate 27 and rear position margining plate, the rear end of preceding adjusting block 26 and the front end of rear adjusting block
Connect respectively with the front-end and back-end central region of fixed station 6, the bottom end of the bottom end of front limit plate 27 and rear position margining plate respectively with
The top middle portion region connection of two groups of mounting racks 13, the front center of front limit plate 27 and the front center of rear position margining plate are passed through respectively
It wears and is equipped with preceding sliding rail and aft ramp, fixing groove before the left and right side top area of installed in front frame is respectively arranged with two groups,
The top of fixing groove is connected to the left and right side at advancing slip rail bottom end respectively before two groups, at the top of the left and right side of rear side mounting rack
Fixing groove after region is respectively arranged with two groups, the top of fixing groove connects with the left and right side of aft ramp bottom end respectively after two groups
Logical, preceding adjusting block 26 and rear adjusting block are clamped with fixing groove behind fixing groove before left side and left side respectively；It can by lifting fixed station
To drive two groups of adjusting blocks to be detached from the ipsilateral fixing groove of two groups of mounting racks respectively, at this moment fixed station is pushed to can be fixed station
Two groups of adjusting blocks slided in two groups of sliding rails respectively, until the other side that two groups of adjusting blocks are installed on two groups of mounting racks respectively is solid
Determine in slot, to realize the downside that wafer is moved to fine polishing halo on the downside of rough polishing halo, reduces using limitation
Property.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including stop nut 28, external screw thread, stop nut 28 and front left side telescopic rod are provided on the circumferential side wall of front left side telescopic rod
Spiral shell dress, the bottom end of stop nut 28 is close to the top of front left side regulating rod；Adjusting, which finishes, stretches four groups of telescopic rods respectively at four groups
After the extension elongation of the telescopic cavity of regulating rod, by the way that stop nut is screwed and can made on the external screw thread of front left side telescopic rod
Stop nut limits front left side telescopic rod, and since four groups of telescopic rods are all connected on balance plate, thus front left side is flexible
Other three groups of telescopic rods are also no longer adjustable height after bar is fixed, to realize the limit to balance plate cover degree, enhance
Practicability.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including preceding handle 29 and rear handle, the rear end of preceding handle 29 and the front end of rear handle are adjusted with the front end of preceding adjusting block 26 and afterwards respectively
The rear end of locking nub connects；The adjusting of fixed station can be made more convenient by two groups of handles, to enhance convenience.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including left extension spring 30, right extension spring, left clamp 31, right clamping plate, left driven rod 32 and right belt lever, 6 top of fixed station
Left region and right areas be respectively arranged with left sliding groove and right sliding groove, the front side of left sliding groove and rear side are respectively communicated with
Two groups of left card slots are provided with, left driven rod 32 is clamped with the sliding of left sliding groove, and the right end of left driven rod 32 is provided with left firm block,
The front-end and back-end of the firm block in a left side are clamped with two groups of left card slot slidings respectively, the middle part bottom end of left clamp 31 and left driven rod 32
The connection of left side top, the left end of left extension spring 30 are connect with the right end of left firm block, the right end of left extension spring 30 and left cunning
The right end connection of dynamic slot, the front side of right sliding groove and rear side are provided with and respectively communicated with two groups of right card slots, right belt lever and right sliding
Slot sliding clamps, and the left end of right belt lever is provided with right firm block, the front-end and back-end of the firm block in the right side respectively with two groups of right card slots
Sliding clamps, and the middle part bottom end of right clamping plate is connect with the right side top of right belt lever, the right end of right extension spring and right firm block
Left end connection, the left end of right extension spring connect with the left end of right sliding groove, the left side of the circumferential side wall of wafer 5 and left folder
The right end of plate 31 is close to, and the right side of the circumferential side wall of wafer 5 is close to the left end of right clamping plate；When wafer is installed on two groups of folders
When between plate, at this moment two groups of clamping plates pass through two groups of driven rods respectively and connect with two groups of extension springs, at this moment two groups of extension springs point
Not Tong Guo two groups of driven rods pull two groups of clamping plates, at this moment two groups of clamping plates can step up wafer, to enhance stability.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including four groups of supporting legs 33, the top of four groups of supporting legs 33 respectively with the front left side of the bottom end of station 1, left rear side, forward right side and the right side
Rear side connection；Station can be made more stable by four groups of supporting legs, to enhance practicability.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, which is characterized in that also
Including stop collar 34, the left end of stop collar 34 is provided with two groups of supporting legs, the left end of two groups of supporting legs respectively with two groups of support frames
12 right end central region connection, two groups of stop collars 34 and the sliding of power rail 10 are set with；Stop collar can make to move down on power rail
It will not be detached from power gear when dynamic, to enhance reliability.
Auxiliary device is thinned with wafer in a kind of power electronic devices chip production of the utility model, at work, first
It is first commercially available motor, rough polishing halo and fine polishing halo on the market, station is put by four groups of supporting legs in specific bit
It sets, is then mounted in wafer on the fixed station of station by two groups of clamping plate cards, buy when institute first, in accordance with rough polishing halo
Rough polishing halo is mounted on the connection buckle of motor output end by the instruction for mounting of band, and fine polishing halo is then mounted on auxiliary
The output end of motor, before polishing thinned wafer piece, by turning knob, while knob drives power gear in two groups of supports
It is rotated between frame, then the gear bar rotation on two groups of power gear occlusion power rails, while gear bar drives power rail or more
Mobile, at this moment the top of power rail equally drives balance plate to vertically move, and the four of balance plate angle drives four groups and stretches at the same time
Extension elongation of the contracting bar respectively in the four of four groups of regulating rods groups of telescopic cavities changes, while can pass through observation forward right side
Graduated scale on telescopic rod controls the length that four groups of telescopic rods stretch out four groups of telescopic cavities respectively, and at this moment fixed station just drives wafer
Piece follows balance plate longitudinal movement by two groups of mounting racks to adjust the machining accuracy of wafer, and then staff is according to electronic
Machine buy when institute band operation instructions by motor access power supply and by motor drive rough polishing halo to wafer into
Row polishing is thinned, and during processing is thinned, can hold left hanging rod, while left and right pushes left hanging rod, at this moment left hanging rod band
Dynamic sliding panel horizontally slips on the downside of transverse slat, then can push left hanging rod with front and back, while motor follows a left side by snap ring
Hanging rod and right hanging rod slide back and forth on sliding panel, the Level tune that motor drives rough polishing halo are just realized in this way, to crystalline substance
After wafer thickness reaches demand thickness, then stops rough polishing halo and wafer is polished, it then can band by lifting fixed station
Dynamic two groups of adjusting blocks are detached from the ipsilateral fixing groove of two groups of mounting racks respectively, at this moment fixed station are pushed to can be the two of fixed station
Group adjusting block slides in two groups of sliding rails respectively, until two groups of adjusting blocks are installed on the other side fixing groove of two groups of mounting racks respectively
It is interior, to realize the downside that wafer is moved to fine polishing halo on the downside of rough polishing halo, it is left that auxiliary can be held later
Hanging rod, while left and right pushes and assists left hanging rod, at this moment assists left hanging rod band dynamic auxiliary sliding panel to horizontally slip on the downside of transverse slat, so
After can be pushed with front and back and assist left hanging rod, while stand-by motor is by assisting snap ring to follow the left hanging rod of auxiliary and the right hanging rod of auxiliary
It is slid back and forth on auxiliary sliding panel, just realizes the Level tune that stand-by motor drives fine polishing halo in this way, wafer passes through
Fine polishing buff polishing is thinned until the state for the processing request for reaching wafer is then sent to next process.
Term as used herein "front", "rear", "left", "right" and similar statement are for illustrative purposes only.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change
It also should be regarded as the protection scope of the utility model into modification.
Claims (8)
1. auxiliary device, including station (1), motor (2), fine polishing is thinned with wafer in a kind of power electronic devices chip production
The output end of halo (3), rough polishing halo (4), wafer (5) and fixed station (6), the motor (2) is provided with connection buckle；Its
Be characterized in that, further include four groups of regulating rods (7), four groups of telescopic rods (8), balance plate (9), power rail (10), power gear (11),
Two groups of support frames (12), two groups of mounting racks (13) and knob (14), the bottom end of four groups of regulating rods (7) respectively with station
(1) front left side, left rear side, the forward right side on top are connected with right lateral side, and the inside of four groups of regulating rods (7) is respectively arranged with
Four groups of telescopic cavities, the top of four groups of telescopic cavities are provided with and respectively communicated with four groups of telescopic mouths, the bottom of four groups of telescopic rods (8)
End passes through four groups of telescopic mouths from the upside of four groups of regulating rods (7) respectively and is respectively protruding into the inside of four groups of telescopic cavities, described
The bottom end of four groups of telescopic rods (8) is respectively arranged with four groups of limit films, the top of four groups of telescopic rods (8) respectively with balance plate
(9) front left side, left rear side, the forward right side of bottom end are connected with right lateral side, the center bottom region of the balance plate (9) and power
The top of bar (10) connects, and the left end of the power rail (10) is provided with gear bar, and the bottom end of two groups of support frames (12) is equal
It is connect with the top middle portion region of station (1), the central region of the power gear (11) is provided with operating shaft, the operation
The rear end of axis and the upside of rear side support frame as described above rotate and are set with, and are provided through connection on the upside of the front end of front side support frame as described above
Mouthful, the front end of the operating shaft passes through communication port from the rear side of front side support frame as described above and extend out to front side support frame as described above
The front end of front side, the rear end of the knob (14) and operating shaft connects, the bottom end of two groups of mounting racks (13) respectively with balance
The front side on the top of plate (9) is connected with rear side, and the circumferential side wall of telescopic rod described in forward right side is provided with graduated scale；It further include two groups
Support (15), transverse slat (16), sliding panel (17), left hanging rod (18), right hanging rod (19) and snap ring (20), two groups of supports
(15) bottom end is connect with the left and right side central region on the top of station (1) respectively, and the bottom end of the transverse slat (16) is left
Side and right side are connect with the top of two groups of supports (15) respectively, are internally provided with horizontal slide rail on the left of the transverse slat (16),
The top area of the sliding panel (17) is provided with sliding shoe, and the sliding shoe and horizontal slide rail sliding clamp, the sliding panel
(17) left and right side of bottom section is respectively arranged with left regulating tank and right regulating tank, and the top of the left hanging rod (18) is right
The top left hand of side and right hanging rod (19) is clamped with left regulating tank and the sliding of right regulating tank respectively, the low side of the left hanging rod (18)
It is connect respectively with the left end of snap ring (20) and right end on the left of right side and the bottom end of right hanging rod (19), the snap ring (20) and motor
(2) circumferential side wall central region is fixed clamps, the bottom end of the connection buckle of the output end bottom of the motor (2) and rough polishing halo
(4) top connection.
2. auxiliary device is thinned with wafer in a kind of power electronic devices chip production as described in claim 1, which is characterized in that
It further include auxiliary sliding panel (21), the left hanging rod (22) of auxiliary, the right hanging rod (23) of auxiliary, auxiliary snap ring (24) and stand-by motor
(25), auxiliary horizontal slide rail is internally provided on the right side of the transverse slat (16), the top area of auxiliary sliding panel (21) is set
It is equipped with auxiliary sliding shoe, the auxiliary sliding shoe and auxiliary horizontal slide rail sliding clamp, the bottom of auxiliary sliding panel (21)
The left and right side in region is respectively arranged with the left regulating tank of auxiliary and assists right regulating tank, the top of the left hanging rod (22) of auxiliary
The top left hand of right side and the right hanging rod (23) of auxiliary is clamped with left regulating tank and the right regulating tank sliding of auxiliary is assisted respectively, described auxiliary
Help on the right side of the low side of left hanging rod (22) and assist on the left of the bottom end of right hanging rod (23) respectively with the left end and the right side that assist snap ring (24)
End connection, the bottom end of the stand-by motor (25) are provided with auxiliary connection buckle, the output end bottom of the stand-by motor (25)
The bottom end of auxiliary connection buckle is connect with the top of fine polishing halo (3).
3. auxiliary device is thinned with wafer in a kind of power electronic devices chip production as claimed in claim 2, which is characterized in that
It further include preceding adjusting block (26), rear adjusting block, front limit plate (27) and rear position margining plate, the rear end of the preceding adjusting block (26) is with after
The front end of adjusting block is connect with the front-end and back-end central region of fixed station (6) respectively, the bottom end of the front limit plate (27) and
The bottom end of rear position margining plate is connect with the top middle portion region of two groups of mounting racks (13) respectively, in the front end of the front limit plate (27)
The front center of portion and rear position margining plate, which extends through, is provided with preceding sliding rail and aft ramp, the left and right side of the front side mounting rack
Fixing groove before top area is respectively arranged with two groups, before described two groups the top of fixing groove respectively with the left side at advancing slip rail bottom end and
Right side is connected to, fixing groove after the left and right side top area of the rear side mounting rack is respectively arranged with two groups, after described two groups
The top of fixing groove is connected to the left and right side of aft ramp bottom end respectively, the preceding adjusting block (26) and rear adjusting block respectively with
Fixing groove clamps after the left side preceding fixing groove and left side are described.
4. auxiliary device is thinned with wafer in a kind of power electronic devices chip production as claimed in claim 3, which is characterized in that
Further include stop nut (28), external screw thread, the stop nut (28) are provided on the circumferential side wall of telescopic rod described in front left side
It is filled with telescopic rod spiral shell described in front left side, the bottom end of the stop nut (28) is close to the top of regulating rod described in front left side.
5. auxiliary device is thinned with wafer in a kind of power electronic devices chip production as claimed in claim 4, which is characterized in that
Further include preceding handle (29) and rear handle, the front end of the rear end of the preceding handle (29) and rear handle respectively with preceding adjusting block (26)
Front end connected with the rear end of rear adjusting block.
6. auxiliary device is thinned with wafer in a kind of power electronic devices chip production as claimed in claim 5, which is characterized in that
It further include left extension spring (30), right extension spring, left clamp (31), right clamping plate, left driven rod (32) and right belt lever, it is described
The left region on fixed station (6) top and right areas are respectively arranged with left sliding groove and right sliding groove, the left sliding groove
Front side and rear side are provided with and respectively communicated with two groups of left card slots, and the left driven rod (32) and the sliding of left sliding groove clamp, the left side
The right end of driven rod (32) is provided with left firm block, and the front-end and back-end of the left firm block are blocked with two groups of left card slot slidings respectively
Dress, the middle part bottom end of the left clamp (31) are connect with the left side top of left driven rod (32), the left extension spring (30)
Left end is connect with the right end of left firm block, and the right end of the left extension spring (30) is connect with the right end of left sliding groove, the right side
The front side of sliding groove and rear side are provided with and respectively communicated with two groups of right card slots, and the right belt lever and the sliding of right sliding groove clamp, institute
The left end for stating right belt lever is provided with right firm block, and the front-end and back-end of the right firm block are blocked with two groups of right card slot slidings respectively
Dress, the middle part bottom end of the right clamping plate are connect with the right side top of right belt lever, and the right end of the right extension spring and the right side are firm
The left end of block connects, and the left end of the right extension spring is connect with the left end of right sliding groove, the circumferential side wall of the wafer (5)
Left side be close to the right end of left clamp (31), the right side of the circumferential side wall of the wafer (5) is close to the left end of right clamping plate.
7. auxiliary device is thinned with wafer in a kind of power electronic devices chip production as claimed in claim 6, which is characterized in that
Further include four groups of supporting legs (33), the top of four groups of supporting legs (33) respectively with the front left side of the bottom end of station (1), left back
Side, forward right side are connected with right lateral side.
8. auxiliary device is thinned with wafer in a kind of power electronic devices chip production as claimed in claim 7, which is characterized in that
It further include stop collar (34), the left end of the stop collar (34) is provided with two groups of supporting legs, the left end point of two groups of supporting legs
It is not connect with the right end central region of two groups of support frames (12), two groups of stop collars (34) and power rail (10) sliding are set with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821719665.8U CN209282169U (en) | 2018-10-23 | 2018-10-23 | Auxiliary device is thinned with wafer in a kind of power electronic devices chip production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821719665.8U CN209282169U (en) | 2018-10-23 | 2018-10-23 | Auxiliary device is thinned with wafer in a kind of power electronic devices chip production |
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| Publication Number | Publication Date |
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| CN209282169U true CN209282169U (en) | 2019-08-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821719665.8U Expired - Fee Related CN209282169U (en) | 2018-10-23 | 2018-10-23 | Auxiliary device is thinned with wafer in a kind of power electronic devices chip production |
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| CN (1) | CN209282169U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113380665A (en) * | 2021-04-25 | 2021-09-10 | 武汉东湖学院 | Wafer thinning auxiliary machine for power electronic device chip production |
| CN115319564A (en) * | 2022-10-12 | 2022-11-11 | 深圳迈菲精密有限公司 | Device and method for thinning hard and brittle wafer material based on constant-pressure composite consolidated abrasive particles |
-
2018
- 2018-10-23 CN CN201821719665.8U patent/CN209282169U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113380665A (en) * | 2021-04-25 | 2021-09-10 | 武汉东湖学院 | Wafer thinning auxiliary machine for power electronic device chip production |
| CN113380665B (en) * | 2021-04-25 | 2023-03-31 | 湖北师范大学 | Wafer thinning auxiliary machine for power electronic device chip production |
| CN115319564A (en) * | 2022-10-12 | 2022-11-11 | 深圳迈菲精密有限公司 | Device and method for thinning hard and brittle wafer material based on constant-pressure composite consolidated abrasive particles |
| CN115319564B (en) * | 2022-10-12 | 2023-01-17 | 深圳迈菲精密有限公司 | Device and method for thinning hard and brittle wafer material based on constant-pressure composite consolidated abrasive particles |
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