CN209271944U - A kind of device of silicon wafer automatic sorting metering - Google Patents

Abstract

The utility model discloses a kind of devices of silicon wafer automatic sorting metering, including the first conveyer belt, the side of first conveyer belt is equipped with turntable, the centre of the turntable is equipped with shaft, the shaft is equipped with first motor far from the side of the turntable, the surface of the turntable is equipped with several placing grooves, the centre of the placing groove is equipped with strip gab, the strip gab is connect with pushing meanss, the turntable is equipped with the second conveyer belt far from the side of first conveyer belt, the two sides of second conveyer belt are respectively equipped with rack, the rack of the side of second conveyer belt is equipped with placing box, the inside of the placing box is equipped with telescopic device, the top of second conveyer belt is equipped with l-shaped rod.The utility model has the advantages that greatly realizing the counting and collection to silicon wafer, whole process realizes the process of automatic sorting, counting, collection, avoids manual sorting, reduces the investment of cost, greatly improves working efficiency.

Description

A kind of device of silicon wafer automatic sorting metering

Technical field

The utility model relates to silicon wafer automatic sorting design fields, it particularly relates to which a kind of silicon wafer automatic sorting measures Device.

Background technique

Silicon wafer is generally relatively thin, and easily there is a phenomenon where fragment, the inspections of Yao Jinhang fragment during cutting, cleaning or transmission Subsequent application can be carried out after looking into, mostly in the prior art is by artificial essence inspection come to the silicon wafer that may contain a large amount of fragments It is detected, generally requires very high cost of labor in this way, and detection efficiency is very low.

So, a kind of device of silicon wafer automatic sorting metering how is provided to solve the problems, such as present on.

For the problems in the relevant technologies, currently no effective solution has been proposed.

Utility model content

For the problems in the relevant technologies, the utility model proposes a kind of devices of silicon wafer automatic sorting metering, to overcome Above-mentioned technical problem present in existing the relevant technologies.

The technical solution of the utility model is achieved in that

A kind of device of silicon wafer automatic sorting metering, including the first conveyer belt, the side of first conveyer belt, which is equipped with, to be turned Disk, the centre of the turntable are equipped with shaft, and the shaft is equipped with first motor, the table of the turntable far from the side of the turntable Face is equipped with several placing grooves, and the centre of the placing groove is equipped with strip gab, and the strip gab is connect with pushing meanss, described Turntable is equipped with the second conveyer belt far from the side of first conveyer belt, and the two sides of second conveyer belt are respectively equipped with rack, The rack of the side of second conveyer belt is equipped with placing box, and the inside of the placing box is equipped with telescopic device, described The top of second conveyer belt is equipped with l-shaped rod, is respectively equipped with the first fibre optical sensor and the second fibre optical sensor in the l-shaped rod, The rack is successively arranged the first guide plate and the second guide plate, first fibre optical sensor far from the side of the placing box The side of first guide plate and the second guide plate, first guide plate and second are respectively equipped with the second fibre optical sensor The centre of guide plate is equipped with sensor for countering, first guide plate and the second guide plate far from second conveyer belt one Side is equipped with collecting box, and second conveyer belt is equipped with collection device far from the side of the turntable.

Further, the pushing meanss include the second motor, and the output end of second motor is equipped with arcuate rotor, institute It states and is equipped with first connecting rod at the center of arcuate rotor, the first connecting rod is equipped with second far from the side of the arcuate rotor Connecting rod is connect at the other end of second connecting rod and the center of third connecting rod, one end of the third connecting rod with The connection of first sliding block, first sliding block are set in first sliding groove, and one end of first sliding block is equipped with convex block, the convex block with The connection of V-type bar, the centre of the V-type bar connect with the first support base, the one end of the V-type bar far from the convex block with it is described Arcuate rotor is in contact.

Further, the telescopic device includes second sliding slot, and the second sliding slot is set to the inside of the placing box, institute The inside for stating second sliding slot is equipped with slide bar, and one end of the slide bar is connect through the side wall of the placing box with push plate, the cunning The centre of bar is equipped with third sliding slot, is equipped with the second sliding block in the third sliding slot, and the surface side of second sliding block is equipped with the Four connecting rods, the 4th connecting rod are equipped with the second support base, the 4th connecting rod far from the side of second sliding block Centre be equipped with sleeve, the side of the sleeve connect with the 5th connecting rod, the 5th connecting rod far from the sleeve one End is connect with the output end of third motor.

It further, is that the slide bar is equipped with damping spring between the outside of the placing box and the push plate.

Further, collection device includes recycling bins, is led between the recycling bins and second conveyer belt equipped with third To plate.

Further, the top of the recycling bins be equipped with fixed block, side of the fixed block far from the recycling bins with The l-shaped rod connection.

Further, the third connecting rod is located in the strip gab.

Further, the first sliding groove is connect with a side of the rack.

The utility model has the beneficial effects that the first fibre optical sensor, convenient to detect to the silicon wafer of damage, the second optical fiber It is that intact silicon wafer will be detected below sensor, sensor for countering will count silicon wafer, then by being oriented to Plate slides into collecting box, and realization is collected intact silicon wafer, greatly realizes the counting and collection to silicon wafer, entirely Process realizes the process of automatic sorting, counting, collection, avoids manual sorting, reduces the investment of cost, greatly improves work Make efficiency.

Detailed description of the invention

In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only the utility model Some embodiments for those of ordinary skill in the art without creative efforts, can also be according to this A little attached drawings obtain other attached drawings.

Fig. 1 is the top view according to a kind of device of silicon wafer automatic sorting of the utility model embodiment metering；

Fig. 2 is the master of the second conveyer belt in the device according to a kind of metering of silicon wafer automatic sorting of the utility model embodiment View；

Fig. 3 is the left view according to a kind of device of silicon wafer automatic sorting of the utility model embodiment metering；

Fig. 4 is the structure of pushing meanss in the device according to a kind of metering of silicon wafer automatic sorting of the utility model embodiment Schematic diagram；

Fig. 5 is the structure of telescopic device in the device according to a kind of metering of silicon wafer automatic sorting of the utility model embodiment Schematic diagram.

In figure:

1, the first conveyer belt；2, turntable；3, shaft；4, first motor；5, placing groove；6, strip gab；7, the second transmission Band；8, rack；9, placing box；10, telescopic device；11, l-shaped rod；12, the first fibre optical sensor；13, the second fibre optical sensor； 14, the first guide plate；15, the second guide plate；16, sensor for countering；17, collecting box；18, the second motor；19, arcuate rotor； 20, first connecting rod；21, the second connecting rod；22, third connecting rod；23, the first sliding block；24, first sliding groove；25, convex block；26, V-type bar；27, the first support base；28, second sliding slot；29, slide bar；30, push plate；31, third sliding slot；32, the 4th connecting rod； 33, sleeve；34, the 5th connecting rod；35, third motor；36, the second support base；37, damping spring；38, recycling bins；39, Three guide plates；40, fixed block.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art's every other embodiment obtained, all belongs to In the range of the utility model protection.

In the following, making further description to the utility model in conjunction with attached drawing and specific embodiment:

Fig. 1-5 is please referred to, according to the device that a kind of silicon wafer automatic sorting of the utility model embodiment measures, including first Conveyer belt 1, the side of first conveyer belt 1 are equipped with turntable 2, and the centre of the turntable 2 is equipped with shaft 3, and the shaft 3 is separate The side of the turntable 2 is equipped with first motor 4, and the surface of the turntable 2 is equipped with several placing grooves 5, the centre of the placing groove 5 Equipped with strip gab 6, the strip gab 6 is connect with pushing meanss, side of the turntable 2 far from first conveyer belt 1 Equipped with the second conveyer belt 7, the two sides of second conveyer belt 7 are respectively equipped with rack 8, the institute of the side of second conveyer belt 7 Rack 8 is stated equipped with placing box 9, the inside of the placing box 9 is equipped with telescopic device 10, and the top of second conveyer belt 7 is set There is l-shaped rod 11, the first fibre optical sensor 12 and the second fibre optical sensor 13 are respectively equipped in the l-shaped rod 11, the rack 8 is remote Side from the placing box 9 is successively arranged the first guide plate 14 and the second guide plate 15,12 He of the first fibre optical sensor Second fibre optical sensor 13 is respectively equipped with the side of first guide plate 14 and the second guide plate 15, first guide plate 14 It is equipped with sensor for countering 16 with the centre of the second guide plate 15, first guide plate 14 and the second guide plate 15 are far from described The side of second conveyer belt 7 is equipped with collecting box 17, and second conveyer belt 7 is equipped with far from the side of the turntable 2 and collects dress It sets, the model (BGQ3-SR-AC-NA-I) of first fibre optical sensor, the model (BGQ3- of the second fibre optical sensor SR-AC-NA-I), the model (SST10-NSK-4K/5K/6K) of the sensor for countering.

By the above scheme of the utility model, by being equipped with turntable 2 between the first conveyer belt 1 and the second conveyer belt 7, Facilitate and be transmitted to silicon wafer on the second conveyer belt 7 from the first conveyer belt 1, while passing through after half revolution on turntable 2 and shifting dress onto It sets and reaches on the second conveyer belt 7, convenient generation time in time is poor, makes the first fibre optical sensor 12 and the second fibre optical sensor 13 detections it is more accurate, reduce damaged silicon wafer and be mixed into recycling bins 38, the first optical fiber is equipped on the second conveyer belt 7 Sensor 12, it is convenient that the silicon wafer of damage is detected, so will if the first fibre optical sensor 12 detects that silicon wafer has damaged It will start the telescopic device 10 of 14 side of the first guide plate, start the second motor 18, the silicon wafer of damage is promoted into the first guide plate It in 14, is counted by the sensor for countering 16 on the first guide plate 14, is entered in collecting box 17 by the first guide plate 14, Collection was carried out to damaged silicon wafer to realize, if silicon wafer does not detect breakage, was continued on the second conveyer belt 7 Transmission, the lower section for being transmitted to the second fibre optical sensor 13 is will to detect to intact silicon wafer, if silicon wafer is intact, The telescopic device 10 of 15 side of the second guide plate will be will start, push plate 30 will be advanced to intact silicon wafer the second guide plate 15 In, it is counted by the sensor for countering 16 on the second guide plate 15, then slid into collecting box 17 by the second guide plate 15, it is real Now intact silicon wafer is collected, other than the silicon wafer of intact silicon wafer and corrupted, produced waste paper will be followed in production Second conveyer belt 7 enters in collection device, this greatly realizes the automatic sorting to silicon wafer, and the silicon wafer after sorting is sent respectively It is counted, then is slid into corresponding collecting box 17 by sensor for countering after entering into different guide plates, it is greatly real The counting and collection to silicon wafer are showed, whole process realizes the process of automatic sorting, counting, collection, avoids manual sorting, subtracts The investment of few cost, greatly improves working efficiency.

In a particular application, for pushing meanss, the pushing meanss include the second motor 18, second motor 18 output end is equipped with arcuate rotor 19, and first connecting rod 20, first connection are equipped at the center of the arcuate rotor 19 Bar 20 is equipped with the second connecting rod 21 far from the side of the arcuate rotor 19, and the other end and third of second connecting rod 21 connect It is connected at the center of extension bar 22, one end of the third connecting rod 22 is connect with the first sliding block 23, and first sliding block 23 is set to In first sliding groove 24, one end of first sliding block 23 is equipped with convex block 25, and the convex block 25 is connect with V-type bar 26, the V-type bar 26 centre is connect with the first support base 27, the one end of the V-type bar 26 far from the convex block 25 and the arcuate rotor 19 It is in contact, the starting of the second motor 18 will will drive the rotation of arcuate rotor 19, and arcuate rotor 19 will will drive first connecting rod 20 rotation, first connecting rod 20 will will drive the movement of the second connecting rod 21, and the second connecting rod 21 will will drive third connection The movement of bar 22 moves up and down the first sliding block 23 in first sliding groove 24, and the first sliding block 23, which will will push convex block 25, makes V-type bar 26 one end moves down, and the other end of V-type bar 26, which will will drive, to be lifted, and waits for the promotion of arcuate rotor 19 again, makes V-type bar 26 other end rises, to drive being pushed to silicon wafer at strip gab 6 of the discontinuity up and down of third connecting rod 22 In second conveyer belt 7, generation time is poor in time, detects the first fibre optical sensor 12 and the second fibre optical sensor 13 more What is added is accurate；For telescopic device 10, the telescopic device 10 includes second sliding slot 28, and the second sliding slot 28 is set to institute The inside of placing box 9 is stated, the inside of the second sliding slot 28 is equipped with slide bar 29, and the placing box is run through in one end of the slide bar 29 9 side wall is connect with push plate 30, and the centre of the slide bar 29 is equipped with third sliding slot 31, and it is sliding to be equipped with second in the third sliding slot 31 The surface side of block, second sliding block is equipped with the 4th connecting rod 32, and the 4th connecting rod 32 is far from second sliding block Side is equipped with the second support base 36, and the centre of the 4th connecting rod 32 is equipped with sleeve 33, the side of the sleeve 33 and the The connection of five connecting rods 34, the 5th connecting rod 34 are connect far from one end of the sleeve 33 with the output end of third motor 35, By starting third motor 35, third motor 35 will will drive moving left and right for the 4th connecting rod 32, indirectly band moving slide-bar 29 It is flexible so that stretching back and forth for push plate 30, facilitates and shift silicon wafer in guide plate onto, to realize the process of sorting；For It is that the slide bar 29 is equipped with damping spring 37 for placing box 9, between the outside and the push plate 30 of the placing box 9, keeps away The outer wall for exempting from push plate 30 and placing box 9 generates shock, plays the role of damping, the safety for protecting push plate 30 to use；For For collection device, collection device includes recycling bins 38, is led between the recycling bins 38 and second conveyer belt 7 equipped with third To plate 39, convenient to other than the silicon wafer of intact silicon wafer and corrupted, produced waste paper will follow the second conveyer belt 7 in production It enters in collection device, improves the clean and tidy of production environment；For recycling bins 38, the top of the recycling bins 38 is equipped with solid Determine block 40, side of the fixed block 40 far from the recycling bins 38 is connect with the l-shaped rod 11, plays support to l-shaped rod 11 Effect；For third connecting rod 22, the third connecting rod 22 is located in the strip gab 6, convenient to placing groove 5 Interior silicon wafer shift on the second conveyer belt 7.For first sliding groove 24, the first sliding groove 24 and the rack 8 A side connection, avoids the hanging placement of first sliding groove 24.

In conclusion by means of the above-mentioned technical proposal of the utility model, by the first conveyer belt 1 and the second conveyer belt It is equipped with turntable 2 between 7, facilitates and is transmitted to silicon wafer on the second conveyer belt 7 from the first conveyer belt 1, while rotation half on turntable 2 Reached on the second conveyer belt 7 after week by shifting device onto, convenient generation time in time is poor, makes 12 He of the first fibre optical sensor Second fibre optical sensor 13 detects more accurate, reduces damaged silicon wafer and is mixed into recycling bins 38, in the second conveyer belt 7 It is equipped with the first fibre optical sensor 12, it is convenient that the silicon wafer of damage is detected, if the first fibre optical sensor 12 detects silicon Piece has damaged the telescopic device 10 that will so will start 14 side of the first guide plate, starts the second motor 18, by the silicon wafer of damage Promote in the first guide plate 14, counted by the sensor for countering 16 on the first guide plate 14, by the first guide plate 14 into Enter into collecting box 17, collection was carried out to damaged silicon wafer to realize, if silicon wafer does not detect breakage, is continued It is transmitted on the second conveyer belt 7, the lower section for being transmitted to the second fibre optical sensor 13 is will to detect to intact silicon wafer, such as Fruit silicon wafer is intact, then the telescopic device 10 that will will start 15 side of the second guide plate, push plate 30 will push away intact silicon wafer It enters in the second guide plate 15, is counted by the sensor for countering 16 on the second guide plate 15, then is sliding by the second guide plate 15 Entering into collecting box 17, realization is collected intact silicon wafer, other than the silicon wafer of intact silicon wafer and corrupted, institute in production Generating waste paper will follow the second conveyer belt 7 to enter in collection device, this greatly realizes the automatic sorting to silicon wafer, point Silicon wafer after picking is counted after being respectively fed into different guide plates by sensor for countering, then slides into corresponding collection In case 17, the counting and collection to silicon wafer are greatly realized, whole process realizes the process of automatic sorting, counting, collection, Manual sorting is avoided, the investment of cost is reduced, greatly improves working efficiency；The starting of second motor 18 will will drive arc The rotation of runner 19, arcuate rotor 19 will will drive the rotation of first connecting rod 20, and first connecting rod 20 will will drive the second company The movement of extension bar 21, the second connecting rod 21 will will drive the movement of third connecting rod 22, make the first sliding block 23 in first sliding groove 24 It inside moves up and down, the first sliding block 23 moves down one end of V-type bar 26 for will push convex block 25, and the other end of V-type bar 26 will band It is dynamic to lift, the promotion of arcuate rotor 19 again is waited for, increase the other end of V-type bar 26, to drive third connection Silicon wafer is pushed in the second conveyer belt 7 by the discontinuity up and down of bar 22 at strip gab 6, and generation time is poor in time, Detect the first fibre optical sensor 12 and the second fibre optical sensor 13 more accurate；By starting third motor 35, third Motor 35 will will drive moving left and right for the 4th connecting rod 32, indirectly flexible with moving slide-bar 29, so that push plate 30 is back and forth It is flexible, facilitate and shift silicon wafer in guide plate onto, to realize the process of sorting；Damping spring 37 avoids push plate 30 and places The outer wall of case 9 generates shock, plays the role of damping, the safety for protecting push plate 30 to use；Conveniently in addition to intact silicon Outside the silicon wafer of piece and corrupted, produced waste paper will follow the second conveyer belt 7 to enter in collection device in production, improve production Environment it is clean and tidy.

The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model Protection scope within.

Claims (8)

1. a kind of device of silicon wafer automatic sorting metering, which is characterized in that including the first conveyer belt (1), first conveyer belt (1) side is equipped with turntable (2), and the centre of the turntable (2) is equipped with shaft (3), and the shaft (3) is far from the turntable (2) Side be equipped with first motor (4), the surface of the turntable (2) is equipped with several placing grooves (5), the centre of the placing groove (5) Equipped with strip gab (6), the strip gab (6) connect with pushing meanss, and the turntable (2) is far from first conveyer belt (1) side is equipped with the second conveyer belt (7), and the two sides of second conveyer belt (7) are respectively equipped with rack (8), and described second passes The rack (8) of the side of band (7) is sent to be equipped with placing box (9), the inside of the placing box (9) is equipped with telescopic device (10), the top of second conveyer belt (7) is equipped with l-shaped rod (11), is respectively equipped with the first Fibre Optical Sensor on the l-shaped rod (11) Device (12) and the second fibre optical sensor (13), the rack (8) are successively arranged the first guiding far from the side of the placing box (9) Plate (14) and the second guide plate (15), first fibre optical sensor (12) and the second fibre optical sensor (13) are respectively equipped with described The side of first guide plate (14) and the second guide plate (15), the centre of first guide plate (14) and the second guide plate (15) It is equipped with sensor for countering (16), first guide plate (14) and the second guide plate (15) are far from second conveyer belt (7) Side be equipped with collecting box (17), second conveyer belt (7) far from the turntable (2) side be equipped with collection device.

2. a kind of device of silicon wafer automatic sorting metering according to claim 1, which is characterized in that the pushing meanss packet It includes the second motor (18), the output end of second motor (18) is equipped with arcuate rotor (19), in the arcuate rotor (19) First connecting rod (20) are equipped at the heart, the first connecting rod (20) is equipped with second far from the side of the arcuate rotor (19) and connects Extension bar (21) is connect at the other end of second connecting rod (21) and the center of third connecting rod (22), the third connection One end of bar (22) is connect with the first sliding block (23), and first sliding block (23) is set in first sliding groove (24), and described first is sliding One end of block (23) is equipped with convex block (25), and the convex block (25) connect with V-type bar (26), the centre of the V-type bar (26) and the One support base (27) connection, the V-type bar (26) connect far from the one end of the convex block (25) with the arcuate rotor (19) Touching.

3. a kind of device of silicon wafer automatic sorting metering according to claim 1, which is characterized in that the telescopic device It (10) include second sliding slot (28), the second sliding slot (28) is set to the inside of the placing box (9), the second sliding slot (28) Inside be equipped with slide bar (29), the side wall of one end of the slide bar (29) through the placing box (9) is connect with push plate (30), institute The centre for stating slide bar (29) is equipped with third sliding slot (31), and the second sliding block, second sliding block are equipped in the third sliding slot (31) Surface side be equipped with the 4th connecting rod (32), the 4th connecting rod (32) far from second sliding block side be equipped with second The centre of support base (36), the 4th connecting rod (32) is equipped with sleeve (33), and the side of the sleeve (33) connects with the 5th The output end of extension bar (34) connection, the 5th connecting rod (34) one end and third motor (35) far from the sleeve (33) connects It connects.

4. a kind of device of silicon wafer automatic sorting metering according to claim 3, which is characterized in that the placing box (9) Outside and the push plate (30) between be the slide bar (29) be equipped with damping spring (37).

5. a kind of device of silicon wafer automatic sorting metering according to claim 1, which is characterized in that collection device includes back It receives case (38), is equipped with third guide plate (39) between the recycling bins (38) and second conveyer belt (7).

6. a kind of device of silicon wafer automatic sorting metering according to claim 5, which is characterized in that the recycling bins (38) Top be equipped with fixed block (40), the fixed block (40) far from the recycling bins (38) side and the l-shaped rod (11) even It connects.

7. a kind of device of silicon wafer automatic sorting metering according to claim 2, which is characterized in that the third connecting rod (22) it is located in the strip gab (6).

8. a kind of device of silicon wafer automatic sorting metering according to claim 2, which is characterized in that the first sliding groove (24) it is connect with a side of the rack (8).