CN209264499U - Detection of particulates module - Google Patents

Abstract

A kind of detection of particulates module includes: a pedestal, and inside has a sense channel and a beam channel；One detection part is set in the pedestal, and includes a laser and a particle sensor, if laser transmitting light beam is projeced into the beam channel, particle sensor is correspondingly arranged the sense channel and the beam channel quadrature position；One micropump is carried in the pedestal, and covers the air guide groove；The gas that wherein micropump is driven outside the absorption guidance pedestal quickly introduces in sense channel, gas passes through the sense channel and the beam channel quadrature position, luminous point is projected by the laser illumination to particle sensor, contained suspended particulates size and concentration in particle sensor detection gas.

Description

Detection of particulates module

[technical field]

This case carries out gas-monitoring in slim portable apparatus about a kind of detection of particulates module, espespecially a kind of combining Detection of particulates module.

[background technique]

Suspended particulates refer to the solid particle or drop contained in air, since its partial size is very subtle, are easy to pass through Vibrissa in nasal cavity enters the lung of human body, thus causes the inflammation, asthma or cardiovascular lesion of lung, if other are polluted Object depends on suspended particulates, but will aggravate the harm for respiratory system.In recent years, air pollution problems inherent is gradually serious, especially It is thin suspended particulates (such as: concentration data PM2.5 or PM10) is usually excessively high, the monitoring of Airborne particulate concentration gradually by Pay attention to, but due to air meeting box haul, the variable amount of flowing of air quantity, and the air quality monitoring station for detecting suspended particulates at present is big It is all fixed point, so can not confirm the aerosol concentration arround instantly at all, it is therefore desirable to the miniature gas being convenient for carrying Body detection device is come the aerosol concentration arround can detecting all the time, anywhere or anytime for user.

In view of this, the concentration of suspended particulates how is monitored whenever and wherever possible, it is actually in the urgent need to address at present Problem.

[utility model content]

The main purpose of this case is to provide a kind of detection of particulates module, logical using the sense channel and light beam of slim pedestal Road, the laser and particle sensor for configuring detection and localization component are passing through sense channel and beam channel just wherein, with detection Contained suspended particulates size and concentration in the gas of position are handed over, and is quickly drawn gas outside pedestal into detection using micropump The concentration of suspended particulates in detection gas is gone in channel, is made using being assembled on portable electronic devices and wearing accessory, to be formed Mobile detection of particulates module, for user can monitor all the time, anywhere or anytime arround aerosol concentration.

The one broad sense state sample implementation of this case is a kind of detection of particulates module, includes: a pedestal, and inside has a detection part Supporting region, a micropump supporting region, a sense channel and a beam channel, the micropump supporting region have an air guide groove, should Micropump supporting region is connected to the sense channel, which is connected to the beam channel, and the sense channel with The beam channel is orthogonal setting；One detection part, includes a laser and a particle sensor, which is set to the base The detection part supporting region positioning of seat, and light beam can be emitted and be projeced into the beam channel, which is correspondingly arranged To the sense channel and the beam channel quadrature position；One micropump is carried in the micropump supporting region of the pedestal, and seals Cover the air guide groove；The gas that wherein micropump is driven outside the absorption guidance pedestal quickly introduces in the sense channel, The gas is projected luminous point to the particle by the laser illumination and is sensed by the sense channel and the beam channel quadrature position Device, contained suspended particulates size and concentration in the particle sensor detection gas.

[Detailed description of the invention]

Fig. 1 show the appearance diagram of this case detection of particulates module.

Fig. 2 show the associated components decomposition diagram of this case detection of particulates module.

Fig. 3 show the pedestal schematic diagram of this case detection of particulates module.

Fig. 4 show the detection implementation diagram of this case detection of particulates module.

Fig. 5 A show the decomposition diagram that the micropump associated components of this case detection of particulates module are regarded by depression angle.

Fig. 5 B show the decomposition diagram that the micropump associated components of this case detection of particulates module are regarded by looking up angle.

Fig. 6 A show the diagrammatic cross-section of the micropump of this case detection of particulates module.

Fig. 6 B show the diagrammatic cross-section of another piezoelectric actuator embodiment of micropump of this case detection of particulates module.

Fig. 6 C to Fig. 6 E show the micropump illustrative view of this case detection of particulates module in Fig. 6 A.

The appearance that Fig. 7 show the pedestal outer cover plate of this case detection of particulates module shows sight figure.

[specific embodiment]

The some exemplary embodiments for embodying this case features and advantages will describe in detail in the explanation of back segment.It should be understood that This case can have various variations in different aspects, all not depart from the range of this case, and explanation therein and diagram It is illustrated as being used in itself, rather than to limit this case.

Shown in please referring to Fig.1 to Fig.4, this case provides a kind of detection of particulates module, comprising a pedestal 1, a detection part 2, One micropump 3.The there is provided detection of particulates module of this case is applied on portable electronic devices and wearing accessory in order to assemble, Middle pedestal 1 has the apparent size of a length L, a width W and a height H, in order to be assembled with detection part 2 and micropump 3, according to Configuration is optimized at present and meets the design of slim microminiaturization, configures 10~60mm for the length L of pedestal 1, length L is 34~ 36mm be it is best, width W is configured to 10~50mm, and width W is that 29~31mm is that best and height H is configured to 1~7mm, high Degree H is that 4.5~5.5mm is most preferably, entire detection of particulates module to be allowed to have the implementation design of carrying convenience.

Shown in please referring to Fig.1 to Fig.4, above-mentioned pedestal 1 has an a first surface 1a and second surface 1b, first surface 1a and second surface 1b is two surfaces being oppositely arranged, and has a detection part supporting region 11, a micropump inside pedestal 1 Supporting region 12, a sense channel 13 and a beam channel 14, wherein micropump supporting region 12 is set to first surface 1a, and has There is an air guide groove 121, and detection part supporting region 11, sense channel 13 and beam channel 14 penetrate through first surface 1a respectively And second surface 1b, and micropump supporting region 12 is connected to sense channel 13, detection part supporting region 11 and beam channel 14 connect It is logical, and sense channel 13 is orthogonal setting with beam channel 14, and on 1 side of pedestal there is an air inlet 15 and one to be vented out Mouth 16, air inlet 15 is connected to sense channel 13, and air exit 16 is connected to air guide groove 121.

It please refers to shown in Fig. 2, above-mentioned detection part 2 includes a detection drive circuit board 21, a particle sensor 22, one Laser 23 and a microprocessor 24.Wherein particle sensor 22, laser 23 and microprocessor 24 are packaged in detection driving electricity On road plate 21, and detects drive circuit board 21 and be covered on the second surface 1b of pedestal 1, and laser 23 is made to be correspondingly arranged in inspection It surveys in component supporting region 11, and can emit that light beam is projeced into beam channel 14 and particle sensor 22 is correspondingly arranged inspection Channel 13 and 14 quadrature position of beam channel are surveyed, such microprocessor 24 controls the driving of laser 23 and particle sensor 22, So that laser 23 is emitted light beam and be irradiated in the gas for passing through sense channel 13 and 14 quadrature position of beam channel in beam channel 14, And so that gas is generated projection luminous point and be projeced into particle sensor 22, contained suspended particulates are big in 22 detection gas of particle sensor Small and concentration, and detection signal is exported, and the reception particle sensor 22 of microprocessor 24 exports detection signal and is analyzed, with Export detection data.Above-mentioned laser 23 includes a light-seeking component 231 and a laser emitting elements 232, light-seeking component 231 settings are positioned on detection drive circuit board 21, and the insertion of laser emitting elements 232 is set in light-seeking component 231, And it is electrically connected detection drive circuit board 21, it is driven with being controlled by microprocessor 24, concurrent irradiating light beam is irradiated in beam channel 14 In.Wherein particle sensor 22 is PM2.5 sensor or PM10 sensor.

Please continue to refer to shown in Fig. 2, detection of particulates module further comprises an insulating sheet member 4, is covered in the first of pedestal 1 On the 1a of surface, import the gas outside pedestal 1 in sense channel 13 by air inlet 15 as shown in Figure 4, then pass through micropump The air guide groove 12 of supporting region 12, then by air exit 16 in outside pedestal 1, to form an air guide path.For another example Fig. 2 and Fig. 7 institute Show, detection of particulates module further includes a pedestal outer cover plate 5, and bearing is in the first table of closed base 1 on insulating sheet member 4 Face 1a, to form electronic interferences protective action, and 15 position of air inlet that pedestal outer cover plate 5 corresponds to pedestal 1 also has One air inlet 51 is corresponded to connection, and 16 position of air exit that pedestal outer cover plate 5 corresponds to pedestal 1 also has an exhaust Outlet 52 is corresponded to connection.

It please refers to shown in Fig. 2, Fig. 4, Fig. 5 A and Fig. 5 B, above-mentioned micropump 3 is carried on the micropump supporting region of pedestal 1 In 12, and cover air guide groove 121.Micropump 3 is by an influent stream plate 31, a resonance plate 32, a piezoelectric actuator 33, one first Insulating trip 34, a conductive sheet 35 and one second insulating trip 36 sequentially stack composition.Wherein influent stream plate 31 has an at least flow-in hole 31a, at least a busbar channel 31b and confluence a chamber 31c, flow-in hole 31a converge for importing gas, the corresponding perforation of flow-in hole 31a Emissions groove 31b is flowed, and busbar channel 31b is flowed to confluence chamber 31c, and the imported gas of flow-in hole 31a is enable to converge into confluence In chamber 31c.In this present embodiment, flow-in hole 31a is identical as the quantity of busbar channel 31b, flow-in hole 31a and busbar channel The quantity of 31b is respectively 4, is not limited thereto, and 4 flow-in hole 31a penetrate through 4 busbar channel 31b, and 4 confluences respectively Emissions groove 31b is flowed to confluence chamber 31c.

It please referring to shown in Fig. 5 A, Fig. 5 B and Fig. 6 A, above-mentioned resonance plate 32 is connected on influent stream plate 31 by laminating type, And on resonance plate 32 there is a hollow hole 32a, a movable part 32b and a fixed part 32c, hollow hole 32a to be located at resonance plate 32 At center, and corresponding with the confluence chamber 31c of influent stream plate 31, and movable part 32b is set to around hollow hole 32a and with remittance The opposite region chamber 31c is flowed, and fixed part 32c is set to the outer peripheral edge portion of resonance plate 32 and is posted solid on influent stream plate 31.

Please continue to refer to shown in Fig. 5 A, Fig. 5 B and Fig. 6 A, above-mentioned piezoelectric actuator 33 includes a suspension board 33a, one Outline border 33b, at least a bracket 33c, a piezoelectric element 33d, at least a gap 33e and a protrusion 33f.Wherein, suspension board 33a is One positive square suspension board, suspension board 33a's so using square, is compared to the design of round suspension board, square suspends The structure of plate 33a obviously has the advantage of power saving, and because of the capacity load operated under resonant frequency, consuming power can be with frequency The rising of rate and increase, and because obviously more round suspension board is low for the resonant frequency of side length square suspension board 33a, therefore it is opposite Consumption power it is also significant lower, that is, the suspension board 33a of the used square _type layout of this case, the benefit with savings advantage； Outline border 33b is around the outside for being set to suspension board 33a；At least a bracket 33c is connected between suspension board 33a and outline border 33b, with The support force of resilient support suspension board 33a is provided；And one piezoelectric element 33d there is a side length, which is less than or equal to outstanding A side length of kickboard 33a, and piezoelectric element 33d is attached on a surface of suspension board 33a, is suspended to apply voltage with driving Plate 33a bending vibration；And an at least gap 33e is constituted between suspension board 33a, outline border 33b and bracket 33c, it is logical to supplied gas It crosses；Protrusion 33f is the opposite another surface for being set to the surface that suspension board 33a attaches piezoelectric element 33d, and protrusion 33f is in this In embodiment, integrally formed protrude from can also be produced using an etch process by suspension board 33a and attach piezoelectric element 33d's A convex architecture is formed on opposite another surface on surface.

Please continue to refer to shown in Fig. 5 A, Fig. 5 B and Fig. 6 A, above-mentioned influent stream plate 31, resonance plate 32, piezoelectric actuator 33, First insulating trip 34, conductive sheet 35 and the second insulating trip 36 sequentially stacked combination, wherein need between suspension board 33a and resonance plate 32 A cavity space 37 is formed, cavity space 37 can be used in the gap between resonance plate 32 and the outline border 33b of piezoelectric actuator 33 A material is filled to be formed, such as: conducting resinl, but not limited to this, so as to can maintain one between resonance plate 32 and suspension board 33a Depthkeeping degree forms cavity space 37, and then can guide gas and more quickly flow, and because suspension board 33a and resonance plate 32 keep suitable When distance makes the interference reduction that is in contact with each other, promoting noise to generate can be lowered, also can be by piezoelectric actuated certainly in embodiment The outline border 33b of device 33, which highly increases to fill reducing the gap between resonance plate 32 and the outline border 33b of piezoelectric actuator 33, to be led The thickness of electric glue, such 3 overall structure of micropump assembling is not because the filling material of conducting resinl can be because of hot pressing temperature and cooling temperature And influence indirectly, avoid the filling material of conducting resinl from being influenced between the reality in molding rear chamber space 37 because of the factor of expanding with heat and contract with cold Away from but not limited to this.

In addition, cavity space 37 will will affect the laser propagation effect of micropump 3, thus maintain a fixed cavity space 37 for It is particularly significant that micropump 3, which provides stable efficiency of transmission, therefore shown in Fig. 6 B, other 33 embodiments of piezoelectric actuator In, suspension board 33a, which can be adopted, makes its distance that extends outwardly with stamping, and the distance that extends outwardly can be by an at least bracket 33c is formed between suspension board 33a and outline border 33b and is adjusted, and makes surface and the outline border of the protrusion 33f on suspension board 33a Both surfaces of 33b form non-co-planar, that is, the surface of protrusion 33f will be less than the surface of outline border 33b, be used in outline border 33b Assemble and be coated with a small amount of filling material on surface, such as: conducting resinl makes piezoelectric actuator 33 fit in resonance plate with hot pressing mode 32 fixed part 32c, so that piezoelectric actuator 33 is able to assemble combination with resonance plate 32, so directly by by above-mentioned pressure The suspension board 33a of electric actuator 33 is adopted with the stamping structural improvement for being constituted a cavity space 37, required cavity space 37 It is able to effectively simplify by adjusting the stamping distance of suspension board 33a of piezoelectric actuator 33 to complete and adjusts chamber sky Between 37 structure design, the advantages that while also reaching simplified processing procedure, shorten processing time.In addition, the first insulating trip 34, conductive sheet 35 and second insulating trip 36 be all frame-type slim sheet body, be sequentially stacked on piezoelectric actuator 33 i.e. group composition micropump 3 it is whole Body structure.

Flowing mode is made in the output that gas transport is provided to understand above-mentioned micropump 3, please continue to refer to Fig. 6 C to Fig. 6 E institute Show, is please applied after driving voltage referring initially to Fig. 6 C, the piezoelectric element 33d of piezoelectric actuator 33 and generates deformation drive suspension board 33a is to bottom offset, and the volume of cavity space 37 is promoted at this time, in foring negative pressure in cavity space 37, just draws confluence chamber Gas in 31c enters in cavity space 37, while resonance plate 32 is influenced to be synchronized by resonance principle to bottom offset, related The volume of confluence chamber 31c is increased, and because the gas in confluence chamber 31c enters the relationship of cavity space 37, causes to converge It is similarly negative pressure state in chamber 31c, and then confluence chamber is entered come draw gas by flow-in hole 31a, busbar channel 31b In 31c；Referring again to Fig. 6 D, piezoelectric element 33d drives suspension board 33a to shift up, compression chamber space 37, likewise, altogether Vibration piece 32 is suspended plate 33a and shifts up because of resonance, and the synchronous gas pushed in cavity space 37 is forced to pass through gap down 33e is transmitted downwards, to achieve the effect that transmit gas；Fig. 6 E is finally please referred to, when suspension board 33a is driven downwards, resonance Piece 32 is also driven to bottom offset simultaneously, and resonance plate 32 at this time will make the gas in compression chamber space 37 to gap 33e It is mobile, and promote the volume in confluence chamber 31c, allow gas can constantly by flow-in hole 31a, busbar channel 31b come It converges in confluence chamber 31c, provides gas transport work by being repeated continuously micropump 3 shown in above-mentioned Fig. 6 C to Fig. 6 E Dynamic step enables micropump 3 that gas is continuously entered influent stream plate 31 and the production of the constituted runner of resonance plate 32 from flow-in hole 31a Raw barometric gradient, then transmitted downwards by gap 33e, make gas flow at high rates, reaches the actuation behaviour that micropump 3 transmits gas output Make.

Please continue to refer to Fig. 6 A, the influent stream plate 31 of micropump 3, resonance plate 32, piezoelectric actuator 33, the first insulating trip 34, Conductive sheet 35 and the second insulating trip 36 all can make the volume-diminished of micropump 3 by micro electronmechanical face type micro-processing technology processing procedure, To constitute the micropump 3 of a MEMS.

As shown in the above description, this case provides a kind of detection of particulates module in specific implementation, when micropump 3 is driven Gas outside absorption guide base 1 quickly introduces in sense channel 13, and gas is passing through sense channel 13 and beam channel 14 just Hand over position, stimulated light device 23 irradiates and projects luminous point to particle sensor 22, contained suspension in 22 detection gas of particle sensor Particle size and concentration.The there is provided detection of particulates module of such this case can be using being assembled on portable electronic devices, to be formed Mobile detection of particulates module.Wherein portable apparatus includes a mobile phone, a tablet computer, a wearable device and a notes type One of computer.Or the provided detection of particulates module of this case can be declined using being assembled on wearing accessory with forming movement Grain detection module.Wherein the wearing accessory includes one of a pendant, a button, a glasses and a wrist-watch.

In conclusion detection of particulates module provided by this case, using slim pedestal sense channel and beam channel and The laser and particle sensor for configuring detection and localization component pass through sense channel position orthogonal with beam channel wherein, with detection Contained suspended particulates size and concentration in the gas set, and quickly drawn gas outside pedestal into sense channel using micropump The concentration of suspended particulates in detection gas is gone, and the present apparatus is very suitable to apply and is assembled in portable electronic devices and wearing accessory On, to form mobile detection of particulates module, for user can monitor all the time, whenever and wherever possible arround suspended particulates it is dense Degree, great industry applications and progressive.

[symbol description]

1: pedestal

1a: first surface

1b: second surface

11: detection part supporting region

12: micropump supporting region

121: air guide groove

13: sense channel

14: beam channel

15: air inlet

16: air exit

2: detection part

21: detection drive circuit board

22: particle sensor

23: laser

231: light-seeking component

232: laser emitting elements

24: microprocessor

3: micropump

31: influent stream plate

31a: flow-in hole

31b: busbar channel

31c: confluence chamber

32: resonance plate

32a: hollow hole

32b: movable part

32c: fixed part

33: piezoelectric actuator

33a: suspension board

33b: outline border

33c: bracket

33d: piezoelectric element

33e: gap

33f: protrusion

34: the first insulating trips

35: conductive sheet

36: the second insulating trips

37: cavity space

4: insulating sheet member

5: pedestal outer cover plate

51: air inlet

52: air exit

H: height

L: length

W: width.

Claims (18)

1. a kind of detection of particulates module, characterized by comprising:

One pedestal, inside have a detection part supporting region, a micropump supporting region, a sense channel and a beam channel, should Micropump supporting region has an air guide groove, which is connected to the sense channel, the detection part supporting region and Beam channel connection, and the sense channel is orthogonal setting with the beam channel；

One detection part, includes a laser and a particle sensor, and the detection part which is set to the pedestal is held Qu Dingwei is carried, and light beam can be emitted and be projeced into the beam channel, which is correspondingly arranged the sense channel and is somebody's turn to do Beam channel quadrature position；And

One micropump is carried in the micropump supporting region of the pedestal, and covers the air guide groove；

Wherein, the gas which is driven outside the absorption guidance pedestal quickly introduces in the sense channel, the gas By the sense channel and the beam channel quadrature position, luminous point is projected by the laser illumination to the particle sensor, is somebody's turn to do Particle sensor detects contained suspended particulates size and concentration in the gas.

2. detection of particulates module as described in claim 1, which is characterized in that the particle sensor is PM2.5 sensor.

3. detection of particulates module as described in claim 1, which is characterized in that the pedestal has a first surface and one second table Face, the micropump supporting region are set to the first surface, the detection part supporting region, the sense channel and beam channel difference Penetrating through has an air inlet and an air exit, the air inlet on the first surface and the second surface and the pedestal side Entrance is connected to the sense channel, which is connected to the air guide groove, which is driven absorption and guides the pedestal The external gas is quickly imported in the sense channel by the air inlet, and orthogonal with the beam channel by the sense channel Behind position, enters back into the air guide groove and be discharged by the air exit in outside the pedestal.

4. detection of particulates module as claimed in claim 3, which is characterized in that the detection part includes a detection driving circuit Plate and a microprocessor, the laser and the particle sensor are packaged on the detection drive circuit board, and detection driving electricity Road plate is covered on the second surface of the pedestal, and is correspondingly arranged in the laser in the detection part supporting region, and The particle sensor is correspondingly arranged the sense channel and the beam channel quadrature position, and the microprocessor package is in the detection On drive circuit board, to control the driving of the laser and the particle sensor, laser transmitting light beam is made to be irradiated in the light Pass through the gas of the sense channel and the beam channel quadrature position in beam passage, and the gas is made to generate projection luminous point projection In the particle sensor, and detection signal is exported, and the microprocessor receives the particle sensor and exports detection signal progress Analysis, to export detection data.

5. detection of particulates module as claimed in claim 4, which is characterized in that the detection of particulates module further includes an insulation board Part is covered on the first surface of the pedestal, and the gas outside the pedestal is made to import the sense channel by the air inlet In, then by the air guide groove of the micropump supporting region, then by air exit discharge in outside the pedestal, to form an air guide Path.

6. detection of particulates module as claimed in claim 5, which is characterized in that the detection of particulates module also includes a pedestal outer cover Plate, bearing is in the first surface for closing the pedestal on the insulating sheet member, to form electronic interferences protective action, outside the pedestal Also there is an air inlet to be corresponded to connection for the air inlet position that cover piece corresponds to the pedestal, the pedestal outer cover plate Also there is an air exit to be corresponded to connection for the air exit position for corresponding to the pedestal.

7. detection of particulates module as claimed in claim 4, which is characterized in that the laser includes that a light-seeking component and one swash Photocell, light-seeking component setting is positioned on the detection drive circuit board, and laser emitting elements insertion setting In the light-seeking component, and it is electrically connected the detection drive circuit board, to be controlled driving, concurrent irradiating light beam by the microprocessor It is irradiated in the beam channel.

8. detection of particulates module as described in claim 1, which is characterized in that the micropump includes:

One influent stream plate has an at least flow-in hole, at least a busbar channel and a confluence chamber, and the flow-in hole is for importing the gas Body, the flow-in hole is corresponding to penetrate through the busbar channel, and the busbar channel is flowed to the confluence chamber, and the flow-in hole is made to import this Gas is able to converge into the confluence chamber；

One resonance plate is engaged on the influent stream plate, has a hollow hole, a movable part and a fixed part, which is located at should At resonance plate center, and corresponding with the confluence chamber of the influent stream plate, and the movable part is set to around the hollow hole and with this The opposite region of confluence chamber, and the fixed part is set to the outer peripheral edge portion of the resonance plate and is posted solid on the influent stream plate；With And

One piezoelectric actuator is engaged in corresponding setting on the resonance plate；

Wherein, between the resonance plate and the piezoelectric actuator there is a cavity space to make when so that the piezoelectric actuator being driven The gas is imported by the flow-in hole of the influent stream plate, is collected in the confluence chamber through the busbar channel, is passed through the resonance plate The hollow hole, the resonance transfer gas is generated by the movable part of the piezoelectric actuator and the resonance plate.

9. detection of particulates module as claimed in claim 8, which is characterized in that the piezoelectric actuator includes:

One suspension board has a square kenel, flexible vibration；

One outline border, around the outside for being set to the suspension board；

An at least bracket is connected between the suspension board and the outline border, to provide suspension board resilient support；And

One piezoelectric element has a side length, which is less than or equal to a side length of the suspension board, and the piezoelectric element is attached at On one surface of the suspension board, to apply voltage to drive the suspension board bending vibration.

10. detection of particulates module as claimed in claim 8, which is characterized in that the micropump further includes one first insulation Piece, a conductive sheet and one second insulating trip, wherein the influent stream plate, the resonance plate, the piezoelectric actuator, first insulating trip, should Conductive sheet and second insulating trip are sequentially stacked in conjunction with setting.

11. detection of particulates module as claimed in claim 9, which is characterized in that the suspension board includes a protrusion, and it is outstanding to be set to this Kickboard attaches opposite another surface on the surface of the piezoelectric element.

12. detection of particulates module as claimed in claim 11, which is characterized in that produced with etch process integrally formed in the protrusion Protrude from the convex architecture on opposite another surface on the surface that the suspension board attaches the piezoelectric element.

13. detection of particulates module as claimed in claim 8, which is characterized in that the piezoelectric actuator includes:

One suspension board has a square kenel, flexible vibration；

One outline border, around the outside for being set to the suspension board；

An at least bracket, joint forming is between the suspension board and the outline border, to provide suspension board resilient support, and keeps this outstanding One surface of kickboard and a surface of the outline border are formed as non-co-planar structure, and make a surface and the sounding board of the suspension board Keep a cavity space；And

One piezoelectric element has a side length, which is less than or equal to a side length of the suspension board, and the piezoelectric element is attached at On one surface of the suspension board, to apply voltage to drive the suspension board bending vibration.

14. detection of particulates module as described in claim 1, which is characterized in that the micropump is the miniature of a MEMS Pump.

15. detection of particulates module as described in claim 1, which is characterized in that the detection of particulates module application is assembled in one can On portable electronic apparatus, to form mobile detection of particulates module.

16. detection of particulates module as claimed in claim 15, which is characterized in that the portable apparatus is a mobile phone, a plate One of computer, a wearable device and a notebook computer.

17. detection of particulates module as described in claim 1, which is characterized in that the detection of particulates module application is assembled in one and wears It wears on accessory, to form mobile detection of particulates module.

18. detection of particulates module as claimed in claim 17, which is characterized in that the wearing accessory is a pendant, a button, one One of glasses and a wrist-watch.