CN209216064U - Full abutted equipment and system - Google Patents

Full abutted equipment and system Download PDF

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Publication number
CN209216064U
CN209216064U CN201920093251.7U CN201920093251U CN209216064U CN 209216064 U CN209216064 U CN 209216064U CN 201920093251 U CN201920093251 U CN 201920093251U CN 209216064 U CN209216064 U CN 209216064U
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CN
China
Prior art keywords
vacuum chamber
fit
component
assembly
valve door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201920093251.7U
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Chinese (zh)
Inventor
胡川
燕英强
陈志涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Semiconductors of Guangdong Academy of Sciences
Original Assignee
Guangdong Semiconductor Industry Technology Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Semiconductor Industry Technology Research Institute filed Critical Guangdong Semiconductor Industry Technology Research Institute
Priority to CN201920093251.7U priority Critical patent/CN209216064U/en
Application granted granted Critical
Publication of CN209216064U publication Critical patent/CN209216064U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model embodiment provides a kind of full abutted equipment and system, including the first vacuum chamber, the second vacuum chamber and the 4th vacuum chamber connecting respectively with third vacuum chamber.Mechanical arm by being set to the third vacuum chamber, which grabs, is located at the indoor first assembly to be fit of first vacuum chamber to the third vacuum chamber, and indoor second component to be fit of second vacuum chamber is grabbed to the third vacuum chamber, and the first assembly to be fit and second component to be fit are bonded in the third vacuum chamber, with the finished product after being bonded, and the finished product is sent into the 4th vacuum chamber.To provide complete multiple vacuum environments required for being bonded for the first assembly to be fit and the second component, required time and cost are vacuumized to reduce, improves production efficiency and quality.

Description

Full abutted equipment and system
Technical field
The utility model relates to electronic technology fields, in particular to a kind of full abutted equipment and system.
Background technique
After touch screen and the full attaching process of display screen are necessary to ensure that fitting, between touch screen, optical adhesive and display screen The defects of being not allow for bubble, stomata and layering, so full attaching process needs carry out in vacuum chamber.
Currently, the fitting vacuum chamber of touch screen and complete only one vacuum-pumping of abutted equipment of display screen, touch screen and It needs to carry out under vacuum conditions when optical bonding glue laminating, has been bonded after needing to discharge vacuum display screen could be sent into and paste Vacuum chamber is closed, then fitting vacuum chamber is vacuumized again and carries out the fitting of touch screen and display screen.Touch screen and display After screen has been bonded, vacuum is discharged, the finished product posted is taken out.Any material disengaging fitting vacuum chamber requires again Fitting vacuum chamber is vacuumized, speed is bonded entirely to touch screen and display screen under this equipment slow, low efficiency, especially greatly When the touch screen and display screen of size (being greater than 80 inches) are bonded entirely, fitting vacuum chamber volume is big, vacuumizes needs and expends greatly The time of amount, production efficiency are extremely low.
Utility model content
In view of this, the purpose of the utility model embodiment is, provide a kind of full abutted equipment and system to solve on State problem.
The utility model embodiment provides a kind of full abutted equipment, including the first vacuum chamber, the second vacuum chamber, third Vacuum chamber and the 4th vacuum chamber, the third vacuum chamber are separately connected the first vacuum chamber, the second vacuum chamber and Four vacuum chambers;
First vacuum chamber is mentioned for accommodating first assembly to be fit, and for the first assembly to be fit For vacuum environment;
Second vacuum chamber is mentioned for accommodating the second component to be fit, and for second component to be fit For vacuum environment;
Mechanical arm is provided in the third vacuum chamber, the mechanical arm is indoor for grabbing first vacuum chamber The first assembly to be fit is to the third vacuum chamber, and it is indoor described to be fit to grab second vacuum chamber Second component is bonded second component to be fit and institute to the third vacuum chamber in the third vacuum chamber First assembly to be fit is stated, with the finished product after being bonded, and the finished product is sent into the 4th vacuum chamber;
4th vacuum chamber, for providing vacuum environment for the finished product and accommodating the finished product.
Further, marking in the first assembly to be fit has target, in the first assembly to be fit It is marked with the first target, marking on second component to be fit has target, in the cavity wall of the third vacuum chamber Side is provided at least one contraposition equipment, for acquire comprising the first assembly to be fit and second group to be fit described The image of part, and described image is identified to obtain first target and second target respectively described to be fit First assembly and second component to be fit on position, the mechanical arm is also used to according to first target and institute The position for stating the second target aligns the first assembly to be fit and second component to be fit.
Further, the contraposition equipment is CCD camera, CMOS camera or infrared camera.
Further, first vacuum chamber includes at least one first accommodating slot position, described to be fit for accommodating First assembly;
Second vacuum chamber includes at least one second accommodating slot position, for accommodating described second group to be fit Part;
The third vacuum chamber includes objective table, for carrying second component to be fit and described to be fit First assembly.
Further, first vacuum chamber is provided with the first isolating valve far from the cavity wall of the third vacuum chamber Door, the cavity wall close to the third vacuum chamber are provided with the second separation valve door;
First separation valve door be closed when, first vacuum chamber is isolated with outside atmosphere pressure, described first every When being opened from valve, first vacuum chamber and external pressure strong continune;
When second separation valve door is closed, first vacuum chamber is isolated with the third vacuum chamber, and described the When two separation valve doors are opened, first vacuum chamber is connected to the third vacuum chamber.
Further, second vacuum chamber is provided with third isolating valve far from the cavity wall of the third vacuum chamber Door, the cavity wall close to the third vacuum chamber are provided with the 4th separation valve door;
The third separation valve door be closed when, second vacuum chamber is isolated with outside atmosphere pressure, the third every When being opened from valve, second vacuum chamber and external pressure strong continune;
When 4th separation valve door is closed, second vacuum chamber is isolated with the third vacuum chamber, and described the When four separation valve doors are opened, second vacuum chamber is connected to the third vacuum chamber.
Further, the 4th vacuum chamber is provided with the 5th isolating valve far from the cavity wall of the third vacuum chamber Door, the cavity wall close to the third vacuum chamber are provided with the 6th separation valve door;
5th separation valve door be closed when, the 4th vacuum chamber is isolated with outside atmosphere pressure, the described 5th every When being opened from valve, the 4th vacuum chamber and external pressure strong continune;
When 6th separation valve door is closed, the 4th vacuum chamber is isolated with the third vacuum chamber, and described the When six separation valve doors are opened, the 4th vacuum chamber is connected to the third vacuum chamber.
Further, the first assembly to be fit is coated with optical adhesive and/or second group to be fit described Part is coated with optical adhesive.
Further, the optical adhesive includes OCA glue and epoxide-resin glue.
Further, the utility model embodiment also provides a kind of full applying system, including above-mentioned full abutted equipment and Controller, the controller are connect with the full abutted equipment, grab described to be fit first for controlling the mechanical arm Component or second component to be fit.
The utility model embodiment provides a kind of full abutted equipment and system, including connect respectively with third vacuum chamber The first vacuum chamber, the second vacuum chamber and the 4th vacuum chamber.By the mechanical arm for being set to the third vacuum chamber It grabs positioned at the indoor first assembly to be fit of first vacuum chamber to the third vacuum chamber, and described in crawl Indoor second component to be fit of second vacuum chamber is to the third vacuum chamber, and in the third vacuum chamber Be bonded second component to be fit and the first assembly to be fit, with the finished product after being bonded, and by it is described at Product are sent into the 4th vacuum chamber.It is more required for full fitting to be provided for second component and first assembly to be fit A vacuum environment vacuumizes required time and cost to reduce, improves production efficiency and quality.
To enable the above objects, features, and advantages of the utility model to be clearer and more comprehensible, preferred embodiment is cited below particularly, and Cooperate appended attached drawing, is described in detail below.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment Attached drawing be briefly described.It should be appreciated that the following drawings illustrates only some embodiments of the utility model, therefore should not be by Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also To obtain other relevant attached drawings according to these attached drawings.
Fig. 1 is a kind of one of schematic diagram of full abutted equipment provided by the embodiment of the utility model.
Fig. 2 is the two of a kind of schematic diagram of full abutted equipment provided by the embodiment of the utility model.
Fig. 3 is the three of the schematic diagram of provided by the embodiment of the utility model one full abutted equipment.
Fig. 4 is a kind of structural block diagram of full applying system provided by the embodiment of the utility model.
Icon: the full applying system of 100-;The full abutted equipment of 110-;The first vacuum chamber of 1-;The first separation valve door of 11-;12- Second separation valve door;13- first accommodates slot position;The second vacuum chamber of 2-;21- third separation valve door;The 4th separation valve door of 22-; 23- second accommodates slot position;3- third vacuum chamber;31- aligns equipment;32- objective table;The 4th vacuum chamber of 4-;41- the 5th every From valve;The 6th separation valve door of 42-;120- controller.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described.Obviously, it is retouched The embodiment stated is only the utility model a part of the embodiment, instead of all the embodiments.Usually retouched in attached drawing here The component of the utility model embodiment stated and shown can be arranged and be designed with a variety of different configurations.
Therefore, requirement is not intended to limit to the detailed description of the embodiments of the present invention provided in the accompanying drawings below The scope of the utility model of protection, but it is merely representative of the selected embodiment of the utility model.Reality based on the utility model Apply example, those skilled in the art's every other embodiment obtained without making creative work belongs to The range of the utility model protection.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the present invention, it should also be noted that, unless otherwise clearly defined and limited, term " is set Set ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected.It can To be mechanical connection, it is also possible to be electrically connected.It can be directly connected, can also can be indirectly connected through an intermediary Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition Concrete meaning in utility model.
In the description of the present invention, it should be noted that the orientation or positional relationship of the instructions such as term " on ", "lower" For be based on the orientation or positional relationship shown in the drawings or the utility model product using when the orientation or position usually put Relationship is merely for convenience of describing the present invention and simplifying the description, rather than the device or element of indication or suggestion meaning must There must be specific orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.This Outside, term " first ", " second ", " third " etc. are only used for distinguishing description, are not understood to indicate or imply relative importance.
Referring to Fig. 1, the utility model embodiment provides a kind of full abutted equipment 110, including the first vacuum chamber 1, Two vacuum chambers 2, third vacuum chamber 3 and the 4th vacuum chamber 4, the third vacuum chamber 3 are separately connected the first vacuum chamber Room 1, the second vacuum chamber 2 and the 4th vacuum chamber 4.
First vacuum chamber 1 is mentioned for accommodating first assembly to be fit, and for the first assembly to be fit For vacuum environment.Second vacuum chamber 2 for accommodating the second component to be fit, and is described second group to be fit Part provides vacuum environment.
In the utility model embodiment, the first assembly is touch screen, and second component is display screen.
Mechanical arm is provided in the third vacuum chamber 3, the mechanical arm is for grabbing in first vacuum chamber 1 The first assembly to be fit to the third vacuum chamber 3, and grab described wait paste in second vacuum chamber 2 The second component closed is bonded in the third vacuum chamber 3 described second group to be fit to the third vacuum chamber 3 The finished product with the finished product after being bonded, and is sent into the 4th vacuum chamber by part and the first assembly to be fit 4。
Specifically, in the utility model embodiment, the mechanical arm can be sucker, provide suction using light spring component Disk pressure avoids generating excessive pressure during conveying, so that generating closed bubble between the second component and first assembly.
4th vacuum chamber 4, for providing vacuum environment for the finished product and accommodating the finished product.
Four above-mentioned vacuum chambers independently come, and individually can carry out vacuum pumping to a wherein vacuum chamber. Four chambers after vacuumizing can have identical vacuum degree or first vacuum chamber 1, the second vacuum chamber 2 and The vacuum degree of four vacuum chambers 4 be lower than the third vacuum chamber 3, it is possible thereby to reduce by second component to be fit with First assembly to be fit frequently enters the time and cost consumed by vacuum chamber.
Before the third vacuum chamber 3 is bonded the first assembly to be fit and second component to be fit, First vacuum chamber 1, the second vacuum chamber 2, third vacuum chamber 3 and the 4th vacuum chamber 4 is set to be in vacuum state, After the first assembly to be fit and second component to be fit enter the third vacuum chamber 3, can directly into Row fitting, is not necessarily to repeatedly vacuum pumping, saves the fitting time.
It should be noted that a kind of embodiment as the utility model embodiment, the first assembly to be fit Upper to be coated with optical adhesive, second component to be fit is complete by optical adhesive and the first assembly to be fit Fitting.
First assembly to be fit coated with optical adhesive places a period of time in vacuum environment, can sufficiently exclude Bubble and moisture that may be present etc., are conducive to further increase the quality being bonded entirely in optical adhesive.Wherein, the optics Adhesive glue can be to be coated before the first assembly to be fit enters first vacuum chamber 1, is also possible to described It is coated in first vacuum chamber 1.
The utility model embodiment also provides another embodiment, is coated with optics on second component to be fit Adhesive glue, the first assembly to be fit pass through optical cement and second component joint to be fit.
The utility model embodiment also provides another embodiment, second component to be fit with it is described to be fit First assembly be coated with optical adhesive, the first assembly to be fit and second component to be fit pass through light Learn bonding glue laminating.
Specifically, the optical cement can be OCA (Optically Clear Adhesive) glue, asphalt mixtures modified by epoxy resin can also be The specific type of rouge glue, the optical adhesive can select according to actual needs, it is not limited here.
Referring to Fig. 2, marking in the first assembly to be fit has target, on second component to be fit It is marked with the second target, at least one contraposition equipment 31 is provided on the inside of the cavity wall of the third vacuum chamber 3, for acquiring packet Image containing the first assembly to be fit and second component to be fit, and described image is identified to obtain First target and second target are respectively in the first assembly to be fit and second component to be fit Position, the mechanical arm is also used to described to be fit first according to the position of first target and second target Component and the second component contraposition to be fit.
Specifically, one of embodiment is that the contraposition equipment 31 is mounted on described in the utility model embodiment 3 inner wall of third vacuum chamber, the contraposition equipment 31 can be CCD (Charge-coupled Device, Charged Couple member Part) camera, it can also be CMOS (Complementary Metal Oxide Semiconductor, complementary metal oxide Semiconductor) camera or infrared camera, the number of the contraposition equipment 31 is two, and acquisition includes described to be fit first respectively The image of component and second component to be fit, and each described image is identified to obtain first target and institute State position of second target respectively in the first assembly to be fit and second component to be fit.It needs to illustrate It is that above-mentioned contraposition equipment 31 acquires image and can refer to the prior art to the principle and method of described image progress image recognition, This will not be repeated here.
Another embodiment is in the utility model embodiment, and 3 inner wall of third vacuum chamber offers contraposition window Mouthful, position corresponding with the contraposition window is arranged outside the equipment in the contraposition equipment 31.The contraposition equipment 31 passes through The contraposition window acquisition includes the image of the first assembly to be fit and second component to be fit, and to each institute Image is stated to be identified to obtain first target and second target respectively in the first assembly to be fit and institute State the position on the second component to be fit.
Meanwhile the number of the contraposition equipment 31 can be two, is also possible to one, can be arranged according to demand, herein Without limitation.
Further, referring to Fig. 3, the first vacuum chamber 1 described in the utility model embodiment include at least one the One accommodating slot position 13, for accommodating the first assembly to be fit.
Second vacuum chamber 2 includes at least one second accommodating slot position 23, for accommodating described to be fit second Component.
The third vacuum chamber 3 includes objective table 32, for carrying second component to be fit and described wait paste The first assembly of conjunction.
In the utility model embodiment, first vacuum chamber 1 is arranged far from the cavity wall of the third vacuum chamber 3 There is the first separation valve door 11, the cavity wall close to the third vacuum chamber 3 is provided with the second separation valve door 12.
When first separation valve door 11 is closed, first vacuum chamber 1 is isolated with outside atmosphere pressure, and described first When separation valve door 11 is opened, first vacuum chamber 1 and external pressure strong continune.
When second separation valve door 12 is closed, first vacuum chamber 1 is isolated with the third vacuum chamber 3, institute When stating the second separation valve door 12 opening, first vacuum chamber 1 is connected to the third vacuum chamber 3.
When first separation valve door 11 is closed with second separation valve door 12, first vacuum chamber 1 is close Closed state.
In the utility model embodiment, second vacuum chamber 2 is arranged far from the cavity wall of the third vacuum chamber 3 There is third separation valve door 21, the cavity wall close to the third vacuum chamber 3 is provided with the 4th separation valve door 22.
When the third separation valve door 21 is closed, second vacuum chamber 2 is isolated with outside atmosphere pressure, the third When separation valve door 21 is opened, second vacuum chamber 2 and external pressure strong continune.
When 4th separation valve door 22 is closed, second vacuum chamber 2 is isolated with the third vacuum chamber 3, institute When stating the 4th separation valve door 22 opening, second vacuum chamber 2 is connected to the third vacuum chamber 3.
When the third separation valve door 21 is closed with the 4th separation valve door 22, second vacuum chamber 2 is in close Closed state.
In the utility model embodiment, the 4th vacuum chamber 4 is arranged far from the cavity wall of the third vacuum chamber 3 There is the 5th separation valve door 41, the cavity wall close to the third vacuum chamber 3 is provided with the 6th separation valve door 42.
When 5th separation valve door 41 is closed, the 4th vacuum chamber 4 is isolated with outside atmosphere pressure, and the described 5th When separation valve door 41 is opened, the 4th vacuum chamber 4 and external pressure strong continune.
When 6th separation valve door 42 is closed, the 4th vacuum chamber 4 is isolated with the third vacuum chamber 3, institute When stating the 6th separation valve door 42 opening, the 4th vacuum chamber 4 is connected to the third vacuum chamber 3.
When 5th separation valve door 41 is closed with the 6th separation valve door 42, the 4th vacuum chamber 4 is in close Closed state.
It specifically, can be in the following manner using the full abutted equipment 110 to described in the utility model embodiment First assembly to be fit and the second component to be fit are bonded.
Firstly, by opening first separation valve door 11 and the third separation valve door 21, it respectively will be described to be fit First assembly and the second component to be fit be put into first vacuum chamber 1 and second vacuum chamber 2, and it is right simultaneously First vacuum chamber 1, the second vacuum chamber 2, third vacuum chamber 3 and the 4th vacuum chamber 4 vacuumize, with for it is described to The first assembly of fitting and the second component to be fit provide vacuum environment.
Secondly, the mechanical arm in the third vacuum chamber 3 grab respectively it is to be fit in first vacuum chamber 1 First assembly and second vacuum chamber 2 in the second component to be fit to the third vacuum insulation chamber 3.Pass through Contraposition equipment 31 is bonded the first assembly to be fit and second component to be fit after aligning, to obtain finished product.
Finally, the finished product is sent into the 4th vacuum chamber 4.
In the utility model embodiment, to the first assembly to be fit and second component joint to be fit When, first separation valve door 11 can be opened simultaneously and closes second separation valve door 12, by described first group to be fit Part is put into first vacuum chamber 1, opens the third separation valve door 21 and closes the 4th separation valve door 22, will be described Second component to be fit is put into second vacuum chamber 2, fills up the first accommodating slot position 13 and second accommodation groove Position 23, to accelerate throughput rate.
Fig. 4 is please referred to, the utility model embodiment is based on the studies above discovery and provides a kind of full applying system 100, the full applying system 100 includes the full abutted equipment 110 and controller 120, the controller 120 with it is described complete Abutted equipment 110 connects.
Specifically, the controller 120 can in the full abutted equipment 110 contraposition equipment 31, mechanical arm, first every From valve 11, the second separation valve door 12, third separation valve door 21, the 4th separation valve door 22, the 5th separation valve door 41 and the 6th every It is connected from valve 42.
Specifically, controller 120 can receive contraposition equipment 31 and collect location information, wherein the location information is The collected image comprising the first assembly to be fit and second component to be fit of equipment 31 is aligned, and to institute Image is stated to be identified to obtain first target and second target respectively in the first assembly to be fit and institute State the position on the second component to be fit.The mechanical arm is further controlled by the location information, so that described wait paste The first assembly of conjunction and the second component contraposition to be fit.
Meanwhile the controller 120 can also control the mechanical arm grab it is described in first vacuum chamber 1 First assembly to be fit to the third vacuum chamber 3, and grab in second vacuum chamber 2 described to be fit Two components are bonded to the third vacuum chamber 3 after mechanical arm aligns according to the positional information to obtain finished product, And the finished product is sent to the 4th vacuum chamber 4.
Further, the controller 120 can also be connect with operation interface, by receiving user in the operation interface The operation information of input can accordingly open or close the first separation valve door 11, the second separation valve door 12, third separation valve door 21, the 4th separation valve door 22, the 5th separation valve door 41 and the 6th separation valve door 42.
It is understood that the operating method and beneficial effect of full applying system 100 described in the utility model embodiment It can refer to the detailed description of corresponding step in above-mentioned full abutted equipment 110 and method, details are not described herein.
In conclusion the utility model embodiment provides a kind of full abutted equipment 110 and system, including respectively with third The first vacuum chamber 1, the second vacuum chamber 2 and the 4th vacuum chamber 4 that vacuum chamber 3 connects.By being set to the third The mechanical arm crawl of vacuum chamber 3 is located at the first assembly to be fit in first vacuum chamber 1 to the third Vacuum chamber 3, and grab second component to be fit in second vacuum chamber 2 to the third vacuum chamber 3, And the first assembly to be fit and second component to be fit are bonded in the third vacuum chamber 3, to obtain Finished product after fitting.And the finished product is sent into the 4th vacuum chamber 4, for the first assembly to be fit and second Component provides complete multiple vacuum environments required for being bonded, time required for vacuumizing with reduction and cost, improves production effect Rate and quality.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.

Claims (10)

1. a kind of full abutted equipment, which is characterized in that including the first vacuum chamber, the second vacuum chamber, third vacuum chamber and 4th vacuum chamber, the third vacuum chamber are separately connected the first vacuum chamber, the second vacuum chamber and the 4th vacuum chamber;
First vacuum chamber provides very for accommodating first assembly to be fit, and for the first assembly to be fit Altitude;
Second vacuum chamber provides very for accommodating the second component to be fit, and for second component to be fit Altitude;
Mechanical arm is provided in the third vacuum chamber, the mechanical arm is indoor described for grabbing first vacuum chamber First assembly to be fit grabs second vacuum chamber indoor described to be fit second to the third vacuum chamber Component to the third vacuum chamber, and be bonded in the third vacuum chamber second component to be fit and it is described to The finished product with the finished product after being bonded, and is sent into the 4th vacuum chamber by the first assembly of fitting;
4th vacuum chamber, for providing vacuum environment for the finished product and accommodating the finished product.
2. full abutted equipment according to claim 1, which is characterized in that marking in the first assembly to be fit has One target, label has target on second component to be fit, is provided on the inside of the cavity wall of the third vacuum chamber At least one contraposition equipment, for acquiring the figure comprising the first assembly to be fit and second component to be fit Picture, and described image is identified to obtain first target and second target respectively described to be fit first Position on component and second component to be fit, the mechanical arm are also used to according to first target and described second The position of target aligns the first assembly to be fit and second component to be fit.
3. full abutted equipment according to claim 2, which is characterized in that the contraposition equipment is CCD camera, CMOS camera Or infrared camera.
4. full abutted equipment according to claim 1, which is characterized in that first vacuum chamber include at least one One accommodating slot position, for accommodating the first assembly to be fit;
Second vacuum chamber includes at least one second accommodating slot position, for accommodating second component to be fit;
The third vacuum chamber includes objective table, for carrying second component to be fit and described to be fit first Component.
5. full abutted equipment according to claim 1, which is characterized in that first vacuum chamber is true far from the third The cavity wall of plenum chamber is provided with the first separation valve door, and the cavity wall close to the third vacuum chamber is provided with the second separation valve door;
When first separation valve door is closed, first vacuum chamber is isolated with outside atmosphere pressure, first isolating valve When door is opened, first vacuum chamber and external pressure strong continune;
Second separation valve door be closed when, first vacuum chamber is isolated with the third vacuum chamber, described second every When opening from valve, first vacuum chamber is connected to the third vacuum chamber.
6. full abutted equipment according to claim 1, which is characterized in that second vacuum chamber is true far from the third The cavity wall of plenum chamber is provided with third separation valve door, and the cavity wall close to the third vacuum chamber is provided with the 4th separation valve door;
When the third separation valve door is closed, second vacuum chamber is isolated with outside atmosphere pressure, the third isolating valve When door is opened, second vacuum chamber and external pressure strong continune;
4th separation valve door be closed when, second vacuum chamber is isolated with the third vacuum chamber, the described 4th every When opening from valve, second vacuum chamber is connected to the third vacuum chamber.
7. full abutted equipment according to claim 1, which is characterized in that the 4th vacuum chamber is true far from the third The cavity wall of plenum chamber is provided with the 5th separation valve door, and the cavity wall close to the third vacuum chamber is provided with the 6th separation valve door;
When 5th separation valve door is closed, the 4th vacuum chamber is isolated with outside atmosphere pressure, the 5th isolating valve When door is opened, the 4th vacuum chamber and external pressure strong continune;
6th separation valve door be closed when, the 4th vacuum chamber is isolated with the third vacuum chamber, the described 6th every When opening from valve, the 4th vacuum chamber is connected to the third vacuum chamber.
8. full abutted equipment described in -7 any one according to claim 1, which is characterized in that the first assembly to be fit Optical adhesive is coated with coated with optical adhesive and/or second component to be fit.
9. full abutted equipment according to claim 8, which is characterized in that the optical adhesive includes OCA glue and epoxy Resin glue.
10. a kind of full applying system, which is characterized in that including full abutted equipment described in any one of claim 1-9 and control Device processed, the controller are connect with the full abutted equipment, grab described first group to be fit for controlling the mechanical arm Part or second component to be fit.
CN201920093251.7U 2019-01-18 2019-01-18 Full abutted equipment and system Withdrawn - After Issue CN209216064U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920093251.7U CN209216064U (en) 2019-01-18 2019-01-18 Full abutted equipment and system

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Application Number Priority Date Filing Date Title
CN201920093251.7U CN209216064U (en) 2019-01-18 2019-01-18 Full abutted equipment and system

Publications (1)

Publication Number Publication Date
CN209216064U true CN209216064U (en) 2019-08-06

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Application Number Title Priority Date Filing Date
CN201920093251.7U Withdrawn - After Issue CN209216064U (en) 2019-01-18 2019-01-18 Full abutted equipment and system

Country Status (1)

Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109634465A (en) * 2019-01-18 2019-04-16 广东省半导体产业技术研究院 Full abutted equipment and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109634465A (en) * 2019-01-18 2019-04-16 广东省半导体产业技术研究院 Full abutted equipment and method
CN109634465B (en) * 2019-01-18 2023-09-26 广东省半导体产业技术研究院 Full-lamination equipment and method

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