CN209195832U - A kind of 28 cun of oil diffusion pumps - Google Patents
A kind of 28 cun of oil diffusion pumps Download PDFInfo
- Publication number
- CN209195832U CN209195832U CN201821778371.2U CN201821778371U CN209195832U CN 209195832 U CN209195832 U CN 209195832U CN 201821778371 U CN201821778371 U CN 201821778371U CN 209195832 U CN209195832 U CN 209195832U
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- nozzle
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- bottom end
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- fixedly mounted
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 53
- 238000009434 installation Methods 0.000 claims abstract description 47
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000498 cooling water Substances 0.000 claims abstract description 8
- 239000004519 grease Substances 0.000 claims description 8
- 238000009987 spinning Methods 0.000 claims description 8
- 238000001125 extrusion Methods 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 7
- 239000011521 glass Substances 0.000 abstract description 6
- 239000003921 oil Substances 0.000 description 25
- 239000012530 fluid Substances 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 238000000576 coating method Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012827 research and development Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012208 gear oil Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000005619 thermoelectricity Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The utility model discloses a kind of 28 cun of oil diffusion pumps, including diffusion pump main body, cooling water pipe, flange, air inlet, first order jet nozzle, nozzle carrier, secondary nozzle, pump core, second level diversion pipe, three-level nozzle, level Four nozzle, three-level diversion pipe, gas outlet, heater, pedestal and diffuser, the fixed installation of diffusion pump body exterior is provided with cooling water pipe, diffusion pump main body top is fixedly mounted and is provided with flange, there is air inlet through installation settings inside flange, flange bottom end installation settings has first order jet nozzle, first order jet nozzle bottom end is fixedly mounted and is provided with nozzle carrier, nozzle carrier bottom end, which is fixedly connected, is provided with pump core, pump core bottom installation settings has secondary nozzle.The utility model is designed as 28 inches for the bore of the prime valve of client, heater is designed in conjunction with heating time and temperature, in conjunction with vacuum line and the group reload request of fore pump, the outer dimension of pump is designed, the plated film requirement of same type glass screen can be met.
Description
Technical field
The utility model relates to oil diffusion pump technical fields, more particularly to a kind of 28 cun of oil diffusion pumps.
Background technique
Oil diffusion pump is the vacuum pump using the oil vapour jet gas extraction of low pressure, high speed and directed flow.The pole of this pump
Limiting vacuum is 10-4~10-5Pa, working pressure range 10-1~10-4Pa, pumping speed range were tens to ten (1 liter of tens of thousands of liter/seconds
=10-3Cubic meter).Oil diffusion pump is the capital equipment for obtaining high vacuum, is widely used in vacuum metling, vacuum coating, spatial mode
In quasi- test and some vacuum systems insensitive to oily pollution.
But existing oil diffusion pump cannot for the tablet computers such as cell phone screen glass and Ipad coating process with
And filming equipment has carried out orientation research and development, pumping speed needed for can not meet client and fluid return rate；Therefore, we, which mention, locates 28 cun of one kind
Oil diffusion pump is determined mainly for the coating process and filming equipment of the tablet computers such as cell phone screen glass and Ipad
To research and development, requires to be analyzed for the plated film of the screen of the novel electrons equipment such as novel mobile phone or tablet computer, make
Meet the oil diffusion pump of client's pumping speed and fluid return rate out.Practical pumping speed reaches 11000L/S, and final vacuum reaches 2.0E-
5Pa。
Utility model content
For overcome the deficiencies in the prior art, the utility model provides a kind of 28 cun of oil diffusion pumps, can solve existing oil
Diffusion pump cannot be oriented for the coating process and filming equipment of the tablet computers such as cell phone screen glass and Ipad
The problem of research and development, pumping speed needed for can not meet client and fluid return rate.
In order to solve the above technical problems, the utility model provides the following technical solutions:
A kind of 28 cun of oil diffusion pumps, including diffusion pump main body, cooling water pipe, flange, air inlet, first order jet nozzle, nozzle carrier,
Secondary nozzle, pump core, second level diversion pipe, three-level nozzle, level Four nozzle, three-level diversion pipe, gas outlet, heater, pedestal and
Diffuser, the diffusion pump body exterior fixed installation are provided with cooling water pipe, and diffusion pump main body top is fixedly mounted and sets
It is equipped with flange, running through installation settings inside the flange has air inlet, and flange bottom end installation settings has first order jet nozzle, described
First order jet nozzle bottom end is fixedly mounted and is provided with nozzle carrier, and the nozzle carrier bottom end, which is fixedly connected, is provided with pump core, the pump core bottom
Portion's installation settings has secondary nozzle, and the secondary nozzle bottom end, which is fixedly connected, is provided with second level diversion pipe, the second level diversion pipe
Bottom end, which is fixedly connected, is provided with three-level nozzle, and three-level nozzle bottom end is fixedly mounted and is provided with three-level diversion pipe, the three-level
Diversion pipe bottom end, which is fixedly mounted, is provided with level Four nozzle, and setting having heaters is fixedly mounted in level Four nozzle bottom end, described to add
Hot device bottom end, which is fixedly mounted, is provided with pedestal, and the middle of the base installation settings has oil cauldron strut, installation beside the heater
It is provided with diffuser, described diffuser one end is connected with gas outlet, and installation settings has electric cabinet beside the diffuser.
As a preferred technical solution of the utility model, setting is fixedly mounted in diffusion pump bottom part body side
There is connecting rod, connecting rod bottom end installation settings has pulley.
As a preferred technical solution of the utility model, it is fixedly mounted beside the oil cauldron strut and is provided with thermoelectricity
It is even.
As a preferred technical solution of the utility model, installation settings has grease baffle inside the gas outlet, institute
It states grease baffle and is provided with several.
As a preferred technical solution of the utility model, it is fixedly mounted beside the diffuser and is provided with oil ga(u)ge.
As a preferred technical solution of the utility model, equal spacing distances are provided through logical on the flange
Hole.
As a preferred technical solution of the utility model, diffusion pump main body bottom end installation settings has heat preservation
Cover.
As a preferred technical solution of the utility model, the diffusion pump body surfaces installation settings has cold-trap leaf
Piece, the cold-trap blade are made of rotary extrusion type spinning.
As a preferred technical solution of the utility model, the pump core is using the knot assembled after the welding of spinning part
Structure.
Compared with prior art, the attainable beneficial effect of the utility model is:
The utility model is simple and reasonable, 28 inches is designed as the bore of the prime valve of client, in conjunction with heating
Time, heating temperature are redesigned for heater, in conjunction with vacuum line and the group reload request of fore pump, to pump
Outer dimension is redesigned, and can satisfy the plated film requirement of the glass screen of same type；Utility model works efficiency
Height has a good application prospect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the top view of the utility model；
Wherein: 1, diffusion pump main body；2, cooling water pipe；3, flange；4, air inlet；5, first order jet nozzle；6, nozzle carrier；7, two
Grade nozzle；8, pump core；9, second level diversion pipe；10, three-level nozzle；11, level Four nozzle；12, three-level diversion pipe；13, connecting rod；
14, gas outlet；15, pulley；16, heater；17, pedestal；18, oil cauldron strut；19, thermocouple；20, diffuser；21, gear oil
Piece；22, oil ga(u)ge；23, electric cabinet；24, through-hole.
Specific embodiment
It is illustrated below in conjunction with preferred embodiment of the attached drawing to the utility model, it should be understood that described herein excellent
It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.
It please refers to shown in Fig. 1-2, a kind of 28 cun of oil diffusion pumps, including diffusion pump main body 1, cooling water pipe 2, flange 3, air inlet
Mouth 4, first order jet nozzle 5, nozzle carrier 6, secondary nozzle 7, pump core 8, second level diversion pipe 9, three-level nozzle 10, level Four nozzle 11, three-level
Diversion pipe 12, gas outlet 14, heater 16, pedestal 17 and diffuser 20, be fixedly mounted outside diffusion pump main body 1 be provided with it is cold
But water pipe 2,1 top of diffusion pump main body, which is fixedly mounted, is provided with flange 3, has air inlet 4, method through installation settings inside flange 3
Blue 3 bottom end installation settings have first order jet nozzle 5, and 5 bottom end of first order jet nozzle is fixedly mounted and is provided with nozzle carrier 6, and 6 bottom end of nozzle carrier is fixed
It is connected with pump core 8,8 bottom installation settings of pump core has secondary nozzle 7, and 7 bottom end of secondary nozzle, which is fixedly connected, is provided with second level
Diversion pipe 9,9 bottom end of second level diversion pipe, which is fixedly connected, is provided with three-level nozzle 10, and 10 bottom end of three-level nozzle is fixedly mounted and is provided with
Three-level diversion pipe 12,12 bottom end of three-level diversion pipe, which is fixedly mounted, is provided with level Four nozzle 11, and 11 bottom end of level Four nozzle is fixedly mounted
Having heaters 16 is set, and 16 bottom end of heater is fixedly mounted and is provided with pedestal 17, and 17 middle part installation settings of pedestal has oil cauldron strut
18,16 side installation settings of heater has diffuser 20, and 20 one end of diffuser is connected with gas outlet 14,20 side of diffuser
Installation settings has electric cabinet 23.
The fixed installation of 1 bottom side of diffusion pump main body is provided with connecting rod 13, and 13 bottom end installation settings of connecting rod has pulley
15, facilitate the disassembly and installation of small space client；It is fixedly mounted beside oil cauldron strut 18 and is provided with thermocouple 19, for mentioning
High heating efficiency；14 inside installation settings of gas outlet has grease baffle 21, and grease baffle 21 is provided with several, for keeping off oil；Diffusion
It is fixedly mounted beside device 20 and is provided with oil ga(u)ge 22, convenient for controlling the inner case of diffusion pump in real time；Equal spacing distances pass through on flange 3
It wears and is equipped with through-hole 24, be easily installed connection；1 bottom end installation settings of diffusion pump main body has insulation cover, so that diffusion pump bottom adds
It can guarantee good temperature environment after heat；1 surface installation settings of diffusion pump main body has cold-trap blade, and cold-trap blade uses spinning
Formula production, meets the design of fluid return rate and installation dimension；Pump core 8 facilitates installation using the structure assembled after the welding of spinning part
And disassembly.
Specifically, the utility model is designed as 28 inches for the bore of the prime valve of client, the size of air inlet 4,
Assembled height and the package size of gas outlet 14 are all made of customization mode, meet the needs of customers；And diffusion pump master
The fixed installation of 1 bottom side of body is provided with connecting rod 13, and 13 bottom end installation settings of connecting rod has pulley 15, facilitates small space objective
The disassembly and installation at family；It is fixedly mounted beside oil cauldron strut 18 and is provided with thermocouple 19, for improving heating efficiency；Gas outlet
14 inside installation settings have grease baffle 21, and grease baffle 21 is provided with several, for keeping off oil；It is fixedly mounted and sets beside diffuser 20
It is equipped with oil ga(u)ge 22, convenient for controlling the inner case of diffusion pump in real time；Equal spacing distances are provided through through-hole 24 on flange 3, just
It is connected in installation；1 bottom end installation settings of diffusion pump main body has insulation cover, so that can guarantee after diffusion pump bottom-heated good
Temperature environment；1 surface installation settings of diffusion pump main body has cold-trap blade, and cold-trap blade is made of rotary extrusion type spinning, meets fluid return rate
And the design of installation dimension；Pump core 8 is easy for installation and removal using the structure assembled after the welding of spinning part.
Compared with prior art, the attainable beneficial effect of the utility model is: the utility model is simple and reasonable, needle
28 inches are designed as to the bore of the prime valve of client, has been carried out again in conjunction with heating time, heating temperature for heater
Design, in conjunction with vacuum line and the group reload request of fore pump, redesigns the outer dimension of pump, can satisfy same
The plated film requirement of the glass screen of type；Utility model works are high-efficient, have a good application prospect.
The embodiments of the present invention is without being limited thereto, according to the above embodiments of the present invention content, utilizes ability
The routine techniques knowledge and customary means in domain, under the premise of not departing from the utility model above-mentioned basic fundamental thought, it is above preferably
Embodiment can also make the modification, replacement or combination of other diversified forms, and other embodiments obtained all fall within practical
Within novel rights protection scope.
Claims (9)
1. a kind of 28 cun of oil diffusion pumps, including the spray of diffusion pump main body (1), cooling water pipe (2), flange (3), air inlet (4), level-one
Mouth (5), nozzle carrier (6), secondary nozzle (7), pump core (8), second level diversion pipe (9), three-level nozzle (10), level Four nozzle (11),
Three-level diversion pipe (12), gas outlet (14), heater (16), pedestal (17) and diffuser (20), which is characterized in that the expansion
It dissipates to be fixedly mounted outside pump main body (1) and be provided with cooling water pipe (2), diffusion pump main body (1) top is fixedly mounted and is provided with
Flange (3), the flange (3) is internal to be had air inlet (4) through installation settings, and flange (3) bottom end installation settings has level-one
Nozzle (5), first order jet nozzle (5) bottom end are fixedly mounted and are provided with nozzle carrier (6), and nozzle carrier (6) bottom end is fixedly connected
It is provided with pump core (8), pump core (8) bottom installation settings has secondary nozzle (7), and secondary nozzle (7) bottom end is fixed to be connected
It connecing and is provided with second level diversion pipe (9), second level diversion pipe (9) bottom end, which is fixedly connected, to be provided with three-level nozzle (10), and described three
Grade nozzle (10) bottom end, which is fixedly mounted, to be provided with three-level diversion pipe (12), and setting is fixedly mounted in three-level diversion pipe (12) bottom end
Have level Four nozzle (11), setting having heaters (16), heater (16) bottom is fixedly mounted in level Four nozzle (11) bottom end
End is fixedly mounted and is provided with pedestal (17), and installation settings has oil cauldron strut (18), the heater in the middle part of the pedestal (17)
(16) side installation settings has diffuser (20), and described diffuser (20) one end is connected with gas outlet (14), the diffusion
Installation settings has electric cabinet (23) beside device (20).
2. a kind of 28 cun of oil diffusion pumps according to claim 1, which is characterized in that diffusion pump main body (1) bottom one
Side is fixedly mounted and is provided with connecting rod (13), and connecting rod (13) bottom end installation settings has pulley (15).
3. a kind of 28 cun of oil diffusion pumps according to claim 1, which is characterized in that fixed beside the oil cauldron strut (18)
Installation settings has thermocouple (19).
4. a kind of 28 cun of oil diffusion pumps according to claim 1, which is characterized in that installation is set inside the gas outlet (14)
It is equipped with grease baffle (21), the grease baffle (21) is provided with several.
5. a kind of 28 cun of oil diffusion pumps according to claim 1, which is characterized in that fixed peace beside the diffuser (20)
Installing is equipped with oil ga(u)ge (22).
6. a kind of 28 cun of oil diffusion pumps according to claim 1, which is characterized in that the first-class spacing distance of the flange (3)
It is provided through through-hole (24).
7. a kind of 28 cun of oil diffusion pumps according to claim 1, which is characterized in that diffusion pump main body (1) the bottom end peace
Installing is equipped with insulation cover.
8. a kind of 28 cun of oil diffusion pumps according to claim 1, which is characterized in that diffusion pump main body (1) the surface peace
Installing is equipped with cold-trap blade, and the cold-trap blade is made of rotary extrusion type spinning.
9. a kind of 28 cun of oil diffusion pumps according to claim 1, which is characterized in that the pump core (8) is welded using spinning part
The structure assembled after connecing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821778371.2U CN209195832U (en) | 2018-10-31 | 2018-10-31 | A kind of 28 cun of oil diffusion pumps |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821778371.2U CN209195832U (en) | 2018-10-31 | 2018-10-31 | A kind of 28 cun of oil diffusion pumps |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209195832U true CN209195832U (en) | 2019-08-02 |
Family
ID=67409767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821778371.2U Active CN209195832U (en) | 2018-10-31 | 2018-10-31 | A kind of 28 cun of oil diffusion pumps |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209195832U (en) |
-
2018
- 2018-10-31 CN CN201821778371.2U patent/CN209195832U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 233500 Jingliu Road, Economic Development Zone, Letu Town, Mengcheng County, Bozhou City, Anhui Province Patentee after: Anhui Fanfeng New Energy Technology Co.,Ltd. Address before: 201507 Room 305, building 2, No. 3877, Tingwei Road, Jinshan Industrial Zone, Jinshan District, Shanghai Patentee before: Shanghai Fanfeng Vacuum Technology Co.,Ltd. |