CN209188172U - A kind of oil diffusion pump single layer cold-trap adds aqueous cold plate - Google Patents
A kind of oil diffusion pump single layer cold-trap adds aqueous cold plate Download PDFInfo
- Publication number
- CN209188172U CN209188172U CN201821645549.6U CN201821645549U CN209188172U CN 209188172 U CN209188172 U CN 209188172U CN 201821645549 U CN201821645549 U CN 201821645549U CN 209188172 U CN209188172 U CN 209188172U
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- CN
- China
- Prior art keywords
- cold
- trap
- cooling water
- coil pipe
- channel coil
- Prior art date
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 21
- 239000002356 single layer Substances 0.000 title claims abstract description 17
- 239000000498 cooling water Substances 0.000 claims abstract description 50
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 20
- 235000015927 pasta Nutrition 0.000 claims abstract description 17
- 238000009434 installation Methods 0.000 claims abstract description 6
- 229910000975 Carbon steel Inorganic materials 0.000 claims description 4
- 239000010962 carbon steel Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000005476 soldering Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 abstract description 17
- 239000003921 oil Substances 0.000 description 14
- 238000007789 sealing Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003305 oil spill Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012208 gear oil Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Abstract
The utility model discloses a kind of oil diffusion pump single layer cold-traps to add aqueous cold plate, including cold-trap flange, warter connection, cooling water channel coil pipe, cooling water channel coil pipe connector, cooling water access port, cold-trap keeps off pasta, cold-trap blade and cold-trap water route, cold-trap flange top, which is fixedly connected, is provided with warter connection, it is fixedly connected inside cold-trap flange and is provided with cold-trap gear pasta, cold-trap gear pasta surface installation settings has cold-trap blade, it is fixedly mounted beside cold-trap blade and is provided with cold-trap water route, it is fixedly mounted on cold-trap gear pasta face and is provided with cooling water channel coil pipe, cooling water channel coil pipe both ends, which are all connected with, is provided with cooling water access port, cooling water access port one end is fixedly mounted and is provided with cooling water channel coil pipe connector, cold-trap flange surrounding, which is respectively mounted, is provided with mounting hole.The utility model is simple and reasonable, cooling by water cooling plant by increasing water cooling plant in cooling surface, keeps the consecutive low temperature of cold-trap and vacuum chamber contact position, prevents secondary pollution.
Description
Technical field
The utility model relates to a kind of oil diffusion pump, in particular to a kind of oil diffusion pump single layer cold-trap adds aqueous cold plate, belongs to
Oil diffusion pump technical field.
Background technique
Oil diffusion pump is the vacuum pump using the oil vapour jet gas extraction of low pressure, high speed and directed flow.The pole of this pump
Limiting vacuum is 10-4~10-5Pa, working pressure range 10-1~10-4Pa, pumping speed range be tens to ten tens of thousands of liter/seconds (1 liter=
10-3Cubic meter).Oil diffusion pump is the capital equipment for obtaining high vacuum, is widely used in vacuum metling, vacuum coating, spatial simulation
In test and some vacuum systems insensitive to oily pollution.Cold-trap is that a kind of prevention steam or liquid from system enter measuring instrument
Device, or enter from measuring instrument a kind of device of system.It can provide the surface of a unusual low temperature, on this surface, molecule
It can agglomerate, and the vacuum degree of one to two order of magnitude can be improved.But inadequately it can be reduced the accurate of instrument using cold-trap
Property, the destruction of instrument or system is caused, a kind of physics accident is generated.Single layer cold-trap is used when being directed to optical coating apparatus
After diffusion pump oil condenses on cold-trap surface, because there is heating in vacuum chamber, it is indoor that diffusion pump oil still evaporates into vacuum
Situation.Therefore, it is proposed that a kind of oil diffusion pump single layer cold-trap adds aqueous cold plate.
Utility model content
The technical problems to be solved in the utility model is overcome inadequately using causing the accuracy of instrument to reduce, and is caused
The destruction of instrument or system generates a kind of defect of physics accident, provides a kind of oil diffusion pump single layer cold-trap and adds aqueous cold plate.
In order to solve the above-mentioned technical problem, the utility model provides the following technical solution:
The utility model provides a kind of oil diffusion pump single layer cold-trap and adds aqueous cold plate, including cold-trap flange, warter connection, cold
But water route coil pipe, cooling water channel coil pipe connector, cooling water access port, cold-trap gear pasta, cold-trap blade and cold-trap water route, it is described
Cold-trap flange top is fixedly connected and is provided with warter connection, is fixedly connected inside the cold-trap flange and is provided with cold-trap gear oil
Face, the cold-trap gear pasta surface installation settings have cold-trap blade, are fixedly mounted beside the cold-trap blade and are provided with cold-trap water
Road, the cold-trap, which keeps off being fixedly mounted on pasta face, is provided with cooling water channel coil pipe, and cooling water channel coil pipe both ends, which are all connected with, to be set
It is equipped with cooling water access port, cooling water access port one end is fixedly mounted and is provided with cooling water channel coil pipe connector, the cold-trap
Flange surrounding, which is respectively mounted, is provided with mounting hole.
As a kind of optimal technical scheme of the utility model, it is fixedly mounted on the outside of the cold-trap flange and is provided with sealing
Seat.
As a kind of optimal technical scheme of the utility model, pass through tin between the cold-trap blade and the cold-trap water route
Weldering is connected.
As a kind of optimal technical scheme of the utility model, the cooling water channel coil pipe is helical structure.
As a kind of optimal technical scheme of the utility model, the cooling water access port is provided with several.
As a kind of optimal technical scheme of the utility model, the cold-trap flange is made of carbon steel material.
The utility model beneficial effect achieved is: the utility model is simple and reasonable, by single layer cold-trap
Cooling surface increases water cooling plant, by the cooling of water cooling plant, keeps the consecutive low temperature of cold-trap and vacuum chamber contact position, prevents
Secondary pollution；The utility model good cooling results, client can have according to cooling water access port unrestricted choice cooling water access way
There is preferable application prospect.
Detailed description of the invention
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this
Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.In the accompanying drawings:
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the internal view of the utility model；
In figure: 1, cold-trap flange；2, warter connection；3, cooling water channel coil pipe；4, cooling water channel coil pipe connector；5, cooling
Water access port；6, cold-trap keeps off pasta；7, cold-trap blade；8, mounting hole；9, seal receptacle；10, cold-trap water route.
Specific embodiment
It is illustrated below in conjunction with preferred embodiment of the attached drawing to the utility model, it should be understood that described herein excellent
It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.
Embodiment 1
As shown in Figs. 1-2, the utility model provides a kind of oil diffusion pump single layer cold-trap and adds aqueous cold plate, including cold-trap flange 1,
Warter connection 2, cooling water channel coil pipe 3, cooling water channel coil pipe connector 4, cooling water access port 5, cold-trap keep off pasta 6, cold-trap leaf
Piece 7 and cold-trap water route 10,1 top of cold-trap flange, which is fixedly connected, to be provided with warter connection 2, fixed inside cold-trap flange 1 connects
It connects and is provided with cold-trap gear pasta 6, cold-trap gear 6 surface installation settings of pasta has cold-trap blade 7, is fixedly mounted beside cold-trap blade 7
It is provided with cold-trap water route 10, is fixedly mounted on cold-trap gear 6 face of pasta and is provided with cooling water channel coil pipe 3,3 both ends of cooling water channel coil pipe
It is all connected with and is provided with cooling water access port 5,5 one end of cooling water access port is fixedly mounted and is provided with cooling water channel coil pipe connector 4, cold
1 surrounding of trap flange, which is respectively mounted, is provided with mounting hole 8.
It is fixedly mounted on the outside of cold-trap flange 1 and is provided with seal receptacle 9, for sealing, prevented oil spill from going out；Cold-trap blade 7 with
It is connected between cold-trap water route 10 by soldering, ensure that the fastness of connection；Cooling water channel coil pipe 3 is helical structure, is used
In improving contact area, accelerate cooling velocity；Cooling water access port 5 is provided with several, can be free according to cooling water access port
Select cooling water access way；Cold-trap flange 1 is the at low cost and good connecting effect made of carbon steel material.
Specifically, when in use, first pass through mounting hole 8 and install cold-trap, due to increasing the thickness of cold-trap flange 1,
And increase spiral cooling water channel coil pipe 4 on cold-trap gear pasta 6, cooling water access port 5 is reserved, client can connect according to cold-trap
Entrance unrestricted choice cooling water access way, and good cooling results, it is therefore prevented that the diffusion pump oil on cold-trap blade 7 is because of secondary steaming
Vacuum chamber contamination caused by sending out；It is equipped with seal receptacle 9 on the outside of cold-trap flange 1, for sealing, has prevented oil spill from going out；Cold-trap blade 7 with
It is connected between cold-trap water route 10 by soldering, ensure that the fastness of connection；Cooling water channel coil pipe 3 is helical structure, is used
In improving contact area, accelerate cooling velocity；Cold-trap flange 1 is the at low cost and good connecting effect made of carbon steel material.
The utility model beneficial effect achieved is: the utility model is simple and reasonable, by single layer cold-trap
Cooling surface increases water cooling plant, by the cooling of water cooling plant, keeps the consecutive low temperature of cold-trap and vacuum chamber contact position, prevents
Secondary pollution；The utility model good cooling results, client can have according to cooling water access port unrestricted choice cooling water access way
There is preferable application prospect.
Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this
Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art
For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic
It is equivalently replaced.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on,
It should be included within the scope of protection of this utility model.
Claims (6)
1. a kind of oil diffusion pump single layer cold-trap adds aqueous cold plate, including cold-trap flange (1), warter connection (2), cooling water channel coil pipe
(3), cooling water channel coil pipe connector (4), cooling water access port (5), cold-trap gear pasta (6), cold-trap blade (7) and cold-trap water route
(10), which is characterized in that cold-trap flange (1) top, which is fixedly connected, is provided with warter connection (2), the cold-trap flange
(1) internal be fixedly connected is provided with cold-trap gear pasta (6), and cold-trap gear pasta (6) surface installation settings has cold-trap blade
(7), it is fixedly mounted and is provided with cold-trap water route (10) beside the cold-trap blade (7), fixed peace on cold-trap gear pasta (6) face
Installing is equipped with cooling water channel coil pipe (3), and cooling water channel coil pipe (3) both ends, which are all connected with, is provided with cooling water access port (5), institute
It states the fixed installation of cooling water access port (5) one end and is provided with cooling water channel coil pipe connector (4), cold-trap flange (1) surrounding is equal
Installation settings has mounting hole (8).
2. a kind of oil diffusion pump single layer cold-trap according to claim 1 adds aqueous cold plate, which is characterized in that the cold-trap flange
(1) outside is fixedly mounted and is provided with seal receptacle (9).
3. a kind of oil diffusion pump single layer cold-trap according to claim 1 adds aqueous cold plate, which is characterized in that the cold-trap blade
(7) it is connected between the cold-trap water route (10) by soldering.
4. a kind of oil diffusion pump single layer cold-trap according to claim 1 adds aqueous cold plate, which is characterized in that the cooling water channel
Coil pipe (3) is helical structure.
5. a kind of oil diffusion pump single layer cold-trap according to claim 1 adds aqueous cold plate, which is characterized in that the cooling water connects
Entrance (5) is provided with several.
6. a kind of oil diffusion pump single layer cold-trap according to claim 1 adds aqueous cold plate, which is characterized in that the cold-trap flange
It (1) is made of carbon steel material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821645549.6U CN209188172U (en) | 2018-10-11 | 2018-10-11 | A kind of oil diffusion pump single layer cold-trap adds aqueous cold plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821645549.6U CN209188172U (en) | 2018-10-11 | 2018-10-11 | A kind of oil diffusion pump single layer cold-trap adds aqueous cold plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209188172U true CN209188172U (en) | 2019-08-02 |
Family
ID=67407695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821645549.6U Active CN209188172U (en) | 2018-10-11 | 2018-10-11 | A kind of oil diffusion pump single layer cold-trap adds aqueous cold plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209188172U (en) |
-
2018
- 2018-10-11 CN CN201821645549.6U patent/CN209188172U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 233500 Jingliu Road, Economic Development Zone, Letu Town, Mengcheng County, Bozhou City, Anhui Province Patentee after: Anhui Fanfeng New Energy Technology Co.,Ltd. Address before: 201507 Room 305, building 2, No. 3877, Tingwei Road, Jinshan Industrial Zone, Jinshan District, Shanghai Patentee before: Shanghai Fanfeng Vacuum Technology Co.,Ltd. |
|
| CP03 | Change of name, title or address |