CN209175463U - Card grinding platform driving structure and full-automatic probe station - Google Patents

Abstract

The utility model relates to semiconductor detection field, aiming at the problem that influencing to detect operating efficiency, it is as follows to provide a kind of card grinding platform driving structure technical solution: the linkage driving part including the STATEMENT OF FEDERALLY SPONSORED, driving STATEMENT OF FEDERALLY SPONSORED sliding that are slidably connected on card grinding platform；A kind of full-automatic probe station, including shell, probe, pedestal, main support is slidably connected on pedestal, secondary support is slidably connected on main support, secondary support slidably connects workbench along the vertical direction, pedestal is equipped with the main actuator of driving main support sliding, main support is equipped with the secondary actuator of driving secondary support sliding, secondary support is equipped with driving worktable lifting so that the vertical actuator that workbench is abutted or separated with probe, card grinding platform is slidably connected on secondary support along the vertical direction, card grinding platform is equipped with card grinding platform driving structure.Without dismantling probe and manual polishing probe, so that the upkeep operation efficiency of probe is higher, so that the duration of detection operation is guaranteed, the effect of detection operation is improved.

Description

Card grinding platform driving structure and full-automatic probe station

Technical field

The utility model relates to semiconductor detection field, more specifically, it relates to a kind of card grinding platform driving structure and complete Automatic prober platform.

Background technique

Full-automatic probe station is mainly used in semicon industry, photovoltaic industry, integrated circuit and the test of encapsulation.Extensively Research and development applied to complicated, high speed device Precise Electric Measurement, it is intended to ensure quality and reliability, and reduce the research and development time and The cost of device fabrication.

When full-automatic probe station detection, it is connect respectively with the pin of semiconductor element to be detected to be powered by probe, And then whether detection semiconductor element circuit is unimpeded, to pick out rejected product.

For probe due to being electrified for a long time, surface is easy to oxidize, polishes after using one end time, to guarantee its survey Accuracy of measurement.

Currently, generalling use disassembly probe and by way of manual grinding to safeguard to probe, but this processing Mode efficiency is lower, seriously affects the efficiency of detection operation, and therefore, there are also improve space.

Utility model content

In view of the deficienciess of the prior art, the first of the utility model is designed to provide a kind of card grinding platform driving knot Structure has the advantages that detection efficiency is high.

To achieve the above object, the utility model provides following technical solution:

A kind of card grinding platform driving structure, including the STATEMENT OF FEDERALLY SPONSORED being slidably connected on the card grinding platform, the STATEMENT OF FEDERALLY SPONSORED and complete Working table movement is followed to link when the workbench connection of automatic prober platform, further includes the linkage driving for driving STATEMENT OF FEDERALLY SPONSORED sliding Part.

Working table movement is followed when connecting by STATEMENT OF FEDERALLY SPONSORED with the workbench of full-automatic probe station, so that complete certainly by driving Working table movement, that is, linkage card grinding platform of dynamic probe station, the probe so that card grinding platform is polished, so that probe is not necessarily to disassembly, so that Safeguard that the efficiency of probe is higher.

In view of the deficienciess of the prior art, the second of the utility model is designed to provide a kind of full-automatic probe station, Have the advantages that detection efficiency is high.

To achieve the above object, the utility model provides following technical solution:

A kind of full-automatic probe station, including shell, the cover top portion are equipped with probe, are equipped with pedestal, institute in the shell It states and slidably connects main support on pedestal in the horizontal direction, slidably connect secondary support, institute on the main support in the horizontal direction The glide direction for stating secondary support is vertical with the glide direction of main support, and the secondary support slidably connects work along the vertical direction Platform, the pedestal are equipped with the main actuator of driving main support sliding, and the main support is equipped with secondary the driving of driving secondary support sliding Moving part, the secondary support is equipped with driving worktable lifting so that the vertical actuator that workbench is abutted or separated with probe, institute It states and slidably connects card grinding platform on secondary support along the vertical direction, further include above-mentioned card grinding platform driving structure.

By adopting the above technical scheme, STATEMENT OF FEDERALLY SPONSORED is driven to slide towards workbench so that STATEMENT OF FEDERALLY SPONSORED and work by linkage driving part Make platform connection, so that card grinding platform will be driven to rise when driving workbench to rise by vertical actuator, is driven by main actuator Main support sliding and secondary support sliding is driven by secondary actuator with adjust card grinding platform it is opposite with probe after, need to drive main branch Card grinding platform and probe relative motion can be realized in frame or secondary support reciprocating motion, passes through since card grinding platform abuts i.e. realization with probe Card grinding platform polishes to probe, and probe upkeep operation can be completed, due to making without dismantling probe and manual polishing probe The upkeep operation efficiency for obtaining probe is higher, so that the duration of detection operation is guaranteed, improves the effect of detection operation Fruit, while no longer needing to prepare motion path of a set of control system to control card grinding platform, cost is controlled, economic benefit is preferable.

Preferably, the workbench is fixedly connected with the lifting member extended towards card grinding platform, and the workbench drops to most When lower, height where the STATEMENT OF FEDERALLY SPONSORED is higher than height where lifting member, and part is located at promotion when the STATEMENT OF FEDERALLY SPONSORED is fully extended Above part.

By adopting the above technical scheme, part is located above lifting member when being stretched out by STATEMENT OF FEDERALLY SPONSORED, is fixedly connected on utilizing Lifting member on workbench is during following workbench to rise by abutting at the top of lifting member with STATEMENT OF FEDERALLY SPONSORED bottom to drive STATEMENT OF FEDERALLY SPONSORED rises, and then the card grinding platform that links rises, since active force of the lifting member to STATEMENT OF FEDERALLY SPONSORED is located at below STATEMENT OF FEDERALLY SPONSORED, so that making Firmly effect is preferable, so that the effect that linkage card grinding platform rises is preferable, stability is high.

Preferably, the STATEMENT OF FEDERALLY SPONSORED sets flexible fixture block, and the lifting member is equipped with the card slot being caught in for fixture block.

By adopting the above technical scheme, being caught in card slot by fixture block is not easily disconnected from lifting member with STATEMENT OF FEDERALLY SPONSORED, so that The process that card grinding platform rises that links is more stable.

Preferably, when the lifting member and STATEMENT OF FEDERALLY SPONSORED are in lowest part, the fixture block bottom level is higher than lifting member Overhead height, the lifting member towards one end of STATEMENT OF FEDERALLY SPONSORED be perpendicular.

By adopting the above technical scheme, so that during normal operation, workbench is due to passing through without dropping to extreme lower position The perpendicular cooperation fixture block of lifting member towards STATEMENT OF FEDERALLY SPONSORED one end limits STATEMENT OF FEDERALLY SPONSORED and slides towards lifting member, and then avoids maloperation Lead to the case where linkage card grinding platform rises when being not necessarily to polish probe.

Preferably, the card slot tilts upward extension towards the direction of STATEMENT OF FEDERALLY SPONSORED close to the side wall edge of STATEMENT OF FEDERALLY SPONSORED.

By adopting the above technical scheme, guide surface is formed by the inclined side wall of card slot, so that after probe is polished, it can be straight Pressure retraction STATEMENT OF FEDERALLY SPONSORED is connect, so that fixture block is slided along guide surface to leave card slot, so that STATEMENT OF FEDERALLY SPONSORED and lifting member are detached from, is made It obtains card grinding platform voluntarily to slide, detection operation can be carried out, shorten the time for being detached from linkage status, improve efficiency.

Preferably, the card grinding platform is equipped with the locating part for the elasticity that limitation STATEMENT OF FEDERALLY SPONSORED is slided towards lifting member, the linkage Part is fixedly connected with touching block, and when the fixture block is connected in card slot, the touching block abuts locating part.

By adopting the above technical scheme, the driving of linkage driving part is avoided by locating part STATEMENT OF FEDERALLY SPONSORED sliding stroke is excessive leads to card Block, which can not be fallen into card slot, even results in the case where STATEMENT OF FEDERALLY SPONSORED shock lifting member leads to damage.

Preferably, the lifting member is horizontal-extending lifting plate, and the STATEMENT OF FEDERALLY SPONSORED is horizontal-extending linkage board, described The surface horizontal extension that lifting plate and linkage board mutually abut.

By adopting the above technical scheme, so that the active force overwhelming majority of lifting plate and linkage board is the effect on vertical direction Power, so that the active force that linkage board is subject to makes full use of lifting member castering action power linkage card grinding platform, together perpendicular to its stress surface When reduce generate other directions active force to produce relative sliding, high stability.

Preferably, the plate face of the lifting plate and linkage board is vertically arranged.

By adopting the above technical scheme, it is vertically arranged by the plate face of lifting plate and extension board, so that lifting plate and prolonging It stretches coiled sheet and is not easy bending deformation along the vertical direction, so that the structure of lifting plate and extension board is more stable, so that linkage The process stability of card grinding platform lifting is higher.

In conclusion the utility model has the following beneficial effects:

1. without dismantling probe and manual polishing probe, so that the upkeep operation efficiency of probe is higher, so that inspection The duration for surveying operation is guaranteed, and improves the effect of detection operation；

2. being caught in card slot by fixture block lifting member is not easily disconnected from STATEMENT OF FEDERALLY SPONSORED, so that linkage card grinding platform rises Process stablize；

3. guide surface is formed by the inclined side wall of card slot, so that can directly force retraction to link after probe is polished Part can carry out detection operation so that card grinding platform voluntarily slides, and shorten the time for being detached from linkage status, improve efficiency.

Detailed description of the invention

Fig. 1 is the overall structure diagram of full-automatic probe station in the utility model；

Fig. 2 is the enlarged diagram in the portion A in Fig. 2；

Fig. 3 is in the utility model for illustrating the schematic diagram of full-automatic probe station internal mechanism；

Fig. 4 is in the utility model for illustrating the schematic diagram of base construction；

Fig. 5 is the enlarged diagram in the portion B in Fig. 4；

Fig. 6 is in the utility model with the schematic diagram of then STATEMENT OF FEDERALLY SPONSORED structure；

Fig. 7 is the enlarged diagram in the portion C in Fig. 6.

In figure: 1, shell；11, cover board；12, mounting hole；13, probe clamping piece；131, grip block；132, screw threads for fastening Part；14, mounting plate；141, probe；2, pedestal；21, main running rail；3, workbench；31, bearing table；32, Working rack；321, it erects Straight sliding block；33, lifting plate；34, fixed section；35, raising section；351, card slot；4, card grinding platform；41, polishing bracket；411, polishing is slided Block；42, sanding block；43, linkage board；44, linkage section；45, connecting section；451, fixture block；46, baffle；461, limited block；47, it touches Collision block；48, reciprocating air cylinder；5, main support；51, main actuator；511, main screw rod；512, main screw rod bushing；513, main motor；52, Master slider；53, secondary sliding rail；6, secondary support；61, secondary actuator；611, paranema bar；612, auxiliary-motor；62, secondary sliding block；63, it polishes Sliding rail；64, upright slide rail.

Specific embodiment

With reference to the accompanying drawings and embodiments, the utility model is described in further detail.

A kind of full-automatic probe station is equipped with probe 141 at the top of shell 1, referring to figure referring to Fig.1 and Fig. 2, including shell 1 3 and Fig. 4 is equipped with pedestal 2 in shell 1, slidably connects main support 5 on pedestal 2 in the horizontal direction, along level on main support 5 Direction slidably connects secondary support 6, slidably connects workbench 3 and card grinding platform 4, card grinding platform 4 on secondary support 6 along the vertical direction Card grinding platform driving structure is slidably connected equipped with card grinding platform 4, card grinding platform driving structure includes stretching out towards workbench 3 to connect work Make the STATEMENT OF FEDERALLY SPONSORED of platform 3 and the linkage driving part of driving STATEMENT OF FEDERALLY SPONSORED sliding.

Referring to Fig.1 and Fig. 2,1 top opening of shell is hinged at the top of shell 1 and logical closes the open-topped cover board of shell 1 11, mounting hole 12 is provided on cover board 11, probe clamping piece 13 is fixedly connected on cover board 11, probe 141 is fixedly connected on installation On plate 14, and being stretched out towards the side of mounting plate 14, mounting plate 14 is clamped by probe clamping piece 13 to be mounted on cover board 11, Probe 141 protrudes into shell 1 from mounting hole 12.

Probe clamping piece 13 includes the grip block 131 being hinged on cover board 11 and the screw threads for fastening through grip block 131 Part 132, threaded fastener 132 are threadedly coupled with cover board 11.

Referring to Fig. 4 and Fig. 6, shell 1 in a rectangular parallelepiped shape, is fixedly connected on pedestal 2 and prolongs along 1 length direction level of shell The main running rail 21 stretched, 5 bottom of main support are fixedly connected with master slider 52, and master slider 52 and main running rail 21 are engaged by clamping along master Sliding rail 21 slides.

Pedestal 2 is equipped with the main actuator 51 that driving main support 5 slides, and main actuator 51 includes being rotatably connected on pedestal 2 On main screw rod 511, the main screw rod bushing 512 being threaded on main screw rod 511 and the main motor being fixedly connected on pedestal 2 513, the shaft of main motor 513 is fixedly connected to drive main screw rod 511 to rotate with main screw rod 511, main screw rod bushing 512 and main support 5 are fixedly connected.

It is fixedly connected on main support 5 along the horizontal-extending secondary sliding rail 53 of 1 width direction of shell, 6 bottom of secondary support is fixed It is connected with secondary sliding block 62, secondary sliding block 62 is engaged by clamping with secondary sliding rail 53 to slide along secondary sliding rail 53.

Main support 5 is equipped with the secondary actuator 61 that driving secondary support 6 slides, and secondary actuator 61 includes being rotationally connected with main branch Paranema bar 611 on frame 5, the paranema rod set (not shown) being threadedly coupled with paranema bar 611 and it is fixedly connected on main branch Auxiliary-motor 612 on frame 5, the shaft of auxiliary-motor 612 are fixedly connected to drive paranema bar 611 to rotate with paranema bar 611, paranema bar Set is fixedly connected with secondary support 6.

Referring to Fig. 5 and Fig. 7, the upright slide rail 64 extended along the vertical direction, workbench 3 are fixedly connected on secondary support 6 Including Working rack 32, it is fixedly connected with bearing table 31 at the top of Working rack 32, is connected on upright slide rail 64 along vertical chute The upright slide block 321 of sliding, upright slide block 321 are fixedly connected with Working rack 32.

Secondary support 6 is equipped with the vertical actuator that driving Working rack 32 is gone up and down, and vertical actuator is to be fixedly connected on pair The piston rod of jacking cylinder (not shown) on bracket 6, jacking cylinder is fixedly connected with Working rack 32.

The polishing sliding rail 63 extended along the vertical direction is fixedly connected on secondary support 6, card grinding platform 4 includes and polishing sliding rail 63 The polishing sliding block 411 being slidably connected is fixedly connected with polishing bracket 41 on sliding block 411 of polishing, fixed at the top of bracket 41 of polishing to connect It is connected to sanding block 42,42 upper surface of sanding block is horizontally disposed, and card grinding platform 4 is located at the side of workbench 3.

STATEMENT OF FEDERALLY SPONSORED is linkage board 43, and the linkage driving part that driving linkage board 43 slides is fixedly connected on bracket 41 of polishing, Linkage driving part is horizontally disposed reciprocating air cylinder 48, and the piston rod of reciprocating air cylinder 48 is stretched out towards workbench 3, and linkage board 43 wraps It includes the linkage section 44 being fixedly connected with the piston rod extension end of reciprocating air cylinder 48 and is located at connecting plate far from reciprocating air cylinder 48 1 The connecting section 45 at end, the width of connecting section 45 are less than the width of linkage section 44, and the plate face of linkage board 43 is vertically arranged, linkage board 43 Length direction be horizontal direction, linkage board 43 and reciprocating air cylinder 48 stretching direction are parallel.

45 bottom surface of connecting section is horizontally disposed, and 45 bottom of connecting section sets flexible fixture block far from the end of linkage section 44 451, fixture block 451 is made of rubber, and fixture block 451 extends straight down.

Lifting member is fixedly connected on Working rack 32, lifting member is horizontal extension and is fixedly connected on Working rack 32 Lifting plate 33, the plate face of lifting plate 33 is vertically arranged, and lifting plate 33 includes the fixed section 34 being fixedly connected with Working rack 32 And the raising section 35 extended towards STATEMENT OF FEDERALLY SPONSORED, 35 upper surface of raising section is horizontally disposed, and 35 upper surface of raising section recess has for card The card slot 351 that block 451 is caught in.

Card slot 351 is set along the direction extension perpendicular to lifting plate 33,351 both ends open of card slot, the sidewall slope of card slot 351 It sets, card slot 351 tilts upward extension towards card grinding platform 4 close to the side wall of card grinding platform 4.

Raising section 35 is vertical plane towards the end of card grinding platform 4, and the end of connecting section 45 towards workbench 3 is vertical Plane.

Workbench 3 and card grinding platform 4 are when lowest part, and the height at 35 top of raising section is lower than 45 bottom of connecting section Highly, connecting section 45 is located at 35 top of raising section and after reciprocating air cylinder 48 stretches out.

Baffle 46 is extended with along the horizontal direction for stretching out direction perpendicular to reciprocating air cylinder 48 on polishing bracket 41,46, baffle In reciprocating air cylinder 48 towards one end of lifting member, it is fixedly connected with flexible locating part on baffle 46, locating part is limited block 461, locating part extends towards reciprocating air cylinder 48 in the horizontal direction.

Touching block 47 is fixedly connected on linkage board 43, touching block 47 and limited block 461 are located at same level height, when past When multiple cylinder 48 stretches out so that fixture block 451 is located at 351 top of card slot, touching block 47 is abutted with limited block 461.

The operating condition and principle of the present embodiment are as follows:

When work, semiconductor element to be measured is placed on bearing table 31, starts main actuator 51 and drives main support 5 sliding It is dynamic to drive secondary actuator 61 that secondary support 6 is driven to slide, semiconductor element and thimble face along the vertical direction are adjusted, by vertical Actuator jacking working platform 3 is to drive workbench 3 to rise, so that semiconductor element pin and probe on bearing table 31 141 contacts, probe 141, which is powered, to be detected.

By placing multiple semiconductor elements on bearing table 31, held by sliding main support 5 and secondary support 6 with adjusting The relative position of object platform 31 and probe 141, so adjust bearing table 31 on multiple semiconductor elements successively with 141 face of probe To be detected, detection operation is convenient and efficient, and efficiency is higher.

After 141 surface oxidation of probe, decline workbench 3 to lowest part starts reciprocating air cylinder 48 to drive linkage board 43 It stretches out, is then lifted out workbench 3, so that the raising section 35 of lifting plate 33 is abutted with the connecting section 45 of linkage board 43, and then passes through Linkage board 43 and lifting plate 33, which cooperate, promotes card grinding platform 4 to link, so that card grinding platform 4 follows workbench 3 to be promoted together, passes through cunning Dynamic main support 5 and secondary support 6 adjust the center that probe 141 is located at sanding block 42, are then lifted out workbench 3 to polishing 42 upper surface of block is abutted with probe 141, is then slided main support 5 or secondary support 6, that is, be may make probe 141 and sanding block 42 Relative motion is polished the oxide layer on 141 surface of probe completely with rubbing, to complete 141 upkeep operation of probe, so that visiting Needle 141 is without disassembly, and without manually polishing probe 141, easy to operate, upkeep operation efficiency is higher, so that probe 141 maintenance times substantially shorten, and then improve the efficiency of probe 141 detection operations.

It is lead screw transmission mechanism by main actuator 51 and secondary actuator 61, so that driving main support 5 and secondary branch When frame 6 is slided to adjust the relative position of workbench 3 or sanding block 42 and probe 141, precision is higher.

It is stuck in card slot 351 by fixture block 451, so that linkage board 43 and lifting plate 33 are not during linking promotion It is easily detached from, improves the stability that linkage is promoted.

It is arranged by 351 sidewall slope of card slot, so that after linkage card grinding platform 4 is promoted and polished probe 141, it can be by slightly After micro- decline workbench 3 is so that sanding block 42 leaves probe 141, bounced back by reciprocating air cylinder 48 so that fixture block 451 is along card 351 side wall of slot is skidded off with the connection of compulsory commutation linkage board 43 and lifting plate 33, so that card grinding platform 4 is fallen naturally with multiple Position, can adjust workbench 3 position after, slightly promotion workbench 3 i.e. may make probe 141 to contact with semiconductor element with Detection, so that after upkeep operation, it is not necessary that, in retraction reciprocating air cylinder 48, the time in stroke will be reduced after workbench 3 completely decline Waste, further increases efficiency.

The range stretched out by touching block 47 and the cooperation limitation reciprocating air cylinder 48 of limited block 461, avoids reciprocating air cylinder 48 stretching strokes are excessive to lead to the case where linkage board 43 is with the shock of lifting plate 33, improves stability.

By linkage board 43 towards the end of workbench 3 be perpendicular and lifting plate 33 towards the end of card grinding platform 4 position Perpendicular, so that when normal operation, since workbench 3 is without dropping to lowest part, so that the raising section 35 of lifting plate 33 is pushed up Portion's height is higher than 45 bottom level of connecting section of linkage board 43, so that when maloperation is to start reciprocating air cylinder 48, connecting section 45 can not slide into 35 top of raising section, so that card grinding platform 4 and workbench 3 can not be made to link, only existed when maloperation After workbench 3 drops to lowest part, combined operation can be carried out, improves stabilization of equipment performance.

This specific embodiment is only the explanation to the utility model, is not limitations of the present invention, ability Field technique personnel can according to need the modification that not creative contribution is made to the present embodiment after reading this specification, but As long as all by the protection of Patent Law in the scope of the claims of the utility model.

Claims (9)

1. a kind of card grinding platform driving structure, it is characterized in that: include the STATEMENT OF FEDERALLY SPONSORED being slidably connected on the card grinding platform (4), it is described STATEMENT OF FEDERALLY SPONSORED follows workbench (3) movement to link when connecting with the workbench (3) of full-automatic probe station, further include driving STATEMENT OF FEDERALLY SPONSORED The linkage driving part of sliding.

2. a kind of full-automatic probe station is equipped with probe (141) at the top of the shell (1) it is characterized in that: including shell (1), described Pedestal (2) are equipped in shell (1), are slidably connected in the horizontal direction main support (5) on the pedestal (2), the main support (5) On slidably connect in the horizontal direction secondary support (6), the glide direction of the glide direction of the secondary support (6) and main support (5) Vertically, the secondary support (6) slidably connects workbench (3) along the vertical direction, and the pedestal (2) is equipped with driving main support (5) The main actuator (51) of sliding, the main support (5) are equipped with the secondary actuator (61) of driving secondary support (6) sliding, the pair Bracket (6) is equipped with driving workbench (3) and goes up and down so as to workbench (3) and probe (141) abutting or the vertical actuator that separates, Card grinding platform (4) are slidably connected along the vertical direction on the secondary support (6), further include that card grinding platform as described in claim 1 drives Dynamic structure.

3. full-automatic probe station according to claim 2, it is characterized in that: the workbench (3) is fixedly connected with towards mill The lifting member that needle platform (4) extends, when the workbench (3) drops to lowest part, height is higher than lifting member where the STATEMENT OF FEDERALLY SPONSORED Part is located above lifting member when place height, the STATEMENT OF FEDERALLY SPONSORED are fully extended.

4. full-automatic probe station according to claim 3, it is characterized in that: the STATEMENT OF FEDERALLY SPONSORED sets flexible fixture block (451), The lifting member is equipped with the card slot (351) being caught in for fixture block (451).

5. full-automatic probe station according to claim 4, it is characterized in that: the lifting member and STATEMENT OF FEDERALLY SPONSORED be in it is minimum When place, fixture block (451) bottom level is higher than lifting member overhead height, and one end of the lifting member towards STATEMENT OF FEDERALLY SPONSORED is vertical Plane.

6. full-automatic probe station according to claim 5, it is characterized in that: side wall of the card slot (351) close to STATEMENT OF FEDERALLY SPONSORED Edge tilts upward extension towards the direction of STATEMENT OF FEDERALLY SPONSORED.

7. full-automatic probe station according to claim 6, it is characterized in that: the card grinding platform (4) is equipped with limitation STATEMENT OF FEDERALLY SPONSORED court The locating part for the elasticity slided to lifting member, the STATEMENT OF FEDERALLY SPONSORED are fixedly connected with touching block (47), and the fixture block (451) is connected to When card slot (351) is interior, the touching block (47) abuts locating part.

8. according to any full-automatic probe station of claim 3-7, it is characterized in that: the lifting member is horizontal-extending mentions Lift slab (33), the STATEMENT OF FEDERALLY SPONSORED are horizontal-extending linkage board (43), and the lifting plate (33) and linkage board (43) mutually support The surface horizontal extension connect.

9. full-automatic probe station according to claim 8, it is characterized in that: the lifting plate (33) and linkage board (43) Plate face is vertically arranged.