CN209147541U - The adjustable infrared detector module of temperature screens composite refrigerating device - Google Patents

The adjustable infrared detector module of temperature screens composite refrigerating device Download PDF

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Publication number
CN209147541U
CN209147541U CN201821638622.7U CN201821638622U CN209147541U CN 209147541 U CN209147541 U CN 209147541U CN 201821638622 U CN201821638622 U CN 201821638622U CN 209147541 U CN209147541 U CN 209147541U
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China
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cold
liquid nitrogen
infrared detector
platform
temperature
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CN201821638622.7U
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Chinese (zh)
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俞君
王小坤
孙闻
沈一璋
王煜宇
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Shanghai Institute of Technical Physics of CAS
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Shanghai Institute of Technical Physics of CAS
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Abstract

This patent discloses a kind of adjustable infrared detector modules of temperature to screen composite refrigerating device.It includes hollow liquid nitrogen cold platform, the cold chamber of cold finger liquid nitrogen, liquid nitrogen side cover Dewar, crank connecting link refrigeration machine, alternating temperature cold platform, jewel heat conductive bar, elasticity insulation circle composition.This patent passes through to two cold platform physical thermal isolation designs, freezed respectively to it by liquid nitrogen and refrigeration machine, allow liquid nitrogen that cold platform to be installed and provides low temperature background and vacuum environment for detector and detector, to reduce the heat load of crank connecting link refrigeration machine, so that extensive infrared detector screening test can get required operating temperature.This patent structure is simple and convenient to operate, and the extensive infrared detector for realizing 50K-150K warm area encapsulates preceding performance screening test, and the encapsulation yield rate for being engineered component for infrared detector provides guarantee.

Description

The adjustable infrared detector module of temperature screens composite refrigerating device
Technical field
This patent is related to infrared detector module screening test technology, in particular to a kind of adjustable infrared detector of temperature The composite refrigerating device of module screening, can satisfy the screening test of 50K-150K warm area infrared detector module.
Background technique
Infrared detector technology of preparing is in space flight, aviation infrared regime important in inhibiting.As infrared detector is to very The raising of long wave extension and detectivity, infrared detector must could work in profound hypothermia.In order to improve infrared detector Du The yield rate of watt component.Infrared detector module must carry out spectrum test and electric performance test screening before entering component package.
Consulting Chinese patent CN201210019382.3 " a kind of low-energy-consumption temperature-control Dewar flask ", it is as infrared detector Dewar is shone in energy screening test side.Its low temperature is that liquid nitrogen refrigerating obtains, and it is cold that one piece of cryogenic heat transfer is inserted between huyashi-chuuka (cold chinese-style noodles) and inner cylinder Piece installs heating sheet in the bottom surface of cold plate.Alternating temperature control is carried out to Dewar with electric current output property PID high accuracy temperature control instrument. Its temperature range applied is 100K-170K.Consult Chinese patent CN200610163824.6 " focal plane detector imaging test With liquid nitrogen metal Dewar ", feature is focal plane imaging test with directly according to Dewar, cold charge section is in hierarchic structure, in ladder Detector and cold screen are installed respectively on face.Its advantage is that detector, which can obtain, is more nearly liquid nitrogen 77K temperature, cold screen leans on liquid nitrogen Refrigeration can also be obtained close to liquid nitrogen 77K temperature, and such detector can obtain lower background radiation.Two above patent Advantage is using cheap liquid nitrogen as cold source, and when infrared detector is tested, vacuum degree is low by active carbon or molecular sieve in Dewar Temperature absorption is to maintain.But its there are some deficiency be mounted on operating temperature of its interior detector can only be more than liquid nitrogen temperature. As mercury cadmium telluride, Quantum Well or two class superlattices are in the demand of 12.5 microns of use above of long wave, detector needs work in 65K (or even 55K) below.Two patents of apparent front are unable to satisfy.It is " a kind of detachable to look into Chinese patent CN201610775886.6 Integrated form temperature variation testing Dewar and its component ".Its innovative point is the infrared detector cooling assembly for applying standard engineering ADDC encapsulation technology carries out partial modification, specific as follows: 1) to be changed in original laser welding of ceramic lead ring and window cap Vacuum O-shaped rubber ring sealing structure living;2) active carbon is installed in the cold platform lower surface of standard ADDC cooling assembly;3) standard The cold welding of ADDC cooling assembly exhaust pipe is changed to exhaust structure;Its advantage is that the alternating temperature survey of the humidity province 55K-130K can be achieved Examination demand.But its Shortcomings: 1) the outer lead solid conduction heat transfer etc. of the Joule heat of detector, the radiant heat of cold screen, Dewar Heat load is provided by crank connecting link refrigeration machine.As detector popularization and High frequency readout circuit develop, detector Joule heat can be increasing.Crank connecting link refrigeration machine provides cooling capacity and is likely difficult to match, and detector work possibly can not be allowed in 50K Left and right, even if reaching temperature, the operating current of refrigeration machine is relatively bigger than normal, also can be big to the test interference of detector performance.Such as Joule heat about 200mW of 640 × 512 scale centers away from 30 microns of CTIA reading circuit detectors, the leakage heat of component Dewar is about 300mW/60K, and the cooling capacity about 500mW or less that common crank connecting link refrigeration machine can be provided in 60K following temperature;2) detector, The cold platform of cold screen, ceramic substrate and refrigeration machine cylinder be all it is cementing by low temperature glue, if device is not up to standard, chip, Cold screen, ceramic substrate and cylinder cold platform cannot utilize again;
As ultra-large (such as 640 × 512,1024 × 1024) mercury cadmium telluride, Quantum Well or two class superlattices are in long wave 12.5 microns or more develop, there is an urgent need to develop it is a kind of it is cheap, detector is lossless removable, temperature is screened in 50K-80K performance The refrigerating plant of reuse.
Summary of the invention
The purpose of this patent is to provide a kind of composite refrigerating device of adjustable infrared detector module screening of temperature, realizes The lossless quick detachable installation of the detector of performance screening test before the extensive infrared detector encapsulation of 50K-150K warm area, Low interference and refrigerating plant are reused, and the encapsulation yield rate for being engineered component for infrared detector provides guarantee.
A kind of composite refrigerating device structure of the adjustable infrared detector module screening of temperature of this patent is based on liquid nitrogen The technical foundation of side cover Dewar, using the physical isolation installation of two cold platforms on original cold platform, respectively by liquid nitrogen and refrigeration machine Carry out two different temperatures that refrigeration realizes two cold platforms.The heat load cooling capacity for testing cold screen, lead of Dewar etc. is mentioned by liquid nitrogen For Joule heat when detector works is provided by refrigeration machine.Detector can obtain the work lower than 77K in this way.Such as Fig. 1 institute Show, it includes: that hollow liquid nitrogen cold platform 1, the cold chamber 2 of cold finger liquid nitrogen, liquid nitrogen side cover Dewar 3, crank connecting link refrigeration machine 4, alternating temperature are cold Platform 5, jewel heat conductive bar 6, elasticity insulation circle 7.Hollow liquid nitrogen cold platform 1 pads indium sheet by its external screw thread 101 and is screwed onto cold finger In the cold chamber 2 of liquid nitrogen.The cold chamber 2 of cold finger liquid nitrogen is welded on the Dewar inner cylinder of liquid nitrogen side cover Dewar 3 by vacuum brazing.Crank connecting link Refrigeration machine 4 is welded on the Dewar outer cylinder of liquid nitrogen side cover Dewar 3 by Laser Welding.Jewel heat conductive bar 6 is cementing in crank connecting link system On the cold finger 401 of cold 4, alternating temperature cold platform 5 is cementing on jewel heat conductive bar 6.In hollow liquid nitrogen cold platform 1 and alternating temperature cold platform Elasticity insulation circle 7 is filled between 5.
The hollow liquid nitrogen cold platform 1 selects aluminum alloy materials, and diameter small end has an external screw thread 101, and centre has one to lead to Hole 102 is placed on outside jewel heat conductive bar 6, and internal diameter is 2mm~3mm bigger than the diameter of jewel heat conductive bar 6, periphery circumference uniform distribution 88 screw holes 103, upper surface circumference uniform distribution screw holes 104, cylinder side have one oblique through through-hole 105.
Cold 2 material of chamber of the cold finger liquid nitrogen is the high red copper of thermal conductivity, and shape is cylindrical shape, and one end is an internal screw thread 201, the outside that centre has a through-hole 202 to be placed on 4 cold finger 401 of crank connecting link refrigeration machine.
The liquid nitrogen side is that Dewar is shone in performances of IR screening test side according to Dewar 3, and low temperature is liquid nitrogen system Cold acquisition is inserted into one piece cryogenic heat transfer cold between huyashi-chuuka (cold chinese-style noodles) and inner cylinder, installs heating sheet in the bottom surface of cold plate.It is exported with electric current Property PID high accuracy temperature control instrument to Dewar carry out alternating temperature control.Its temperature range applied is 100K-170K.
5 material of alternating temperature cold platform is kovar, and shape is that thin plate is cylindrical, has a boss 501 among side, in Diameter is 0.1mm~0.2mm bigger than 6 diameter of jewel heat conductive bar.501 inside of boss is intermediate to have a circular hole 502 to be through to cylinder side wall.
The sapphire that the jewel heat conductive bar 6 selects thermal conductivity high is material, and shape is cylinder.
The elasticity insulation circle 7 selects thermally conductive poor polytetrafluoroethylene material, and shape is eight pawl truncated cone-shapeds, such as Fig. 2 It is shown.
Steps are as follows for the realization of this patent:
1) the liquid nitrogen side described in Chinese patent CN201210019382.3 " a kind of low-energy-consumption temperature-control Dewar flask " is according on Dewar 3 The cold chamber 2 of cold finger liquid nitrogen is integral by Welding according to the Dewar inner cylinder of Dewar 3 with liquid nitrogen side.The cold chamber 2 of cold finger liquid nitrogen and song Handle connecting rod refrigeration machine 4 is coaxial, and the cold finger 401 of crank connecting link refrigeration machine 4 is inserted into the through-hole 202 of the cold chamber 2 of cold finger liquid nitrogen, and crank connects Dewar outer cylinder of the bar refrigeration machine 4 with liquid nitrogen side according to Dewar 3 is welded together by Laser Welding.
2) platinum resistance pin is drawn with conducting wire and platinum resistance is cemented in low temperature glue the circular hole 502 of alternating temperature cold platform 5 It is interior, conducting wire is pierced by from side wall through hole.Successively jewel heat conductive bar 6 and alternating temperature cold platform 5 are cemented in low temperature glue (DW3) Cold finger 401 on, realize the cold quantity transmission of crank connecting link refrigeration machine 4.
3) external screw thread 101 of hollow liquid nitrogen cold platform 1 is padded to the indium sheet of 0.1mm thickness and the internal screw thread of the cold chamber 2 of cold finger liquid nitrogen 201 are spirally connected, and liguefied nitrogen is transmitted on hollow liquid nitrogen cold platform 1 by solid conduction.
4) elasticity insulation circle 7 is filled between hollow liquid nitrogen cold platform 1 and alternating temperature cold platform 5, guarantees crank connecting link refrigeration Machine 4 and will be pierced by by the circular hole 502 for being pierced by alternating temperature cold platform 5 to the cold quantity transmission part axial restraint of alternating temperature cold platform 5 Conducting wire is pierced by through-hole 501 from the oblique of hollow liquid nitrogen cold platform 1.
5) electrode fixed seat is bolted on the reserved screw hole 103 of hollow liquid nitrogen cold platform 1.
The composite refrigerating device assembling assembly of the adjustable infrared detector module screening of this patent temperature is completed above;
The working method of this patent is as follows
1) the liquid nitrogen side is unscrewed according to the rotation briquetting of Dewar 3, is allowed the window frame with window to separate with test Dewar ontology, is revealed The hollow cold platform 1 of liquid nitrogen out, need to infrared detector module to be tested with vacuum grease be mounted on alternating temperature cold platform 5 it Afterwards, the lead of detector and electrode fixed seat are realized by Electricity Federation by ring-shaped P CB plate.
2) the reserved screw hole 104 of the indium sheet of cold screen bottom pad 0.1mm and hollow liquid nitrogen cold platform 1 is spirally connected fixation.It revolves again Turn liquid nitrogen side according to the rotation briquetting of Dewar 3, the window frame with window and test Dewar ontology is allowed to seal by O-shaped rubber ring.
3) patent device is exhausted using dedicated vacuum valve, is closed after vacuum degree is better than 5E-4Pa dedicated Vacuum valve, and liquid nitrogen side is allowed to be isolated according to 3 inside of Dewar with external vacuum.
4) liquid nitrogen is injected in the Dewar inner cylinder toward liquid nitrogen side according to Dewar 3, liquid nitrogen cooling capacity passes through the cold chamber 2 of cold finger liquid nitrogen, hollow Liquid nitrogen cold platform 1 is transmitted to cold screen again, hollow liquid nitrogen cold platform 1 and external radiant heat, detector signal line and the vacuum of cold screen The solid conduction of the lead of electricity communication outside Dewar is leaked these hot cooling capacity and is provided by liquid nitrogen.Vacuum in test Dewar passes through liquid nitrogen Principle of the side according to active carbon or molecular sieve adsorbed gas in Dewar 3, it is ensured that maintain certain vacuum degree in test Dewar, come real Existing vacuum insulation.
5) it is powered with power supply to crank connecting link refrigeration machine 4, crank connecting link refrigeration machine 4 is allowed to freeze, cooling capacity passes through crank connecting link 4 cold finger 401 of refrigeration machine flows through jewel heat conductive bar 6 and passes on alternating temperature cold platform 5, thus by be measured infrared on alternating temperature cold platform 5 Detector is as cold as specified temperature.Due to crank connecting link refrigeration machine 4 cold finger 401, jewel heat conductive bar 6 and alternating temperature cold platform 5 all It is in the background environment of liquid nitrogen temperature, the radiation heat transfer very little with external environment, since the temperature difference of two cold platforms is small, visits Lead leakage heat of the survey device between two cold platforms is also small, and the cooling capacity of the offer of refrigeration machine is mainly to provide when detector works Joule heat.By thermometric feedback on the detector, detector temperature work can be allowed in 50K-150K.
This patent, which has the following advantages, is:
1) cold platform divides the warm area to design:
1. 80K cold platform, the radiation of cold platform, the lead leakage heat for testing Dewar etc. have liquid nitrogen offer, and cold screen can obtain Lower temperature is obtained, the background radiation of detector is reduced.Since liquid nitrogen has unlimited High cooling power, so that the outer lead number of detector Amount and the scalability of cold screen are big.
2. 50K-150K cold platform liquid nitrogen environment around under, the heat load of cold platform mainly include detector Joule heat and Detector outer lead is in 50K-80K temperature, solid heat transfer two parts of maximum temperature difference 30K;When being higher than 80K, refrigeration machine Load is the difference of detector Joule heat and detector outer lead in the leakage heat of two cold bench temperature differences.Cause cold provided by refrigeration machine Amount is smaller, and refrigeration type selecting is convenient and cheap.
2) lossless quick detachable installation;
3) it reuses, it is efficient and convenient
Detailed description of the invention
Fig. 1 is the schematic diagram of the composite refrigerating device of the adjustable infrared detector module screening of temperature;
In figure:
1 --- hollow liquid nitrogen cold platform;
101 --- external screw thread;
102 --- through-hole;
103 --- screw hole one;
104 --- screw hole two;
105 --- run through through-hole;
2 --- the cold chamber of cold finger liquid nitrogen;
201 --- internal screw thread;
202 --- through-hole;
3 --- Dewar is shone in liquid nitrogen side;
4 --- crank connecting link refrigeration machine;
401 --- cold finger;
5 --- alternating temperature cold platform;
501 --- boss;
502 --- run through circular hole;
6 --- jewel heat conductive bar;
7 --- elasticity insulation circle;
Fig. 2 is the schematic diagram of elasticity insulation circle 7.
Specific embodiment
Specific implementation of the patent mode is described in further detail in embodiment with reference to the accompanying drawing:
The present embodiment is the assembly method that certain project very long wave infrared detector module screens composite refrigerating device, such as Fig. 1 Shown, its main implementation method is as follows:
A) cold 2 material of chamber of cold finger liquid nitrogen is red copper, and outer diameter is φ 28mm, and surface is processed by shot blasting, the height of the part Thermal conductivity plays a part of transmitting liquid nitrogen cooling capacity.The cold chamber 2 of cold finger liquid nitrogen is fitted into liquid nitrogen side to reserve according to the Dewar inner cylinder of Dewar 3 It in hole location, is connected using vacuum brazing mode, the leak detection leak rate after welding reaches 7.0 × 10-11Torr/l.s, magnitude satisfaction make With requiring.
B) crank connecting link refrigeration machine 4 selects the SCI10R collection of the Research Institute one by one of China North Industries Group Corporation second It is pre- according to the Dewar outer cylinder of Dewar 3 to be fitted into liquid nitrogen side by accepted way of doing sth sterlin refrigerator for the cold finger 401 of the crank connecting link refrigeration machine 4 It boxes out in position, and coaxial with the cold chamber 2 of cold finger liquid nitrogen, is connected using laser welding mode.
C) jewel heat conductive bar 6 selects sapphire material, and diameter is φ 15mm, and surface is processed by shot blasting, uses low temperature glue (DW3) one of end face of jewel heat conductive bar 6 is cementing on the cold finger end face of crank connecting link refrigeration machine 4, the height of the part Thermal conductivity plays a part of transmitting refrigeration machine cooling capacity.
D) hollow liquid nitrogen cold platform 1 selects aluminum alloy materials, and external screw thread 101 pads 0.1mm indium sheet and is screwed onto cold finger liquid nitrogen In the internal screw thread 201 of cold chamber 2, indium sheet has good thermal conductivity and ductility, is more effectively transmitted to liquid nitrogen cooling capacity hollow Liquid nitrogen cold platform 1.
E) with low temperature glue (DW3) that thermometric platinum resistance is cementing in the circular hole 502 of alternating temperature cold platform 5, and with φ 0.1mm's Copper-manganese lead draws the pin of platinum resistance, and lead is successively cold from the side wall through hole 502 of alternating temperature cold platform 5, hollow liquid nitrogen Platform 1 is pierced by through-hole 105, and platinum resistance selects thermometric PT resistance, uses low temperature glue (DW3) by alternating temperature again after glue parches The lower end surface of cold platform 5 is cementing on the end face of jewel heat conductive bar 6.
F) electrode fixed seat is bolted in the reserved screw hole 103 of hollow liquid nitrogen cold platform 1.
G) it after being mounted on infrared detector module on alternating temperature cold platform 5 with vacuum grease, will be visited by ring-shaped P CB plate It surveys electrode fixed seat of the lead of device with liquid nitrogen side according to Dewar 3 and realizes Electricity Federation.
H) cold screen selects 304L stainless steel material, and outer surface polishing reduces radiation leakage heat, and inner surface, which blacks, reduces background spoke It penetrates, the indium sheet of cold screen bottom pad 0.1mm and the reserved screw hole 104 of hollow liquid nitrogen cold platform 1 are spirally connected fixation.The liquid nitrogen is rotated again Side allows the window frame with window and test Dewar ontology to seal by O-shaped rubber ring according to the rotation briquetting of Dewar 3.
The assembly of each components of composite refrigerating device of the adjustable infrared detector module screening of temperature is completed above.

Claims (6)

1. a kind of adjustable infrared detector module of temperature screens composite refrigerating device, including hollow liquid nitrogen cold platform (1), cold finger The cold chamber of liquid nitrogen (2), liquid nitrogen side cover Dewar (3), crank connecting link refrigeration machine (4), alternating temperature cold platform (5), jewel heat conductive bar (6), bullet Property insulation circle (7), it is characterised in that:
The hollow liquid nitrogen cold platform (1) pads indium sheet by external screw thread (101) thereon and is screwed onto the cold chamber of cold finger liquid nitrogen (2) Interior, the cold chamber of cold finger liquid nitrogen (2) is welded on the inner cylinder of liquid nitrogen side cover Dewar (3) by vacuum brazing, crank connecting link refrigeration machine (4) Cold finger (401) in the cold chamber of cold finger liquid nitrogen (2), crank connecting link refrigeration machine (4) is welded on liquid nitrogen side cover Dewar by Laser Welding (3) on outer cylinder, for jewel heat conductive bar (6) in hollow liquid nitrogen cold platform (1), jewel heat conductive bar (6) is cementing in crank connecting link system On the cold finger (401) of cold (4), alternating temperature cold platform (5) is cementing on jewel heat conductive bar (6), in hollow liquid nitrogen cold platform (1) and Elasticity insulation circle (7) is filled between alternating temperature cold platform (5).
2. the adjustable infrared detector module of a kind of temperature according to claim 1 screens composite refrigerating device, feature Be: the hollow liquid nitrogen cold platform (1) selects aluminum alloy materials, and diameter small end has an external screw thread (101), and centre has one to incite somebody to action The through-hole (102) that jewel heat conductive bar (6) is placed in one, periphery circumference uniform distribution 8 screw holes (103), upper surface circumference uniform distributions 8 Screw hole (104), cylinder side have one oblique through through-hole (105).
3. the adjustable infrared detector module of a kind of temperature according to claim 1 screens composite refrigerating device, feature Be: cold finger liquid nitrogen cold chamber (2) material is the high red copper of thermal conductivity, and shape is cylindrical shape, and there is internal screw thread in one end (201), there is a through-hole (202) that crank connecting link refrigeration machine (4) cold finger (401) is placed in one in centre.
4. the adjustable infrared detector module of a kind of temperature according to claim 1 screens composite refrigerating device, feature Be: alternating temperature cold platform (5) material is kovar, and shape is that thin plate is cylindrical, has a boss (501) among side, There is a circular hole (502) to be through to cylinder side wall among inside.
5. the adjustable infrared detector module of a kind of temperature according to claim 1 screens composite refrigerating device, feature Be: the sapphire material that the jewel heat conductive bar (6) selects thermal conductivity high, shape are cylinder.
6. the adjustable infrared detector module of a kind of temperature according to claim 1 screens composite refrigerating device, feature Be: the elasticity insulation circle (7) selects thermally conductive poor polytetrafluoroethylene material, and shape is eight pawl truncated cone-shapeds.
CN201821638622.7U 2018-10-10 2018-10-10 The adjustable infrared detector module of temperature screens composite refrigerating device Withdrawn - After Issue CN209147541U (en)

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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109297225A (en) * 2018-10-10 2019-02-01 中国科学院上海技术物理研究所 A kind of adjustable infrared detector module screening composite refrigerating device of temperature
CN111595463A (en) * 2020-05-22 2020-08-28 中国科学院上海技术物理研究所 Split type Dewar cold platform with low contact thermal resistance and coupling stress isolation
CN113985471A (en) * 2021-10-28 2022-01-28 清华大学 High-purity germanium detector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109297225A (en) * 2018-10-10 2019-02-01 中国科学院上海技术物理研究所 A kind of adjustable infrared detector module screening composite refrigerating device of temperature
CN109297225B (en) * 2018-10-10 2023-07-04 中国科学院上海技术物理研究所 Temperature-adjustable infrared detector module screening composite refrigerating device
CN111595463A (en) * 2020-05-22 2020-08-28 中国科学院上海技术物理研究所 Split type Dewar cold platform with low contact thermal resistance and coupling stress isolation
CN111595463B (en) * 2020-05-22 2022-11-08 中国科学院上海技术物理研究所 Split type Dewar cold platform with low contact thermal resistance and coupling stress isolation
CN113985471A (en) * 2021-10-28 2022-01-28 清华大学 High-purity germanium detector

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