CN209144247U - Vacuum electron beam continuous coating apparatus - Google Patents
Vacuum electron beam continuous coating apparatus Download PDFInfo
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- CN209144247U CN209144247U CN201822038643.1U CN201822038643U CN209144247U CN 209144247 U CN209144247 U CN 209144247U CN 201822038643 U CN201822038643 U CN 201822038643U CN 209144247 U CN209144247 U CN 209144247U
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- electron beam
- vacuum
- chamber
- beam furnace
- vacuum chamber
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Abstract
The utility model discloses a kind of vacuum electron beam continuous coating apparatus, including electron beam furnace, uncoiler and winder, the input end side of electron beam furnace is arranged in the uncoiler, and the outlet end side of electron beam furnace is arranged in winder；The electron beam furnace is made of at least one working chamber, and at least one is equipped in each working chamber electron gun.The utility model is cooperated by uncoiler, winder and electron beam furnace, while electron beam furnace carries out plated film to metal coil tape, uncoiler will be sent into electron beam furnace after metal coil tape uncoiling, the metal coil tape that winder completes plated film is wound, realize the continuous coating to metal coil tape, the efficiency of plated film is significantly greatly increased, the utility model structure is simple, production cost is low, can be widely used in flow line production.
Description
Technical field
The utility model relates to filming equipment technical field, especially a kind of vacuum electron beam continuous coating apparatus.
Background technique
Vacuum coating is metal or metal oxide to be become gaseous molecule or atom it is made to be deposited on plating piece surface
Form a technology of coating.Vacuum coating technology compared with electroplating technology pollution it is smaller, energy consumption is lower, required cost compared with
Low, decorative effect and metal sense are all stronger, are a very promising technologies.Vacuum coating specifically includes many kinds
Class: vacuum ionic evaporation, magnetron sputtering, MBE molecular beam epitaxy, many kinds such as PLD pulsed laser deposition.
Filming equipment used by vacuum coating is since the device is complicated at present, and the cost of equipment is higher, plating membrane efficiency is lower,
Production cost and the production time of coating process are undoubtedly increased, and existing filming equipment not can be used directly in assembly line life
In production, the production technology of continuous coating can not achieve.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of vacuum electron beam continuous coating apparatus, structures
It is simple and convenient to operate, it can be achieved that efficient continuous coating, can be widely used in flow line production.
To solve above-mentioned technical problem the technical scheme adopted by the utility model is vacuum electron beam continuous coating fills
It sets, including electron beam furnace, uncoiler and winder, the input end side of electron beam furnace is arranged in the uncoiler, and winder is set
It sets in the outlet end side of electron beam furnace；The electron beam furnace is made of at least one working chamber, is equipped with extremely in each working chamber
Few one electron gun.
Preferably, the working chamber that the electron beam furnace is connected to by 1~3 forms, and 1~2 is equipped in each working chamber electricity
Sub- rifle.
Further, further including being connected to forvacuum room in electron beam furnace input end to be exported in electron beam furnace with being connected to
The postposition vacuum chamber at end, the forvacuum room by least two connection forvacuum chamber form, the postposition vacuum chamber by
The postposition vacuum chamber of at least two connections forms, and is designed with planar vacuum device in the forvacuum chamber and postposition vacuum chamber.
Preferably, the forvacuum chamber that the forvacuum room is connected to by 2~8 forms, the postposition vacuum chamber by 2~
The postposition vacuum chamber composition of 8 connections.
Further, further including hot donut and cooling vacuum room, the hot donut connection is in electron beam furnace
Between forvacuum room, the cooling vacuum room connection is between electron beam furnace and postposition vacuum chamber；The hot donut
It is made of at least one heating, vacuum chamber, the cooling vacuum room is made of at least two cooling vacuum chambers；The heating, vacuum
Intracavitary to be equipped with planar vacuum heating device, the cooling vacuum is intracavitary to be equipped with planar vacuum cooling device.
Preferably, the heating, vacuum chamber that the hot donut is connected to by 1~4 forms, the cooling vacuum room by 2~
The cooling vacuum chamber composition of 4 connections.
Further, further including the preposition straightener being arranged between forvacuum room and uncoiler and setting in postposition
Postposition straightener between vacuum chamber and winder.
The beneficial effects of the utility model are: the utility model is cooperated by uncoiler, winder and electron beam furnace,
While electron beam furnace carries out plated film to metal coil tape, uncoiler will be sent into electron beam furnace, winder after metal coil tape uncoiling
The metal coil tape winding that plated film is completed, realizes the continuous coating to metal coil tape, the efficiency of plated film has been significantly greatly increased, this is practical
New structure is simple, production cost is low, can be widely used in flow line production.
Detailed description of the invention
Fig. 1 is the schematic diagram of the utility model.
In the figure, it is marked as 1- electron beam furnace, 11- working chamber, 12- electron gun, 2- uncoiler, 3- winder, 4- are preposition true
Empty room, 41- forvacuum chamber, 5- postposition vacuum chamber, 51- postposition vacuum chamber, 6- hot donut, 61- heating, vacuum chamber, 7- are cold
But vacuum chamber, 71- cooling vacuum chamber, the preposition straightener of 8-, 9- postposition straightener, 10- metal coil tape.
Specific embodiment
The utility model is further detailed with reference to the accompanying drawing for the ease of understanding the utility model,.
As shown in Figure 1, vacuum electron beam continuous coating apparatus described in the utility model includes electron beam furnace 1, uncoiler 2
With winder 3, the input end side of electron beam furnace 1 is arranged in uncoiler 2, and the outlet end one of electron beam furnace 1 is arranged in winder 3
Side, uncoiler 2 carry out uncoiling to metal coil tape 10 to be coated and metal coating 10 are sent into electron beam furnace 1, metal coating
After 10 complete plated film in electron beam furnace 1, enter in winder 3 from the outlet end of electron beam furnace 1, winder 3 completes plated film
Metal coil tape 10 wind, uncoiler 2 and winder 3 are mentioned with the conveying in electron beam furnace 1 for being combined into metal coil tape 10 jointly
For power.Electron beam furnace 1 by setting electron beam furnace 1 in electron gun 12 to metal coil tape 10 carry out plated film, electron beam furnace 1 by
The working chamber 11 of 1~3 connection forms, and 1~2 is designed in each working chamber 11 electron gun 12, electron gun 12 is to plated film original
Material is heated, and the surface that metal coil tape 10 is deposited on after melting coating raw material forms film plating layer.Electron gun 12, which can be used, to incline
The mode being tiltedly arranged provides 10~40 ° of injection angle for electron gun 12, is conducive to electron beam and all beats in metal coil tape 10
On, plating membrane efficiency can be effectively improved.
In order to realize vacuum environment when plated film work, as shown in Figure 1, the utility model further includes connection in electron beam furnace
The forvacuum room 4 of 1 input end be connected to the postposition vacuum chamber 5 in 1 outlet end of electron beam furnace；Forvacuum room 4 is by 2~8
The forvacuum chamber 41 of connection forms, and the postposition vacuum chamber 51 that postposition vacuum chamber 5 is connected to by 2~8 forms；Forvacuum chamber 41
With planar vacuum device is designed in postposition vacuum chamber 51, realize that the multistage before plated film and after plated film is true by planar vacuum device
Altitude avoids coating raw material from being oxidized to oxide in air, loses metallicity, influences coating effects.
In addition, in order to reinforce coating effects, as shown in Figure 1, being also provided with hot donut 6 and cooling in the utility model
Vacuum chamber 7, hot donut 6 are connected between electron beam furnace 1 and forvacuum room 4, and cooling vacuum room 7 is connected in electron beam furnace
Between 1 and postposition vacuum chamber 5；The heating, vacuum chamber 61 that hot donut 6 is connected to by 1~4 forms, cooling vacuum room 2~4
The cooling vacuum chamber 71 of connection forms；Planar vacuum heating device, each cooling vacuum are designed in each heating, vacuum chamber 61
Planar vacuum cooling device is designed in chamber 71.Before metal coil tape 10 carries out plated film work, by flat in hot donut 6
Plate vacuum heater carries out single-stage or Multi-stage heating to metal coil tape 10, single heating, vacuum chamber 61 is arranged carries out single-stage and add
Heat is arranged 2~4 heating, vacuum chambers 61 and carries out Multi-stage heating, metal coil tape 10 is heated to proper temperature, can make film plating layer
And the combination of metal coil tape 10 is even closer.After metal coil tape 10 completes plated film work, pass through the plate in cooling vacuum room 7
Vacuum cooling unit carries out multistage cooling to metal coil tape 10, is conducive to adjust film plating layer internal grain institutional framework, further
Plated film is avoided to be oxidized, while rapid cooling is conducive to metal coil tape 10 and takes out as early as possible, shortens working hours.
As shown in Figure 1, being equipped with preposition straightener 8 between forvacuum room 4 and uncoiler 2, in postposition vacuum chamber 5 and receive
Postposition straightener 9 is equipped between volume machine 3, preposition straightener 8 carries out the aligning before plated film to metal coil tape 10, then postpones strong
Straight machine 9 then carries out the aligning after plated film to metal coil tape 10, and metal coil tape 10 can be made by aligning before plated film to metal coil tape 10
It is whole straight, be conducive to the conjugation for improving Coating Materials and metal coil tape 10；And due to the utility model before plated film to gold
Belong to band volume 10 to be heated, and metal coil tape 10 cooled down after plated film, metal coil tape 10 by heating expansion and
Straightness may reduce after cooling meat, be aligned the metal coil tape 10 after plated film to improve by postposition straightener 9
The straightness of metal coil tape 10.
Claims (7)
1. vacuum electron beam continuous coating apparatus, it is characterised in that: including electron beam furnace (1), uncoiler (2) and winder (3),
In the input end side of electron beam furnace (1), winder (3) is arranged in the outlet end of electron beam furnace (1) for uncoiler (2) setting
Side；The electron beam furnace (1) is made of at least one working chamber (11), and at least one is equipped in each working chamber (11) electronics
Rifle (12).
2. vacuum electron beam continuous coating apparatus as described in claim 1, it is characterised in that: the electron beam furnace (1) by 1~
Working chamber (11) composition of 3 connections, each working chamber (11) is interior to be equipped with 1~2 electron gun (12).
3. vacuum electron beam continuous coating apparatus as claimed in claim 1 or 2, it is characterised in that: further include connection in electronics
The forvacuum room (4) of beam furnace (1) input end be connected to the postposition vacuum chamber (5) in electron beam furnace (1) outlet end, it is described preposition
Vacuum chamber (4) is made of the forvacuum chamber (41) of at least two connections, and the postposition vacuum chamber (5) is by least two connections
Postposition vacuum chamber (51) forms, and is designed with planar vacuum device in the forvacuum chamber (41) and postposition vacuum chamber (51).
4. vacuum electron beam continuous coating apparatus as claimed in claim 3, it is characterised in that: the forvacuum room (4) is by 2
Forvacuum chamber (41) composition of~8 connections, postposition vacuum chamber (51) group that the postposition vacuum chamber (5) is connected to by 2~8
At.
5. vacuum electron beam continuous coating apparatus as claimed in claim 3, it is characterised in that: further include hot donut (6)
With cooling vacuum room (7), the hot donut (6) is connected between electron beam furnace (1) and forvacuum room (4), described cold
But vacuum chamber (7) connection is between electron beam furnace (1) and postposition vacuum chamber (5)；The hot donut (6) is added by least one
Thermal vacuum chamber (61) composition, the cooling vacuum room (7) are made of at least two cooling vacuum chambers (71)；The heating, vacuum chamber
(61) it is equipped with planar vacuum heating device in, is equipped with planar vacuum cooling device in the cooling vacuum chamber (71).
6. vacuum electron beam continuous coating apparatus as claimed in claim 5, it is characterised in that: the hot donut (6) is by 1
Heating, vacuum chamber (61) composition of~4 connections, cooling vacuum chamber (71) group that the cooling vacuum room (7) is connected to by 2~4
At.
7. vacuum electron beam continuous coating apparatus as claimed in claim 3, it is characterised in that: further include being arranged in forvacuum
The postposition of preposition straightener (8) and setting between postposition vacuum chamber (5) and winder (3) between room (4) and uncoiler (2)
Straightener (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822038643.1U CN209144247U (en) | 2018-12-04 | 2018-12-04 | Vacuum electron beam continuous coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822038643.1U CN209144247U (en) | 2018-12-04 | 2018-12-04 | Vacuum electron beam continuous coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209144247U true CN209144247U (en) | 2019-07-23 |
Family
ID=67289266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822038643.1U Active CN209144247U (en) | 2018-12-04 | 2018-12-04 | Vacuum electron beam continuous coating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209144247U (en) |
-
2018
- 2018-12-04 CN CN201822038643.1U patent/CN209144247U/en active Active
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