CN209140519U - A kind of surface processing device rotating molybdenum target material - Google Patents
A kind of surface processing device rotating molybdenum target material Download PDFInfo
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- CN209140519U CN209140519U CN201821276449.0U CN201821276449U CN209140519U CN 209140519 U CN209140519 U CN 209140519U CN 201821276449 U CN201821276449 U CN 201821276449U CN 209140519 U CN209140519 U CN 209140519U
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- target material
- grinding tool
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- molybdenum target
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Abstract
The utility model relates to a kind of surface processing device for rotating molybdenum target material, the surface processing device of the rotation molybdenum target material includes: body, and the body includes fuselage and pedestal；Rotate clamping device, the rotation clamping device includes spindle box, clamping piece and tailstock, and the both ends of the fuselage are respectively set in the spindle box and tailstock, and the clamping piece and the spindle box are drivingly connected, it is top that a rotation is articulated on the tailstock, the clamping piece and rotating top is oppositely arranged；Sliding seat, the sliding seat are slidably arranged on the fuselage, and between the spindle box and tailstock；Rotating grinding tool, the rotating grinding tool are arranged in the sliding seat two sides.By rotating the cooperation of clamping device, sliding seat and rotating grinding tool, can quickly grind off the thin scratch of rotation molybdenum target material, by this device handle molybdenum target material surface is smooth and uniformity.
Description
Technical field
The utility model relates to field of machining, more particularly to a kind of surface processing device for rotating molybdenum target material.
Background technique
Photovoltaic solar develops very swift and violent in recent years as 21 century optimal new energy.Data show that the whole world is right
The speed of the demand of photovoltaic solar cell annual 40% increases, and molybdenum target material also shows surge as mating consumptive material, demand.
Molybdenum target material is consumed in a manner of molybdenum sputtered film, is mainly used as the metal stack of TFT gate and solar cell module
Lamination etc..Rotation molybdenum target material is mainly used for photovoltaic industry, and due to its utilization rate height, plating film uniformity is good, is suitable for big
Area continuity magnetron sputtering production line has become the new trend of the following target development.The theoretical utilization rate of tubular rotary target
Up to 70%, it is much higher than the utilization rate of flat target 20%-30%, greatly reduces plated film production cost, be the development of target
Direction.
After the completion of molybdenum rotary target material is through over mechanical processing, there are lathe tool lines on surface, cause target material surface coarse, but to rotation
It is higher and higher to turn molybdenum target material sputter face roughness requirements, how to produce sputtering surface roughness it is small, processing labor intensity it is low, efficiency
High molybdenum rotary target material has to be solved.
Utility model content
Based on this, the purpose of the utility model is to provide a kind of surface processing device for rotating molybdenum target material, processing dresses
Set the thin scratch that can quickly grind off rotation molybdenum target material, by this device handle molybdenum target material surface is smooth and uniformity.
The surface processing device of a kind of surface processing device rotating molybdenum target material, the rotation molybdenum target material includes: body, institute
Stating body includes fuselage and pedestal；Clamping device is rotated, the rotation clamping device includes spindle box, clamping piece and tailstock, institute
It states spindle box and the both ends of the fuselage is respectively set in tailstock, the clamping piece and the spindle box are drivingly connected, the tailstock
On to be articulated with a rotation top, the clamping piece and rotate top be oppositely arranged；Sliding seat, the sliding seat are slidably arranged in institute
It states on fuselage, and between the spindle box and tailstock；Rotating grinding tool, the rotating grinding tool are arranged in the sliding seat two
Side.
The further improvement of surface processing device as above-mentioned rotation molybdenum target material, the tailstock are slidably arranged in the machine
With, it can be towards the spindle box linear reciprocating motion.
The further improvement of surface processing device as above-mentioned rotation molybdenum target material, the rotating grinding tool include mobile mechanism
With grinding tool ontology, mobile mechanism's setting is connect on the sliding seat, and with the grinding tool ontology, can control the grinding tool
Ontology moves.
The further improvement of surface processing device as above-mentioned rotation molybdenum target material, the rotating grinding tool include the first rotation
Grinding tool and the second rotating grinding tool, are separately positioned on the two sides of the sliding seat；The grinding tool ontology of first rotating grinding tool rotates
Direction is identical as the steering of the clamping piece, the grinding tool ontology direction of rotation of second rotating grinding tool and turning for the clamping piece
To opposite.
The further improvement of surface processing device as above-mentioned rotation molybdenum target material, the mobile mechanism are three shaft mechanicals
Hand, the grinding tool ontology are mounted on the end of three axle robert.
The further improvement of surface processing device as above-mentioned rotation molybdenum target material, further includes cooling mechanism, the cooling
Mechanism is arranged on the sliding seat.
The further improvement of surface processing device as above-mentioned rotation molybdenum target material, the cooling mechanism include a spray
Head, the spray head are rotatably arranged on the sliding seat.
The further improvement of surface processing device as above-mentioned rotation molybdenum target material further includes roughness concentration mechanism, institute
Roughness concentration mechanism is stated to be arranged on the sliding seat.
The further improvement of surface processing device as above-mentioned rotation molybdenum target material, further includes protective cover, the protective cover
It is arranged on the fuselage, one side is opening.
The further improvement of surface processing device as above-mentioned rotation molybdenum target material, further includes receiver, the receiver
It is arranged below fuselage, both ends are connect with pedestal.
One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:
1, by rotating the cooperation of clamping device, sliding seat and rotating grinding tool, it can quickly grind off rotation molybdenum target material and carefully draw
Trace, by this device handle molybdenum target material surface is smooth and uniformity.
2, the sliding seat being slidably arranged on the fuselage can be adapted to the rotation molybdenum target material of different length.
3, three axle robert can be adjusted grinding tool ontology from a direction is turned over, practical flexible, improve processing essence
Degree.
4, the cooling mechanism can in process cool down to rotation molybdenum target material and grinding tool ontology, keep processing
Safety carry out.
5, the setting of second liquid level sensor and alarm can be used as safety measures, when liquid level expiring close to oil tray
Carrying capacity, second liquid level sensor sense that hydraulic oil will give notice signal to the controller, the controller control
It makes the alarm device to sound an alarm, so that staff makes remedial measure in time.
6, roughness concentration mechanism can carry out the measurement of roughness to the rotation molybdenum target material after processing, improve processed goods
Quality.
7, the molybdenum target material or other foreign matters that protective cover can prevent process to be worn away fly out, and pollute to ambient enviroment
Or injury to personnel.
8, receiver can keep the clean of working environment with the particle and waste water fallen on access fuselage.
In order to better understand and implement, according to the present invention will be described in detail below with reference to the accompanying drawings.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the surface processing device of rotation molybdenum target material described in the utility model；
Fig. 2 is the top view of the surface processing device of rotation molybdenum target material described in the utility model；
Fig. 3 is the side view of the surface processing device of rotation molybdenum target material described in the utility model；
Fig. 4 is the process principle figure of the surface processing device of rotation molybdenum target material described in the utility model.
Specific embodiment
A kind of surface processing device for rotating molybdenum target material of the utility model, passes through rotation clamping device, sliding seat and rotation
The cooperation of grinding tool can quickly grind off the thin scratch of molybdenum rotary target material, and the molybdenum target material surface handled by this device is smooth and equal
It is even consistent.
Referring now to attached drawing hereinafter, the utility model is described in more detail below, shows the utility model in the figure
Embodiment.However, the utility model can be presented as many different forms, and should not be construed as being limited to presented herein
Specific embodiment.Exactly, these embodiments are used to the scope of the utility model being communicated to those skilled in the art.
Unless otherwise defined, otherwise, term (including technical and scientific terms) used herein is interpreted as
With the identical meaning of the meaning that is generally understood with the technical staff in field belonging to the utility model.Moreover, it will be appreciated that
, term used herein be interpreted as have with the consistent meaning of meaning in this specification and related fields, and
And it should not be explained by ideal or excessively formal meaning, unless being clearly specified that herein.
In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", " hard straight ", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, rather than indicate
Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand
For limitations of the present invention.In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or two
More than a.
As shown in FIG. 1, FIG. 1 is the structural schematic diagrams of the surface processing device of rotation molybdenum target material described in the utility model.One
The surface processing device of the surface processing device of kind rotation molybdenum target material, the rotation molybdenum target material includes: body, and the body includes
Fuselage and pedestal；Rotate clamping device, the rotation clamping device includes spindle box, clamping piece and tailstock, the spindle box with
The both ends of the fuselage are respectively set in tailstock, and the clamping piece and the spindle box are drivingly connected, and are articulated with one on the tailstock
Rotate top, the clamping piece and rotating top is oppositely arranged；Sliding seat, the sliding seat are slidably arranged on the fuselage,
And between the spindle box and tailstock；Rotating grinding tool, the rotating grinding tool are arranged in the sliding seat two sides.
Each component part of the present embodiment recyclable device is described in detail individually below.
Body, for the surface processing device basic components for supporting entire rotation molybdenum target material comprising fuselage 11 and pedestal 12,
Wherein, the fuselage 11 is the main operating area of surface treatment for carrying out rotation molybdenum target material, and the pedestal 12 is all for support
The substrate of component plays the role of firm entire machine.
Preferably, the tailstock 23 is slidably arranged on the fuselage 11, can be transported towards 21 reciprocating linear of spindle box
It is dynamic, so as to be adapted to the rotation molybdenum target material of different length.
Clamping device is rotated, for the component for clamping and making rotation molybdenum target material rotation comprising spindle box 21,22 and of clamping piece
The both ends of the fuselage 11, the clamping piece 22 and the spindle box is respectively set in tailstock 23, the spindle box 21 and tailstock 23
21 are drivingly connected, and a rotation top 231 is articulated on the tailstock 23, and the clamping piece 22 and rotation top 231 are oppositely arranged.
Specifically, the spindle box is provided with main shaft and variable speed electric motors, particularly, obtains it not by variable speed electric motors, particularly driving spindle
Same revolving speed, one end of the clamping piece 22 are connect with the main shaft, and the main shaft drives clamping piece 22 to rotate simultaneously, described
The other end of clamping 22 has clamping part, can clamp rotation molybdenum target material.The tailstock 23 is another for fixed rotation molybdenum target material
One end, the rotation top 231 are articulated on tailstock 23, and when rotating molybdenum target material rotation, rotation top 231 will be followed by same
Shi Xuanzhuan.
Sliding seat 3, the sliding seat 3 are slidably mounted on the fuselage 11, and are located at the spindle box 21 and tailstock 23
Between, it can slidably reciprocate between, convenient for being processed to rotation molybdenum target material.
Specifically, the sliding seat 3 is driven by a feed mechanism, feed screw nut can be cooperated to realize by screw rod
Transmission, can also be driven by sliding block and sliding rail.
Rotating grinding tool 4, the rotating grinding tool be to the main component that is polished of rotation molybdenum target material, by with the rotation
Molybdenum target material relatively rotates friction, thus the rough turn knife mark on molybdenum target material surface of erasing.
Specifically, the rotating grinding tool includes mobile mechanism 41 and grinding tool ontology 42, and the mobile mechanism 41 is arranged in institute
It states on sliding seat 3, and is connect with the grinding tool ontology 42, can control the grinding tool ontology 42 to move, to adjust grinding tool
Position, to carry out more accurate processing.The grinding tool ontology 42 can be with the common grinding tool such as grinding wheel.
As shown in Figure 2 and Figure 4, Fig. 2 is the top view of the surface processing device of rotation molybdenum target material described in the utility model, figure
4 be the process principle figure of the surface processing device of rotation molybdenum target material described in the utility model.In the present embodiment, the rotation mill
Tool includes the first rotating grinding tool 4a and the second rotating grinding tool 4b, is separately positioned on the two sides of the sliding seat 3；First rotation
The grinding tool ontology direction of rotation of grinding tool 4a is identical as the steering of the clamping piece 22, the grinding tool ontology of the second rotating grinding tool 4b
Direction of rotation is opposite with the steering of the clamping piece 22.The setting simultaneously processes the two sides of rotation molybdenum target material 9, can be fast
Speed and uniformly to rotation molybdenum target material complete processing.
As preferred embodiment, the mobile mechanism 41 is three axle robert, and the grinding tool ontology is mounted on three axis machines
The end of tool hand.Three axle robert can be adjusted grinding tool ontology 42 from a direction is turned over, practical flexible, improve processing
Precision.
It further include cooling mechanism 5 as preferred embodiment, the cooling mechanism 5 is arranged on the sliding seat 3, can
As needed, cool down in process to rotation molybdenum target material and grinding tool ontology 42.
Specifically, the cooling mechanism 5 includes a spray head, and the spray head is rotatably arranged in the sliding seat 3
On, it can be kept working properly to processing rotation molybdenum target material water spray and cooling down by spraying.
It further include roughness concentration mechanism 6 as preferred embodiment, the roughness concentration mechanism 6 is arranged described
On sliding seat 3, after completion of processing, the measurement of roughness can be carried out to the rotation molybdenum target material after processing.
As shown in figure 3, Fig. 3 is the side view of the surface processing device of rotation molybdenum target material described in the utility model.As excellent
The embodiment of choosing further includes protective cover 7, and the protective cover 7 is arranged on the fuselage, and one side is opening, the protective cover
The molybdenum target material or other foreign matters that process can be prevented to be worn away fly out, and pollute to ambient enviroment or injury to personnel.
It further include receiver 8 as preferred embodiment, the receiver 8 is arranged below fuselage 11, both ends and bottom
Seat 12 connects, which can keep the clean of working environment with the particle and waste water fallen on access fuselage.
Working principle: its rotation is fixed and driven to rotation clamping device by molybdenum target material is rotated, by rotating molybdenum target material two sides
Rotating grinding tool and rotation molybdenum target material relatively rotate friction, to grind off the thin scratch of molybdenum rotary target material, 3 band of sliding seat
Dynamic rotating grinding tool is mobile in the length direction that will rotate molybdenum target material so that rotating grinding tool is uniform to the whole progress of rotation molybdenum target material
Processing, wherein the mobile mechanism 41 can also be finely adjusted the position of grinding tool ontology 42, to reach higher processing
Level.
Compared with the prior art, the embodiment of the present application has the following technical effect that or advantage:
1, by rotating the cooperation of clamping device, sliding seat and rotating grinding tool, it can quickly grind off rotation molybdenum target material and carefully draw
Trace, by this device handle molybdenum target material surface is smooth and uniformity.
2, the sliding seat being slidably arranged on the fuselage can be adapted to the rotation molybdenum target material of different length.
3, three axle robert can be adjusted grinding tool ontology from a direction is turned over, practical flexible, improve processing essence
Degree.
4, the cooling mechanism can in process cool down to rotation molybdenum target material and grinding tool ontology, keep processing
Safety carry out.
5, the setting of second liquid level sensor and alarm can be used as safety measures, when liquid level expiring close to oil tray
Carrying capacity, second liquid level sensor sense that hydraulic oil will give notice signal to the controller, the controller control
It makes the alarm device to sound an alarm, so that staff makes remedial measure in time.
6, roughness concentration mechanism can carry out the measurement of roughness to the rotation molybdenum target material after processing, improve processed goods
Quality.
7, the molybdenum target material or other foreign matters that protective cover can prevent process to be worn away fly out, and pollute to ambient enviroment
Or injury to personnel.
8, receiver can keep the clean of working environment with the particle and waste water fallen on access fuselage.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The protection scope of the utility model.
Claims (10)
1. a kind of surface processing device for rotating molybdenum target material, which is characterized in that the surface processing device packet of the rotation molybdenum target material
It includes:
Body, the body include fuselage and pedestal；
Clamping device is rotated, the rotation clamping device includes spindle box, clamping piece and tailstock, and the spindle box and tailstock are distinguished
The both ends of the fuselage are set, the clamping piece and the spindle box are drivingly connected, and it is top to be articulated with a rotation on the tailstock,
The clamping piece and rotating top is oppositely arranged；
Sliding seat, the sliding seat are slidably arranged on the fuselage, and between the spindle box and tailstock；
Rotating grinding tool, the rotating grinding tool are arranged in the sliding seat two sides.
2. the surface processing device of rotation molybdenum target material according to claim 1, it is characterised in that: the tailstock sliding setting
It, can be towards the spindle box linear reciprocating motion on the fuselage.
3. the surface processing device of rotation molybdenum target material according to claim 1, it is characterised in that: the rotating grinding tool includes
Mobile mechanism and grinding tool ontology, mobile mechanism's setting connect on the sliding seat, and with the grinding tool ontology, can control
The grinding tool ontology moves.
4. the surface processing device of rotation molybdenum target material according to claim 3, it is characterised in that: the rotating grinding tool includes
First rotating grinding tool and the second rotating grinding tool, are separately positioned on the two sides of the sliding seat；The grinding tool of first rotating grinding tool
Ontology direction of rotation is identical as the steering of the clamping piece, the grinding tool ontology direction of rotation of second rotating grinding tool and the folder
The steering of gripping member is opposite.
5. the surface processing device of rotation molybdenum target material according to claim 3, it is characterised in that: the mobile mechanism is three
Axis robot, the grinding tool ontology are mounted on the end of three axle robert.
6. the surface processing device of rotation molybdenum target material according to claim 1, it is characterised in that: it further include cooling mechanism,
The cooling mechanism is arranged on the sliding seat.
7. the surface processing device of rotation molybdenum target material according to claim 6, it is characterised in that: the cooling mechanism includes
One spray head, the spray head are rotatably arranged on the sliding seat.
8. the surface processing device of rotation molybdenum target material according to claim 1, it is characterised in that: further include roughness concentration
Mechanism, the roughness concentration mechanism are arranged on the sliding seat.
9. the surface processing device of rotation molybdenum target material according to claim 1, it is characterised in that: it further include protective cover, institute
It states protective cover to be arranged on the fuselage, one side is opening.
10. the surface processing device of rotation molybdenum target material according to claim 1, it is characterised in that: it further include receiver, institute
It states receiver to be arranged below fuselage, both ends are connect with pedestal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821276449.0U CN209140519U (en) | 2018-08-08 | 2018-08-08 | A kind of surface processing device rotating molybdenum target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821276449.0U CN209140519U (en) | 2018-08-08 | 2018-08-08 | A kind of surface processing device rotating molybdenum target material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209140519U true CN209140519U (en) | 2019-07-23 |
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ID=67265746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821276449.0U Active CN209140519U (en) | 2018-08-08 | 2018-08-08 | A kind of surface processing device rotating molybdenum target material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209140519U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112192327A (en) * | 2020-10-29 | 2021-01-08 | 先导薄膜材料（广东）有限公司 | Cleaning device and method for rotary target |
| CN113001114A (en) * | 2021-03-01 | 2021-06-22 | 宁波江丰电子材料股份有限公司 | Turning method for sputtering surface of rotary target |
| CN113635214A (en) * | 2021-07-26 | 2021-11-12 | 先导薄膜材料（广东）有限公司 | Sputtering target grinding device and machining method |
-
2018
- 2018-08-08 CN CN201821276449.0U patent/CN209140519U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112192327A (en) * | 2020-10-29 | 2021-01-08 | 先导薄膜材料（广东）有限公司 | Cleaning device and method for rotary target |
| CN113001114A (en) * | 2021-03-01 | 2021-06-22 | 宁波江丰电子材料股份有限公司 | Turning method for sputtering surface of rotary target |
| CN113001114B (en) * | 2021-03-01 | 2023-12-29 | 宁波江丰电子材料股份有限公司 | Turning method of rotary target sputtering surface |
| CN113635214A (en) * | 2021-07-26 | 2021-11-12 | 先导薄膜材料（广东）有限公司 | Sputtering target grinding device and machining method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Surface treatment device for rotary molybdenum target material Effective date of registration: 20200622 Granted publication date: 20190723 Pledgee: Shaoguan Branch of China Construction Bank Co.,Ltd. Pledgor: SHAOGUAN OULAI HI-TECH MATERIAL Co.,Ltd.|DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. Registration number: Y2020440000149 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| CP03 | Change of name, title or address |
Address after: 512026 Yangshan village committee, Xilian Town, Wujiang District, Shaoguan City, Guangdong Province Patentee after: Guangdong Oulai high tech materials Co.,Ltd. Patentee after: DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. Address before: 512000 Yangshan Area, Muxi Industrial Park, Wujiang District, Shaoguan City, Guangdong Province Patentee before: SHAOGUAN OULAI HI-TECH MATERIAL Co.,Ltd. Patentee before: DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20211227 Granted publication date: 20190723 Pledgee: Shaoguan Branch of China Construction Bank Co.,Ltd. Pledgor: SHAOGUAN OULAI HI-TECH MATERIAL Co.,Ltd.|DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. Registration number: Y2020440000149 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A surface treatment device for rotating molybdenum target Effective date of registration: 20211229 Granted publication date: 20190723 Pledgee: Shaoguan Branch of China Construction Bank Co.,Ltd. Pledgor: Guangdong Oulai high tech materials Co.,Ltd.|DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. Registration number: Y2021980016846 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20220311 Granted publication date: 20190723 Pledgee: Shaoguan Branch of China Construction Bank Co.,Ltd. Pledgor: Guangdong Oulai high tech materials Co.,Ltd.|DONGGUAN OMAT PUTTERING TARGET Co.,Ltd. Registration number: Y2021980016846 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right |