CN209131881U - A kind of titanium alloy piezoresistive pressure sensor pedestal - Google Patents
A kind of titanium alloy piezoresistive pressure sensor pedestal Download PDFInfo
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- CN209131881U CN209131881U CN201822150392.6U CN201822150392U CN209131881U CN 209131881 U CN209131881 U CN 209131881U CN 201822150392 U CN201822150392 U CN 201822150392U CN 209131881 U CN209131881 U CN 209131881U
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- shell
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- pressure sensor
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Abstract
The utility model belongs to cermet soldering sealing-in field, is specifically related to a kind of titanium alloy piezoresistive pressure sensor pedestal.The titanium alloy piezoresistive pressure sensor pedestal includes shell, stage shape metal ceramics, seal glass, brazing solder and iron-nickel alloy lead, the shell is cylindrical, the stepped hollow form in the inside of the shell, the stage shape metal ceramics are set to the interior of shell, the inner wall of the shell is equipped with two circles and is brazed sealing-in hole, the brazing solder is covered on the top and lower part of the stage shape metal ceramics, and it is located inside the soldering sealing-in hole, the inside of the ladder-like technical ceramics is set there are two glass sealing hole, the seal glass is set to inside the glass sealing hole, the seal glass is internally provided with the iron-nickel alloy lead.
Description
Technical field
The utility model belongs to cermet soldering sealing-in field, is specifically related to a kind of titanium alloy pressure drag type pressure sensing
Device pedestal.
Background technique
At present in sensor field, the main material of piezoresistive pressure sensor pedestal is SUS316L, with kovar alloy material
Matter is as inner conductor contact pin.However in actual use, the aggravation that often will appear working environment leads to service life
Too short, equipment breaks down, and is the piezoresistive pressure sensor of basic material in moist atmosphere and Seawater using titanium alloy
Middle work, corrosion stability are much better than stainless steel product, strong to the resistance of spot corrosion, acid etching, stress corrosion, to alkali, chloride, chlorine
Organic article, nitric acid, sulfuric acid etc. there is excellent resistance to corrosion to can satisfy the use under various operating conditions.Titanium alloy is excellent with its
Different performance steps into sensor field, and titanium alloy sensor will replace with the continuous improvement to product requirement in future
Stainless steel sensor and become mainstream.However titanium alloy and kovar alloy are difficult with the direct sealing-in of seal glass.Therefore with ceramics with
Soldering is on titanium alloy casing after kovar alloy sealing-in.
Utility model content
The utility model aim is to provide a kind of piezoresistive pressure sensor pedestal and preparation method thereof, the utility model
For the optimization of piezoresistive pressure sensor pedestal and production method, the product corrosion resistance made is good, proof voltage and pressure-resistant performance
By force.Greatly improve the service life of sensor.
In order to achieve the above objectives, the utility model/utility model adopts the following technical scheme that
A kind of piezoresistive pressure sensor pedestal, it is characterised in that including shell, stage shape metal ceramics, seal glass,
Brazing solder and iron-nickel alloy lead, the shell is cylindrical, the stepped hollow form in the inside of the shell, the ladder
Shape cermet is set to the interior of shell, and the inner wall of the shell is equipped with two circles and is brazed sealing-in hole, and the brazing solder covers
The top and lower part in the stage shape metal ceramics are covered, and is located inside the soldering sealing-in hole, the stage shape metal
The inside of ceramics is set there are two glass sealing hole, and the seal glass is set to inside the glass sealing hole, the seal glass
It is internally provided with the iron-nickel alloy lead.
Further, the outside of the shell is equipped with a circle rectangular channel, is equipped with sealing ring inside the rectangular channel.
Further, the two sides of the outer casing underpart are equipped with rectangle unfilled corner.
The utility model has following beneficial effect:
The utility model piezoresistive pressure sensor pedestal, including shell, ceramics.There are soldering hole, cermet on shell
To there is sealing-in hole on ladder-like, iron-nickel alloy lead is by glass sealing on ceramics.Due to higher to shell appearance requirement, add
Work difficulty is big, at high cost therefore realized on the shell using Ceramic brazing, since the addition of ceramics has very an electrical property of product
Big raising.The product corrosion resistance made is good, and proof voltage and pressure-resistant performance are strong.The service life for improving product expands
The scope of application.
Detailed description of the invention
The utility model is described in further detail below in conjunction with attached drawing.
Fig. 1 is the structural schematic diagram of the utility model.
1, shell；2, stage shape metal ceramics；3, seal glass；4, brazing solder；5, iron-nickel alloy lead；6, soldering envelope
Connect hole；7, glass sealing hole；8, rectangular channel；9, sealing ring；10, rectangle unfilled corner.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and embodiments:
As shown in Figure 1, titanium alloy piezoresistive pressure sensor pedestal, including shell 1, stage shape metal ceramics 2, sealing-in glass
Glass 3, brazing solder 4 and iron-nickel alloy lead 5, the shell 1 is cylindrical, the stepped hollow form in inside of the shell 1,
The stage shape metal ceramics 2 are set to inside the shell 1, and the inner wall of the shell 1 is equipped with two circles and is brazed sealing-in hole 6, institute
Top and lower part that brazing solder 4 is covered on the stage shape metal ceramics 2 are stated, and is located inside the soldering sealing-in hole 6,
The inside of the stage shape metal ceramics 2 is set there are two glass sealing hole 7, and the seal glass 3 is set to the glass sealing hole 7
Inside, the seal glass 3 are internally provided with the iron-nickel alloy lead 5.
In the present embodiment, the outside of the shell 1 is equipped with a circle rectangular channel 8, is equipped with sealing ring 9 inside the rectangular channel 8.
In the present embodiment, the two sides of 1 lower part of shell are equipped with rectangle unfilled corner 10.
A kind of production method of piezoresistive pressure sensor pedestal, it is characterised in that further comprising the steps of:
1) it cleans
It is cleaned by ultrasonic the greasy dirt of removal titanium alloy shell, iron-nickel alloy wire surface using 10% basic solvent.Use nothing
Water-ethanol is cleaned by ultrasonic brazing solder, seal glass and cermet.
2) it dries
The material cleaned up is dried using baking oven, oven temperature is 70 DEG C~110 DEG C.
3) it assembles
Ready cermet is put into encapsulating mould, seal glass is put into crunch seal hole, iron-nickel alloy lead
It is put into seal glass hole.
4) sealing-in
The ceramics that will be assembled are put into catenet band encapsulation furnace, and 800 DEG C~1050 DEG C of furnace temperature, the overall sealing time is 3.5
~4.5H, protective atmosphere are nitrogen.
5) it is brazed
Titanium alloy metal shell is assembled on soldering mold.Soldering mold material is graphite.Ceramics are put into soldering
Brazing solder is placed on soldering hole by hole.Brazing temperature is 700~920 DEG C.Atmosphere is nitrogen hydrogen mixeding gas.Ratio be 4:1~
4:5, overall holding time are 1~2H.
6) service check
The piezoresistive pressure sensor pedestal that will be brazed carries out appearance, sealing, performance etc., examines, and completes product system
Make.
Claims (3)
1. a kind of titanium alloy piezoresistive pressure sensor pedestal, it is characterised in that including shell, stage shape metal ceramics, sealing-in glass
Glass, brazing solder and iron-nickel alloy lead, the shell is cylindrical, the stepped hollow form in the inside of the shell, described
Stage shape metal ceramics are set to the interior of shell, and the inner wall of the shell is equipped with two circles and is brazed sealing-in hole, the soldering weldering
Material is covered on the top and lower part of the stage shape metal ceramics, and is located inside the soldering sealing-in hole, described ladder-like
The inside of cermet is set there are two glass sealing hole, and the seal glass is set to inside the glass sealing hole, the sealing-in
Inside glass is provided with the iron-nickel alloy lead.
2. titanium alloy piezoresistive pressure sensor pedestal as described in claim 1, it is characterised in that set on the outside of the shell
There is a circle rectangular channel, is equipped with sealing ring inside the rectangular channel.
3. titanium alloy piezoresistive pressure sensor pedestal as described in claim 1, it is characterised in that the two of the outer casing underpart
Side is equipped with rectangle unfilled corner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822150392.6U CN209131881U (en) | 2018-12-20 | 2018-12-20 | A kind of titanium alloy piezoresistive pressure sensor pedestal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822150392.6U CN209131881U (en) | 2018-12-20 | 2018-12-20 | A kind of titanium alloy piezoresistive pressure sensor pedestal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209131881U true CN209131881U (en) | 2019-07-19 |
Family
ID=67249058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822150392.6U Active CN209131881U (en) | 2018-12-20 | 2018-12-20 | A kind of titanium alloy piezoresistive pressure sensor pedestal |
Country Status (1)
| Country | Link |
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| CN (1) | CN209131881U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109520664A (en) * | 2018-12-20 | 2019-03-26 | 西安赛尔电子材料科技有限公司 | A kind of titanium alloy piezoresistive pressure sensor pedestal and preparation method thereof |
| CN114101831A (en) * | 2021-12-20 | 2022-03-01 | 浙江亚通焊材有限公司 | Sensor base and base brazing method |
-
2018
- 2018-12-20 CN CN201822150392.6U patent/CN209131881U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109520664A (en) * | 2018-12-20 | 2019-03-26 | 西安赛尔电子材料科技有限公司 | A kind of titanium alloy piezoresistive pressure sensor pedestal and preparation method thereof |
| CN114101831A (en) * | 2021-12-20 | 2022-03-01 | 浙江亚通焊材有限公司 | Sensor base and base brazing method |
| CN114101831B (en) * | 2021-12-20 | 2022-11-01 | 浙江亚通焊材有限公司 | Sensor base and base brazing method |
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