CN209117761U - A kind of test device for extracting conductive film surface conductivity based on electromagnetic field near field - Google Patents
A kind of test device for extracting conductive film surface conductivity based on electromagnetic field near field Download PDFInfo
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- CN209117761U CN209117761U CN201821457164.7U CN201821457164U CN209117761U CN 209117761 U CN209117761 U CN 209117761U CN 201821457164 U CN201821457164 U CN 201821457164U CN 209117761 U CN209117761 U CN 209117761U
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- conductive film
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Abstract
The utility model relates to film surface conductivity measuring technologies, it is desirable to provide a kind of test device that conductive film surface conductivity is extracted based on electromagnetic field near field.It is that Electromagnetic Launching source is set in the side of conductive film, emits the direction direction of electromagnetic wave and perpendicular to conductive film；Magnetic field near field probes and electric field near field probes are placed in two sides respectively above and below horizontal conductive film, and two probes spacing identical as conductive film holding, the line of the two is perpendicular to conductive film.The utility model has no rigors to shape, the size of conductive film, can solve when carrying out high-frequency test in coaxial, waveguide, conductive film shape processing required precision is higher, error is larger problem.Meanwhile the utility model can measure conductive film any position, optional frequency, the surface conductivity of any time, obtain the surface conductivity of film with position, frequency, the distribution situation of time, be conducive to the reliability and stability for improving film application.
Description
Technical field
The utility model relates to a kind of film surface conductivity measuring technologies, and in particular to one kind is mentioned based on electromagnetic field near field
The test device for taking conductive film surface conductivity, be accurately measured using electromagnetic field near-field test film surface and position and
The local conductivity of frequency dependence.
Background technique
Conductive film is widely used in flexible electronic industrial field, is in urgent need.The most common conductive thin of industry at present
Film has the two-dimensional materials films such as tin indium oxide (ITO) film, fluorine-doped tin oxide (FTO) film and graphene, their electricity
Conductance be its be applied to screen show, one of the key influence factor of products such as screen touch-control, solar battery.Large-scale production
The electric thin of high quality not only needs to carry out accurate Row control in production, with greater need for different product, different batches
Carry out efficient quantitative test.Current test method is included in the chambers internal tests such as coaxial, waveguide, adds to conductive film shape
Work required precision is higher, mismachining tolerance degree test result is affected.
In the research frontier of Electromagnetic Fields & Magnetic Waves, there is the theoretical research largely about New Two Dimensional conductive film,
These films include graphene, molybdenum disulfide, hexagonal boron nitride etc., they are theoretically widely used in novel waveguide, novel
The design of the passive devices such as antenna, Novel Filter.Currently, the quality of production of these novel thin films is unstable, production scale compared with
It is small, thus with greater need for strictly being regulated and controled in production and design to their conductivity, and subtly measured.
Utility model content
The technical problems to be solved in the utility model is to overcome deficiency in the prior art, is provided a kind of based on electromagnetic field
The test device of near field extraction conductive film surface conductivity.
In order to solve the technical problem, the solution of the utility model is:
A kind of test device for being extracted conductive film surface conductivity based on electromagnetic field near field is provided, is in conductive film
Electromagnetic Launching source is arranged in side, emits the direction direction of electromagnetic wave and perpendicular to conductive film；Electromagnetic Launching source and conductive thin
The spacing of film is greater than 2 λ, and λ is the wavelength for emitting electromagnetic wave；Two sides are placed magnetic field near field respectively and are visited above and below horizontal conductive film
Head and electric field near field probes, two probes spacing identical as conductive film holding, the line of the two is perpendicular to conductive film.
As an improvement being to have both the detection of magnetic field near field and the probe of electric field near field detecting function and substitute the magnetic field
Near field probes and/or electric field near field probes.
As an improvement two probe between line intersect with conductive film, the direction of the launch in Electromagnetic Launching source and
Conductive film intersection, the distance between two crosspoints are not more than DMAX/ 2, DMAXFor the maximum caliber of emission source.
As an improvement the Electromagnetic Launching source is electromagnetic horn.
As an improvement described two probes and the spacing of conductive film be less than Electromagnetic Launching source and conductive film away from
From.
As an improvement described two probes are connected to industrial personal computer by signal wire respectively, the Electromagnetic Launching source passes through
Signal wire is connected to controller.
The test that conductive film surface conductivity is extracted based on electromagnetic field near field is realized using device described in the utility model
Method is the electromagnetic wave irradiation conductive film issued using Electromagnetic Launching source, its surface is made to generate induced current, close by magnetic field
The amplitude of horizontal magnetic field and horizontal component of electric field that Field probe and electric field near field probes measurement conductive film two sides are formed by induced current
With phase；Finally, the surface conductivity of conductive film is calculated using measurement data；
This method specifically includes:
(1) emit electromagnetic wave in the export-oriented conductive film of 2 λ distance using Electromagnetic Launching source, guarantee electromagnetic wave irradiation to conduction
Plane wave is equivalent to when film；
(2) amplitude of film two sides equidistant horizontal magnetic field and the width of phase, horizontal component of electric field are measured respectively using probe
Degree and phase；By transmission line theory and boundary condition, the surface of film is obtained using the amplitude and phase calculation of horizontal magnetic field
Electric current obtains surface field using the amplitude and phase calculation of horizontal component of electric field；And then it is obtained by surface field and surface current
Surface conductivity between two probes at line and conductive film crosspoint；
(3) position of synchronous change two probes, repeats the operation of step (1) and (2), to obtain conductive film difference
Surface conductivity at position.
Before test job starts, two probes are calibrated first with vector network analyzer and standard component, with
Just the corresponding data of electric and magnetic fields can accurately be measured.
The surface current and surface field that film is calculated by transmission line theory and boundary condition, specifically
Refer to:
Two probes are respectively placed in above and below conductive film, are respectively respectively d apart from film position1And d2；Two
The pop one's head in horizontal component of electric field that tests out, magnetic field is denoted as (E respectivelyI、HI) and (EII、HII)；
In the direction perpendicular to conductive film, conductive film one equivalent resistance, resistance value Req=1/ σ, ReqFor to
The surface conductivity of conductive film is surveyed, σ is the surface conductivity of conductive film to be measured；In conductive film two sides, probe and conduction
Vertical space between film is equivalent with two sections of air transfer lines, and propagation constant and characteristic impedance are respectively kz0=ω/c, Zc0
=(μ0/ε0)0.5；In formula, the π of ω=2 f is angular frequency, and f is transmitting wave frequency, and c is the light velocity in vacuum, μ0For Vacuum Magnetic
Conductance, ε0For permittivity of vacuum.
According to the definition of abcd matrix:
In above formula, since field parallel component is equal everywhere, there is EI=EII；Wherein, EII、HI、HIIFor pop one's head in measured value,
Zc0、kz0、d1、d2For known quantity；J is imaginary unit's symbol.
By carrying out inverse operation to the above matrix, solution obtains film surface conductivityσ.
In the utility model, when probe is less than λ/20 at a distance from conductive film, it is by the further abbreviation of the matrix
I.e.
It is solved according to formula (3) and obtains film surface conductivityσ.
The description of utility model realization principle:
Conductive film material is placed in free space, and driving source plane of departure wave above film works as plane wave illumination
When to thin-film material surface, since electric field is in the reflection and transmission of film surface, the water of some strength can be formed above and below film
Ordinary telegram field；Its horizontal component of electric field can motivate the surface current of thin-film material, and the amplitude and phase of surface current depend on material
Surface conductivity；The surface current will lead to the mutation in film upper and lower surfaces magnetic field；Thus, under certain plane wave illumination, no
With the film of surface conductivity, corresponding surface horizontal component of electric field and horizontal magnetic field information are different, pass through test electric field and magnetic
, so that it may the anti-surface conductivity for releasing film.
The step of device described in the utility model is for when testing is as follows: firstly, using vector network analyzer and standard
Part calibrates magnetic field near field probes and electric field near field probes, so as to measure electric and magnetic fields true value；Later, it utilizes
Electromagnetic Launching source (such as electromagnetic horn) emits electromagnetic wave other than several wavelength, to guarantee when electromagnetic wave irradiation to film
It can be equivalent to plane wave；In turn, it above and below film, at vertical range film certain position, is surveyed respectively using magnetic field near field probes
The amplitude and phase of horizontal magnetic field are tried out, and the same position below film, tests out horizontal electricity using electric field near field probes
The amplitude and phase of field.Finally, by transmission line theory and boundary condition, can push away film surface current and surface electricity
, and then solve the surface conductivity of film.
The surface conductivity that the test obtains be film on a point at conductivity, the point be located at probe just on
Side/underface.Surface conductivity by changing the test position of probe, at available film different location.
Meanwhile the surface conductivity that the test obtains is the conductivity at the tranmitting frequency of Electromagnetic Launching source.By changing electricity
The tranmitting frequency of magnetic emission source, at the same near field probes test respective frequencies under horizontal magnetic field and horizontal component of electric field amplitude and phase
Position can push away to obtain the surface conductivity of film under different frequency.
It is popped one's head in using multi -components, horizontal component of electric field, the horizontal magnetic field of film or more can be measured simultaneously, to obtain certain for the moment
The surface conductivity of film under different moments can be obtained in the film surface conductivity at quarter, change test moment.
Compared with prior art, the utility model has the beneficial effects that
The utility model has no rigors to shape, the size of conductive film, can solve and carries out in coaxial, waveguide
When high-frequency test, conductive film shape processing required precision is higher, error is larger problem.Meanwhile the utility model can be surveyed
Conductive film any position, optional frequency, the surface conductivity of any time are measured, the surface conductivity of available film is with position
It sets, frequency, the distribution situation of time, is conducive to the reliability and stability for improving film application.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of test device in the utility model.
Fig. 2 is the utility model electromagnetic principle figure.
Fig. 3 is the schematic diagram that embodiment is popped one's head in apart from conductive film 1mm to be measured.
Fig. 4 is the schematic diagram that embodiment is popped one's head in apart from conductive film 0.2mm to be measured.
Fig. 5 is the surface conductivity obtained when embodiment is popped one's head in apart from conductive film 1mm to be measured.
Fig. 6 is the surface conductivity obtained when embodiment is popped one's head in apart from conductive film 0.2mm to be measured.
Appended drawing reference in Fig. 1: 1 Electromagnetic Launching source；Near field probes above 2 films are (for the water above testing film
The amplitude and phase of ordinary telegram field and horizontal magnetic field)；3 conductive films；Near field probes below 4 films are (for below testing film
Horizontal component of electric field and horizontal magnetic field amplitude and phase).
Specific embodiment
With reference to the accompanying drawing and specific embodiment is described in further detail the utility model.
The test device for extracting conductive film surface conductivity in the utility model based on electromagnetic field near field, is in conductive thin
Electromagnetic Launching source 1 is arranged in the side of film 3, emits the direction direction of electromagnetic wave and perpendicular to conductive film 3；Electromagnetic Launching source 1
It is greater than 2 λ with the spacing spacing of conductive film 3, λ is transmitting electromagnetic wavelength；It is put respectively in horizontal about 3 two sides of conductive film
Near field probes 2 and near field probes 4 are set, two probes keep identical spacing (to be not more than with the spacing of conductive film with conductive film 3
The distance between Electromagnetic Launching source and conductive film), the line of the two intersects perpendicular to conductive film 3 and with conductive film 3, electricity
The direction of the launch of magnetic emission source 1 intersects with conductive film 3, and the distance between two crosspoints are not more than DMAX/ 2, DMAXFor transmitting
The maximum caliber in source.
The optional electromagnetic horn in Electromagnetic Launching source 1, is connected to its controller by signal wire.Two probes pass through signal wire respectively
It is connected to industrial personal computer.It may be selected to have both the probe of the detection of magnetic field near field and electric field near field detecting function and substitute the magnetic field near field spy
Head and/or electric field near field probes.
Specific embodiment:
The measuring device schematic diagram of the utility model is as shown in Figure 1, using electromagnetic horn as Electromagnetic Launching source 1, by it
It is placed in 3 top certain position of conductive film.Two probes are respectively placed in above and below conductive film 3, are divided apart from conductive film 3
It Wei not d1And d2.Two electric fields tested out of popping one's head in, magnetic fields are denoted as (E respectivelyI、HI) and (EII、HII)。
In the direction perpendicular to conductive film 3, this device can be with transmission line model as shown in Figure 2 come equivalent.Conductive thin
Film 3 equivalent resistance, resistance value Req=1/ σ, σ are film surface conductivity to be measured.In 3 two sides of conductive film, visit
Vertical space between head and conductive film 3 is equivalent with two sections of air transfer lines, and propagation constant and characteristic impedance are kz0=ω/
c、Zc0=(μ0/ε0)0.5, according to the definition of abcd matrix, have
In above formula, since field parallel component is equal everywhere, there is EI=EII。EII、HI、HIIFor measured value of popping one's head in, Zc0、kz0、
d1、d23 surface conductivity σ of conductive film can be solved by carrying out inverse operation to the above matrix for known quantity.Particularly, when
Probe with conductive film 3 at a distance from less than λ/20 when, above formula can abbreviation be
I.e.
Using test method as described above, two examples calculated using the data of three-dimensional full-wave emulation are shown below.
As shown in Figure 3, it is assumed that having a sheet resistance is 50 Ω/square, and surface conductivity is the conductive film of 0.02S, benefit
With the plane wave of electromagnetic horn transmitting 6GHz, vertical irradiation is on film.Respectively in the two sides up and down of film, vertical range film
At 1mm, horizontal component of electric field and horizontal magnetic field (E are extractedII、HI、HII).It is each on film by carrying out inverse operation to formula (1)
Position solves the surface conductivity of film, as shown in Figure 5.Surface conductivity shown in fig. 5 is a certain moment, and film surface is not
With the local conductivity at position.
Similarly, it in Fig. 4, keeps other settings constant, is to be extracted level at 0.2mm in film two sides vertical range
Electric field and horizontal magnetic field, and by same principle, the surface conductivity of film is solved, as shown in Figure 6.
From figs. 5 and 6, it can be seen that solving obtained surface conductivity in the value of most of domain on 0.02S
Under, illustrate the method for the utility model precision with higher.
Claims (6)
1. a kind of test device for extracting conductive film surface conductivity based on electromagnetic field near field, which is characterized in that be in conduction
Electromagnetic Launching source is arranged in the side of film, emits the direction direction of electromagnetic wave and perpendicular to conductive film；Electromagnetic Launching source with
The spacing of conductive film is greater than 2 λ, and λ is the wavelength for emitting electromagnetic wave；Magnetic field is placed in two sides respectively above and below horizontal conductive film
Near field probes and electric field near field probes, two probes spacing identical as conductive film holding, the line of the two is perpendicular to conductive thin
Film.
2. test device according to claim 1, which is characterized in that be to have both the detection of magnetic field near field with electric field near field and visit
The probe of brake substitutes the magnetic field near field probes and/or electric field near field probes.
3. test device according to claim 1, which is characterized in that line and conductive film phase between two probes
It hands over, the direction of the launch in Electromagnetic Launching source intersects with conductive film, and the distance between two crosspoints are not more than DMAX/ 2, DMAXFor hair
Penetrate the maximum caliber in source.
4. test device according to claim 1, which is characterized in that the Electromagnetic Launching source is electromagnetic horn.
5. test device according to claim 1, which is characterized in that the spacing of described two probes and conductive film is less than
Electromagnetic Launching source is at a distance from conductive film.
6. according to claim 1 to test device described in 5 any one, which is characterized in that described two probes lead to respectively
It crosses signal wire and is connected to industrial personal computer, the Electromagnetic Launching source is connected to controller by signal wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821457164.7U CN209117761U (en) | 2018-09-06 | 2018-09-06 | A kind of test device for extracting conductive film surface conductivity based on electromagnetic field near field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821457164.7U CN209117761U (en) | 2018-09-06 | 2018-09-06 | A kind of test device for extracting conductive film surface conductivity based on electromagnetic field near field |
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| Publication Number | Publication Date |
|---|---|
| CN209117761U true CN209117761U (en) | 2019-07-16 |
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| CN201821457164.7U Expired - Fee Related CN209117761U (en) | 2018-09-06 | 2018-09-06 | A kind of test device for extracting conductive film surface conductivity based on electromagnetic field near field |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109358233A (en) * | 2018-09-06 | 2019-02-19 | 浙江大学 | Conductive film surface conductivity test device and method are extracted based on electromagnetic field near field |
-
2018
- 2018-09-06 CN CN201821457164.7U patent/CN209117761U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109358233A (en) * | 2018-09-06 | 2019-02-19 | 浙江大学 | Conductive film surface conductivity test device and method are extracted based on electromagnetic field near field |
| CN109358233B (en) * | 2018-09-06 | 2024-05-17 | 浙江大学 | Device and method for testing surface conductivity of conductive film based on electromagnetic field near field extraction |
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