CN109358233B - Device and method for testing surface conductivity of conductive film based on electromagnetic field near field extraction - Google Patents
Device and method for testing surface conductivity of conductive film based on electromagnetic field near field extraction Download PDFInfo
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- 238000012360 testing method Methods 0.000 title claims abstract description 31
- 230000005672 electromagnetic field Effects 0.000 title claims abstract description 12
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- 238000000605 extraction Methods 0.000 title claims description 7
- 239000000523 sample Substances 0.000 claims abstract description 76
- 230000005684 electric field Effects 0.000 claims abstract description 44
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- 230000005540 biological transmission Effects 0.000 claims description 12
- 239000011159 matrix material Substances 0.000 claims description 8
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- PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 claims description 3
- GZPBVLUEICLBOA-UHFFFAOYSA-N 4-(dimethylamino)-3,5-dimethylphenol Chemical compound CN(C)C1=C(C)C=C(O)C=C1C GZPBVLUEICLBOA-UHFFFAOYSA-N 0.000 claims description 3
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- 229910021389 graphene Inorganic materials 0.000 description 2
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- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
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- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
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Abstract
The invention relates to a film surface conductivity testing technology, and aims to provide a device and a method for extracting conductive film surface conductivity based on an electromagnetic field near field. The device is characterized in that an electromagnetic emission source is arranged on one side of a conductive film, and the direction of the electromagnetic emission source faces to and is perpendicular to the conductive film; and respectively placing a magnetic field near field probe and an electric field near field probe on the upper side and the lower side of the horizontal conductive film, wherein the two probes and the conductive film keep the same distance, and the connecting line of the two probes is perpendicular to the conductive film. The invention has no strict requirement on the shape and the size of the conductive film, and can solve the problems of higher requirement on the shape processing precision and larger error of the conductive film when the high-frequency test is carried out in the coaxial waveguide. Meanwhile, the invention can measure the surface conductivity of the conductive film at any position, any frequency and any time to obtain the distribution condition of the surface conductivity of the film along with the position, the frequency and the time, thereby being beneficial to improving the reliability and the stability of the application of the film.
Description
Technical Field
The invention relates to a film surface conductivity test technology, in particular to a test device and a method for extracting the surface conductivity of a conductive film based on an electromagnetic field near field, which accurately measure the local conductivity of the film surface relative to the position and the frequency by adopting the electromagnetic field near field test.
Background
The conductive film is widely applied in the field of flexible electronic industry, and the demand is urgent. The most commonly used conductive films in the industry at present are Indium Tin Oxide (ITO) films, fluorine doped tin oxide (FTO) films, graphene and other two-dimensional material films, and the conductivity of the films is one of the key influencing factors of the films applied to products such as screen display, screen touch and solar cells. The high-quality electronic film is produced in a large scale, so that not only is precise flow control needed in production, but also efficient quantitative tests on different products and different batches are needed. The current testing method comprises the steps of testing in cavities such as coaxial cavities and waveguides, and has higher requirements on the shape processing precision of the conductive film and larger influence on the processing error degree testing result.
In the field of leading edge research of electromagnetic fields and electromagnetic waves, there are a great deal of theoretical researches on novel two-dimensional conductive films, which comprise graphene, molybdenum disulfide, hexagonal boron nitride and the like, and are widely used in theory for designing novel waveguides, novel antennas, novel filters and other passive devices. At present, the production quality of these novel films is unstable and the production scale is small, so that the conductivity of these films is more required to be strictly regulated and finely measured in production and design.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects in the prior art and providing a device and a method for testing the surface conductivity of a conductive film based on electromagnetic field near field extraction.
In order to solve the technical problems, the invention adopts the following solutions:
The device for testing the surface conductivity of the conductive film based on the near field extraction of the electromagnetic field is provided, wherein an electromagnetic emission source is arranged on one side of the conductive film, and the direction of the electromagnetic wave emission source faces towards and is perpendicular to the conductive film; the distance between the electromagnetic emission source and the conductive film is larger than 2λ, where λ is the wavelength of the emitted electromagnetic wave; and respectively placing a magnetic field near field probe and an electric field near field probe on the upper side and the lower side of the horizontal conductive film, wherein the two probes and the conductive film keep the same distance, and the connecting line of the two probes is perpendicular to the conductive film.
In the invention, a probe with the functions of magnetic field near field detection and electric field near field detection is used for replacing the magnetic field near field probe and/or the electric field near field probe.
In the invention, a connecting line between two probes is intersected with the conductive film, the emitting direction of the electromagnetic emitting source is intersected with the conductive film, and the distance between two intersecting points is not more than D MAX/2,DMAX which is the maximum caliber of the emitting source.
In the invention, the electromagnetic emission source is a horn antenna.
In the invention, the distance between the two probes and the conductive film is smaller than the distance between the electromagnetic emission source and the conductive film.
In the invention, the two probes are respectively connected to the industrial personal computer through signal wires, and the electromagnetic emission source is connected to the controller through the signal wires.
The invention further provides a testing method for realizing the near-field extraction of the surface conductivity of the conductive film based on the electromagnetic field by utilizing the device, which comprises the steps of irradiating the conductive film by utilizing electromagnetic waves emitted by an electromagnetic emission source to generate induced current on the surface of the conductive film, and measuring the amplitude and the phase of a horizontal magnetic field and a horizontal electric field formed by the induced current on two sides of the conductive film through a magnetic field near-field probe and an electric field near-field probe; finally, calculating to obtain the surface conductivity of the conductive film by using the measurement data;
The method specifically comprises the following steps:
(1) The electromagnetic emission source is utilized to emit electromagnetic waves to the conductive film outside the distance of 2 lambda, so that the electromagnetic waves are ensured to be equivalent to plane waves when the electromagnetic waves irradiate to the conductive film;
(2) Measuring the amplitude and the phase of the horizontal magnetic field and the amplitude and the phase of the horizontal electric field at the equidistant positions on the two sides of the film by using a probe; calculating to obtain the surface current of the film by using the amplitude and the phase of the horizontal magnetic field and calculating to obtain the surface electric field by using the amplitude and the phase of the horizontal electric field through the transmission line theory and the boundary condition; further obtaining the surface conductivity at the intersection point of the connecting line between the two probes and the conductive film through the surface electric field and the surface current;
(3) And (3) synchronously changing the positions of the two probes, and repeating the operations of the steps (1) and (2), so as to obtain the surface conductivity of the conductive film at different positions.
In the invention, before the test work starts, the vector network analyzer and the standard component are utilized to calibrate the two probes so as to accurately measure the corresponding data of the electric field and the magnetic field.
In the invention, the surface current and the surface electric field of the film are obtained through transmission line theory and boundary condition calculation, and concretely refer to:
Placing two probes above and below the conductive film respectively, wherein the distance between the probes and the conductive film is d 1 and d 2 respectively; the horizontal electric field and the magnetic field tested by the two probes are respectively marked as (E I、HI) and (E II、HII);
in the direction perpendicular to the conductive film, the conductive film is equivalent by a resistor, the resistance value of the resistor is R eq＝1/σ,Req which is the surface conductivity of the conductive film to be tested, and sigma is the surface conductivity of the conductive film to be tested; the vertical space between the probe and the conductive film is equivalent by two sections of air transmission lines, and the propagation constant and the characteristic impedance of the air transmission lines are k z0＝ω/c、Zc0＝(μ0/ε0)0.5 respectively; where ω=2pi f is the angular frequency, f is the frequency of the emitted electromagnetic wave, c is the speed of light in vacuum, μ 0 is the vacuum permeability, and ε 0 is the vacuum dielectric constant.
According to the definition of the ABCD matrix:
In the above formula, E I＝EII is arranged because the parallel components of the electric field are equal everywhere; wherein E II、HI、HII is the measured value of the probe, and Z c0、kz0、d1、d2 is a known quantity; j is an imaginary unit symbol.
And solving to obtain the surface conductivity sigma of the film by carrying out inverse operation on the matrix.
In the invention, when the distance between the probe and the conductive film is smaller than lambda/20, the matrix is further simplified into
I.e.
And solving according to a formula (3) to obtain the surface conductivity sigma of the film.
Description of the implementation principle of the invention:
The conductive film material is placed in a free space, an excitation source emits plane waves from above the film, and when the plane waves irradiate to the surface of the film material, a horizontal electric field with certain strength is formed on the upper side and the lower side of the film due to reflection and transmission of an electric field on the surface of the film; the horizontal electric field excites the surface current of the film material, and the amplitude and phase of the surface current depend on the surface conductivity of the material; the surface current can cause abrupt changes of the magnetic fields on the upper surface and the lower surface of the film; therefore, under the irradiation of a certain plane wave, the films with different surface conductivities have different corresponding surface horizontal electric field and horizontal magnetic field information, and the surface conductivities of the films can be reversely deduced through testing the electric field and the magnetic field.
The testing steps of the invention are as follows: firstly, calibrating a magnetic field near field probe and an electric field near field probe by using a vector network analyzer and a standard component so as to measure the true values of an electric field and a magnetic field; then, electromagnetic emission sources (such as horn antennas) are utilized to emit electromagnetic waves outside a plurality of wavelengths, so that the electromagnetic waves can be equivalent to plane waves when the electromagnetic waves irradiate the film; further, the amplitude and phase of the horizontal magnetic field are respectively tested by using a magnetic field near field probe at a certain position, which is vertical to the film, above and below the film, and the amplitude and phase of the horizontal electric field are tested by using an electric field near field probe at the same position below the film. Finally, the surface current and the surface electric field of the film can be deduced through the transmission line theory and the boundary condition, and then the surface conductivity of the film is solved.
The surface conductivity obtained from this test is the conductivity at a point on the film that is directly above/below the probe. By changing the test position of the probe, the surface conductivity at different positions of the film can be obtained.
Meanwhile, the surface conductivity obtained by the test is the conductivity at the emission frequency of the electromagnetic emission source. By changing the emission frequency of the electromagnetic emission source and simultaneously testing the amplitude and the phase of the horizontal magnetic field and the horizontal electric field under the corresponding frequency by using the near-field probe, the surface conductivity of the film under different frequencies can be deduced.
The horizontal electric field and the horizontal magnetic field above and below the film can be measured simultaneously by utilizing the multi-component probe, so that the surface conductivity of the film at a certain moment can be obtained, and the surface conductivity of the film at different moments can be obtained by changing the testing moment.
Compared with the prior art, the invention has the beneficial effects that:
The invention has no strict requirement on the shape and the size of the conductive film, and can solve the problems of higher requirement on the shape processing precision and larger error of the conductive film when the high-frequency test is carried out in the coaxial waveguide. Meanwhile, the invention can measure the surface conductivity of the conductive film at any position, any frequency and any time, can obtain the distribution condition of the surface conductivity of the film along with the position, the frequency and the time, and is beneficial to improving the reliability and the stability of the application of the film.
Drawings
FIG. 1 is a schematic diagram of a test apparatus according to the present invention.
Fig. 2 is an electromagnetic schematic diagram of the present invention.
Fig. 3 is a schematic view of an embodiment probe 1mm from a conductive film to be tested.
Fig. 4 is a schematic view of an embodiment probe 0.2mm from a conductive film to be tested.
Fig. 5 is the surface conductivity obtained when the probe of the example is 1mm from the conductive film to be measured.
FIG. 6 is the surface conductivity obtained when the probe of the example is 0.2mm from the conductive film to be measured.
Reference numerals in fig. 1:1 an electromagnetic emission source; 2 near field probes above the film (for testing the amplitude and phase of horizontal electric and magnetic fields above the film); 3, a conductive film; 4 near field probes below the film (for testing the amplitude and phase of horizontal electric and magnetic fields below the film).
Detailed Description
The invention will be described in further detail with reference to the accompanying drawings and specific examples.
The invention is based on the testing device of the surface conductivity of the conductive film of near field extraction of electromagnetic field, set up the electromagnetic emission source 1 on one side of the conductive film 3, its direction to emit electromagnetic wave is oriented and perpendicular to conductive film 3; the interval between the electromagnetic emission source 1 and the conductive film 3 is larger than 2λ, where λ is the wavelength of the emitted electromagnetic wave; near field probes 2 and near field probes 4 are respectively placed on the upper side and the lower side of a horizontal conductive film 3, the distance between the two probes and the conductive film 3 is kept the same (the distance between the two probes and the conductive film is not greater than the distance between an electromagnetic emission source and the conductive film), a connecting line of the two probes is perpendicular to the conductive film 3 and intersects with the conductive film 3, the emission direction of the electromagnetic emission source 1 intersects with the conductive film 3, and the distance between the two intersecting points is not greater than D MAX/2,DMAX and is the maximum caliber of the emission source.
The electromagnetic emission source 1 is optionally a horn antenna and is connected to a controller thereof through a signal line. The two probes are respectively connected to the industrial personal computer through signal wires. The magnetic field near field probe and/or the electric field near field probe can be replaced by a probe with magnetic field near field detection and electric field near field detection functions.
Specific implementation examples:
The measuring device of the invention is schematically shown in fig. 1, and uses a horn antenna as an electromagnetic emission source 1, and is arranged at a certain position above a conductive film 3. Two probes are respectively arranged above and below the conductive film 3, and are respectively d 1 and d 2 away from the conductive film 3. The electric and magnetic fields tested by the two probes are designated (E I、HI) and (E II、HII), respectively.
In the direction perpendicular to the conductive film 3, the device can be equivalent with a transmission line model as shown in fig. 2. The conductive film 3 is equivalent by a resistor, the resistance value of which is R eq =1/sigma, and sigma is the surface conductivity of the film to be measured. On both sides of the conductive film 3, the vertical space between the probe and the conductive film 3 is equivalent by two sections of air transmission lines, the propagation constant and the characteristic impedance are k z0＝ω/c、Zc0＝(μ0/ε0)0.5, and according to the definition of ABCD matrix, there are
In the above equation, since the parallel components of the electric field are equal everywhere, E I＝EII.EII、HI、HII is the measured value of the probe, Z c0、kz0、d1、d2 is a known quantity, and the surface conductivity σ of the conductive film 3 can be solved by performing the inverse operation on the above matrix. In particular, when the distance between the probe and the conductive film 3 is less than λ/20, the above can be simplified as
I.e.
Using the test method described above, two examples of data calculations using three-dimensional full-wave simulation are shown below.
As shown in fig. 3, assuming a conductive film having a surface resistance of 50 Ω/square and a surface conductivity of 0.02S, a plane wave of 6GHz was emitted by a horn antenna and irradiated perpendicularly to the film. And extracting a horizontal electric field and a horizontal magnetic field (E II、HI、HII) at the upper side and the lower side of the film respectively and at a position which is 1mm away from the film vertically. The surface conductivity of the film was solved at each position on the film by performing the inverse operation with the formula (1), as shown in fig. 5. The surface conductivity shown in fig. 5 is the local conductivity at different locations on the surface of the film at a certain point in time.
Similarly, in fig. 4, the other settings were kept unchanged, the horizontal electric field and the horizontal magnetic field were extracted at the vertical distance of 0.2mm on both sides of the thin film, and the surface conductivity of the thin film was solved by the same principle, as shown in fig. 6.
As can be seen from fig. 5 and fig. 6, the values of the surface conductivities obtained by solving are about 0.02S in most of the solving areas, which indicates that the method of the invention has higher precision.
Claims (7)
1. A testing device for extracting the surface conductivity of a conductive film based on an electromagnetic field near field is characterized in that an electromagnetic emission source is arranged on one side of the conductive film, and the direction of the electromagnetic emission source emits electromagnetic waves is oriented to and perpendicular to the conductive film; the distance between the electromagnetic emission source and the conductive film is larger than 2λ, where λ is the wavelength of the emitted electromagnetic wave; respectively placing a magnetic field near field probe and an electric field near field probe on the upper side and the lower side of the horizontal conductive film, keeping the same distance between the two probes and the conductive film, and enabling a connecting line of the two probes to be perpendicular to the conductive film;
The connecting line between the two probes is intersected with the conductive film, the emitting direction of the electromagnetic emitting source is intersected with the conductive film, and the distance between the two intersecting points is not more than D MAX/2,DMAX which is the maximum caliber of the emitting source; the distance between the two probes and the conductive film is smaller than the distance between the electromagnetic emission source and the conductive film; the electromagnetic emission source is a horn antenna.
2. The test device according to claim 1, wherein the magnetic field near field probe and/or the electric field near field probe is replaced by a probe having both magnetic field near field detection and electric field near field detection functions.
3. The test device according to claim 1 or 2, wherein the two probes are connected to the industrial personal computer through signal lines, respectively, and the electromagnetic emission source is connected to the controller through signal lines.
4. The method for realizing the test of the surface conductivity of the conductive film based on the near field extraction of the electromagnetic field by using the device according to the claim 1 is characterized in that electromagnetic waves emitted by an electromagnetic emission source are utilized to irradiate the conductive film so as to generate induced current on the surface of the conductive film, and the amplitude and the phase of a horizontal magnetic field and a horizontal electric field formed by the induced current on two sides of the conductive film are measured by a magnetic field near field probe and an electric field near field probe; finally, calculating to obtain the surface conductivity of the conductive film by using the measurement data;
The method specifically comprises the following steps:
(1) The electromagnetic emission source is utilized to emit electromagnetic waves to the conductive film outside the distance of 2 lambda, so that the electromagnetic waves are ensured to be equivalent to plane waves when the electromagnetic waves irradiate to the conductive film;
(2) Measuring the amplitude and the phase of the horizontal magnetic field and the amplitude and the phase of the horizontal electric field at the equidistant positions on the two sides of the film by using a probe; calculating to obtain the surface current of the film by using the amplitude and the phase of the horizontal magnetic field and calculating to obtain the surface electric field by using the amplitude and the phase of the horizontal electric field through the transmission line theory and the boundary condition; further obtaining the surface conductivity at the intersection point of the connecting line between the two probes and the conductive film through the surface electric field and the surface current;
(3) And (3) synchronously changing the positions of the two probes, and repeating the operations of the steps (1) and (2), so as to obtain the surface conductivity of the conductive film at different positions.
5. The method of claim 4, wherein the two probes are calibrated using a vector network analyzer and standard before the test operation is started, so that the corresponding data of the electric field and the magnetic field can be accurately measured.
6. The method according to claim 4, wherein the surface current and the surface electric field of the thin film are calculated by transmission line theory and boundary conditions, specifically:
Placing two probes above and below the conductive film respectively, wherein the distance between the probes and the conductive film is d 1 and d 2 respectively; the horizontal electric field and the magnetic field tested by the two probes are respectively marked as (E I、HI) and (E II、HII);
In the direction perpendicular to the conductive film, the conductive film is equivalent by a resistor, the resistance value of the resistor is R eq＝1/σ,Req which is the surface conductivity of the conductive film to be tested, and sigma is the surface conductivity of the conductive film to be tested; the vertical space between the probe and the conductive film is equivalent by two sections of air transmission lines, and the propagation constant and the characteristic impedance of the air transmission lines are k z0＝ω/c、Zc0＝(μ0/ε0)0.5 respectively; wherein ω=2pi f is angular frequency, f is emitted electromagnetic wave frequency, c is light velocity in vacuum, μ 0 is vacuum permeability, ε 0 is vacuum dielectric constant;
According to the definition of the ABCD matrix:
In the above formula, E I＝EII is arranged because the parallel components of the electric field are equal everywhere; wherein E II、HI、HII is the measured value of the probe, and Z c0、kz0、d1、d2 is a known quantity; j is an imaginary unit symbol;
and solving to obtain the surface conductivity sigma of the film by carrying out inverse operation on the matrix.
7. The method of claim 6, wherein the matrix is further reduced to a value of λ/20 when the probe is less than a distance of λ/20 from the conductive film
I.e.
And solving according to a formula (3) to obtain the surface conductivity sigma of the film.
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