CN209115315U - Mems pump module - Google Patents
Mems pump module Download PDFInfo
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- CN209115315U CN209115315U CN201822029951.8U CN201822029951U CN209115315U CN 209115315 U CN209115315 U CN 209115315U CN 201822029951 U CN201822029951 U CN 201822029951U CN 209115315 U CN209115315 U CN 209115315U
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- mems pump
- common electrode
- electrode
- mems
- voltage
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Abstract
A kind of mems pump module includes: a microprocessor, exports certain voltage and a time variant voltage；One mems chip is electrically connected the microprocessor, which includes: a chip body；Multiple mems pumps are set to the chip body, and are respectively provided with a first electrode and a second electrode；And an at least common electrode, it is set to the second electrode of the chip body and the multiple mems pump of electrical connection；Wherein, which is electrically connected first electrode and an at least common electrode of multiple mems pump, to transmit the constant voltage to an at least common electrode and transmit the first electrode that the power transformation is depressed into multiple mems pump.
Description
[technical field]
About a kind of mems pump module, the espespecially a kind of setting using common electrode reduces connecing for microprocessor for this case
Point, and then simplify the mems pump module of mems pump contact and wiring.
[background technique]
With making rapid progress for science and technology, the application also more and more diversification of fluid delivery system, industrial application, life are cured such as
Using, health care, electronic radiation etc., or even the recently popular all visible Ta COPA shadow of wearable device, it is seen that it is traditional
Pump has had the tendency that gradually towards device microminiaturization, but traditional pump is difficult to size reduction to millimetre grade, therefore at present micro-
Type fluid delivery system is only capable of using piezoelectricity pump configuration as minisize fluid transmitting device.
And though mems pump can be by the volume microminiaturization of pump to micron grade, the mems pump of micron grade can be because of mistake
Small volume and limit fluid transmission quantity, therefore the collocation of multiple mems pumps is needed to use, please referred to shown in Fig. 1, current microcomputer
Electric pump module is all unit control to be done by an advanced microprocessors 1, but advanced microprocessors 1 itself are at high cost, and each
Mems pump 2 all has to two microprocessor pins 11 and connects, and increases the cost of advanced microprocessors 1,
Cause mems pump module cost high, it is difficult to it is universal, therefore, how to reduce the driving of mems pump module
The cost at end is the difficulty that current mems pump primarily overcomes.
[utility model content]
The main purpose of this case is to provide a kind of mems pump module, and connecing for microprocessor is reduced by common electrode
Point reduces contact and the wiring of mems pump module, is further simplified mems pump module.
In order to achieve the above object, the broader state sample implementation of this case is to provide a kind of mems pump module, include: a micro process
Device exports certain voltage and a time variant voltage；One mems chip is electrically connected the microprocessor, which includes: a core
Piece ontology；Multiple mems pumps are set to the chip body, and are respectively provided with a first electrode and a second electrode；And extremely
A few common electrode is set to the second electrode of the chip body and the multiple mems pump of electrical connection；Wherein, the microprocessor
Be electrically connected first electrode and an at least common electrode of multiple mems pump, with transmit the constant voltage to this at least one
Common electrode and transmit the first electrode that the power transformation is depressed into multiple mems pump.
[Detailed description of the invention]
Fig. 1 is the schematic diagram of mems pump module in prior art.
Fig. 2 is the schematic diagram of this case mems pump module.
Fig. 3 is the second embodiment schematic diagram of the mems chip of this case mems pump module.
Fig. 4 is the 3rd embodiment schematic diagram of the mems chip of this case mems pump module.
Fig. 5 is the fourth embodiment schematic diagram of the mems chip of this case mems pump module.
Fig. 6 is the 5th embodiment schematic diagram of the mems chip of this case mems pump module.
Fig. 7 is the sixth embodiment schematic diagram of the mems chip of this case mems pump module.
Fig. 8 A is the electrical connection schematic diagram of this case mems pump.
Fig. 8 B is the first embodiment schematic diagram of the control signal of this case microprocessor output.
Fig. 8 C is the second embodiment schematic diagram of the control signal of this case microprocessor output.
Fig. 8 D is the 3rd embodiment schematic diagram of the control signal of this case microprocessor output.
[embodiment]
The some exemplary embodiments for embodying this case features and advantages will describe in detail in the explanation of back segment.It should be understood that
This case can have various variations in different aspects, all not depart from the range of this case, and explanation therein and diagram
It is illustrated as being used in itself, rather than to limit this case.
Referring to FIG. 2, Fig. 2 is the schematic diagram of this case mems pump module.Mems pump module 100 includes: a micro process
Device 3, a mems chip 4, mems chip 4 be electrically connected microprocessor 3, and mems chip 4 include a chip body 41,
Multiple mems pumps 42 and at least a common electrode 43, mems pump 42 is all arranged on chip body 41, and each mems pump
42 are respectively provided with an a first electrode 42a and second electrode 42b, and an at least common electrode 43 be also set to chip body 41 and
It is electrically connected the second electrode 42b of all mems pumps 42, wherein the first electrode 42a and chip body of all mems pumps 42
An at least common electrode 43 on 41 is electrically connected to microprocessor 3, to receive the control signal that microprocessor 3 is issued, in addition, figure
2 are similarly the first embodiment schematic diagram of this case, and at least quantity of a common electrode 43 includes one first common electrode 43a, this implementation
43 quantity of common electrode of example is one, and the second electrode 42b of all mems pumps 42 is all electrically connected to the first common electrode 43a.
It please referring to shown in Fig. 3, Fig. 3 is the second embodiment schematic diagram of the mems chip of this case mems pump module, until
A few common electrode 43 includes the first common electrode 43a and one second common electrode 43b, and multiple mems pumps 42 above-mentioned are according to position area
It is divided into one first mems pump group 421 and one second mems pump group 422, wherein being located at the first mems pump group 421
Interior its second electrode of mems pump 42 42b is all electrically connected to the first common electrode 43a, and is located at the second mems pump group 422
Interior its second electrode of mems pump 42 42b is all electrically connected to the second common electrode 43b, so as to achieving the effect that zonal control, this
The quantity of the common electrode 43 of embodiment is two.
It please referring to shown in Fig. 4, Fig. 4 is the 3rd embodiment schematic diagram of the mems chip of this case mems pump module, the
Three embodiments common electrode 43 identical as second embodiment is all two, therefore common electrode 43 is total with the first common electrode 43a and second
Electrode 43b, the first common electrode 43a and the second common electrode 43b are separately positioned in the two sides of chip body 41, and the first common electrode
43a is electrically connected with the second common electrode 43b, and the second electrode 42b of multiple mems pumps 42 above-mentioned is electrically connected is located at two simultaneously
The the first common electrode 43a and the second common electrode 43b of side, 3rd embodiment can reduce the second electrode 42b of mems pump 42 together
Impedance between electrode 43 reduces the power consumption apart from the farther away second electrode 42b of common electrode 43.
It please referring to shown in Fig. 5, Fig. 5 is the fourth embodiment schematic diagram of the mems chip of this case mems pump module, until
A few common electrode 43 includes the first common electrode 43a, the second common electrode 43b, a third common electrode 43c and one the 4th common electrode
43d, the first common electrode 43a and third common electrode 43c are arranged at intervals at the side of chip body 41, the second common electrode 43b and
Four common electrode 43d are arranged at intervals at the other side of chip body 41, and in the present embodiment, and multiple mems pumps above-mentioned 42 are according to position
It sets region and divides into the first mems pump group 421, the second mems pump group 422, a third mems pump group 423 and one
4th mems pump group 424, the first mems pump group 421 are formed by the mems pump 42 of neighbouring first common electrode 43a,
First common electrode 43a supplies the second electrode 42b electrical connection for being located at mems pump 42 all in the first mems pump group 421；
Second mems pump group 422 is formed by the mems pump 42 of neighbouring second common electrode 43b, and the second common electrode 43b is for being located at
The second electrode 42b electrical connection of all mems pumps 42 in second mems pump group 422；Third mems pump group 423 is
The mems pump 42 of neighbouring third common electrode 43c is formed, and third common electrode 43c supplies to be located in third mems pump group 423
The second electrode 42b of all mems pumps 42 is electrically connected；4th mems pump group 424 is neighbouring 4th common electrode 43d
Mems pump 42 is formed, the 4th common electrode 43d supply to be located in the 4th mems pump group 424 all mems pump 42 its
Two electrode 42b electrical connection, so as to achieving the effect that zonal control.
It please referring to shown in Fig. 6, Fig. 6 is the 5th embodiment schematic diagram of the mems chip of this case mems pump module, this
Embodiment is identical with fourth embodiment to have the first common electrode 43a, the second common electrode 43b, third common electrode 43c and the 4th total
Electrode 43d, and its setting position is also identical, discrepancy is that the first common electrode 43a is electrically connected the second common electrode in the present embodiment
43b, third common electrode 43c are electrically connected the 4th common electrode 43d, and it is micro electronmechanical that multiple mems pumps 42 above-mentioned are divided into first
Pump group 421 and the second mems pump group 422, the first mems pump group 421 is neighbouring first common electrode 43a or neighbouring the
The mems pump 42 of two common electrode 43b is formed, and the second mems pump group 422 is neighbouring third common electrode 43c or neighbouring the
The mems pump 42 of four common electrode 43d is formed, and whereby come the effect of reaching zonal control, and reduces common electrode 43 and second electric
The distance between pole 42b reduces the loss of power transmission.
It please referring to shown in Fig. 7, Fig. 7 is the sixth embodiment schematic diagram of the mems chip of this case mems pump module, this
Embodiment is identical as having in fourth embodiment to have the first common electrode 43a, the second common electrode 43b, third common electrode 43c and the
Four common electrode 43d, and its setting position is also identical, discrepancy is the first common electrode 43a, the second common electrode in the present embodiment
43b, third common electrode 43c and the 4th common electrode 43d are all electrically connected to each other, the second electricity of the multiple mems pumps 42 above-mentioned made
Pole 42b is able to be electrically connected apart from its closer common electrode 43, the second electrode of the mems pump 42 of such as neighbouring first common electrode 43a
42b is just electrically connected to the first common electrode 43a, and the second electrode 42b of the mems pump 42 of neighbouring second common electrode 43b is just electrically connected
To the second common electrode 43b, and so on, mems pump 42 similar in 43 supply position of common electrode can reduce each mems pump 42
In the loss of transmission electric power.
It please also refer to shown in Fig. 8 A and Fig. 8 B, Fig. 8 A is the electrical connection schematic diagram of this case mems pump, and Fig. 8 B is this case
The control signal first embodiment schematic diagram of microprocessor output；Mems pump 42 has further included a piezoelectric elements 42c, first electrode
Voltage is transferred to piezoelectric elements 42c by 42a and second electrode 42b, for piezoelectric elements 42c because piezoelectric effect generates deformation, and then is changed
The internal pressure of mems pump 42 is electrically connected to microprocessor 3 to be used to the first electrode 42a of trandfer fluid, mems pump 42
(as shown in Figure 2), second electrode 42b are electrically connected to microprocessor 3 (as shown in Figure 2) by common electrode 43, wherein microprocessor
The 3 control signals exported include certain voltage and a time variant voltage, and in this present embodiment, time variant voltage can be in a first voltage
And the voltage that switches between second voltage, and the voltage value of the constant voltage is between the voltage value of first voltage and the electricity of second voltage
Between pressure value, and the voltage value of constant voltage also can for first voltage voltage value and second voltage voltage value be worth among it ±
10%, for example, when first voltage is 1.5V, and second voltage is -1.5V, constant voltage 0V, first voltage 3V, second
When voltage is 0V, constant voltage 1.5V, so that the second electrode 42b of mems pump 42 receives fixed voltage, first electrode 42a is connect
By the first voltage and second voltage of lasting variation, enable piezoelectric elements 42c can be because holding between first electrode 42a and second electrode 42b
The continuous voltage difference changed generates deformation, to transmit fluid.In addition, being the micro- place of this case please continue to refer to Fig. 8 C and Fig. 8 D, Fig. 8 C
The control signal second embodiment schematic diagram of device output is managed, Fig. 8 D is the control signal 3rd embodiment of this case microprocessor output
Schematic diagram, time variant voltage can also be the voltage of the consecutive variations between first voltage and second voltage, and control signal is in addition to the
Outside the square wave of one embodiment, triangular wave (Fig. 8 C) and sine wave (Fig. 8 D) also can be used.
In conclusion this case provides a kind of mems pump module, microprocessor is allowed to be transferred to constant voltage via common electrode
The second electrode of mems pump, then transmit the first electrode that power transformation is depressed into mems pump, it is only necessary to the voltage in modulation first electrode,
The voltage difference between first electrode and second electrode can be changed, be successfully driven the piezoelectric elements of mems pump, pass its actuation
Transporting fluid, can be greatly decreased the pin of microprocessor by the setting of common electrode, in the case where the cost for reducing microprocessor, still
Multiple mems pumps can be efficiently controlled.
This case as the personage Ren Shi craftsman for being familiar with this technology thinks and be it is all as modify, it is so neither de- such as attached claim
Be intended to Protector.
[symbol description]
100: mems pump module
1: advanced microprocessors
11: microprocessor pin
2: mems pump
3: microprocessor
4: mems chip
41: chip body
42: mems pump
42a: first electrode
42b: second electrode
42c: piezoelectric elements
421: the first mems pump groups
422: the second mems pump groups
423: third mems pump group
424: the four mems pump groups
43: common electrode
43a: the first common electrode
43b: the second common electrode
43c: third common electrode
43d: the four common electrode
Claims (13)
1. a kind of mems pump module, characterized by comprising:
One microprocessor exports certain voltage and a time variant voltage；
One mems chip is electrically connected the microprocessor, which includes:
One chip body；
Multiple mems pumps are set to the chip body, and are respectively provided with a first electrode and a second electrode；And
An at least common electrode is set to the second electrode of the chip body and the multiple mems pump of electrical connection；
Wherein, which is electrically connected first electrode and an at least common electrode of multiple mems pump, to pass
The defeated constant voltage is to an at least common electrode and transmits the first electrode that the power transformation is depressed into multiple mems pump.
2. mems pump module as described in claim 1, which is characterized in that an at least common electrode includes one first common-battery
Pole.
3. mems pump module as claimed in claim 2, which is characterized in that the second electrode of multiple mems pump is electrically connected
First common electrode.
4. mems pump module as claimed in claim 2, which is characterized in that an at least common electrode further includes one second common-battery
Pole.
5. mems pump module as claimed in claim 4, which is characterized in that it is micro- that multiple mems pump can divide into one first
Electro-mechanical pump group and one second mems pump group, multiple second electrode of the first mems pump group be electrically connected this first
Common electrode, multiple second electrode of the second mems pump group are electrically connected second common electrode.
6. mems pump module as claimed in claim 4, which is characterized in that the second electrode of multiple mems pump is electrically connected
First common electrode and second common electrode.
7. mems pump module as claimed in claim 4, which is characterized in that an at least common electrode further includes a third common-battery
Pole and one the 4th common electrode.
8. mems pump module as claimed in claim 7, which is characterized in that it is micro- that multiple mems pump can divide into one first
Electro-mechanical pump group, one second mems pump group, a third mems pump group and one the 4th mems pump group, this is first micro-
Multiple second electrode of electro-mechanical pump group is electrically connected first common electrode, multiple second electricity of the second mems pump group
Pole is electrically connected second common electrode, and multiple second electrode of the third mems pump group is electrically connected the third common electrode, should
Multiple second electrode of 4th mems pump group is electrically connected the 4th common electrode.
9. mems pump module as claimed in claim 7, which is characterized in that it is micro- that multiple mems pump can divide into one first
Electro-mechanical pump group and one second mems pump group, multiple second electrode of the first mems pump group be electrically connected this first
Common electrode and second common electrode, multiple second electrode of the second mems pump group are electrically connected the third common electrode and are somebody's turn to do
4th common electrode.
10. mems pump module as claimed in claim 7, which is characterized in that the second electrode electricity of multiple mems pump
Connect first common electrode, second common electrode, the third common electrode and the 4th common electrode.
11. mems pump module as described in claim 1, which is characterized in that the time variant voltage includes a first voltage and one
Second voltage, the voltage value of the constant voltage is between the first voltage and the second voltage.
12. mems pump module as claimed in claim 11, which is characterized in that the voltage value of the constant voltage is the first voltage
Voltage value and the voltage value of the second voltage be worth ± 10% among it.
13. mems pump module as claimed in claim 11, which is characterized in that the voltage value of the constant voltage is the first voltage
Voltage value and the voltage value of the second voltage be worth among it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822029951.8U CN209115315U (en) | 2018-12-05 | 2018-12-05 | Mems pump module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822029951.8U CN209115315U (en) | 2018-12-05 | 2018-12-05 | Mems pump module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209115315U true CN209115315U (en) | 2019-07-16 |
Family
ID=67207513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822029951.8U Withdrawn - After Issue CN209115315U (en) | 2018-12-05 | 2018-12-05 | Mems pump module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209115315U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111271265A (en) * | 2018-12-05 | 2020-06-12 | 研能科技股份有限公司 | Micro-electromechanical pump module |
-
2018
- 2018-12-05 CN CN201822029951.8U patent/CN209115315U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111271265A (en) * | 2018-12-05 | 2020-06-12 | 研能科技股份有限公司 | Micro-electromechanical pump module |
| CN111271265B (en) * | 2018-12-05 | 2022-07-29 | 研能科技股份有限公司 | Microcomputer electric pump module |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20190716 Effective date of abandoning: 20220729 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20190716 Effective date of abandoning: 20220729 |