CN209100243U - Mems pump module - Google Patents
Mems pump module Download PDFInfo
- Publication number
- CN209100243U CN209100243U CN201822029923.6U CN201822029923U CN209100243U CN 209100243 U CN209100243 U CN 209100243U CN 201822029923 U CN201822029923 U CN 201822029923U CN 209100243 U CN209100243 U CN 209100243U
- Authority
- CN
- China
- Prior art keywords
- electrode
- common electrode
- mems pump
- mems
- electrically connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Landscapes
- Micromachines (AREA)
Abstract
A kind of mems pump module includes: a microprocessor, issues a control signal；One mems chip is electrically connected the microprocessor, which includes: a chip body, is a rectangle aspect, has a short side；Multiple mems pumps are set to the chip body, and are respectively provided with a first electrode and a second electrode；Multiple connection electrodes, are set to the chip body and the neighbouring short side, multiple connection electrode are electrically connected the first electrode of multiple mems pump；And an at least common electrode, it is set to the chip body and the neighbouring short side, an at least common electrode is electrically connected the second electrode of multiple mems pump；Wherein, which is electrically connected multiple connection electrode and an at least common electrode, to transmit the control signal to multiple mems pump.
Description
[technical field]
About a kind of mems pump module, the espespecially a kind of setting using common electrode reduces connecing for microprocessor for this case
Point, and then simplify the mems pump module of mems pump contact and wiring.
[background technique]
With making rapid progress for science and technology, the application also more and more diversification of fluid delivery system, industrial application, life are cured such as
Using, health care, electronic radiation etc., or even the recently popular all visible Ta COPA shadow of wearable device, it is seen that it is traditional
Pump has had the tendency that gradually towards device microminiaturization, but traditional pump is difficult to size reduction to millimetre grade, therefore at present micro-
Type fluid delivery system is only capable of using piezoelectricity pump configuration as minisize fluid transmitting device.
And though mems pump can be by the volume microminiaturization of pump to micron grade, the mems pump of micron grade can be because of mistake
Small volume and limit fluid transmission quantity, therefore the collocation of multiple mems pumps is needed to use, please referred to shown in Fig. 1, current microcomputer
Electric pump module is all unit control to be done by an advanced microprocessors 1, but advanced microprocessors 1 itself are at high cost, and each
Mems pump 2 all has to two microprocessor pins 11 and connects, and increases the cost of advanced microprocessors 1, causes micro electronmechanical
Pump module cost is high, it is difficult to which universal, therefore, how to reduce the cost at the driving end of mems pump module is current microcomputer
The difficulty that electric pump primarily overcomes.
[utility model content]
The main purpose of this case is to provide a kind of mems pump module, and connecing for microprocessor is reduced by common electrode
Point reduces contact and the wiring of mems pump module, is further simplified mems pump module.
In order to achieve the above object, the broader state sample implementation of this case is to provide a kind of mems pump module, include: a micro process
Device issues a control signal；One mems chip is electrically connected the microprocessor, which includes: a chip body,
For a rectangle aspect, there is a short side；Multiple mems pumps are set to the chip body, and are respectively provided with a first electrode
An and second electrode；Multiple connection electrodes, are set to the chip body and the neighbouring short side, multiple connection electrode are electrically connected respectively
Connect the first electrode of multiple mems pump；And an at least common electrode, it is set to the chip body and the neighbouring short side, it should
An at least common electrode is electrically connected the second electrode of multiple mems pump；Wherein, which is electrically connected multiple
Connection electrode and an at least common electrode, to transmit the control signal to multiple mems pump.
[Detailed description of the invention]
Fig. 1 is the schematic diagram of mems pump module in the prior art.
Fig. 2 is the schematic diagram of this case mems pump module.
Fig. 3 is the second embodiment schematic diagram of the mems chip of this case mems pump module.
Fig. 4 is the 3rd embodiment schematic diagram of the mems chip of this case mems pump module.
Fig. 5 is the fourth embodiment schematic diagram of the mems chip of this case mems pump module.
Fig. 6 is the 5th embodiment schematic diagram of the mems chip of this case mems pump module.
Fig. 7 is the sixth embodiment schematic diagram of the mems chip of this case mems pump module.
Fig. 8 A is the electrical connection schematic diagram of this case mems pump.
Fig. 8 B is the first embodiment schematic diagram of the control signal of this case microprocessor output.
Fig. 8 C is the second embodiment schematic diagram of the control signal of this case microprocessor output.
Fig. 8 D is the 3rd embodiment schematic diagram of the control signal of this case microprocessor output.
[specific embodiment]
The some exemplary embodiments for embodying this case features and advantages will describe in detail in the explanation of back segment.It should be understood that
This case can have various variations in different aspects, all not depart from the range of this case, and explanation therein and diagram
It is illustrated as being used in itself, rather than to limit this case.
Referring to FIG. 2, Fig. 2 is the schematic diagram of this case mems pump module.Mems pump module 100 includes: a micro process
Device 3, a mems chip 4.Mems chip 4 be electrically connected microprocessor 3, and mems chip 4 include a chip body 41,
Multiple mems pumps 42, at least a common electrode 43 and multiple connection electrodes 44.Chip body 41 is a rectangle aspect, and is had
There is an a long side 41a and short side 41b.Mems pump 42 is all set on chip body 41, and each mems pump 42 has respectively
There is an a first electrode 42a and second electrode 42b.And an at least common electrode 43 is also set on chip body 41, and neighbouring short
Side 41b, and it is electrically connected the second electrode 42b of all mems pumps 42.Multiple connection electrode 44 is set to chip body 41
And neighbouring short side 41b, multiple connection electrode 44 are electrically connected the first electrode 42a of multiple mems pump 42.Wherein, institute
There are connection electrode 44 and an at least common electrode 43 on chip body 41 to be all respectively electrically connected to microprocessor 3, it is micro- so as to receiving
The control signal that processor 3 is issued.In addition, Fig. 2 is similarly the first embodiment schematic diagram of this case mems chip, at least one
The quantity of common electrode 43 includes one first common electrode 43a.43 quantity of common electrode in the present embodiment is one, and all is micro electronmechanical
The second electrode 42b of pump 42 is all electrically connected to the first common electrode 43a.
It please refers to shown in Fig. 3, Fig. 3 is the second embodiment schematic diagram of the mems chip of this case mems pump module.Extremely
A few common electrode 43 includes the first common electrode 43a and one second common electrode 43b, and multiple mems pumps 42 above-mentioned are according to position area
It is divided into one first mems pump group 421 and one second mems pump group 422, wherein being located at the first mems pump group 421
Interior mems pump 42, second electrode 42b is all electrically connected to the first common electrode 43a, and is located at the second mems pump group 422
Interior mems pump 42, second electrode 42b is all electrically connected to the second common electrode 43b, so as to achieving the effect that zonal control.This
The quantity of common electrode 43 in embodiment is two.
It please refers to shown in Fig. 4, Fig. 4 is the 3rd embodiment schematic diagram of the mems chip of this case mems pump module.The
Three embodiments are identical as second embodiment, and common electrode 43 is all two, therefore common electrode 43 equally has the first common electrode 43a and the
Two common electrode 43b, only the first common electrode 43a and the second common electrode 43b is separately positioned in the two sides of chip body 41, and first is total
Electrode 43a is electrically connected with the second common electrode 43b, and the second electrode 42b of multiple mems pumps 42 above-mentioned is electrically connected position simultaneously
The first common electrode 43a and the second common electrode 43b in two sides.3rd embodiment can reduce the second electrode 42b of mems pump 42
With the impedance between common electrode 43, the power consumption apart from the farther away second electrode 42b of common electrode 43 is reduced.
It please referring to shown in Fig. 5, Fig. 5 is the fourth embodiment schematic diagram of the mems chip of this case mems pump module, until
A few common electrode 43 includes the first common electrode 43a, the second common electrode 43b, a third common electrode 43c and one the 4th common electrode
43d.First common electrode 43a and third common electrode 43c are arranged at intervals at the side of chip body 41, the second common electrode 43b and the
Four common electrode 43d are arranged at intervals at the other side of chip body 41, and in the present embodiment, and multiple mems pumps above-mentioned 42 are according to position
It sets region and divides into the first mems pump group 421, the second mems pump group 422, a third mems pump group 423 and one
4th mems pump group 424.First mems pump group 421 is formed by the mems pump 42 of neighbouring first common electrode 43a,
First common electrode 43a supplies the second electrode 42b electrical connection for being located at mems pump 42 all in the first mems pump group 421；
Second mems pump group 422 is formed by the mems pump 42 of neighbouring second common electrode 43b, and the second common electrode 43b is for being located at
The second electrode 42b electrical connection of all mems pumps 42 in second mems pump group 422；Third mems pump group 423 is
The mems pump 42 of neighbouring third common electrode 43c is formed, and third common electrode 43c supplies to be located in third mems pump group 423
The second electrode 42b of all mems pumps 42 is electrically connected；4th mems pump group 424 is neighbouring 4th common electrode 43d
Mems pump 42 is formed, and the 4th common electrode 43d supplies to be located at the of all mems pump 42 in the 4th mems pump group 424
Two electrode 42b electrical connection, so as to achieving the effect that zonal control.
It please refers to shown in Fig. 6, Fig. 6 is the 5th embodiment schematic diagram of the mems chip of this case mems pump module.This
Embodiment is identical as fourth embodiment, has the first common electrode 43a, the second common electrode 43b, third common electrode 43c and the 4th total
Electrode 43d, and its setting position is also identical, discrepancy is that the first common electrode 43a is electrically connected the second common electrode in the present embodiment
43b, third common electrode 43c are electrically connected the 4th common electrode 43d, and it is micro electronmechanical that multiple mems pumps 42 above-mentioned are divided into first
Pump group 421 and the second mems pump group 422.First mems pump group 421 is neighbouring first common electrode 43a or neighbouring the
The mems pump 42 of two common electrode 43b is formed, and the second mems pump group 422 is neighbouring third common electrode 43c or neighbouring the
The mems pump 42 of four common electrode 43d is formed, and whereby come the effect of reaching zonal control, and reduces common electrode 43 and second electric
The distance between pole 42b reduces the loss of power transmission.
It please referring to shown in Fig. 7, Fig. 7 is the sixth embodiment schematic diagram of the mems chip of this case mems pump module, this
Embodiment is identical as fourth embodiment, has the first common electrode 43a, the second common electrode 43b, third common electrode 43c and the 4th total
Electrode 43d, and it is arranged that position is also identical, and discrepancy is the first common electrode 43a, the second common electrode 43b, the in the present embodiment
Three common electrode 43c and the 4th common electrode 43d is all electrically connected to each other, so that the second electrode 42b of multiple mems pumps 42 above-mentioned
It is able to be electrically connected apart from its closer common electrode 43, the second electrode 42b of the mems pump 42 of such as neighbouring first common electrode 43a is just
It is electrically connected to the first common electrode 43a, the second electrode 42b of the mems pump 42 of neighbouring second common electrode 43b is just electrically connected to the
Two common electrode 43b, and so on, mems pump 42 similar in 43 supply position of common electrode can reduce each mems pump 42 in biography
The loss for power of transmitting electricity.
It please also refer to shown in Fig. 2, Fig. 8 A and Fig. 8 B, Fig. 8 A is the electrical connection schematic diagram of this case mems pump, and Fig. 8 B is
The first embodiment schematic diagram of the control signal of this case microprocessor output.Mems pump 42 has further included a piezoelectric elements 42c, the
Voltage is transferred to piezoelectric elements 42c by one electrode 42a and second electrode 42b, makes piezoelectric elements 42c because piezoelectric effect generates deformation, into
And change the internal pressure of mems pump 42, to be used to trandfer fluid.The first electrode 42a of mems pump 42 passes through connection electrode
44 are electrically connected to microprocessor 3, and second electrode 42b is electrically connected to microprocessor 3 by common electrode 43, wherein 3 institute of microprocessor
The control signal of output includes certain voltage and a time variant voltage.In this present embodiment, time variant voltage can in a first voltage and
The voltage switched between one second voltage, and the voltage value of the constant voltage is between the voltage value of first voltage and the voltage of second voltage
Between value, and the voltage value of constant voltage also can for first voltage voltage value and second voltage voltage value median ±
10%.For example, when first voltage is 1.5V, and second voltage is -1.5V, constant voltage 0V；When first voltage is 3V, the
When two voltages are 0V, constant voltage 1.5V.The second electrode 42b of mems pump 42 receives fixed voltage, and first electrode 42a receives
Time variant voltage of the lasting variation between first voltage and second voltage, enables piezoelectric elements 42c because of first electrode 42a and second electrode
The voltage difference persistently changed between 42b generates deformation, so as to transmitting fluid.In addition, being please continue to refer to Fig. 8 C and Fig. 8 D, Fig. 8 C
The second embodiment schematic diagram of the control signal of this case microprocessor output, Fig. 8 D are the control signal of this case microprocessor output
3rd embodiment schematic diagram.Time variant voltage can also be the voltage of the consecutive variations between first voltage and second voltage, control
Triangular wave (as shown in Figure 8 C) and sine wave (as in fig. 8d) also can be used other than the square wave of first embodiment in signal processed.
In conclusion this case provides a kind of mems pump module, by allowing microprocessor to pass constant voltage via common electrode
It is handed to the second electrode of mems pump, then transmits the first electrode that power transformation is depressed into mems pump, it is only necessary in modulation first electrode
Voltage can change the voltage difference between first electrode and second electrode, be successfully driven the piezoelectric elements of mems pump, make its actuation
To transmit fluid.In addition, the pin of microprocessor can be greatly decreased in the setting of common electrode, and reducing the cost of microprocessor
In the case of, it can still efficiently control multiple mems pumps.
This case as the personage Ren Shi craftsman for being familiar with this technology thinks and be it is all as modify, it is so neither de- such as attached claim
Be intended to Protector.
[symbol description]
100: mems pump module
1: advanced microprocessors
11: microprocessor pin
2: mems pump
3: microprocessor
4: mems chip
41: chip body
41a: long side
41b: short side
42: mems pump
42a: first electrode
42b: second electrode
42c: piezoelectric elements
421: the first mems pump groups
422: the second mems pump groups
423: third mems pump group
424: the four mems pump groups
43: common electrode
43a: the first common electrode
43b: the second common electrode
43c: third common electrode
43d: the four common electrode
44: connection electrode
Claims (10)
1. a kind of mems pump module, characterized by comprising:
One microprocessor issues a control signal；
One mems chip is electrically connected the microprocessor, which includes:
One chip body is a rectangle aspect, has a short side；
Multiple mems pumps are set to the chip body, and are respectively provided with a first electrode and a second electrode；
Multiple connection electrodes are set to the chip body and the neighbouring short side, and multiple connection electrode is electrically connected multiple
The first electrode of mems pump；And
An at least common electrode, is set to the chip body and the neighbouring short side, an at least common electrode are electrically connected multiple microcomputer
The second electrode of electric pump；
Wherein, which is electrically connected multiple connection electrode and an at least common electrode, to transmit the control signal
To multiple mems pump.
2. mems pump module as described in claim 1, which is characterized in that an at least common electrode includes one first common-battery
Pole.
3. mems pump module as claimed in claim 2, which is characterized in that the second electrode of multiple mems pump is electrically connected
Connect first common electrode.
4. mems pump module as claimed in claim 2, which is characterized in that an at least common electrode further includes one second common-battery
Pole.
5. mems pump module as claimed in claim 4, which is characterized in that it is micro- that multiple mems pump can divide into one first
Electro-mechanical pump group and one second mems pump group, multiple second electrode of the first mems pump group be electrically connected this first
Common electrode, multiple second electrode of the second mems pump group are electrically connected second common electrode.
6. mems pump module as claimed in claim 4, which is characterized in that the second electrode of multiple mems pump is electrically connected
First common electrode and second common electrode.
7. mems pump module as claimed in claim 4, which is characterized in that an at least common electrode further includes a third common-battery
Pole and one the 4th common electrode.
8. mems pump module as claimed in claim 7, which is characterized in that it is micro- that multiple mems pump can divide into one first
Electro-mechanical pump group, one second mems pump group, a third mems pump group and one the 4th mems pump group, this is first micro-
Multiple second electrode of electro-mechanical pump group is electrically connected first common electrode, multiple second electricity of the second mems pump group
Pole is electrically connected second common electrode, and multiple second electrode of the third mems pump group is electrically connected the third common electrode, should
Multiple second electrode of 4th mems pump group is electrically connected the 4th common electrode.
9. mems pump module as claimed in claim 7, which is characterized in that it is micro- that multiple mems pump can divide into one first
Electro-mechanical pump group and one second mems pump group, multiple second electrode of the first mems pump group be electrically connected this first
Common electrode and second common electrode, multiple second electrode of the second mems pump group are electrically connected the third common electrode and are somebody's turn to do
4th common electrode.
10. mems pump module as claimed in claim 7, which is characterized in that the second electrode electricity of multiple mems pump
Connect first common electrode, second common electrode, the third common electrode and the 4th common electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822029923.6U CN209100243U (en) | 2018-12-05 | 2018-12-05 | Mems pump module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822029923.6U CN209100243U (en) | 2018-12-05 | 2018-12-05 | Mems pump module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209100243U true CN209100243U (en) | 2019-07-12 |
Family
ID=67162449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822029923.6U Withdrawn - After Issue CN209100243U (en) | 2018-12-05 | 2018-12-05 | Mems pump module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209100243U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111271267A (en) * | 2018-12-05 | 2020-06-12 | 研能科技股份有限公司 | Micro-electromechanical pump module |
-
2018
- 2018-12-05 CN CN201822029923.6U patent/CN209100243U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111271267A (en) * | 2018-12-05 | 2020-06-12 | 研能科技股份有限公司 | Micro-electromechanical pump module |
| CN111271267B (en) * | 2018-12-05 | 2022-08-09 | 研能科技股份有限公司 | Micro-electromechanical pump module |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209100243U (en) | Mems pump module | |
| CN209115314U (en) | Mems pump module | |
| CN209212526U (en) | Mems pump module | |
| EP2385591A3 (en) | Detachable tip for communicating with adapter and electronic device | |
| CN209212525U (en) | Mems pump module | |
| CN209100242U (en) | Mems pump module | |
| CN209115315U (en) | Mems pump module | |
| CN206348812U (en) | Fingerprint identification module, fingerprint recognition device, and configure the device electrical equipment | |
| TW201224758A (en) | Touch module switch circuit for all in one computer | |
| CN111271265B (en) | Microcomputer electric pump module | |
| CN111271266B (en) | Micro-electromechanical pump module | |
| CN111271269B (en) | Micro-electromechanical pump module | |
| CN111271268B (en) | Micro-electromechanical pump module | |
| CN111271267B (en) | Micro-electromechanical pump module | |
| CN102567265A (en) | Touch module switching circuit for all-in-one computer | |
| CN209925181U (en) | Micro-electromechanical pump module | |
| CN111271264A (en) | Micro-electromechanical pump module | |
| CN101295470A (en) | Gamma voltage output circuit | |
| CN106695749A (en) | Microrobot based on resonant driving | |
| TWM576619U (en) | Micro electrical-mechanical pump module | |
| TWM577068U (en) | Micro electrical-mechanical pump module | |
| TWM577067U (en) | Micro electrical-mechanical pump module | |
| TWI790324B (en) | Micro electrical-mechanical pump module | |
| TW201020794A (en) | Computer interface kit and computer interface device thereof | |
| TWI763955B (en) | Micro electrical-mechanical pump module |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20190712 Effective date of abandoning: 20220809 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20190712 Effective date of abandoning: 20220809 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |