CN209055306U - Off axis paraboloidal mirror detection adjustment device - Google Patents
Off axis paraboloidal mirror detection adjustment device Download PDFInfo
- Publication number
- CN209055306U CN209055306U CN201821755379.7U CN201821755379U CN209055306U CN 209055306 U CN209055306 U CN 209055306U CN 201821755379 U CN201821755379 U CN 201821755379U CN 209055306 U CN209055306 U CN 209055306U
- Authority
- CN
- China
- Prior art keywords
- axis paraboloidal
- paraboloidal mirror
- measured
- mirror
- interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The utility model discloses a kind of off axis paraboloidal mirrors to detect adjustment device, including interferometer, the standard flat mirror as interferometer beam output window, adjustment frame, compensation mechanism, auxiliary body, fixed bottom plate；The adjustment frame is mutually fixed with off axis paraboloidal mirror to be measured, the interferometer fixed placement is in the surface of off axis paraboloidal mirror to be measured, and the auxiliary body is mounted on the side of off axis paraboloidal mirror to be measured and the auxiliary body and off axis paraboloidal mirror to be measured have unisurf；The focal length that off axis paraboloid mirror to be measured can rapidly be measured, meets the needs of client.
Description
Technical field
The utility model belongs to off axis paraboloidal mirror technical field, and in particular to a kind of off axis paraboloidal mirror detection adjustment dress
It sets.
Background technique
The traditional detection method and technology of optical element have continued to use many decades.Optical detection be related to detected element material,
Bore, type and measuring technology, instrument and equipment etc..Detected element it is many kinds of, include parallel flat, spherical surface, non-
Spherical surface, free form surface, diffraction grating, axicon lens, cylindrical lens etc., it is aspherical in have it is special it is aspherical as paraboloid, ellipsoid,
Hyperboloid and in addition to this other aspherical.Common key instrument can be divided into interferometer class, surface profile in optical detection
Instrument class, MTF tester class, precision spherometer class, focal length and eccentric testing instrument class and Other Instruments etc..
Utility model content
The purpose of this utility model is to propose a kind of off axis paraboloidal mirror focus detection adjustment device, it is intended to be able to achieve focusing
Point detection carries out Preliminary Determination.
The utility model provides a kind of off axis paraboloidal mirror detection adjustment device, including interferometer, as interferometer light
Standard flat mirror, adjustment frame, compensation mechanism, auxiliary body, the fixed bottom plate of beam output window；
The adjustment frame is mutually fixed with off axis paraboloidal mirror to be measured, and the interferometer fixed placement is in off axis paraboloid mirror to be measured
The surface of mirror, the auxiliary body are mounted on the side of off axis paraboloidal mirror to be measured and the auxiliary body and off-axis parabolic to be measured
Face mirror has unisurf；
The compensation mechanism includes that compensation mechanism is driven to carry out the driving mechanism of all directions movement, compensation bead, for putting
It sets the placements slotted disk of compensation bead and places the slotted disk lid that is used cooperatively of slotted disk with described, can be accommodated in the placement slotted disk several
Bead is compensated, which arranges around the center of circle for placing slotted disk and place, and forms several ring-types, the slotted disk lid by outer from interior
It is constituted by several annular covers are mutually nested, and is offered in the annular cover and compensate circular hole at bead of the same size one, appointed
Ring cowling of anticipating is connected with rotary drive, drives annular cover to be rotated around the center of circle for placing slotted disk by rotary drive
And aperture selection is compensated by the circular hole in annular cover, the shutter for blocking circular hole is additionally provided on the circular hole.
As advanced optimizing for the utility model, auxiliary body described in the utility model is cylindrical structure.
As advanced optimizing for the utility model, adjustment frame described in the utility model is five dimension adjustment frames.
As advanced optimizing for the utility model, interferometer described in the utility model is fizeau interferometer.
As advanced optimizing for the utility model, off axis paraboloidal mirror to be measured described in the utility model is concave mirror.
The utility model has the advantages that the utility model is compared with prior art, the utility model be can rapidly measure it is to be measured off-axis
Paraboloidal focal length, meets the needs of client.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the compensation mechanism structural schematic diagram of the utility model；
Fig. 3 is the slotted disk lid structural schematic diagram figure of the utility model；
Fig. 4 is the placement slotted disk and compensation bead position view of the utility model.
Specific embodiment
The utility model is further described with reference to the accompanying drawing.
A kind of off axis paraboloidal mirror detection adjustment device as shown in Figure 1, including it is interferometer 1, defeated as 1 light beam of interferometer
The standard flat mirror 2 of window, adjustment frame 6, compensation mechanism 4, auxiliary body 7, fixed bottom plate out；The adjustment frame 6 with it is to be measured from
3 phase of axis paraboloidal mirror is fixed, and 1 fixed placement of interferometer is in the surface of off axis paraboloidal mirror 3 to be measured, the auxiliary body
7, which are mounted on the side of off axis paraboloidal mirror 3 to be measured and the auxiliary body 7 and off axis paraboloidal mirror 3 to be measured, has unisurf.
As shown in Figure 2, Figure 3 and Figure 4, the compensation mechanism 4 of the utility model includes that driving compensation mechanism 4 carries out all directions fortune
Dynamic driving mechanism 5, compensation bead 41, the placement slotted disk 42 for placing compensation bead 41 and with the placement slotted disk 42 cooperation
The slotted disk lid 43 used, can accommodate several compensation beads 41 in the placement slotted disk 42, and the compensation bead 41 is around placing slotted disk
42 center of circle, which arranges, places, and forms several ring-types by outer from interior, and the slotted disk lid 43 is constituted by several annular covers are mutually nested, and
It offers in the annular cover and is driven with rotation with circular hole 431, any one annular cover at compensation bead of the same size one
Part is connected, and drives annular cover rotate and by the circular hole in annular cover around the center of circle for placing slotted disk 42 by rotary drive
431 compensate the selection of aperture 41, and the shutter for blocking circular hole 431 is additionally provided on the circular hole 431.
Specifically, the auxiliary body of the utility model is cylindrical structure, adjustment frame is five dimension adjustment frames, and interferometer is striking
Rope interferometer, off axis paraboloidal mirror to be measured are concave mirror.
The light that the fizeau interferometer that the utility model uses issues is collimated monochromatic ligth, with the interior reflective surface of standard flat mirror
As a reference plane, off axis paraboloidal mirror to be measured passes through off axis paraboloid mirror to be measured according to parallel planar light as spherical surface to be measured
Mirror post-concentration makes the face type of off axis paraboloidal mirror to be measured most by adjusting with the position for finding compensation bead in the property of focus
Small, the position for compensating the bead centre of sphere at this time is focal position.
After the collimated monochromatic ligth that interferometer issues is incident on standard flat mirror, part light is reflected, which carries
Standard spherical wave information is incident on off axis paraboloidal mirror to be measured in parallel after another part light transmission, and parallel rays is through paraboloid
It is converged in after mirror in paraboloidal focus, compensation bead, the ball of the focus pooled and compensation bead is placed on focal position
Heart point is overlapped, and light, which presses former road reflection through overcompensation bead spherical surface, can arrive off axis paraboloidal mirror to be measured, and reflected parallel is emitted again
To standard flat mirror, return to interferometer, if generating interference fringe, pass through interferometer observe interference fringe and being analyzed obtain from
The surface type measurement on axis paraboloidal mirror surface is as a result, so that it is determined that the position of compensation bead, the compensation when being adjusted to face type minimum
The centre of sphere seat of bead is exactly the position of off axis paraboloid mirror mirror foci to be measured.
As shown in figure 4, the placement slotted disk of the utility model is upper and lower engraved structure, it to be used for fixed compensation bead, slotted disk lid
For sheltering from the compensation bead not used, in order to avoid influence detection structure.
Claims (5)
1. off axis paraboloidal mirror detection adjustment device, it is characterised in that: including interferometer, as interferometer beam output window
Standard flat mirror, adjustment frame, compensation mechanism, auxiliary body, fixed bottom plate；
The adjustment frame is mutually fixed with off axis paraboloidal mirror to be measured, and the interferometer fixed placement is in off axis paraboloidal mirror to be measured
Surface, the auxiliary body are mounted on the side of off axis paraboloidal mirror to be measured and the auxiliary body and off axis paraboloidal mirror to be measured
With unisurf；
The compensation mechanism includes driving compensation mechanism to carry out the driving mechanism of all directions movement, compensation bead, mending for placing
Repay bead placement slotted disk and with the slotted disk lid that is used cooperatively of placement slotted disk, several compensation can be accommodated in the placement slotted disk
Bead, the compensation bead are arranged around the center of circle for placing slotted disk and are placed, and form several ring-types, the slotted disk Gai Youruo by outer from interior
The dry mutually nested composition of annular cover, and offered in the annular cover and compensate circular hole at bead of the same size one, it is any one
A ring cowling is connected with rotary drive, drives annular cover to be rotated and led to around the center of circle for placing slotted disk by rotary drive
The circular hole crossed in annular cover compensates aperture selection, and the shutter for blocking circular hole is additionally provided on the circular hole.
2. off axis paraboloidal mirror detection adjustment device according to claim 1, it is characterised in that: the auxiliary body is circle
Column structure.
3. off axis paraboloidal mirror detection adjustment device according to claim 1, it is characterised in that: the adjustment frame is five dimensions
Adjustment frame.
4. off axis paraboloidal mirror detection adjustment device according to claim 1, it is characterised in that: the interferometer is striking rope
Interferometer.
5. off axis paraboloidal mirror detection adjustment device according to claim 1, it is characterised in that: the off-axis parabolic to be measured
Face mirror is concave mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821755379.7U CN209055306U (en) | 2018-10-29 | 2018-10-29 | Off axis paraboloidal mirror detection adjustment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821755379.7U CN209055306U (en) | 2018-10-29 | 2018-10-29 | Off axis paraboloidal mirror detection adjustment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209055306U true CN209055306U (en) | 2019-07-02 |
Family
ID=67051656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821755379.7U Active CN209055306U (en) | 2018-10-29 | 2018-10-29 | Off axis paraboloidal mirror detection adjustment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209055306U (en) |
-
2018
- 2018-10-29 CN CN201821755379.7U patent/CN209055306U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4302512B2 (en) | Interferometric scanning for aspheric surfaces and wavefronts | |
| JP4312602B2 (en) | Aspheric and wavefront scanning interferometers | |
| US8913234B2 (en) | Measurement of the positions of centres of curvature of optical surfaces of a multi-lens optical system | |
| CN207963765U (en) | A kind of optical measuring device of high-precision shafting running accuracy | |
| JP5925972B2 (en) | Integrated wavefront sensor and profilometer | |
| JP2004534245A (en) | Scanning interferometer for aspheric and wavefronts | |
| CN102564340A (en) | Large-caliber plane mirror surface-shaped detection device | |
| CN104360095B (en) | A kind of method for measuring instantaneous rotation speed based on Beams, apparatus and system | |
| US9068904B2 (en) | System and method for non-contact metrology of surfaces | |
| CN104359655A (en) | Off-axis parabolic mirror focal length detection device and method | |
| EP3729039A1 (en) | Method and apparatus for the determination of the index of refraction of lens material | |
| US9632005B1 (en) | Multi order diffractive devices | |
| CN112964455B (en) | Wave aberration splicing measuring device and method for large-numerical-aperture objective lens | |
| CN208125613U (en) | A kind of apparatus for measuring reflectance | |
| CN209055306U (en) | Off axis paraboloidal mirror detection adjustment device | |
| Meyen et al. | A new instrument for measuring the reflectance distribution function of solar reflector materials | |
| CN103245488B (en) | A kind of broadband large scale plane raster diffraction efficiency measurer | |
| CN102494772B (en) | Alignment method applied to preposed optical system with wide field of view | |
| US4693604A (en) | Interference method and interferometer for testing the surface precision of a parabolic mirror | |
| JPS6333659B2 (en) | ||
| JP4560517B2 (en) | Portable device for measuring light intensity from an object and method of using such a device | |
| RU183150U1 (en) | AUTOCOLLIMATION INTERFEROMETRIC DEVICE FOR CENTERING OF OPTICAL ELEMENTS | |
| JP6445755B2 (en) | Surface shape measuring device or wavefront aberration measuring device | |
| RU160407U1 (en) | DEVICE FOR CONTROL OF FORM OF FLAT SURFACES OF LARGE-DIMENSIONAL OPTICAL MIRRORS | |
| CN204202853U (en) | The pick-up unit of off axis paraboloidal mirror focal length |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |