CN209024630U - A kind of preparation facilities of plural layers - Google Patents
A kind of preparation facilities of plural layers Download PDFInfo
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- CN209024630U CN209024630U CN201821261167.3U CN201821261167U CN209024630U CN 209024630 U CN209024630 U CN 209024630U CN 201821261167 U CN201821261167 U CN 201821261167U CN 209024630 U CN209024630 U CN 209024630U
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- chamber
- accommodating space
- tray
- transport mechanism
- vacuum
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Abstract
The utility model discloses a kind of preparation facilities of plural layers, are related to field of material technology, and described device includes: first chamber, and the first chamber has an accommodating space；Second chamber, the second chamber are arranged in the accommodating space, and the second chamber accommodates the first material；Third chamber, the third chamber are oppositely arranged with the second chamber, and the third chamber accommodates the second material；Transport mechanism, the transport mechanism are arranged in the accommodating space.It solves beaming type film growth system in the prior art by above-mentioned apparatus and increases the components such as reaction chamber, gate valve, vacuum pump, vacuum mechanical-arm, the technical issues of causing cost and occupied space to increase, reach and has realized a variety of film growths in single vacuum, it is small in size, device is simple, high-efficient, easy to operate and at low cost technical effect.
Description
Technical field
The utility model belongs to field of material technology more particularly to a kind of preparation facilities of plural layers.
Background technique
The method of growing film mainly has magnetron sputtering, vacuum evaporation, Chemical Vapor-Phase Epitaxy and atomic layer epitaxy etc. at present.
If growing the film of multiple layers of different materials in a vacuum, just need to be arranged in same vacuum chamber a variety of targets or a variety of anti-
Ying Yuan.And with the raising of the quality requirement to plural layers, the mutual pollution in multiple material growth course seems more aobvious
It writes.For this purpose, the mode of the more targets of single-chamber is improved to the more targets of multi-cavity, each chamber with regard to a target, between chamber with vacuum mechanical-arm into
Row sample transfer, referred to as beaming type film growth system.
But the application utility model people during technical solution, has found above-mentioned existing skill in realizing the embodiment of the present application
Art at least has the following technical problems:
Beaming type film growth system in the prior art increases the portions such as reaction chamber, gate valve, vacuum pump, vacuum mechanical-arm
Part causes cost and occupied space to increase.
Summary of the invention
It is thin to solve beaming type in the prior art by providing a kind of preparation facilities of plural layers for the embodiment of the present application
Film growing system increases the components such as reaction chamber, gate valve, vacuum pump, vacuum mechanical-arm, and cost and occupied space is caused to increase
The technical issues of, reached and realized the growth of a variety of films in single vacuum, small in size, device is simple, high-efficient, it is easy to operate and
Technical effect at low cost.
The utility model embodiment provides a kind of preparation facilities of plural layers, and described device includes: first chamber, institute
First chamber is stated with an accommodating space；Second chamber, the second chamber are arranged in the accommodating space, and described second
Chamber accommodates the first material；Third chamber, the third chamber are oppositely arranged with the second chamber, and the third chamber holds
Set the second material；Transport mechanism, the transport mechanism are arranged in the accommodating space.
Preferably, the transport mechanism includes: support rod, and the support rod is arranged in the second chamber and the third
Between chamber；Tray, the tray are vertically arranged with the support rod, and the relatively described second chamber of the tray has
First position and the second position, wherein the first position is that the tray and the second chamber have a preset distance,
The second position is the position after the tray contacts at the top of the second chamber.
Preferably, the transport mechanism further include: the tray can be rotated around the support rod.
Preferably, described device further include: the 4th chamber, the 4th chamber is arranged in the accommodating space, and institute
State the 4th chamber accommodating third material.
Preferably, described device further include: first material is different from second material.
Preferably, described device further include: second material is different from the third material.
Preferably, described device further include: M through-hole, the M through-hole are arranged on the tray, wherein M is
Positive integer.
Preferably, described device further include: the M through-hole wall is stairstepping.
Said one or multiple technical solutions in the utility model embodiment at least have following one or more technologies
Effect:
1, in a kind of preparation facilities of plural layers provided by the embodiment of the utility model, described device includes: the first chamber
Room, the first chamber have an accommodating space；Second chamber, the second chamber is arranged in the accommodating space, and institute
It states second chamber and accommodates the first material；Third chamber, the third chamber is oppositely arranged with the second chamber, and the third
Chamber accommodates the second material；Transport mechanism, the transport mechanism are arranged in the accommodating space.It is solved by above-mentioned apparatus
Beaming type film growth system in the prior art increases the components such as reaction chamber, gate valve, vacuum pump, vacuum mechanical-arm, causes
The technical issues of cost and occupied space increase has reached and has realized a variety of film growths in single vacuum, small in size, device letter
Single, high-efficient, easy to operate and at low cost technical effect.
2, the embodiment of the present application can be rotated by the tray around the support rod, and further having reached will by rotation
Sample is transmitted, and guarantees the mutually isolated technical effect between the transmission of sample and each chamber.
3, by the 4th chamber, the 4th chamber is arranged in the accommodating space the embodiment of the present application, and described the
Four chambers accommodate third material.Beaming type film growth system in the prior art is further solved by above-mentioned apparatus to increase
The components such as reaction chamber, gate valve, vacuum pump, vacuum mechanical-arm, the technical issues of causing cost and occupied space to increase, into one
Step, which has reached, realizes a variety of film growths in single vacuum, small in size, device is simple, high-efficient, easy to operate and at low cost
Technical effect.
The above description is merely an outline of the technical solution of the present invention, in order to better understand the skill of the utility model
Art means, and being implemented in accordance with the contents of the specification, and in order to allow above and other purpose, feature of the utility model
It can be more clearly understood with advantage, it is special below to lift specific embodiment of the present utility model.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the preparation facilities of plural layers of the utility model embodiment.
Description of symbols: first chamber 1, second chamber 2, third chamber 3, tray 4, support rod 5, M through-hole 6.
Specific embodiment
The embodiment of the present application solves beaming type in the prior art by providing a kind of preparation facilities of plural layers
Film growth system increases the components such as reaction chamber, gate valve, vacuum pump, vacuum mechanical-arm, and cost and occupied space is caused to increase
The technical issues of adding.
The technical scheme in the embodiment of the utility model, general thought are as follows:
A kind of preparation facilities of plural layers provided by the embodiment of the utility model, described device include: first chamber, institute
First chamber is stated with an accommodating space；Second chamber, the second chamber are arranged in the accommodating space, and described second
Chamber accommodates the first material；Third chamber, the third chamber are oppositely arranged with the second chamber, and the third chamber holds
Set the second material；Transport mechanism, the transport mechanism are arranged in the accommodating space.Reached realized in single vacuum it is a variety of
Film growth, small in size, device is simple, high-efficient, easy to operate and at low cost technical effect.
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Based on the implementation in the utility model
Example, every other embodiment obtained by those of ordinary skill in the art without making creative efforts belong to
The range of the utility model protection.
Embodiment one
The present embodiment provides a kind of preparation facilities of plural layers, referring to FIG. 1, described device includes:
First chamber 1, the first chamber 1 have an accommodating space；
Specifically, the first chamber 1 is the essential shape structure of described device, chamber interior is true at work
Dummy status, and the inside of the first chamber 1 has an accommodating space, further can be arranged second inside the accommodating space
Chamber, the lesser vacuum chamber of third chamber isometric(al).
Second chamber 2, the second chamber 2 are arranged in the accommodating space, and the second chamber 2 accommodates the first material
Matter；
Specifically, the second chamber 2 is arranged in the accommodating space, that is, the second chamber 2 is arranged described
Inside first chamber 1, and 2 inside of the second chamber equally has an accommodating space, and the second chamber 2 is vacuum chamber,
Therefore, the accommodating space size of the second chamber 2 is less than the accommodating space of the first chamber 1, in the second chamber 2
Target holder can be placed in accommodating space, so as to which the target of first material is arranged on target holder.
Third chamber 3, the third chamber 3 are oppositely arranged with the second chamber 2, and the third chamber 3 accommodating the
Two materials；First material is different from second material.
Specifically, the third chamber 3 is arranged in the accommodating space, that is, the third chamber 3 is arranged described
Inside first chamber 1, and 3 inside of the third chamber equally has an accommodating space, therefore, the accommodating of the third chamber 3
Space size is less than the accommodating space of the first chamber 1, and the third chamber 3 is oppositely arranged with the second chamber 2, and two
Person is respectively positioned on the lower section of the tray 4, further, target holder can be placed in the accommodating space of third chamber 3, so as to
The target of second material is set on target holder.
Transport mechanism, the transport mechanism are arranged in the accommodating space.
Further, the transport mechanism includes: support rod 5, and the support rod 5 is arranged in the second chamber 2 and institute
It states between third chamber 3；Tray 4, the tray 4 are vertically arranged with the support rod 5, and the tray 4 is relatively described
Second chamber 2 has first position and the second position, wherein the first position is the tray 4 and the second chamber 2
With a preset distance, the second position is that the tray 4 contacts the position behind 2 top of second chamber；It is described to set
Object disk 4 can be rotated around the support rod 5.
Specifically, the transport mechanism is arranged in the accommodating space, that is, the transport mechanism setting is described the
Inside one chamber 1, wherein the transport mechanism includes: support rod 5 and tray 4, specific: the support rod 5 and described the
The bottom of one chamber 1 is perpendicular, and between the second chamber 2 and the third chamber 3；4 level of tray is set
It sets inside the accommodating space, that is, the tray 4 is vertically arranged with the support rod 5, and, the setting of tray 4 exists
The top of the second chamber 2 and the third chamber 3, and the relatively described second chamber 2 of the tray 4 and the third chamber
Room 3 all has first position and the second position, that is to say, that the first position is the tray 4 and the second chamber 2
A preset distance, the second position is that the tray 4 contacts the position behind 2 top of the second chamber, that is, described to set
Object disk 4 can move vertically along the support rod 5.For example, when not needing first material in the second chamber 2
When growth, it can be made to be covered on above the second chamber by vertically moving the tray 4 at this time, it is further reachable
To the technical effect mutually polluted for preventing multiple material.And the tray 4 can also be rotated around the support rod 5, pass through rotation
Turn sample can be transmitted, has further reached the mutually isolated technology effect between the transmission and each chamber that guarantee sample
Fruit.
In the utility model embodiment, solves beaming type film growth system in the prior art by above-mentioned apparatus
The technical issues of increasing the components such as reaction chamber, gate valve, vacuum pump, vacuum mechanical-arm, cost and occupied space caused to increase,
Reach and realized a variety of film growths in single vacuum, small in size, device is simple, high-efficient, easy to operate and at low cost skill
Art effect.
Further, described device further include: the 4th chamber, the 4th chamber are arranged in the accommodating space, and
4th chamber accommodates third material；Second material is different from the third material.
Specifically, the 4th chamber is arranged in the accommodating space, that is, the 4th chamber setting is described the
Inside one chamber 1, and the 4th chamber interior equally has an accommodating space.Described can be accommodated inside its accommodating space
Three materials, and the third material and second material be not identical.Further, the chamber number inside described device may be used also
It is configured according to actual needs, that is to say, that multiple chambers such as also settable 5th chamber, the 6th chamber, in this reality
The description of " first ", " second " involved in novel etc. is used for description purposes only, and it is opposite to be not understood to indicate or imply it
Importance or the quantity for implicitly indicating indicated technical characteristic.Define " first " as a result, the feature of " second " can be bright
Show or implicitly include at least one this feature.In the description of the present invention, the meaning of " plurality " is at least two, example
Such as two, three etc., unless otherwise specifically defined.
Further, described device further include: M through-hole 6, the M through-hole 6 are arranged on the tray 4,
In, M is positive integer；6 inner wall of M through-hole is stairstepping.
Specifically, the M through-hole is arranged on the tray 4, that is, the M through-hole 6 is arranged described first
In chamber 1, wherein M is positive integer, and number is more than or equal to the chamber number being arranged inside described device, the M through-hole 6
Inner wall be it is ladder-like.
Said one or multiple technical solutions in the utility model embodiment at least have following one or more technologies
Effect:
1, in a kind of preparation facilities of plural layers provided by the embodiment of the utility model, described device includes: the first chamber
Room, the first chamber have an accommodating space；Second chamber, the second chamber is arranged in the accommodating space, and institute
It states second chamber and accommodates the first material；Third chamber, the third chamber is oppositely arranged with the second chamber, and the third
Chamber accommodates the second material；Transport mechanism, the transport mechanism are arranged in the accommodating space.It is solved by above-mentioned apparatus
Beaming type film growth system in the prior art increases the components such as reaction chamber, gate valve, vacuum pump, vacuum mechanical-arm, causes
The technical issues of cost and occupied space increase has reached and has realized a variety of film growths in single vacuum, small in size, device letter
Single, high-efficient, easy to operate and at low cost technical effect.
2, the embodiment of the present application can be rotated by the tray around the support rod, and further having reached will by rotation
Sample is transmitted, and guarantees the mutually isolated technical effect between the transmission of sample and each chamber.
3, by the 4th chamber, the 4th chamber is arranged in the accommodating space the embodiment of the present application, and described the
Four chambers accommodate third material.Beaming type film growth system in the prior art is further solved by above-mentioned apparatus to increase
The components such as reaction chamber, gate valve, vacuum pump, vacuum mechanical-arm, the technical issues of causing cost and occupied space to increase, into one
Step, which has reached, realizes a variety of film growths in single vacuum, small in size, device is simple, high-efficient, easy to operate and at low cost
Technical effect.
Although the preferred embodiment of the utility model has been described, once a person skilled in the art knows basic
Creative concept, then additional changes and modifications can be made to these embodiments.It is wrapped so the following claims are intended to be interpreted as
It includes preferred embodiment and falls into all change and modification of the scope of the utility model.
Obviously, those skilled in the art the utility model embodiment can be carried out various modification and variations without departing from
The spirit and scope of the utility model embodiment.In this way, if these modifications and variations of the utility model embodiment belong to this
Within the scope of utility model claims and its equivalent technologies, then the utility model is also intended to encompass these modification and variations and exists
It is interior.
Claims (7)
1. a kind of preparation facilities of plural layers, which is characterized in that described device includes:
First chamber, the first chamber have an accommodating space；
Second chamber, the second chamber are arranged in the accommodating space, and the second chamber accommodates the first material；
Third chamber, the third chamber are oppositely arranged with the second chamber, and the third chamber accommodates the second material；
Transport mechanism, the transport mechanism are arranged in the accommodating space.
2. device as described in claim 1, which is characterized in that the transport mechanism includes:
Support rod, the support rod are arranged between the second chamber and the third chamber；
Tray, the tray are vertically arranged with the support rod, and the relatively described second chamber of the tray has first
Position and the second position, wherein the first position is the tray and the second chamber has a preset distance, described
The second position is the position after the tray contacts at the top of the second chamber.
3. device as claimed in claim 2, which is characterized in that the transport mechanism further include:
The tray can be rotated around the support rod.
4. device as described in claim 1, which is characterized in that described device further include:
4th chamber, the 4th chamber are arranged in the accommodating space, and the 4th chamber accommodates third material.
5. device as described in claim 1, which is characterized in that described device further include:
First material is different from second material.
6. device as claimed in claim 4, which is characterized in that described device further include:
Second material is different from the third material.
7. device as claimed in claim 3, which is characterized in that described device further include:
M through-hole, the M through-hole are arranged on the tray, wherein M is positive integer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821261167.3U CN209024630U (en) | 2018-08-06 | 2018-08-06 | A kind of preparation facilities of plural layers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821261167.3U CN209024630U (en) | 2018-08-06 | 2018-08-06 | A kind of preparation facilities of plural layers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209024630U true CN209024630U (en) | 2019-06-25 |
Family
ID=66872776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821261167.3U Active CN209024630U (en) | 2018-08-06 | 2018-08-06 | A kind of preparation facilities of plural layers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209024630U (en) |
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2018
- 2018-08-06 CN CN201821261167.3U patent/CN209024630U/en active Active
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