CN209006880U - A kind of micro/nano-scale high-temperature laser impact imprinting apparatus - Google Patents
A kind of micro/nano-scale high-temperature laser impact imprinting apparatus Download PDFInfo
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- CN209006880U CN209006880U CN201821794345.9U CN201821794345U CN209006880U CN 209006880 U CN209006880 U CN 209006880U CN 201821794345 U CN201821794345 U CN 201821794345U CN 209006880 U CN209006880 U CN 209006880U
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Abstract
The utility model discloses a kind of micro/nano-scale high-temperature lasers to impact imprinting apparatus, is related to laser-impact stamping technique field.The utility model includes atmosphere protection module, high-temperature laser percussive pressure impression block, monitoring modular and fixture module；Atmosphere protection module includes target chamber, and target chamber has air inlet and exhaust outlet, and air inlet is sequentially connected intake valve, air pump and gas storage system by pipeline, and exhaust outlet passes through piping connection lambda sensor and exhaust valve；And the lambda sensor is connected with air pump；High-temperature laser percussive pressure impression block is sequentially connected and is constituted by focus lamp, pulse laser, pulse laser controller, pulse daley generator, infrared laser controller, infrared laser；Monitoring modular is sequentially connected by CCD and computer；Fixture module is from top to bottom followed successively by restraint layer, absorbed layer, sample and mold；Fixture module is arranged in target chamber.Realize the laser-impact coining quickly manufacture of metal material surface high-precision micro nano labyrinth.
Description
Technical field
The utility model relates to laser-impact stamping technique field, specifically a kind of micro/nano-scale high-temperature laser impact coining
Device.
Background technique
With the rapid development of MEMS, nano electromechanical systems, micro-fluidic chip etc., micromation to device and high-precision
Degree also proposed increasingly higher demands.In micro element manufacture based on by metal material, how to obtain on the surface of the material
The labyrinth of micro/nano-scale is a bigger challenge.Laser-impact stamping technique is generated using laser ablation absorbed layer
High-energy shock wave acts on metal material surface, and metal material generates superplastic deformation under the action of shock wave, can carry out
The quick copy of micro-nano labyrinth.But during laser-impact coining, there is also two problems at present: first,
When carrying out laser-impact coining at room temperature or under higher temperature (lower than the recrystallization temperature of metal material), the metal material of acquisition
Expect that the depth-to-width ratio of micro-nano structure is smaller, replica precision is poor, when further increasing laser spot energy, and can be because of biggish punching
Hitting power makes material that drawing crack etc. defect occur；Second, if by laser-impact imprint temperature be increased to recrystallization temperature with
On, although the formed precision of micro nano structure can be improved, due to the high-temperature oxydation of metal material surface and the crystal grain of material
Growing up etc. will lead to the performance of micro-nano device and substantially reduces.Therefore, if obtaining, there is high-precision micro nano structure to become
It is extremely important.
Summary of the invention
In order to overcome the disadvantages of the above prior art, the utility model provides a kind of micro/nano-scale high-temperature laser impact coining
Device, mechanical property is good, the accuracy of manufacture is high, realizes the laser-impact pressure of metal material surface high-precision micro nano labyrinth
Print quickly manufacture.
The utility model is realized with following technical solution: a kind of micro/nano-scale high-temperature laser impact imprinting apparatus, packet
Include atmosphere protection module, high-temperature laser percussive pressure impression block, monitoring modular and fixture module；The atmosphere protection module includes target
Room, the target chamber have air inlet and exhaust outlet, and air inlet is sequentially connected intake valve, air pump and gas storage system by pipeline, arrange
Port passes through piping connection lambda sensor and exhaust valve；And the lambda sensor is connected with air pump；
The high-temperature laser percussive pressure impression block is sent out by focus lamp, pulse laser, pulse laser controller, pulse daley
Raw device, infrared laser controller, infrared laser are sequentially connected composition；
The monitoring modular is sequentially connected by CCD and computer；
The fixture module is from top to bottom followed successively by restraint layer, absorbed layer, sample and mold；
The fixture module is arranged in target chamber；Above the high-temperature laser percussive pressure impression block is arranged outside target chamber.
Further, the restraint layer is the K9 glass of 2~4mm of thickness.
Further, the black aluminium foil that the absorbed layer is 10~50 μm of thickness.
Further, the protective gas in gas storage system is argon gas or other inert gases.
Further, the pulse width of the pulse laser is between 5~20ns, and the power density of hot spot is big after focusing
In 1GW/cm2。
Further, the infrared laser launch wavelength is the infrared laser of 1064nm, and beam diameter is greater than pulse laser
Focus diameter.
Working principle: during laser-impact coining, laser-impact microcell is carried out instantaneously by infrared laser
Heating, and after impact close infrared laser be quickly cooled down shock zone, by adjust infrared laser power density and
The environment temperature of the regulation laser-impact imprinting area of the action time property of can choose, to control laser-impact moulding process
Middle metal material crystal grain is grown up.Meanwhile inert protective gas is injected by imprinting in target chamber toward laser-impact, avoid laser from rushing
The oxidation of imprinting area metal material surface due to caused by high temperature is hit, to obtain the good micro nano structure of surface quality.This
Utility model utilizes atmosphere protection and high temperature householder method, and crystal grain caused by overcoming because of high temperature is grown up and surface caused by high temperature
The technical problems such as oxidation, obtain the metal material surface micro nano structure that mechanical property is good, the accuracy of manufacture is high.
Compared to existing technology, the beneficial effects of the utility model are as follows:
(1) it currently, for laser-impact stamping technique, generally carries out at room temperature or below recrystallization temperature, by
It is relatively low in temperature, sample hardness also with higher, intensity and poor plasticity, therefore the sample that laser-impact imprints
Product depth is smaller, internal stress is larger, is easy to cause the drawing crack and destruction of sample, and the utility model carries out laser imprinted at high temperature
Impact can obtain biggish depth of indentation, internal stress distribution more evenly.
(2) compared to the heating for carrying out sample using traditional heating method, the time at sample at high temperature is longer, is easy
So that the crystal grain in sample is grown up rapidly at high temperature, the mechanical property of sample is caused to be deteriorated, the utility model is heated using laser
Mode, by pulse delay generator accurately regulate and control sample heating time, it is ensured that at the time that sample is heated
In nanosecond order, it not only can guarantee that the advantage that laser-impact imprints under high temperature, but also the crystal grain of avoidable sample interior were grown up in this way.
(3) sample easily aoxidizes at high temperature, to change the various performances of itself, the utility model uses inertia
The mode of gas shield is accurately controlled the indoor oxygen content of target by lambda sensor, avoids the oxygen in sample heating process
Change, to obtain the laser-impact coining of great surface quality.
Detailed description of the invention
Fig. 1 is the utility model structure diagram.
Specific embodiment
As shown in Figure 1, a kind of micro/nano-scale high-temperature laser impacts imprinting apparatus, including atmosphere protection module, high-temperature laser
Percussive pressure impression block, monitoring modular and fixture module.Wherein, atmosphere protection module includes target chamber 6, and the target chamber 6 has air inlet
Mouth and exhaust outlet, air inlet are sequentially connected intake valve 1, air pump 2 and gas storage system 3 by pipeline, and exhaust outlet passes through piping connection
Lambda sensor 5 and exhaust valve 4；And the lambda sensor 5 is connected with air pump 2.High-temperature laser percussive pressure impression block is by focus lamp
9, pulse laser 10, pulse laser controller 11, pulse daley generator 12, infrared laser controller 13, infrared laser
14 are sequentially connected composition；Monitoring modular is sequentially connected by CCD7 and computer 8；Fixture module is from top to bottom followed successively by restraint layer
15, absorbed layer 16, sample 17 and mold 18；Fixture module is arranged in target chamber；The high-temperature laser percussive pressure impression block setting
Above 6 outside of target chamber.
A kind of micro/nano-scale high-temperature laser impact method for stamping, impacts coining using the micro/nano-scale high-temperature laser in Fig. 1
Device,
1) preparation of fixture module: being from top to bottom sequentially placed restraint layer 15, absorbed layer 16, sample 17 and mold 18, protects
It demonstrate,proves and is bonded closely between each layer；And fixture module is put into target chamber 6.Wherein, restraint layer 15 is the K9 glass of 2~4mm of thickness.
The black aluminium foil that absorbed layer 16 is 10~50 μm of thickness.Protective gas in gas storage system 3 is argon gas or other inert gases.
2) it adjusts atmosphere protection module: opening air pump 2, the protective gas in gas storage system 3 is pumped by target by intake valve 1
Room 6, the gas in target chamber 6 pass sequentially through the pipeline discharge of lambda sensor 5 and exhaust valve 4；Lambda sensor 5 detects in target chamber 6
Oxygen content be lower than certain value when, control air pump 2 stop working；The cracking pressure of intake valve and exhaust valve is respectively 0.2MPa
And 0.15MPa, when lambda sensor detects the indoor oxygen purity of target lower than 1%, control air pump stops working.
3) adjustment of high-temperature laser percussive pressure printing light path: pulse laser 10 is opened by pulse laser controller 11 and is guided
Light, line focus mirror 9 are incident in target chamber after focusing, and guarantee that laser spot falls in absorbed layer 16 by computer 8 and CCD7 detection
Surface；Infrared laser 14 is opened by infrared laser controller 13 simultaneously, the guiding light irradiation for issuing infrared laser 14
To pulse laser focus area；Close infrared laser 14 and pulse laser 10.The pulse width of pulse laser 10 is between 5
Between~20ns, the power density of hot spot is greater than 1GW/cm after focusing2.14 launch wavelength of infrared laser is the infrared of 1064nm
Laser, beam diameter are greater than the focus diameter of pulse laser.
4) infrared laser 14 and pulse laser high-temperature laser impact coining: are controlled by pulse daley generator 12 respectively
Device 10 emits the time interval of laser, realizes heating, the impact, temperature-fall period of laser-impact coining film micro area.Pulse daley hair
Raw device 12 controls infrared laser 14 and first emits infrared laser, and for heating absorbed layer 16 and sample 17, interval time is greater than
It after 100ns, then opens pulse laser 10 and is imprinted for laser-impact, by stringent control time interval, can accurately adjust
Control the temperature of laser-impact coining.
Claims (6)
1. a kind of micro/nano-scale high-temperature laser impacts imprinting apparatus, it is characterised in that: rushed including atmosphere protection module, high-temperature laser
Hit coining module, monitoring modular and fixture module；
The atmosphere protection module includes target chamber (6), and the target chamber (6) has air inlet and exhaust outlet, and air inlet passes through pipeline
It is sequentially connected intake valve (1), air pump (2) and gas storage system (3), exhaust outlet passes through piping connection lambda sensor (5) and exhaust valve
(4)；And the lambda sensor (5) is connected with air pump (2)；
The high-temperature laser percussive pressure impression block is by focus lamp (9), pulse laser (10), pulse laser controller (11), arteries and veins
It rushes delay generator (12), infrared laser controller (13), infrared laser (14) and is sequentially connected composition；
The monitoring modular is sequentially connected by CCD (7) and computer (8)；
The fixture module is from top to bottom followed successively by restraint layer (15), absorbed layer (16), sample (17) and mold (18)；
The fixture module is arranged in target chamber；The high-temperature laser percussive pressure impression block setting is in the external top of target chamber (6).
2. a kind of micro/nano-scale high-temperature laser according to claim 1 impacts imprinting apparatus, it is characterised in that: the constraint
Layer (15) is the K9 glass of 2~4mm of thickness.
3. a kind of micro/nano-scale high-temperature laser according to claim 1 impacts imprinting apparatus, it is characterised in that: the absorption
The black aluminium foil that layer (16) is 10~50 μm of thickness.
4. a kind of micro/nano-scale high-temperature laser according to claim 1 impacts imprinting apparatus, it is characterised in that: gas storage system
(3) protective gas in is argon gas or other inert gases.
5. a kind of micro/nano-scale high-temperature laser according to claim 1 impacts imprinting apparatus, it is characterised in that: the pulse
The pulse width of laser (10) is between 5~20ns, and the power density of hot spot is greater than 1GW/cm after focusing2。
6. a kind of micro/nano-scale high-temperature laser according to claim 1 impacts imprinting apparatus, it is characterised in that: described infrared
Laser (14) launch wavelength is the infrared laser of 1064nm, and beam diameter is greater than the focus diameter of pulse laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821794345.9U CN209006880U (en) | 2018-11-01 | 2018-11-01 | A kind of micro/nano-scale high-temperature laser impact imprinting apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821794345.9U CN209006880U (en) | 2018-11-01 | 2018-11-01 | A kind of micro/nano-scale high-temperature laser impact imprinting apparatus |
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| CN209006880U true CN209006880U (en) | 2019-06-21 |
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| CN201821794345.9U Expired - Fee Related CN209006880U (en) | 2018-11-01 | 2018-11-01 | A kind of micro/nano-scale high-temperature laser impact imprinting apparatus |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109226970A (en) * | 2018-11-01 | 2019-01-18 | 徐州工程学院 | A kind of micro/nano-scale high-temperature laser impact imprinting apparatus and method |
| CN112811795A (en) * | 2021-01-07 | 2021-05-18 | 长春理工大学 | Laser heating micro-nano photonics device mould pressing processing device and method |
| CN113560713A (en) * | 2021-07-20 | 2021-10-29 | 扬州镭奔激光科技有限公司 | Protection tool for forming laser forging process by combining laser cladding and laser impact |
-
2018
- 2018-11-01 CN CN201821794345.9U patent/CN209006880U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109226970A (en) * | 2018-11-01 | 2019-01-18 | 徐州工程学院 | A kind of micro/nano-scale high-temperature laser impact imprinting apparatus and method |
| CN112811795A (en) * | 2021-01-07 | 2021-05-18 | 长春理工大学 | Laser heating micro-nano photonics device mould pressing processing device and method |
| CN113560713A (en) * | 2021-07-20 | 2021-10-29 | 扬州镭奔激光科技有限公司 | Protection tool for forming laser forging process by combining laser cladding and laser impact |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190621 Termination date: 20191101 |
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| CF01 | Termination of patent right due to non-payment of annual fee |