CN208998745U - Contactless Terahertz overbrushing layer thickness detection device - Google Patents
Contactless Terahertz overbrushing layer thickness detection device Download PDFInfo
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- CN208998745U CN208998745U CN201821159220.9U CN201821159220U CN208998745U CN 208998745 U CN208998745 U CN 208998745U CN 201821159220 U CN201821159220 U CN 201821159220U CN 208998745 U CN208998745 U CN 208998745U
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- terahertz
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Abstract
The utility model provides a kind of contactless Terahertz overbrushing layer thickness detection device, its structure includes rack, pulse THz source, terahertz camera, control and signal processing module, computer, pulse THz source, terahertz camera are fixed at the lower surface of work upper mounting plate, and work upper mounting plate is arranged on the rack；The impulse ejection direction of pulse THz source and the receiving direction of terahertz camera are in the vertical symmetrical setting of central axial normal of work upper mounting plate；Translation rotating mechanism is provided between rack and work upper mounting plate；Vertical vertical support shaft, vertical vertical elevator, horizontal steering mechanism, horizontal swing arm, longitudinal working arm and rotary tray motor constitute translation rotating mechanism.The contactless Terahertz overbrushing layer thickness detection device can be realized the real-time detection of multicoat, improve detection efficiency.The device is contactless on-line checking, will not generate scratch to coating.
Description
Technical field
The utility model relates to Terahertz detection technique field, specifically a kind of contactless Terahertz overbrushing thickness
Spend detection device.
Background technique
The thickness detection apparatus lacked in the market to laminated coating under the prior art, existing film layer detection can only detect
Single coating thickness and be contact type measurement, can also be easy to generate secondary destruction, existing coating to coating in the detection process
Thickness sensitivity can only carry out the Thickness sensitivity of one layer of coating, cannot carry out the detection of multicoat simultaneously, Given this technological accumulation and inheritance, urgently
To a kind of contactless Terahertz overbrushing layer thickness detection device of demand.
Summary of the invention
The technical assignment of the utility model is to solve the deficiencies in the prior art, provides a kind of contactless Terahertz multicoat
Thickness detection apparatus.
The technical solution of the utility model realizes in the following manner, the contactless Terahertz multicoat Thickness sensitivity
Device, structure include rack, pulse THz source, terahertz camera, control and signal processing module, computer,
Pulse THz source, terahertz camera are fixed at the lower surface of work upper mounting plate, work upper mounting plate setting
On the rack；
The receiving direction of the impulse ejection direction of pulse THz source and terahertz camera in work upper mounting plate it is vertical in
Mandrel to the symmetrical setting of normal；
Translation rotating mechanism is provided between rack and work upper mounting plate；
Pulse THz source, terahertz camera are connected respectively to control and signal processing module, control and signal processing mould
Block is connect with computer；
Pulse THz source, terahertz camera, control and signal processing module, computer collectively form testing agency；
The upper surface of work lower platform is placed with part to be detected, and the outreach end for the lower platform that works is fixedly installed vertical vertical support
Axis, indulges vertical support shaft and work lower platform plane is perpendicular；
It is coaxially arranged with vertical vertical elevator on the axle body of vertical vertical support shaft, indulges vertical elevator and moves up and down along vertical vertical support shaft
And it is diametrically opposed static, angular transducer is coaxially fixedly installed on the fuselage of vertical vertical elevator and turn to encoder with
And steering motor, angular transducer and steering encoder and steering motor interconnection constitute horizontal steering mechanism；
The fuselage of steering motor is fixedly connected with horizontal swing arm, and steering motor drives horizontal swing arm and indulges the opposite of vertical support shaft
Rotation；
The outreach end of horizontal swing arm is fixedly installed longitudinal working arm, and longitudinal working arm is parallel with vertical vertical support shaft；
The bottom end of longitudinal working arm connects work upper mounting plate by rotary tray motor, and work drive of the upper mounting plate by rotary tray motor
It moves using longitudinal working arm as center axis flat turn；
The downward projection of the vertical central axial normal of work upper mounting plate falls within the upper surface center of work lower platform；
Vertical vertical support shaft, vertical vertical elevator, horizontal steering mechanism, horizontal swing arm, longitudinal working arm and rotary tray motor are constituted
Translate rotating mechanism.
Pulse THz source: 1.5~20THZ of adjustable frequency, pulse width < 50GHZ, repetitive rate 100HZ, mean power 1
~10 microwatts, 10~100nJ of pulse energy, impulse ejection stopping is controlled and signal processing module control.
The surface of part to be detected is provided with coating, and coating is single layer figure layer or laminated coating.
Vertical vertical support shaft, horizontal swing arm and longitudinal working arm constitute rack.
Utility model has the following beneficial effects compared with the prior art:
The contactless Terahertz overbrushing layer thickness detection device can be realized the real-time detection of multicoat, improve detection effect
Rate.The device is contactless on-line checking, will not generate scratch to coating.
Contactless Terahertz overbrushing layer thickness detection device design is reasonable, structure is simple, safe and reliable, user for this
Just, easy to maintain, it has good value for applications.
Detailed description of the invention
Attached drawing 1 is the structural schematic diagram of the utility model；
Attached drawing 2 is embodiment control signal processing module model foundation schematic diagram.
Marks in the drawings respectively indicate:
1, pulse THz source, 2, coating, 3, substrate (part to be detected), 4, terahertz camera, 5, control and signal processing
Module, 6, computer, 7, translation rotating mechanism,
8, work upper mounting plate, 9, rack,
10, rotating mechanism is translated,
11, testing agency,
12, work lower platform, 13, part to be detected,
14, it indulges and founds support shaft, 15, vertical vertical elevator, 16, angular transducer, 17, steering encoder, 18, steering motor,
19, horizontal steering mechanism,
20, horizontal swing arm,
21, longitudinal working arm, 22, rotary tray motor.
Specific embodiment
The contactless Terahertz overbrushing layer thickness detection device of the utility model is made in detailed below with reference to the accompanying drawing
Explanation.
As shown in the picture, the contactless Terahertz overbrushing layer thickness detection device of the utility model, structure includes machine
Frame, pulse THz source 1, terahertz camera 4, control and signal processing module 5, computer 6,
Pulse THz source 1, terahertz camera 4 are fixed at the lower surface of work upper mounting plate 8, and work upper mounting plate 8
It is arranged in rack 9；
The receiving direction of the impulse ejection direction of pulse THz source and terahertz camera in work upper mounting plate it is vertical in
Mandrel to the symmetrical setting of normal；
Translation rotating mechanism 10 is provided between rack and work upper mounting plate；
Pulse THz source 1, terahertz camera 4 are connected respectively to control and signal processing module 5, control and signal processing
Module 5 is connect with computer 6；
Pulse THz source, terahertz camera, control and signal processing module, computer collectively form testing agency 11；
The upper surface of work lower platform 12 is placed with part 13 to be detected, and the outreach end of work lower platform 12 is fixedly installed vertical
Vertical support shaft 14, indulges vertical support shaft 14 and work 12 plane of lower platform is perpendicular；
It is coaxially arranged with vertical vertical elevator 15 on the axle body of vertical vertical support shaft 14, indulges vertical elevator 15 in vertical vertical support shaft
Lower movement and diametrically opposed static, being coaxially fixedly installed angular transducer 16 and turning on the fuselage of vertical vertical elevator 15
To encoder 17 and steering motor 18, angular transducer and steering encoder and steering motor three, which interconnect, constitutes horizontal turn
To mechanism 19；
The fuselage of steering motor 18 is fixedly connected with horizontal swing arm 20, and steering motor 18 drives horizontal swing arm 20 and vertical vertical support
The relative rotation of axis 14；
The outreach end of horizontal swing arm 20 is fixedly installed longitudinal working arm 21, longitudinal working arm 21 and vertical vertical 14 phase of support shaft
In parallel；
The bottom end of longitudinal working arm 21 connects work upper mounting plate 8 by rotary tray motor 22, and work upper mounting plate passes through turntable electricity
The driving of machine is using longitudinal working arm as center axis flat turn；
The projection that the vertical central axial normal of work upper mounting plate 8 is downward is fallen in the upper surface of work lower platform 12
The heart；
Vertical vertical support shaft, vertical vertical elevator, horizontal steering mechanism, horizontal swing arm, longitudinal working arm and rotary tray motor are constituted
Translate rotating mechanism.
Pulse THz source: 1.5~20THZ of adjustable frequency, pulse width < 50GHZ, repetitive rate 100HZ, mean power 1
~10 microwatts, 10~100nJ of pulse energy, impulse ejection stopping is controlled and signal processing module control.
The surface of part to be detected is provided with coating, and coating is single layer figure layer or laminated coating.
Vertical vertical support shaft, horizontal swing arm and longitudinal working arm constitute rack.
The time domain terahertz pulse that the pulse THz source 1 of the contactless Terahertz overbrushing layer thickness detection device emits
By 5 controls and signal processing module control triggering, when control and the sending outgoing instruction of signal processing module 5, pulse Terahertz
Source 1 starts to emit time domain impulse THz wave, while control and signal processing module start timing.When terahertz pulse is incident on
Coating and occurring reflects and the terahertz pulse signal that reflects by terahertz camera when being received, and timing terminates and extract impulse wave to wear
The row time, by time and the terahertz signal received being carried out processing and operation obtains the thickness of coating.
Pulse THz source: 1.5~20THZ of adjustable frequency, pulse width < 50GHZ, repetitive rate 100HZ, mean power 1
~10 microwatts, 10~100nJ of pulse energy, impulse ejection stopping is controlled and signal processing module control.
Coating can be laminated coating, at the electromagnetic property parameters and typing control and signal of measured in advance coating
The database in module is managed, the thickness of different coating is obtained by the analytical calculation of control and signal processing module.
Rotating mechanism is translated, pulse THz source and terahertz camera are fixed on the same part, is revolved by translation
The movement of rotation mechanism can thickness information at real-time measurement different coating position, the plane coating for not being rule passes through rotation
And translational motion is able to carry out detection, translation and rotating mechanism control its motion morphology by computer, can be according to different figure layers
And substrate shape sets its motion profile.
Control and signal processing module, electromagnetism, optical characteristics based on different coating are obtained by inverting and Fourier transformation
Pulse Terahertz to different coating reflects signal.
It is as shown in Figure 2 to control signal processing module model foundation.
Z-direction electromagnetic field may be expressed as:
The projection amplitude of Ai: the i-th layer of coating, the reflected amplitude of Bi: the i-th layer of coating.Wherein
K0 is the wave number of light in a vacuum, and θ is terahertz pulse incident angle.With the direction maxwell equation group x electricity
Field may be expressed as:
The y=di at boundary, Continuity may be expressed as:
So:
Complex refractivity index may be expressed as:
neffIt (v) is effective refractive index, k (v) is waste light factor
In terahertz wave band by n in this modeleff(v) it is considered as constant, and k (v) and frequency are at incremental linear relationship:
K (v)=keffv.
Then the optical property of each coating may be expressed as:
K (v)=keffv.
Reflection R (v) may be expressed as:
Reflection configuration emulation: time domain terahertz pulse signal is frequency-region signal by Fourier transformation, is represented by
Reflection outgoing signal by Fourier transformation are as follows:
Eout(v)=Eref(v)×R(v).
Time domain, the frequency-region signal of reflected terahertz hereby pulse are obtained with this.
Processing operation finally is carried out to signal and obtains the thickness information of each coating.
Claims (4)
1. contactless Terahertz overbrushing layer thickness detection device, it is characterised in that including rack, pulse THz source, Terahertz
Camera, control and signal processing module, computer,
Pulse THz source, terahertz camera are fixed at the lower surface of work upper mounting plate, and work upper mounting plate is arranged in machine
On frame；
The impulse ejection direction of pulse THz source and the receiving direction of terahertz camera are in the vertical central axis of work upper mounting plate
To the symmetrical setting of normal；
Translation rotating mechanism is provided between rack and work upper mounting plate；
Pulse THz source, terahertz camera are connected respectively to control and signal processing module, control and signal processing module with
Computer connection；
Pulse THz source, terahertz camera, control and signal processing module, computer collectively form testing agency；
The upper surface of work lower platform is placed with part to be detected, and the outreach end for the lower platform that works is fixedly installed vertical vertical support shaft,
Vertical vertical support shaft and work lower platform plane are perpendicular；
Vertical vertical elevator is coaxially arranged on the axle body of vertical vertical support shaft, indulge vertical elevator move up and down along vertical vertical support shaft and
It is diametrically opposed static, angular transducer is coaxially fixedly installed on the fuselage of vertical vertical elevator and is turned to encoder and is turned
To motor, angular transducer and steering encoder and steering motor interconnection constitute horizontal steering mechanism；
The fuselage of steering motor is fixedly connected with horizontal swing arm, and steering motor drives horizontal swing arm and vertical the opposite of vertical support shaft to turn
It is dynamic；
The outreach end of horizontal swing arm is fixedly installed longitudinal working arm, and longitudinal working arm is parallel with vertical vertical support shaft；
The bottom end of longitudinal working arm connects work upper mounting plate by rotary tray motor, work upper mounting plate by the driving of rotary tray motor with
Longitudinal working arm is the flat turn of center axis；
The downward projection of the vertical central axial normal of work upper mounting plate falls within the upper surface center of work lower platform；
Vertical vertical support shaft, vertical vertical elevator, horizontal steering mechanism, horizontal swing arm, longitudinal working arm and rotary tray motor constitute translation
Rotating mechanism.
2. contactless Terahertz overbrushing layer thickness detection device according to claim 1, it is characterised in that: pulse terahertz
Hereby source: 1.5~20THZ of adjustable frequency, pulse width < 50GHZ, repetitive rate 100HZ, 1~10 microwatt of mean power, pulse energy
10~100nJ is measured, impulse ejection stopping is controlled and signal processing module control.
3. contactless Terahertz overbrushing layer thickness detection device according to claim 1, it is characterised in that: part to be detected
Surface be provided with coating, coating is single layer figure layer or laminated coating.
4. contactless Terahertz overbrushing layer thickness detection device according to claim 1, it is characterised in that: vertical vertical support
Axis, horizontal swing arm and longitudinal working arm constitute rack.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821159220.9U CN208998745U (en) | 2018-07-21 | 2018-07-21 | Contactless Terahertz overbrushing layer thickness detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821159220.9U CN208998745U (en) | 2018-07-21 | 2018-07-21 | Contactless Terahertz overbrushing layer thickness detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208998745U true CN208998745U (en) | 2019-06-18 |
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ID=66796462
Family Applications (1)
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|---|---|---|---|
| CN201821159220.9U Active CN208998745U (en) | 2018-07-21 | 2018-07-21 | Contactless Terahertz overbrushing layer thickness detection device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3835760A1 (en) * | 2019-12-09 | 2021-06-16 | General Electric Company | Systems and methods of assessing a coating microstructure |
| CN114322766A (en) * | 2021-12-29 | 2022-04-12 | 黎明职业大学 | Casting size detection equipment applying terahertz technology |
-
2018
- 2018-07-21 CN CN201821159220.9U patent/CN208998745U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3835760A1 (en) * | 2019-12-09 | 2021-06-16 | General Electric Company | Systems and methods of assessing a coating microstructure |
| CN113030127A (en) * | 2019-12-09 | 2021-06-25 | 通用电气公司 | System and method for evaluating coating microstructure |
| US11099002B2 (en) | 2019-12-09 | 2021-08-24 | General Electric Company | Systems and methods of assessing a coating microstructure |
| CN114322766A (en) * | 2021-12-29 | 2022-04-12 | 黎明职业大学 | Casting size detection equipment applying terahertz technology |
| CN114322766B (en) * | 2021-12-29 | 2023-08-22 | 黎明职业大学 | Casting size detection equipment applying terahertz technology |
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