CN208985953U - A kind of cutter device for wafer etching apparatus - Google Patents
A kind of cutter device for wafer etching apparatus Download PDFInfo
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- CN208985953U CN208985953U CN201821494869.6U CN201821494869U CN208985953U CN 208985953 U CN208985953 U CN 208985953U CN 201821494869 U CN201821494869 U CN 201821494869U CN 208985953 U CN208985953 U CN 208985953U
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- 238000005530 etching Methods 0.000 title claims abstract description 34
- 238000005520 cutting process Methods 0.000 claims abstract description 72
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 29
- 239000010432 diamond Substances 0.000 claims abstract description 29
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- 238000009434 installation Methods 0.000 claims description 37
- 238000003780 insertion Methods 0.000 claims description 15
- 230000037431 insertion Effects 0.000 claims description 15
- 229920000297 Rayon Polymers 0.000 claims description 7
- 238000005096 rolling process Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 42
- 229910052710 silicon Inorganic materials 0.000 abstract description 42
- 239000010703 silicon Substances 0.000 abstract description 42
- 239000013078 crystal Substances 0.000 abstract description 41
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 10
- 238000005111 flow chemistry technique Methods 0.000 abstract description 3
- 230000009471 action Effects 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 241000167880 Hirundinidae Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The utility model relates to the technical fields of wafer flow processing auxiliary equipment can reduce security risk more particularly to a kind of cutter device for wafer etching apparatus, improve the stability in silicon crystal column cutting process, cutting accuracy is improved, cutting effect is improved, reduces and uses limitation；And driving belt can carry out tensioning adjusting in long-time use process to loose driving belt, improve transmission effect, improve use reliability；Including operation panel, four groups of supporting legs, back side panel, cutting motor, driving belt, cutting piece made from diamond, left limit plate, right limit plate, left skateboard, right slide plate, top plate, adjusting screw, motor, two groups of upper left guide wheels, two groups of lower-left guide wheels, two groups of upper right guide wheels, two groups of bottom right guide wheels, two groups of clamping screws, upper mounted plate, bottom plate, left fixed plate, right fixed plate, screwed pipe, threaded rod, adjustable plate and tensioning wheel, the left and right side at the middle part of back side panel is driven to be vertically arranged with dovetail chute.
Description
Technical field
The utility model relates to the technical fields of wafer flow processing auxiliary equipment, more particularly to one kind for crystalline substance
The cutter device of circle etching apparatus.
Background technique
It is well known that wafer is the carrier for producing used in integrated circuits, refer to monocrystalline silicon wafer more, is used for wafer etching apparatus
Cutter device be that a kind of pair of silicon crystal column is cut, in order to preferably process obtain silicon wafer auxiliary device, in wafer
It is widely used in a variety of applications in the field of flow processing；The existing cutter device for wafer etching apparatus includes operation
Plate, four groups of supporting legs, back side panel, cutting motor, driving belt and cutting piece made from diamond, the bottom end of back side panel and the top of operation panel
Rear side connection, and the top of four groups of supporting legs connects with the front left side of operation panel bottom end, left rear side, forward right side and right lateral side respectively
It connects, cutting motor is mounted on the rear end right side central of back side panel, and the front output end of cutting motor is provided with transmission shaft, passes
The front end of moving axis passes through the inside of back side panel from the rear end of back side panel and extend out to the front end external world of back side panel, the front end of transmission shaft
It is provided with belt driving wheel, the front end left side central portion of back side panel is provided with left fixing groove, and left fixing groove is internally provided with a left side
Ball bearing, the rear end of cutting piece made from diamond has been arranged concentrically support shaft, and the rear end of support shaft is inserted and fixed installation extremely
Inside the front end of left ball bearing, and the external fixing sleeve of support shaft is equipped with belt slave wheel, and driving belt is set in
On belt driving wheel and belt slave wheel；The existing cutter device for wafer etching apparatus is in use, first will be to be cut
Silicon crystal column be placed on operation panel, then cutting motor and external power supply are connected, cutting motor is opened, passes through cutting motor
Rotation, drive the rotation of belt driving wheel, by the transmission of driving belt, drive cutting piece made from diamond rotation, then manually
Silicon crystal column to be cut is held, is moved up, it is cut using the cutting piece made from diamond of rotation；It is existing to be used for
It being found in the cutter device use of wafer etching apparatus, artificial hand takes silicon crystal column to cut upwards, and there are security risks, simultaneously because
The stability of manpower is poor, and cutting accuracy is lower, and since the cutting diameter of cutting piece made from diamond is smaller, in silicon crystal column to moving up
During dynamic, silicon crystal column cannot disposably be cut, cause cutting effect poor, it is higher using limitation；And driving belt
In long-time use process, it is easy to happen relaxation by extraneous factor, causes transmission effect poor, use reliability is lower.
Utility model content
In order to solve the above technical problems, the utility model provides a kind of reduction security risk, improves silicon crystal column and rising shifting
Stability in dynamic cutting process improves cutting accuracy, solve because cutting piece made from diamond cutting diameter is smaller cannot be by silicon crystal column
The problem of disposable cutting, improves cutting effect, reduces and uses limitation；And driving belt is in long-time use process,
Tensioning adjusting can be carried out to loose driving belt, improves transmission effect, and that improves use reliability is used for wafer etching apparatus
Cutter device.
A kind of cutter device for wafer etching apparatus of the utility model, including operation panel, four groups of supporting legs, rear sides
It is connected on rear side of plate, cutting motor, driving belt and cutting piece made from diamond, the bottom end of back side panel and the top of operation panel, and four
The top of group supporting leg is connect with the front left side of operation panel bottom end, left rear side, forward right side and right lateral side respectively, and cutting motor is mounted on
The rear end right side central of back side panel, and the front output end of cutting motor is provided with transmission shaft, the front end of transmission shaft is from rear side
The rear end of plate passes through the inside of back side panel and extend out to the front end external world of back side panel, and the front end of transmission shaft is provided with belt actively
Wheel, the front end left side central portion of back side panel is provided with left fixing groove, and left fixing groove is internally provided with left ball bearing, diamond
The rear end of cutting sheet has been arranged concentrically support shaft, and the rear end of support shaft is inserted and fixed installation to the front end of left ball bearing
Inside, and the external fixing sleeve of support shaft is equipped with belt slave wheel, and driving belt is set in belt driving wheel and belt
On driven wheel；Including left limit plate, right limit plate, left skateboard, right slide plate, top plate, adjusting screw, drive motor, two groups of upper lefts
Guide wheel, two groups of lower-left guide wheels, two groups of upper right guide wheels, two groups of bottom right guide wheels and two groups of clamping screws, the left limit plate and right limit
The bottom end of position plate is connect with the left and right side in operation panel top left hand region respectively, and the right end of left limit plate is longitudinal
It is provided with left limit sliding slot, the left end correspondence of right limit plate is vertically arranged with right limit sliding slot, the left end of the left skateboard and institute
The right end for stating left limit plate slidably contacts, and the left skateboard includes upper left slide plate and lower-left slide plate, the lower-left slide plate
Left end be provided with left limit sliding block, left limit sliding block is slidably arranged in inside left limit sliding slot, the right end of the right slide plate
It is slidably contacted with the left end of the right limit plate, and the right end of the right slide plate is provided with right limit sliding block, right limit is sliding
Block is slidably arranged in inside right limit sliding slot, connects on the downside of the left end of the top plate and the right end of left skateboard, the right end of top plate
It is connect on the downside of the left end of right slide plate, the bottom end and left side of the upper left slide plate and the top left hand of lower-left slide plate are cut with scissors by hinge
Setting is connect, and the front side on upper left slide plate top and rear side are vertically arranged with perforative bolt hole, and institute up and down
The front side and rear side for stating lower-left slide plate top are provided with threaded hole, and the bottom end of two groups of clamping screws is each passed through two groups of spiral shells
Simultaneously spiral shell is filled to inside two groups of threaded holes for insertion respectively inside bolt throughhole, and two groups of upper left guide wheels are rotatably disposed in upper left respectively
The front end and downside of the right end of slide plate, and two groups of lower-left guide wheels are rotatably disposed in the front side of lower-left slide plate right end respectively
And rear side, the upper front side for being rotatably disposed in right slide plate left end respectively of two groups of upper right guide wheels and upper rear side, and it is described
Two groups of bottom right guide wheels are rotatably disposed in the lower front side of right slide plate left end respectively and lower rear side, the bottom end for driving motor are installed
In the top middle portion of top plate, and the front output end of motor is driven to be provided with drive rubber tire, the bottom end of the operation panel is longitudinal
It is provided with perforative tapped through hole up and down, and the tapped through hole is located at the middle part of left limit plate and right limit plate, the tune
Save the top of lead screw from the bottom end spiral shell of operation panel dress inside tapped through hole and screw out to the top external world of operation panel with it is described
The center bottom of top plate contacts, and the bottom end of adjusting screw has been arranged concentrically the first handwheel；Further include upper mounted plate, bottom plate,
Left fixed plate, right fixed plate, screwed pipe, threaded rod, adjustable plate and tensioning wheel, the left side and the right side of the central region of the back side panel
Side is vertically arranged with dovetail chute, and the left and right side of the adjustable plate rear end is provided with dovetail slide block, and described two
Group dovetail slide block is slidably arranged in respectively inside two groups of dovetail chutes, and the bottom end of the bottom plate and the back side panel
Top middle portion connection, the bottom end of the left fixed plate and right fixed plate left and right side with the bottom plate top respectively
Connection, and the top of left fixed plate and right fixed plate is connect with the left and right side at fixed board bottom end respectively, it is described
The inside middle portion of upper mounted plate and bottom plate is vertically arranged with fixed hole and lower fixed hole respectively, and upper fixation is logical
It is fixedly installed upper ball bearing and lower ball bearing inside hole and lower fixed hole respectively, the bottom end of the screwed pipe is from upper solid
The top of fixed board sequentially passes through inside upper ball bearing and lower ball bearing and extend out to the bottom end external world of bottom plate, upper ball
The inside of bearing and lower ball bearing is fixedly connected with the upper side and lower side of screwed pipe outer circumferential walls respectively, the top of the threaded rod
End insertion and spiral shell are filled to the bottom inner portion of screwed pipe, and the bottom end of threaded rod is connect with the top middle portion of the adjustable plate, spiral shell
The top of line pipe is connected with the second handwheel with one heart, and the rear end of the tensioning wheel is provided with tensioning shaft, and before adjustable plate
End middle part is provided with right fixing groove, and right fixing groove is internally provided with right ball bearing, and the rear end insertion of the tensioning shaft is simultaneously
It is fixedly installed to inside right ball bearing, can be in rolling contact on the upside of the top of the tensioning wheel and the inner ring of the driving belt.
A kind of cutter device for wafer etching apparatus of the utility model further includes installation screw rod and rotating disk, institute
The front end for stating support shaft has been arranged concentrically installation axle, and the diameter of the installation axle is less than the diameter of the support shaft, installation
The front end of axis is provided with installation threaded hole, and the cutting piece made from diamond is set in the installation axle, and the rotation
The rear end of disk with it is described installation screw rod front end it is concentric connect, the upside, downside, left and right side for rotating back-end disk are provided with
Anti-skidding blob of viscose, and simultaneously spiral shell is filled to inside the front end of installation threaded hole for the rear end insertion of the installation screw rod, and described four groups
The rear end of anti-skidding blob of viscose is contacted with the locking of the front end of the cutting piece made from diamond.
A kind of cutter device for wafer etching apparatus of the utility model, the front end of the rotating disk are inscribed in circle and set
It is equipped with interior hexagonal fixing groove.
A kind of cutter device for wafer etching apparatus of the utility model further includes left latch, right latch, a left side
The right end of clamping screw and right clamping screw, the left latch is connect with the left end of the adjustable plate, and the right locking
The right end of the left end of plate and adjustable plate connects, the rear end of left latch and right latch with the front end of the back side panel slidably
Contact, and the front end of the left latch is vertically arranged with pre-and post perforative left bar shaped groove, and the right latch
Front end is vertically arranged with pre-and post perforative right bar shaped groove, and the left and right side of the front end of the back side panel, which respectively corresponds, to be provided with
Left locking screw through-hole and right locking screw through-hole, the rear end of the left clamping screw pass through insertion and spiral shell inside left bar shaped groove
It is filled to inside left locking screw through-hole, and the rear end of right clamping screw passes through insertion inside right bar shaped groove and spiral shell is filled to right lock
Inside tight tapped through hole.
A kind of cutter device for wafer etching apparatus of the utility model, two groups of upper left guide wheels, two groups of lower-lefts
The outside of guide wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels is provided with rubber sleave.
A kind of cutter device for wafer etching apparatus of the utility model, the left limit sliding block of the left skateboard left end
Two groups are set as, and the right end of two groups of left limit sliding blocks is connect with the front side of the left skateboard left end and rear side respectively, and
It is two groups that the left limit sliding slot of the left limit plate right end, which is correspondingly arranged, and two groups of left limit sliding slots are separately positioned on left limit
The front side of plate right end and rear side, two groups of left limit sliding blocks are slidably arranged in respectively inside two groups of left limit sliding slots, and described
The right limit sliding block of right slide plate right end is set as two groups, and the left end of two groups of right limit sliding blocks respectively with the right slide plate right end
Front side connected with rear side, and it is two groups that the left limit sliding slot of right limit plate left end, which is correspondingly arranged, two groups of right limits
Position sliding slot is separately positioned on front side and the rear side of right limit plate left end, and two groups of right sides are slidably arranged in two groups of right limit sliding blocks respectively
Inside limit sliding chutes.
A kind of cutter device for wafer etching apparatus of the utility model, further include adjustment axis, stiffening ring, four groups add
Stock, adjustment disk and four groups of inserted links, the inside of four groups of supporting legs are laterally fixedly installed support plate, and the support plate
Top left hand is provided with auxiliary tank, and auxiliary tank is internally provided with auxiliary ball bearing, and the bottom end of the adjustment axis is inserted and fixed
Inside installation to auxiliary ball bearing, the bottom end of the adjustment disk with the top of the adjustment axis is concentric connect, and described four
The bottom end of group inserted link is connect with front left side, left rear side, forward right side and the right lateral side on the adjustment disk top respectively, four groups of inserted links
Top respectively longitudinally through the first handwheel bottom inner portion and extend out to the first handwheel top it is extraneous, the stiffening ring is fixed
It is sleeved on the outside of the adjustment axis, and the inner end of four groups of extension bars is evenly distributed with circumference connection and the stiffening ring is arranged in
On periphery wall.
A kind of cutter device for wafer etching apparatus of the utility model, further includes four groups of Anti-slip covers, and described four groups
Anti-slip cover is fixedly set in respectively outside the outer end of four groups of extension bars.
Compared with prior art the utility model has the following beneficial effects: can be made by unscrewing two groups of clamping screws upwards
Upper left slide plate and lower-left slide plate can be overturn to the left under the action of two groups of hinges, so that two groups of upper left guide wheels be allow to turn over to the left
Turn, silicon crystal column to be cut be placed on inside two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels to facilitate,
Then by overturning upper left slide plate to the right, upper left slide plate is made to return back to home position, and by rotating two groups of lockings separately down
Bolt, make it is longitudinally fixed between upper left slide plate and lower-left slide plate, so as to left by two groups inside left skateboard and right slide plate
Upper block, two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels carry out the silicon crystal column cut to stablize clamping, and
And limited support can be carried out to left skateboard and right slide plate by left limit plate and right limit plate, and exist by left limit sliding block
Being slidably matched inside left limit sliding slot, while by right limit sliding block being slidably matched inside right limit sliding slot, make left cunning
Plate and right slide plate can move up and down adjusting, and can connection by top plate to left skateboard and right slide plate, lead to simultaneously
The spiral shell assembly overregulated between lead screw and tapped through hole is closed, and by rotating the first handwheel, drive adjusting screw is rotated, thus
Top plate is pushed to move up, so as to push limit of the silicon crystal column cut upwards in left limit sliding slot and right limit sliding slot
Under moved along the direction of left limit sliding slot and right limit sliding slot is stable upwards, it is upward that silicon crystal column is directly held without operator
Mobile cutting, reduces security risk, and lead with two groups of upper left guide wheels, two groups of lower-lefts by left limit sliding slot and right limit sliding slot
The cooperation of wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels improves silicon crystal column and is rising the stability in mobile cutting process, mentions
High cutting accuracy can make that rubber tire is driven to be rotated, and pass through two groups of upper left guide wheels, two by the rotation of drive motor
Under the rotational support of group lower-left guide wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels, allow silicon crystal column in left skateboard and right cunning
The stable rotation of intralamellar part is driven the opposite rotation direction of motor and cutting motor by setting, makes silicon crystal column and diamond
Cutting sheet steering is identical, after by rotating adjusting screw to suitable depth of cut upwards, by the rotation of silicon crystal column, makes silicon
Crystal column is cut in rotary course, circumference cut by way of solve because cutting piece made from diamond cutting diameter is smaller cannot
The problem of silicon crystal column is disposably cut improves cutting effect, reduces and uses limitation；And driving belt is used in long-time
In the process, adjustable plate can be allow along two groups by being slidably matched between two groups of dovetail slide blocks and two groups of dovetail chutes
The direction of dovetail chute, which vertically moves, to be adjusted, and by rotating the second handwheel, makes screwed pipe respectively in upper ball bearing and lower ball
Bearing inner rotation, is assembled by spiral shell between screwed pipe and threaded rod and is closed, and allows threaded rod to precession inside screwed pipe, from
And adjustable plate is driven to move up, by the rotatable cooperation of tensioning shaft bottom end and driving belt inner ring, make moved up
Mandrel tenses driving belt upwards, so as to carry out tensioning adjusting to loose driving belt, improves transmission effect, raising makes
Use reliability.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the partial enlargement structural representation at the utility model A；
Fig. 3 is the partial enlargement structural representation at the utility model B；
Fig. 4 is the structural schematic diagram that the utility model installs screw rod, the left view that rotating disk is connected with cutting piece made from diamond；
Fig. 5 is the utility model adjustment disk, four groups of inserted links and the first handwheel connection schematic perspective view；
Fig. 6 is the right side structural representation that the utility model cutting motor is connected with back side panel；
It is attached marked in the figure: 1, operation panel；2, supporting leg；3, back side panel；4, cutting motor；5, driving belt；6, diamond cutting
Pitch cutting；7, left limit plate；8, left skateboard；9, top plate；10, adjusting screw；11, motor is driven；12, lower-left guide wheel；13, locking screw
Bolt；14, the first handwheel；15, upper mounted plate；16, left fixed plate；17, screwed pipe；18, threaded rod；19, adjustable plate；20, it is tensioned
Wheel；21, screw rod is installed；22, rotating disk；23, interior hexagonal fixing groove；24, left latch；25, left clamping screw；26, rubber skin
Set；27, adjustment axis；28, stiffening ring；29, extension bar；30, adjustment disk；31, inserted link；32, Anti-slip cover.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below
Embodiment is not intended to limit the scope of the present invention for illustrating the utility model.
As shown in Figures 1 to 6, a kind of cutter device for wafer etching apparatus of the utility model, including operation panel
1, four groups of supporting legs 2, back side panel 3, cutting motor 4, driving belt 5 and cutting piece made from diamond 6, the bottom end of back side panel and operation panel
Top on rear side of connection, and the top of four groups of supporting legs is respectively and behind the front left side of operation panel bottom end, left rear side, forward right side and the right side
Side connection, cutting motor is mounted on the rear end right side central of back side panel, and the front output end of cutting motor is provided with transmission
The front end of axis, transmission shaft passes through the inside of back side panel from the rear end of back side panel and extend out to the front end external world of back side panel, transmission shaft
Front end be provided with belt driving wheel, the front end left side central portion of back side panel is provided with left fixing groove, and sets inside left fixing groove
It is equipped with left ball bearing, the rear end of cutting piece made from diamond has been arranged concentrically support shaft, and the rear end of support shaft is inserted and fixed
Inside installation to the front end of left ball bearing, and the external fixing sleeve of support shaft is equipped with belt slave wheel, driving belt difference
It is sleeved on belt driving wheel and belt slave wheel；Including left limit plate 7, right limit plate, left skateboard 8, right slide plate, top plate 9, adjust
It saves lead screw 10, drive 11, two groups of upper left guide wheels of motor, two groups of lower-left guide wheels, 12, two groups of upper right guide wheels, two groups of bottom right guide wheels and two
The bottom end of group clamping screw 13, left limit plate and right limit plate connects with the left and right side in operation panel top left hand region respectively
It connects, and the right end of left limit plate is vertically arranged with left limit sliding slot, the left end correspondence of right limit plate is vertically arranged with right limit
The left end of sliding slot, left skateboard is slidably contacted with the right end of left limit plate, and left skateboard includes upper left slide plate and lower-left slide plate,
The left end of lower-left slide plate is provided with left limit sliding block, and left limit sliding block is slidably arranged in inside left limit sliding slot, right slide plate
Right end is slidably contacted with the left end of right limit plate, and the right end of right slide plate is provided with right limit sliding block, and right limit sliding block can
It is slidably arranged in inside right limit sliding slot, is connected on the downside of the left end of top plate and the right end of left skateboard, the right end of top plate and right slide plate
Left end on the downside of the top left hand of connection, the bottom end of upper left slide plate and left side and lower-left slide plate pass through hinge and be hingedly arranged, and
The front side on upper left slide plate top and rear side are vertically arranged with perforative bolt hole, and the front side on lower-left slide plate top up and down
It is provided with threaded hole with rear side, the bottom end of two groups of clamping screws is each passed through inside two groups of bolt holes insertion respectively and spiral shell dress
To two groups of threaded holes, two groups of upper left guide wheels are rotatably disposed in the front end and downside of the right end of upper left slide plate respectively, and
Two groups of lower-left guide wheels are rotatably disposed in front side and the rear side of lower-left slide plate right end respectively, and the difference of two groups of upper right guide wheels is rotatable
Be arranged in right slide plate left end upper front side and upper rear side, and two groups of bottom right guide wheels are rotatably disposed in right slide plate left end respectively
Lower front side and lower rear side, drive the bottom end of motor to be mounted on the top middle portion of top plate, and the front output end of motor is driven to set
It is equipped with drive rubber tire, the bottom end of operation panel is vertically arranged with perforative tapped through hole up and down, and tapped through hole is located at left limit
The top at the middle part of plate and right limit plate, adjusting screw inside tapped through hole and is screwed out to behaviour from the bottom end spiral shell dress of operation panel
The top external world for making plate is contacted with the center bottom of top plate, and the bottom end of adjusting screw has been arranged concentrically the first handwheel 14；Further include
Upper mounted plate 15, bottom plate, left fixed plate 16, right fixed plate, screwed pipe 17, threaded rod 18, adjustable plate 19 and tensioning wheel 20,
The left and right side of the central region of back side panel is vertically arranged with dovetail chute, and the left and right side of adjustable plate rear end is equal
It is provided with dovetail slide block, two groups of dovetail slide blocks are slidably arranged in respectively inside two groups of dovetail chutes, and the bottom of bottom plate
End is connect with the top middle portion of back side panel, the bottom end of the left fixed plate and right fixed plate left side and the right side with bottom plate top respectively
Side connection, and the top of left fixed plate and right fixed plate is connect with the left and right side of upper mounted plate bottom end respectively, upper fixation
The inside middle portion of plate and bottom plate is vertically arranged with fixed hole and lower fixed hole respectively, and upper fixed hole is under
It is fixedly installed upper ball bearing and lower ball bearing inside fixed hole respectively, the bottom end of screwed pipe is from the top of upper mounted plate
It sequentially passes through inside upper ball bearing and lower ball bearing and the bottom end for extending out to bottom plate is extraneous, upper ball bearing and lower rolling
The inside of pearl bearing is fixedly connected with the upper side and lower side of screwed pipe outer circumferential walls respectively, and simultaneously spiral shell is filled to for the top insertion of threaded rod
The bottom inner portion of screwed pipe, and the top middle portion of the bottom end of threaded rod and adjustable plate connects, and the top of screwed pipe connects with one heart
It is provided with the second handwheel, the rear end of tensioning wheel is provided with tensioning shaft, and the front center of adjustable plate is provided with right fixing groove, and
And right fixing groove is internally provided with right ball bearing, the rear end of tensioning shaft is inserted and fixed inside installation to right ball bearing,
It can be in rolling contact on the upside of the top of bearing up pulley and the inner ring of driving belt；It can make upper left by unscrewing two groups of clamping screws upwards
Slide plate and lower-left slide plate can be overturn to the left under the action of two groups of hinges, thus overturn two groups of upper left guide wheels to the left,
Silicon crystal column to be cut is placed on inside two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels to facilitate, so
Afterwards by overturning upper left slide plate to the right, upper left slide plate is set to return back to home position, and by rotating two groups of locking screws separately down
Bolt, make it is longitudinally fixed between upper left slide plate and lower-left slide plate, so as to pass through two groups of upper lefts inside left skateboard and right slide plate
Guide wheel, two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels carry out the silicon crystal column cut to stablize clamping, and
Limited support can be carried out to left skateboard and right slide plate by left limit plate and right limit plate, and by left limit sliding block on a left side
Being slidably matched inside limit sliding chutes, while by right limit sliding block being slidably matched inside right limit sliding slot, make left skateboard
Adjusting can be moved up and down with right slide plate, and can connection by top plate to left skateboard and right slide plate, pass through simultaneously
Spiral shell between adjusting screw and tapped through hole, which assembles, to be closed, and by rotating the first handwheel, drives adjusting screw to be rotated, to push away
Dynamic top plate moves up, so as to push the silicon crystal column cut upwards under the limit of left limit sliding slot and right limit sliding slot
It is moved along the direction of left limit sliding slot and right limit sliding slot is stable upwards, silicon crystal column is directly held without operator to moving up
Dynamic cutting, reduces security risk, and lead with two groups of upper left guide wheels, two groups of lower-lefts by left limit sliding slot and right limit sliding slot
The cooperation of wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels improves silicon crystal column and is rising the stability in mobile cutting process, mentions
High cutting accuracy can make that rubber tire is driven to be rotated, and pass through two groups of upper left guide wheels, two by the rotation of drive motor
Under the rotational support of group lower-left guide wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels, allow silicon crystal column in left skateboard and right cunning
The stable rotation of intralamellar part is driven the opposite rotation direction of motor and cutting motor by setting, makes silicon crystal column and diamond
Cutting sheet steering is identical, after by rotating adjusting screw to suitable depth of cut upwards, by the rotation of silicon crystal column, makes silicon
Crystal column is cut in rotary course, circumference cut by way of solve because cutting piece made from diamond cutting diameter is smaller cannot
The problem of silicon crystal column is disposably cut improves cutting effect, reduces and uses limitation；And driving belt is used in long-time
In the process, adjustable plate can be allow along two groups by being slidably matched between two groups of dovetail slide blocks and two groups of dovetail chutes
The direction of dovetail chute, which vertically moves, to be adjusted, and by rotating the second handwheel, makes screwed pipe respectively in upper ball bearing and lower ball
Bearing inner rotation, is assembled by spiral shell between screwed pipe and threaded rod and is closed, and allows threaded rod to precession inside screwed pipe, from
And adjustable plate is driven to move up, by the rotatable cooperation of tensioning shaft bottom end and driving belt inner ring, make moved up
Mandrel tenses driving belt upwards, so as to carry out tensioning adjusting to loose driving belt, improves transmission effect, raising makes
Use reliability.
A kind of cutter device for wafer etching apparatus of the utility model further includes installation screw rod 21 and rotating disk
22, the front end of support shaft has been arranged concentrically installation axle, and the diameter of installation axle is less than the diameter of support shaft, the front end of installation axle
It is provided with installation threaded hole, and cutting piece made from diamond is arranged on the mounting shaft, and the rear end of rotating disk and installation screw rod
Front end connects with one heart, and the upside, downside, left and right side for rotating back-end disk are provided with anti-skidding blob of viscose, and install screw rod
Rear end insertion and spiral shell be filled to installation threaded hole front end inside, and the rear end of four groups of anti-skidding blob of viscoses with cutting piece made from diamond
Front end locking contact；It can be assembled and be closed by the spiral shell between the installation threaded hole of installation screw rod on the mounting shaft, make that screw rod is installed
It is easy to disassemble, so as to improve usability, and rotating disk can be passed through so that cutting piece made from diamond can carry out dismounting and change
Four groups of anti-skidding blob of viscoses of rear end prevent the cutting piece made from diamond after installation and support shaft from opposite sliding occurs, and improve diamond cut
Piece rotates the use reliability in cutting process.
A kind of cutter device for wafer etching apparatus of the utility model, the front end of rotating disk are inscribed in circle and are provided with
Interior hexagonal fixing groove 23；Can be arranged by interior hexagonal fixing groove, facilitate operator using allen wrench to rotating disk into
Row rotation process saves manpower, reduces and uses limitation.
A kind of cutter device for wafer etching apparatus of the utility model, further include left latch 24, right latch,
Left clamping screw 25 and right clamping screw, the right end of left latch and the left end of adjustable plate connect, and the left end of right latch
It is connect with the right end of adjustable plate, the rear end of left latch and right latch is slidably contacted with the front end of back side panel, and left
The front end of latch is vertically arranged with pre-and post perforative left bar shaped groove, and the front end of right latch is vertically arranged with front and back and passes through
The right bar shaped groove worn, the left and right side of the front end of back side panel, which respectively corresponds, is provided with left locking screw through-hole and right locking screw
Line through-hole, the rear end of left clamping screw passes through insertion inside left bar shaped groove and spiral shell is filled to inside left locking screw through-hole, and
The rear end of right clamping screw passes through insertion inside right bar shaped groove and spiral shell is filled to inside right locking screw through-hole；Left lock can be passed through
Left bar shaped groove and right bar shaped groove on tight plate and right latch facilitate adjustable plate to move up adjusting, and can be by dividing
The other left clamping screw of back rotation and right clamping screw, make the rear end of left latch and right latch respectively with rear side front edge of board
Left and right side locking contact, so as to so that the position after adjustable plate is adjusted is locked, thus to the position of tensioning wheel into
Row is locked, and prevents the position of the tensioning wheel caused by by external force rotation because of the second handwheel mobile, improves tensioning wheel to driving belt
It is tensioned the use reliability adjusted.
A kind of cutter device for wafer etching apparatus of the utility model, two groups of upper left guide wheels, two groups of lower-left guide wheels,
The outside of two groups of upper right guide wheels and two groups of bottom right guide wheels is provided with rubber sleave 26；It can reduce by two groups of left sides by rubber sleave
The abrasion of upper block, two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels to silicon crystal column improves the guarantor to silicon crystal column
Shield.
A kind of cutter device for wafer etching apparatus of the utility model, the left limit sliding block setting of left skateboard left end
It is two groups, and the right end of two groups of left limit sliding blocks is connect with the front side of left skateboard left end and rear side respectively, and left limit plate
It is two groups that the left limit sliding slot of right end, which is correspondingly arranged, and two groups of left limit sliding slots are separately positioned on the front side of left limit plate right end with after
Side, two groups of left limit sliding blocks are slidably arranged in respectively inside two groups of left limit sliding slots, and the right limit of right slide plate right end is sliding
Block is set as two groups, and the left end of two groups of right limit sliding blocks is connect with the front side of right slide plate right end and rear side respectively, and right
It is two groups that the left limit sliding slot of limit plate left end, which is correspondingly arranged, before two groups of right limit sliding slots are separately positioned on right limit plate left end
Side and rear side, two groups of right limit sliding blocks are slidably arranged in respectively inside two groups of right limit sliding slots；Two groups of left limits can be passed through
The setting of sliding block and two groups of right limit sliding blocks improves the stability of left skateboard and right slide plate in uphill process, reduces and shake, from
And the precision that depth of cut adjusting is carried out to silicon crystal column can be improved, improve use reliability.
A kind of cutter device for wafer etching apparatus of the utility model, further include adjustment axis 27, stiffening ring 28,
Four groups of extension bars 29, adjustment disk 30 and four groups of inserted links 31, the inside of four groups of supporting legs is laterally fixedly installed support plate, and supports
The top left hand of plate is provided with auxiliary tank, and auxiliary tank is internally provided with auxiliary ball bearing, and the bottom end of adjustment axis is inserted and fixed
Inside installation to auxiliary ball bearing, the bottom end of the adjustment disk and top of adjustment axis is concentric connects, and the bottom end of four groups of inserted links
Connect respectively with the front left side on adjustment disk top, left rear side, forward right side and right lateral side, the top of four groups of inserted links respectively longitudinally through
First handwheel bottom inner portion and the top external world for extending out to the first handwheel, stiffening ring are fixedly set in the outside of adjustment axis, and
The inner end of four groups of extension bars is evenly distributed with circumference connection and is arranged on the periphery wall of stiffening ring；The increasing of four groups of extension bars can be passed through
The rotary arm of strong rotation adjustment axis, according to lever principle, so as to save operator during rotating adjustment axis
Manpower, facilitate the rotation of adjustment axis by lower ball bearing, and can be separately inserted by four groups of inserted links to the first handwheel
Internal setting, so as to the first handwheel be driven to be rotated, so as to by using four by rotation adjustment axis
Group extension bar saves the manpower that rotation adjusts the first handwheel, easy to operate, improves practicability.
A kind of cutter device for wafer etching apparatus of the utility model further includes four groups of Anti-slip covers 32, and four groups anti-
Sliding sleeve is fixedly set in respectively outside the outer end of four groups of extension bars；Operator's manpower can be improved by four groups of Anti-slip covers
It to the frictional force in four groups of extension bar use processes, prevents from skidding, improves practicability.
A kind of cutter device for wafer etching apparatus of the utility model, at work, first by twisting upwards
Loose two groups of clamping screws, overturn upper left slide plate and lower-left slide plate to the left under the action of two groups of hinges, make two groups of upper left guide wheels
It overturns, silicon crystal column to be cut is placed on inside two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels, so to the left
Afterwards by overturning upper left slide plate to the right, upper left slide plate is set to return back to home position, and by rotating two groups of locking screws separately down
Bolt, makes longitudinally fixed between upper left slide plate and lower-left slide plate, passes through two groups of upper left guide wheels inside left skateboard and right slide plate, two groups
Lower-left guide wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels carry out the silicon crystal column cut to stablize clamping, and pass through left limit
Position plate and right limit plate carry out limited support to left skateboard and right slide plate, and through left limit sliding block inside left limit sliding slot
Be slidably matched, while by right limit sliding block being slidably matched inside right limit sliding slot, carry out left skateboard and right slide plate
Move up and down adjusting, and by connection of the top plate to left skateboard and right slide plate, at the same by adjusting screw and tapped through hole it
Between spiral shell assemble and close, adjusted according to lever principle in rotation by the rotary arm of the enhancing rotation adjustment axis of four groups of extension bars
The manpower that operator is saved during axis by the rotation of lower ball bearing adjustment axis, and passes through four groups of inserted link difference
It injects to the setting inside the first handwheel, by rotating adjustment axis, drives the first handwheel to be rotated, by using four groups of lengthenings
Bar saves the manpower that rotation adjusts the first handwheel, improves operator's manpower by four groups of Anti-slip covers and uses four groups of extension bars
Frictional force in the process prevents from skidding, and by rotating the first handwheel, adjusting screw is driven to be rotated, and pushes top plate to moving up
It is dynamic, push the silicon crystal column cut upwards under the limit of left limit sliding slot and right limit sliding slot along left limit sliding slot and right limit
The direction stable movement upwards of position sliding slot improves left skateboard by the setting of two groups of left limit sliding blocks and two groups of right limit sliding blocks
It with stability of the right slide plate in uphill process, reduces and shakes, improve the precision for carrying out depth of cut adjusting to silicon crystal column, and
And it is right by left limit sliding slot and right limit sliding slot and two groups of upper left guide wheels, two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups
The cooperation of lower tumbler makes that rubber tire is driven to be rotated, and pass through two groups of upper left guide wheels, two groups by driving the rotation of motor
Under the rotational support of lower-left guide wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels, make silicon crystal column inside left skateboard and right slide plate
Stable rotation is driven the opposite rotation direction of motor and cutting motor by setting, makes silicon crystal column and cutting piece made from diamond
Turn to it is identical, by upwards rotate adjusting screw to suitable depth of cut after, by the rotation of silicon crystal column, silicon crystal column is made to exist
It is cut in rotary course, two groups of upper left guide wheels, two groups of lower-left guide wheels, two groups of upper right guide wheels and two is reduced by rubber sleave
Abrasion of the group bottom right guide wheel to silicon crystal column, driving belt pass through two groups of dovetail slide blocks and two groups of swallows in long-time use process
Being slidably matched between tail sliding slot adjusts adjustable plate along the direction longitudinal movement of two groups of dovetail chutes, passes through rotation second
Handwheel makes screwed pipe in upper ball bearing and lower ball bearing inner rotation, pass through the spiral shell between screwed pipe and threaded rod respectively
Assembly is closed, and makes threaded rod to precession inside screwed pipe, adjustable plate is driven to move up, by tensioning wheel bottom end and driving belt
The rotatable cooperation of circle, tenses the tensioning shaft moved up upwards driving belt, can open to loose driving belt
It is tight to adjust, adjusting is moved up by left bar shaped groove on left latch and right latch and right bar shaped groove adjustable plate, and
And by rotating left clamping screw and right clamping screw respectively backward, make the rear end of left latch and right latch respectively with rear side
The left and right side of front edge of board locks contact, and the position after adjusting adjustable plate is locked, and locks to the position of tensioning wheel
It fastens, prevents the position of the tensioning wheel caused by by external force rotation because of the second handwheel mobile.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change
It also should be regarded as the protection scope of the utility model into modification.
Claims (8)
1. a kind of cutter device for wafer etching apparatus, including operation panel (1), four groups of supporting legs (2), back side panel (3), cutting
Connect on rear side of motor (4), driving belt (5) and cutting piece made from diamond (6), the bottom end of back side panel (3) and the top of operation panel (1)
It connects, and the top of four groups of supporting legs (2) connects with the front left side of operation panel (1) bottom end, left rear side, forward right side and right lateral side respectively
It connects, cutting motor (4) is mounted on the rear end right side central of back side panel (3), and the front output end of cutting motor (4) is provided with
Transmission shaft, before the front end of transmission shaft passes through the inside of back side panel (3) and extend out to back side panel (3) from the rear end of back side panel (3)
End is extraneous, and the front end of transmission shaft is provided with belt driving wheel, and the front end left side central portion of back side panel (3) is provided with left fixing groove, and
And left fixing groove is internally provided with left ball bearing, the rear end of cutting piece made from diamond (6) has been arranged concentrically support shaft, and supports
The rear end of axis is inserted and fixed installation to inside the front end of left ball bearing, and the external fixing sleeve of support shaft be equipped with belt from
Driving wheel, driving belt (5) are set on belt driving wheel and belt slave wheel；It is characterised in that it includes left limit plate
(7), right limit plate, left skateboard (8), right slide plate, top plate (9), adjusting screw (10), drive motor (11), two groups of upper left guide wheels
(12), two groups of lower-left guide wheels, two groups of upper right guide wheels, two groups of bottom right guide wheels and two groups of clamping screws (13), the left limit plate (7)
It is connect respectively with the left and right side in the operation panel (1) top left hand region with the bottom end of right limit plate, and left limit plate
(7) right end is vertically arranged with left limit sliding slot, and the left end correspondence of right limit plate is vertically arranged with right limit sliding slot, the left cunning
The left end of plate (8) is slidably contacted with the right end of the left limit plate (7), and the left skateboard (8) include upper left slide plate and
Lower-left slide plate, the left end of the lower-left slide plate are provided with left limit sliding block, and left limit sliding slot is slidably arranged in left limit sliding block
Inside, the right end of the right slide plate are slidably contacted with the left end of the right limit plate, and the right end setting of the right slide plate
There is right limit sliding block, right limit sliding block is slidably arranged in inside right limit sliding slot, the left end of the top plate (9) and left skateboard
(8) it is connect on the downside of connection on the downside of right end, the right end of top plate (9) and the left end of right slide plate, the bottom end and a left side of the upper left slide plate
Side and the top left hand of lower-left slide plate are hingedly arranged by hinge, and the front side on upper left slide plate top and rear side are longitudinal
It is provided with perforative bolt hole up and down, and the front side on lower-left slide plate top and rear side are provided with threaded hole, it is described
The bottom end of two groups of clamping screws (13) is each passed through inside two groups of bolt holes insertion respectively and spiral shell is filled to inside two groups of threaded holes,
Two groups of upper left guide wheels (12) are rotatably disposed in the front end and downside of the right end of upper left slide plate respectively, and described two groups left
Lower tumbler is rotatably disposed in front side and the rear side of lower-left slide plate right end respectively, and the rotatable respectively of two groups of upper right guide wheels sets
The upper front side in right slide plate left end and upper rear side are set, and two groups of bottom right guide wheels are rotatably disposed in right slide plate left end respectively
Lower front side and lower rear side, the bottom end for driving motor (11) be mounted on the top middle portion of top plate (9), and drive motor
(11) front output end is provided with drive rubber tire, and it is logical that the bottom end of the operation panel (1) is vertically arranged with perforative screw thread up and down
Hole, and the tapped through hole is located at the middle part of left limit plate (7) and right limit plate, and the top of the adjusting screw (10) is grasped certainly
The bottom making the bottom end spiral shell dress of plate (1) inside tapped through hole and screwing out to the top external world of operation panel (1) and the top plate (9)
The contact of end middle part, the bottom end of adjusting screw (10) has been arranged concentrically the first handwheel (14)；It further include upper mounted plate (15), lower fixation
Plate, left fixed plate (16), right fixed plate, screwed pipe (17), threaded rod (18), adjustable plate (19) and tensioning wheel (20), after described
The left and right side of the central region of side plate (3) is vertically arranged with dovetail chute, and the left side of the adjustable plate (19) rear end
Side and right side are provided with dovetail slide block, and two groups of dovetail slide blocks are slidably arranged in respectively inside two groups of dovetail chutes, and
And the bottom end of the bottom plate is connect with the top middle portion of the back side panel (3), the left fixed plate (16) and right fixed plate
Bottom end connect respectively with the left and right side on the bottom plate top, and the top of left fixed plate (16) and right fixed plate
It is connect respectively with the left and right side of fixed plate (15) bottom end, in fixed plate (15) and the middle part of bottom plate
Side is vertically arranged with fixed hole and lower fixed hole respectively, and fixes respectively inside upper fixed hole and lower fixed hole
It is provided with upper ball bearing and lower ball bearing, the top of bottom end from the upper mounted plate (15) of the screwed pipe (17) sequentially passes through
Upper ball bearing and lower ball bearing inside and the bottom end external world for extending out to bottom plate, upper ball bearing and lower ball bearing
Inside is fixedly connected with the upper side and lower side of screwed pipe (17) outer circumferential walls respectively, and the top of the threaded rod (18) is inserted into and spiral shell
It is filled to the bottom inner portion of screwed pipe (17), and the bottom end of threaded rod (18) is connect with the top middle portion of the adjustable plate (19),
The top of screwed pipe (17) is connected with the second handwheel with one heart, and the rear end of the tensioning wheel (20) is provided with tensioning shaft, and
The front center of adjustable plate (19) is provided with right fixing groove, and right fixing groove is internally provided with right ball bearing, the tensioning
The rear end of axis is inserted and fixed inside installation to right ball bearing, the top and the driving belt (5) of the tensioning wheel (20)
Inner ring on the upside of can be in rolling contact.
2. a kind of cutter device for wafer etching apparatus as described in claim 1, which is characterized in that further include installation spiral shell
Bar (21) and rotating disk (22), the front end of the support shaft has been arranged concentrically installation axle, and the diameter of the installation axle is less than
The diameter of the support shaft, the front end of installation axle is provided with installation threaded hole, and the cutting piece made from diamond (6) is set in institute
State in installation axle, and the rear end of the rotating disk (22) with it is described installation screw rod (21) front end it is concentric connect, rotating disk
(22) upside of rear end, downside, left and right side are provided with anti-skidding blob of viscose, and the rear end insertion of installation screw rod (21)
And spiral shell be filled to installation threaded hole front end inside, and the rear end of four groups of anti-skidding blob of viscoses with the cutting piece made from diamond
(6) contact is locked in front end.
3. a kind of cutter device for wafer etching apparatus as claimed in claim 2, which is characterized in that the rotating disk
(22) front end is inscribed in circle and is provided with interior hexagonal fixing groove (23).
4. a kind of cutter device for wafer etching apparatus as claimed in claim 3, which is characterized in that further include left locking
Plate (24), right latch, left clamping screw (25) (13) and right clamping screw (13), the right end of the left latch (24) and institute
The left end connection of adjustable plate (19) is stated, and the left end of the right latch is connect with the right end of adjustable plate (19), left latch
(24) it is slidably contacted with the front end of the back side panel (3) with the rear end of right latch, and the left latch (24)
Front end is vertically arranged with pre-and post perforative left bar shaped groove, and the front end of the right latch be vertically arranged with it is pre-and post perforative
Right bar shaped groove, the left and right side of the front end of the back side panel (3), which respectively corresponds, is provided with left locking screw through-hole and right lock
Tight tapped through hole, the rear end of the left clamping screw (25) (13) passes through insertion inside left bar shaped groove and spiral shell is filled to left locking screw
Inside line through-hole, and the rear end of right clamping screw (13) passes through the insertion of right bar shaped groove inside and spiral shell is filled to right locking screw and leads to
Inside hole.
5. a kind of cutter device for wafer etching apparatus as claimed in claim 4, which is characterized in that two groups of upper lefts
Guide wheel (12), two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels outside be provided with rubber sleave (26).
6. a kind of cutter device for wafer etching apparatus as claimed in claim 5, which is characterized in that the left skateboard
(8) the left limit sliding block of left end is set as two groups, and the right end of two groups of left limit sliding blocks respectively with the left skateboard (8) left end
Front side connected with rear side, and it is two groups that the left limit sliding slot of the left limit plate (7) right end, which is correspondingly arranged, and described two groups are left
Limit sliding chutes are separately positioned on the front side and rear side of left limit plate (7) right end, and two groups of left limit sliding blocks are slidably arranged in respectively
Inside two groups of left limit sliding slots, and the right limit sliding block of the right slide plate right end is set as two groups, and two groups of right limits are sliding
The left end of block is connect with the front side of the right slide plate right end and rear side respectively, and the left limit sliding slot of right limit plate left end
Being correspondingly arranged is two groups, and two groups of right limit sliding slots are separately positioned on front side and the rear side of right limit plate left end, two groups of right limits
Position sliding block is slidably arranged in respectively inside two groups of right limit sliding slots.
7. a kind of cutter device for wafer etching apparatus as claimed in claim 6, which is characterized in that further include adjustment axis
(27), stiffening ring (28), four groups of extension bars (29), adjustment disk (30) and four groups of inserted links (31), the inside of four groups of supporting legs (2)
It laterally is fixedly installed support plate, and the top left hand of the support plate is provided with auxiliary tank, auxiliary tank is internally provided with auxiliary
Ball bearing is helped, the bottom end of the adjustment axis (27) is inserted and fixed inside installation to auxiliary ball bearing, the adjustment disk
(30) bottom end with the top of the adjustment axis (27) is concentric connect, and the bottom end of four groups of inserted links (31) respectively with it is described
Front left side, left rear side, the forward right side on adjustment disk (30) top are connected with right lateral side, and the top of four groups of inserted links (31) is longitudinally worn respectively
It crosses the first handwheel (14) bottom inner portion and extend out to the top external world of the first handwheel (14), stiffening ring (28) fixing sleeve
Circumference connection setting is evenly distributed with mounted in the inner end of the outside of the adjustment axis (27), and four groups of extension bars (29) to add described
On the periphery wall of strong circle (28).
8. a kind of cutter device for wafer etching apparatus as claimed in claim 7, which is characterized in that further include four groups anti-
Sliding sleeve (32), four groups of Anti-slip covers (32) are fixedly set in respectively outside the outer end of four groups of extension bars (29).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821494869.6U CN208985953U (en) | 2018-09-12 | 2018-09-12 | A kind of cutter device for wafer etching apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821494869.6U CN208985953U (en) | 2018-09-12 | 2018-09-12 | A kind of cutter device for wafer etching apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208985953U true CN208985953U (en) | 2019-06-14 |
Family
ID=66784051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821494869.6U Expired - Fee Related CN208985953U (en) | 2018-09-12 | 2018-09-12 | A kind of cutter device for wafer etching apparatus |
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| Country | Link |
|---|---|
| CN (1) | CN208985953U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111379941A (en) * | 2019-08-20 | 2020-07-07 | 安徽建筑大学 | Adjustable security alarm device |
-
2018
- 2018-09-12 CN CN201821494869.6U patent/CN208985953U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111379941A (en) * | 2019-08-20 | 2020-07-07 | 安徽建筑大学 | Adjustable security alarm device |
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Granted publication date: 20190614 |