CN208985953U - A kind of cutter device for wafer etching apparatus - Google Patents

Abstract

The utility model relates to the technical fields of wafer flow processing auxiliary equipment can reduce security risk more particularly to a kind of cutter device for wafer etching apparatus, improve the stability in silicon crystal column cutting process, cutting accuracy is improved, cutting effect is improved, reduces and uses limitation；And driving belt can carry out tensioning adjusting in long-time use process to loose driving belt, improve transmission effect, improve use reliability；Including operation panel, four groups of supporting legs, back side panel, cutting motor, driving belt, cutting piece made from diamond, left limit plate, right limit plate, left skateboard, right slide plate, top plate, adjusting screw, motor, two groups of upper left guide wheels, two groups of lower-left guide wheels, two groups of upper right guide wheels, two groups of bottom right guide wheels, two groups of clamping screws, upper mounted plate, bottom plate, left fixed plate, right fixed plate, screwed pipe, threaded rod, adjustable plate and tensioning wheel, the left and right side at the middle part of back side panel is driven to be vertically arranged with dovetail chute.

Description

A kind of cutter device for wafer etching apparatus

Technical field

The utility model relates to the technical fields of wafer flow processing auxiliary equipment, more particularly to one kind for crystalline substance The cutter device of circle etching apparatus.

Background technique

It is well known that wafer is the carrier for producing used in integrated circuits, refer to monocrystalline silicon wafer more, is used for wafer etching apparatus Cutter device be that a kind of pair of silicon crystal column is cut, in order to preferably process obtain silicon wafer auxiliary device, in wafer It is widely used in a variety of applications in the field of flow processing；The existing cutter device for wafer etching apparatus includes operation Plate, four groups of supporting legs, back side panel, cutting motor, driving belt and cutting piece made from diamond, the bottom end of back side panel and the top of operation panel Rear side connection, and the top of four groups of supporting legs connects with the front left side of operation panel bottom end, left rear side, forward right side and right lateral side respectively It connects, cutting motor is mounted on the rear end right side central of back side panel, and the front output end of cutting motor is provided with transmission shaft, passes The front end of moving axis passes through the inside of back side panel from the rear end of back side panel and extend out to the front end external world of back side panel, the front end of transmission shaft It is provided with belt driving wheel, the front end left side central portion of back side panel is provided with left fixing groove, and left fixing groove is internally provided with a left side Ball bearing, the rear end of cutting piece made from diamond has been arranged concentrically support shaft, and the rear end of support shaft is inserted and fixed installation extremely Inside the front end of left ball bearing, and the external fixing sleeve of support shaft is equipped with belt slave wheel, and driving belt is set in On belt driving wheel and belt slave wheel；The existing cutter device for wafer etching apparatus is in use, first will be to be cut Silicon crystal column be placed on operation panel, then cutting motor and external power supply are connected, cutting motor is opened, passes through cutting motor Rotation, drive the rotation of belt driving wheel, by the transmission of driving belt, drive cutting piece made from diamond rotation, then manually Silicon crystal column to be cut is held, is moved up, it is cut using the cutting piece made from diamond of rotation；It is existing to be used for It being found in the cutter device use of wafer etching apparatus, artificial hand takes silicon crystal column to cut upwards, and there are security risks, simultaneously because The stability of manpower is poor, and cutting accuracy is lower, and since the cutting diameter of cutting piece made from diamond is smaller, in silicon crystal column to moving up During dynamic, silicon crystal column cannot disposably be cut, cause cutting effect poor, it is higher using limitation；And driving belt In long-time use process, it is easy to happen relaxation by extraneous factor, causes transmission effect poor, use reliability is lower.

Utility model content

In order to solve the above technical problems, the utility model provides a kind of reduction security risk, improves silicon crystal column and rising shifting Stability in dynamic cutting process improves cutting accuracy, solve because cutting piece made from diamond cutting diameter is smaller cannot be by silicon crystal column The problem of disposable cutting, improves cutting effect, reduces and uses limitation；And driving belt is in long-time use process, Tensioning adjusting can be carried out to loose driving belt, improves transmission effect, and that improves use reliability is used for wafer etching apparatus Cutter device.

A kind of cutter device for wafer etching apparatus of the utility model, including operation panel, four groups of supporting legs, rear sides It is connected on rear side of plate, cutting motor, driving belt and cutting piece made from diamond, the bottom end of back side panel and the top of operation panel, and four The top of group supporting leg is connect with the front left side of operation panel bottom end, left rear side, forward right side and right lateral side respectively, and cutting motor is mounted on The rear end right side central of back side panel, and the front output end of cutting motor is provided with transmission shaft, the front end of transmission shaft is from rear side The rear end of plate passes through the inside of back side panel and extend out to the front end external world of back side panel, and the front end of transmission shaft is provided with belt actively Wheel, the front end left side central portion of back side panel is provided with left fixing groove, and left fixing groove is internally provided with left ball bearing, diamond The rear end of cutting sheet has been arranged concentrically support shaft, and the rear end of support shaft is inserted and fixed installation to the front end of left ball bearing Inside, and the external fixing sleeve of support shaft is equipped with belt slave wheel, and driving belt is set in belt driving wheel and belt On driven wheel；Including left limit plate, right limit plate, left skateboard, right slide plate, top plate, adjusting screw, drive motor, two groups of upper lefts Guide wheel, two groups of lower-left guide wheels, two groups of upper right guide wheels, two groups of bottom right guide wheels and two groups of clamping screws, the left limit plate and right limit The bottom end of position plate is connect with the left and right side in operation panel top left hand region respectively, and the right end of left limit plate is longitudinal It is provided with left limit sliding slot, the left end correspondence of right limit plate is vertically arranged with right limit sliding slot, the left end of the left skateboard and institute The right end for stating left limit plate slidably contacts, and the left skateboard includes upper left slide plate and lower-left slide plate, the lower-left slide plate Left end be provided with left limit sliding block, left limit sliding block is slidably arranged in inside left limit sliding slot, the right end of the right slide plate It is slidably contacted with the left end of the right limit plate, and the right end of the right slide plate is provided with right limit sliding block, right limit is sliding Block is slidably arranged in inside right limit sliding slot, connects on the downside of the left end of the top plate and the right end of left skateboard, the right end of top plate It is connect on the downside of the left end of right slide plate, the bottom end and left side of the upper left slide plate and the top left hand of lower-left slide plate are cut with scissors by hinge Setting is connect, and the front side on upper left slide plate top and rear side are vertically arranged with perforative bolt hole, and institute up and down The front side and rear side for stating lower-left slide plate top are provided with threaded hole, and the bottom end of two groups of clamping screws is each passed through two groups of spiral shells Simultaneously spiral shell is filled to inside two groups of threaded holes for insertion respectively inside bolt throughhole, and two groups of upper left guide wheels are rotatably disposed in upper left respectively The front end and downside of the right end of slide plate, and two groups of lower-left guide wheels are rotatably disposed in the front side of lower-left slide plate right end respectively And rear side, the upper front side for being rotatably disposed in right slide plate left end respectively of two groups of upper right guide wheels and upper rear side, and it is described Two groups of bottom right guide wheels are rotatably disposed in the lower front side of right slide plate left end respectively and lower rear side, the bottom end for driving motor are installed In the top middle portion of top plate, and the front output end of motor is driven to be provided with drive rubber tire, the bottom end of the operation panel is longitudinal It is provided with perforative tapped through hole up and down, and the tapped through hole is located at the middle part of left limit plate and right limit plate, the tune Save the top of lead screw from the bottom end spiral shell of operation panel dress inside tapped through hole and screw out to the top external world of operation panel with it is described The center bottom of top plate contacts, and the bottom end of adjusting screw has been arranged concentrically the first handwheel；Further include upper mounted plate, bottom plate, Left fixed plate, right fixed plate, screwed pipe, threaded rod, adjustable plate and tensioning wheel, the left side and the right side of the central region of the back side panel Side is vertically arranged with dovetail chute, and the left and right side of the adjustable plate rear end is provided with dovetail slide block, and described two Group dovetail slide block is slidably arranged in respectively inside two groups of dovetail chutes, and the bottom end of the bottom plate and the back side panel Top middle portion connection, the bottom end of the left fixed plate and right fixed plate left and right side with the bottom plate top respectively Connection, and the top of left fixed plate and right fixed plate is connect with the left and right side at fixed board bottom end respectively, it is described The inside middle portion of upper mounted plate and bottom plate is vertically arranged with fixed hole and lower fixed hole respectively, and upper fixation is logical It is fixedly installed upper ball bearing and lower ball bearing inside hole and lower fixed hole respectively, the bottom end of the screwed pipe is from upper solid The top of fixed board sequentially passes through inside upper ball bearing and lower ball bearing and extend out to the bottom end external world of bottom plate, upper ball The inside of bearing and lower ball bearing is fixedly connected with the upper side and lower side of screwed pipe outer circumferential walls respectively, the top of the threaded rod End insertion and spiral shell are filled to the bottom inner portion of screwed pipe, and the bottom end of threaded rod is connect with the top middle portion of the adjustable plate, spiral shell The top of line pipe is connected with the second handwheel with one heart, and the rear end of the tensioning wheel is provided with tensioning shaft, and before adjustable plate End middle part is provided with right fixing groove, and right fixing groove is internally provided with right ball bearing, and the rear end insertion of the tensioning shaft is simultaneously It is fixedly installed to inside right ball bearing, can be in rolling contact on the upside of the top of the tensioning wheel and the inner ring of the driving belt.

A kind of cutter device for wafer etching apparatus of the utility model further includes installation screw rod and rotating disk, institute The front end for stating support shaft has been arranged concentrically installation axle, and the diameter of the installation axle is less than the diameter of the support shaft, installation The front end of axis is provided with installation threaded hole, and the cutting piece made from diamond is set in the installation axle, and the rotation The rear end of disk with it is described installation screw rod front end it is concentric connect, the upside, downside, left and right side for rotating back-end disk are provided with Anti-skidding blob of viscose, and simultaneously spiral shell is filled to inside the front end of installation threaded hole for the rear end insertion of the installation screw rod, and described four groups The rear end of anti-skidding blob of viscose is contacted with the locking of the front end of the cutting piece made from diamond.

A kind of cutter device for wafer etching apparatus of the utility model, the front end of the rotating disk are inscribed in circle and set It is equipped with interior hexagonal fixing groove.

A kind of cutter device for wafer etching apparatus of the utility model further includes left latch, right latch, a left side The right end of clamping screw and right clamping screw, the left latch is connect with the left end of the adjustable plate, and the right locking The right end of the left end of plate and adjustable plate connects, the rear end of left latch and right latch with the front end of the back side panel slidably Contact, and the front end of the left latch is vertically arranged with pre-and post perforative left bar shaped groove, and the right latch Front end is vertically arranged with pre-and post perforative right bar shaped groove, and the left and right side of the front end of the back side panel, which respectively corresponds, to be provided with Left locking screw through-hole and right locking screw through-hole, the rear end of the left clamping screw pass through insertion and spiral shell inside left bar shaped groove It is filled to inside left locking screw through-hole, and the rear end of right clamping screw passes through insertion inside right bar shaped groove and spiral shell is filled to right lock Inside tight tapped through hole.

A kind of cutter device for wafer etching apparatus of the utility model, two groups of upper left guide wheels, two groups of lower-lefts The outside of guide wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels is provided with rubber sleave.

A kind of cutter device for wafer etching apparatus of the utility model, the left limit sliding block of the left skateboard left end Two groups are set as, and the right end of two groups of left limit sliding blocks is connect with the front side of the left skateboard left end and rear side respectively, and It is two groups that the left limit sliding slot of the left limit plate right end, which is correspondingly arranged, and two groups of left limit sliding slots are separately positioned on left limit The front side of plate right end and rear side, two groups of left limit sliding blocks are slidably arranged in respectively inside two groups of left limit sliding slots, and described The right limit sliding block of right slide plate right end is set as two groups, and the left end of two groups of right limit sliding blocks respectively with the right slide plate right end Front side connected with rear side, and it is two groups that the left limit sliding slot of right limit plate left end, which is correspondingly arranged, two groups of right limits Position sliding slot is separately positioned on front side and the rear side of right limit plate left end, and two groups of right sides are slidably arranged in two groups of right limit sliding blocks respectively Inside limit sliding chutes.

A kind of cutter device for wafer etching apparatus of the utility model, further include adjustment axis, stiffening ring, four groups add Stock, adjustment disk and four groups of inserted links, the inside of four groups of supporting legs are laterally fixedly installed support plate, and the support plate Top left hand is provided with auxiliary tank, and auxiliary tank is internally provided with auxiliary ball bearing, and the bottom end of the adjustment axis is inserted and fixed Inside installation to auxiliary ball bearing, the bottom end of the adjustment disk with the top of the adjustment axis is concentric connect, and described four The bottom end of group inserted link is connect with front left side, left rear side, forward right side and the right lateral side on the adjustment disk top respectively, four groups of inserted links Top respectively longitudinally through the first handwheel bottom inner portion and extend out to the first handwheel top it is extraneous, the stiffening ring is fixed It is sleeved on the outside of the adjustment axis, and the inner end of four groups of extension bars is evenly distributed with circumference connection and the stiffening ring is arranged in On periphery wall.

A kind of cutter device for wafer etching apparatus of the utility model, further includes four groups of Anti-slip covers, and described four groups Anti-slip cover is fixedly set in respectively outside the outer end of four groups of extension bars.

Compared with prior art the utility model has the following beneficial effects: can be made by unscrewing two groups of clamping screws upwards Upper left slide plate and lower-left slide plate can be overturn to the left under the action of two groups of hinges, so that two groups of upper left guide wheels be allow to turn over to the left Turn, silicon crystal column to be cut be placed on inside two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels to facilitate, Then by overturning upper left slide plate to the right, upper left slide plate is made to return back to home position, and by rotating two groups of lockings separately down Bolt, make it is longitudinally fixed between upper left slide plate and lower-left slide plate, so as to left by two groups inside left skateboard and right slide plate Upper block, two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels carry out the silicon crystal column cut to stablize clamping, and And limited support can be carried out to left skateboard and right slide plate by left limit plate and right limit plate, and exist by left limit sliding block Being slidably matched inside left limit sliding slot, while by right limit sliding block being slidably matched inside right limit sliding slot, make left cunning Plate and right slide plate can move up and down adjusting, and can connection by top plate to left skateboard and right slide plate, lead to simultaneously The spiral shell assembly overregulated between lead screw and tapped through hole is closed, and by rotating the first handwheel, drive adjusting screw is rotated, thus Top plate is pushed to move up, so as to push limit of the silicon crystal column cut upwards in left limit sliding slot and right limit sliding slot Under moved along the direction of left limit sliding slot and right limit sliding slot is stable upwards, it is upward that silicon crystal column is directly held without operator Mobile cutting, reduces security risk, and lead with two groups of upper left guide wheels, two groups of lower-lefts by left limit sliding slot and right limit sliding slot The cooperation of wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels improves silicon crystal column and is rising the stability in mobile cutting process, mentions High cutting accuracy can make that rubber tire is driven to be rotated, and pass through two groups of upper left guide wheels, two by the rotation of drive motor Under the rotational support of group lower-left guide wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels, allow silicon crystal column in left skateboard and right cunning The stable rotation of intralamellar part is driven the opposite rotation direction of motor and cutting motor by setting, makes silicon crystal column and diamond Cutting sheet steering is identical, after by rotating adjusting screw to suitable depth of cut upwards, by the rotation of silicon crystal column, makes silicon Crystal column is cut in rotary course, circumference cut by way of solve because cutting piece made from diamond cutting diameter is smaller cannot The problem of silicon crystal column is disposably cut improves cutting effect, reduces and uses limitation；And driving belt is used in long-time In the process, adjustable plate can be allow along two groups by being slidably matched between two groups of dovetail slide blocks and two groups of dovetail chutes The direction of dovetail chute, which vertically moves, to be adjusted, and by rotating the second handwheel, makes screwed pipe respectively in upper ball bearing and lower ball Bearing inner rotation, is assembled by spiral shell between screwed pipe and threaded rod and is closed, and allows threaded rod to precession inside screwed pipe, from And adjustable plate is driven to move up, by the rotatable cooperation of tensioning shaft bottom end and driving belt inner ring, make moved up Mandrel tenses driving belt upwards, so as to carry out tensioning adjusting to loose driving belt, improves transmission effect, raising makes Use reliability.

Detailed description of the invention

Fig. 1 is the structural schematic diagram of the utility model；

Fig. 2 is the partial enlargement structural representation at the utility model A；

Fig. 3 is the partial enlargement structural representation at the utility model B；

Fig. 4 is the structural schematic diagram that the utility model installs screw rod, the left view that rotating disk is connected with cutting piece made from diamond；

Fig. 5 is the utility model adjustment disk, four groups of inserted links and the first handwheel connection schematic perspective view；

Fig. 6 is the right side structural representation that the utility model cutting motor is connected with back side panel；

It is attached marked in the figure: 1, operation panel；2, supporting leg；3, back side panel；4, cutting motor；5, driving belt；6, diamond cutting Pitch cutting；7, left limit plate；8, left skateboard；9, top plate；10, adjusting screw；11, motor is driven；12, lower-left guide wheel；13, locking screw Bolt；14, the first handwheel；15, upper mounted plate；16, left fixed plate；17, screwed pipe；18, threaded rod；19, adjustable plate；20, it is tensioned Wheel；21, screw rod is installed；22, rotating disk；23, interior hexagonal fixing groove；24, left latch；25, left clamping screw；26, rubber skin Set；27, adjustment axis；28, stiffening ring；29, extension bar；30, adjustment disk；31, inserted link；32, Anti-slip cover.

Specific embodiment

With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below Embodiment is not intended to limit the scope of the present invention for illustrating the utility model.

As shown in Figures 1 to 6, a kind of cutter device for wafer etching apparatus of the utility model, including operation panel 1, four groups of supporting legs 2, back side panel 3, cutting motor 4, driving belt 5 and cutting piece made from diamond 6, the bottom end of back side panel and operation panel Top on rear side of connection, and the top of four groups of supporting legs is respectively and behind the front left side of operation panel bottom end, left rear side, forward right side and the right side Side connection, cutting motor is mounted on the rear end right side central of back side panel, and the front output end of cutting motor is provided with transmission The front end of axis, transmission shaft passes through the inside of back side panel from the rear end of back side panel and extend out to the front end external world of back side panel, transmission shaft Front end be provided with belt driving wheel, the front end left side central portion of back side panel is provided with left fixing groove, and sets inside left fixing groove It is equipped with left ball bearing, the rear end of cutting piece made from diamond has been arranged concentrically support shaft, and the rear end of support shaft is inserted and fixed Inside installation to the front end of left ball bearing, and the external fixing sleeve of support shaft is equipped with belt slave wheel, driving belt difference It is sleeved on belt driving wheel and belt slave wheel；Including left limit plate 7, right limit plate, left skateboard 8, right slide plate, top plate 9, adjust It saves lead screw 10, drive 11, two groups of upper left guide wheels of motor, two groups of lower-left guide wheels, 12, two groups of upper right guide wheels, two groups of bottom right guide wheels and two The bottom end of group clamping screw 13, left limit plate and right limit plate connects with the left and right side in operation panel top left hand region respectively It connects, and the right end of left limit plate is vertically arranged with left limit sliding slot, the left end correspondence of right limit plate is vertically arranged with right limit The left end of sliding slot, left skateboard is slidably contacted with the right end of left limit plate, and left skateboard includes upper left slide plate and lower-left slide plate, The left end of lower-left slide plate is provided with left limit sliding block, and left limit sliding block is slidably arranged in inside left limit sliding slot, right slide plate Right end is slidably contacted with the left end of right limit plate, and the right end of right slide plate is provided with right limit sliding block, and right limit sliding block can It is slidably arranged in inside right limit sliding slot, is connected on the downside of the left end of top plate and the right end of left skateboard, the right end of top plate and right slide plate Left end on the downside of the top left hand of connection, the bottom end of upper left slide plate and left side and lower-left slide plate pass through hinge and be hingedly arranged, and The front side on upper left slide plate top and rear side are vertically arranged with perforative bolt hole, and the front side on lower-left slide plate top up and down It is provided with threaded hole with rear side, the bottom end of two groups of clamping screws is each passed through inside two groups of bolt holes insertion respectively and spiral shell dress To two groups of threaded holes, two groups of upper left guide wheels are rotatably disposed in the front end and downside of the right end of upper left slide plate respectively, and Two groups of lower-left guide wheels are rotatably disposed in front side and the rear side of lower-left slide plate right end respectively, and the difference of two groups of upper right guide wheels is rotatable Be arranged in right slide plate left end upper front side and upper rear side, and two groups of bottom right guide wheels are rotatably disposed in right slide plate left end respectively Lower front side and lower rear side, drive the bottom end of motor to be mounted on the top middle portion of top plate, and the front output end of motor is driven to set It is equipped with drive rubber tire, the bottom end of operation panel is vertically arranged with perforative tapped through hole up and down, and tapped through hole is located at left limit The top at the middle part of plate and right limit plate, adjusting screw inside tapped through hole and is screwed out to behaviour from the bottom end spiral shell dress of operation panel The top external world for making plate is contacted with the center bottom of top plate, and the bottom end of adjusting screw has been arranged concentrically the first handwheel 14；Further include Upper mounted plate 15, bottom plate, left fixed plate 16, right fixed plate, screwed pipe 17, threaded rod 18, adjustable plate 19 and tensioning wheel 20, The left and right side of the central region of back side panel is vertically arranged with dovetail chute, and the left and right side of adjustable plate rear end is equal It is provided with dovetail slide block, two groups of dovetail slide blocks are slidably arranged in respectively inside two groups of dovetail chutes, and the bottom of bottom plate End is connect with the top middle portion of back side panel, the bottom end of the left fixed plate and right fixed plate left side and the right side with bottom plate top respectively Side connection, and the top of left fixed plate and right fixed plate is connect with the left and right side of upper mounted plate bottom end respectively, upper fixation The inside middle portion of plate and bottom plate is vertically arranged with fixed hole and lower fixed hole respectively, and upper fixed hole is under It is fixedly installed upper ball bearing and lower ball bearing inside fixed hole respectively, the bottom end of screwed pipe is from the top of upper mounted plate It sequentially passes through inside upper ball bearing and lower ball bearing and the bottom end for extending out to bottom plate is extraneous, upper ball bearing and lower rolling The inside of pearl bearing is fixedly connected with the upper side and lower side of screwed pipe outer circumferential walls respectively, and simultaneously spiral shell is filled to for the top insertion of threaded rod The bottom inner portion of screwed pipe, and the top middle portion of the bottom end of threaded rod and adjustable plate connects, and the top of screwed pipe connects with one heart It is provided with the second handwheel, the rear end of tensioning wheel is provided with tensioning shaft, and the front center of adjustable plate is provided with right fixing groove, and And right fixing groove is internally provided with right ball bearing, the rear end of tensioning shaft is inserted and fixed inside installation to right ball bearing, It can be in rolling contact on the upside of the top of bearing up pulley and the inner ring of driving belt；It can make upper left by unscrewing two groups of clamping screws upwards Slide plate and lower-left slide plate can be overturn to the left under the action of two groups of hinges, thus overturn two groups of upper left guide wheels to the left, Silicon crystal column to be cut is placed on inside two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels to facilitate, so Afterwards by overturning upper left slide plate to the right, upper left slide plate is set to return back to home position, and by rotating two groups of locking screws separately down Bolt, make it is longitudinally fixed between upper left slide plate and lower-left slide plate, so as to pass through two groups of upper lefts inside left skateboard and right slide plate Guide wheel, two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels carry out the silicon crystal column cut to stablize clamping, and Limited support can be carried out to left skateboard and right slide plate by left limit plate and right limit plate, and by left limit sliding block on a left side Being slidably matched inside limit sliding chutes, while by right limit sliding block being slidably matched inside right limit sliding slot, make left skateboard Adjusting can be moved up and down with right slide plate, and can connection by top plate to left skateboard and right slide plate, pass through simultaneously Spiral shell between adjusting screw and tapped through hole, which assembles, to be closed, and by rotating the first handwheel, drives adjusting screw to be rotated, to push away Dynamic top plate moves up, so as to push the silicon crystal column cut upwards under the limit of left limit sliding slot and right limit sliding slot It is moved along the direction of left limit sliding slot and right limit sliding slot is stable upwards, silicon crystal column is directly held without operator to moving up Dynamic cutting, reduces security risk, and lead with two groups of upper left guide wheels, two groups of lower-lefts by left limit sliding slot and right limit sliding slot The cooperation of wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels improves silicon crystal column and is rising the stability in mobile cutting process, mentions High cutting accuracy can make that rubber tire is driven to be rotated, and pass through two groups of upper left guide wheels, two by the rotation of drive motor Under the rotational support of group lower-left guide wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels, allow silicon crystal column in left skateboard and right cunning The stable rotation of intralamellar part is driven the opposite rotation direction of motor and cutting motor by setting, makes silicon crystal column and diamond Cutting sheet steering is identical, after by rotating adjusting screw to suitable depth of cut upwards, by the rotation of silicon crystal column, makes silicon Crystal column is cut in rotary course, circumference cut by way of solve because cutting piece made from diamond cutting diameter is smaller cannot The problem of silicon crystal column is disposably cut improves cutting effect, reduces and uses limitation；And driving belt is used in long-time In the process, adjustable plate can be allow along two groups by being slidably matched between two groups of dovetail slide blocks and two groups of dovetail chutes The direction of dovetail chute, which vertically moves, to be adjusted, and by rotating the second handwheel, makes screwed pipe respectively in upper ball bearing and lower ball Bearing inner rotation, is assembled by spiral shell between screwed pipe and threaded rod and is closed, and allows threaded rod to precession inside screwed pipe, from And adjustable plate is driven to move up, by the rotatable cooperation of tensioning shaft bottom end and driving belt inner ring, make moved up Mandrel tenses driving belt upwards, so as to carry out tensioning adjusting to loose driving belt, improves transmission effect, raising makes Use reliability.

A kind of cutter device for wafer etching apparatus of the utility model further includes installation screw rod 21 and rotating disk 22, the front end of support shaft has been arranged concentrically installation axle, and the diameter of installation axle is less than the diameter of support shaft, the front end of installation axle It is provided with installation threaded hole, and cutting piece made from diamond is arranged on the mounting shaft, and the rear end of rotating disk and installation screw rod Front end connects with one heart, and the upside, downside, left and right side for rotating back-end disk are provided with anti-skidding blob of viscose, and install screw rod Rear end insertion and spiral shell be filled to installation threaded hole front end inside, and the rear end of four groups of anti-skidding blob of viscoses with cutting piece made from diamond Front end locking contact；It can be assembled and be closed by the spiral shell between the installation threaded hole of installation screw rod on the mounting shaft, make that screw rod is installed It is easy to disassemble, so as to improve usability, and rotating disk can be passed through so that cutting piece made from diamond can carry out dismounting and change Four groups of anti-skidding blob of viscoses of rear end prevent the cutting piece made from diamond after installation and support shaft from opposite sliding occurs, and improve diamond cut Piece rotates the use reliability in cutting process.

A kind of cutter device for wafer etching apparatus of the utility model, the front end of rotating disk are inscribed in circle and are provided with Interior hexagonal fixing groove 23；Can be arranged by interior hexagonal fixing groove, facilitate operator using allen wrench to rotating disk into Row rotation process saves manpower, reduces and uses limitation.

A kind of cutter device for wafer etching apparatus of the utility model, further include left latch 24, right latch, Left clamping screw 25 and right clamping screw, the right end of left latch and the left end of adjustable plate connect, and the left end of right latch It is connect with the right end of adjustable plate, the rear end of left latch and right latch is slidably contacted with the front end of back side panel, and left The front end of latch is vertically arranged with pre-and post perforative left bar shaped groove, and the front end of right latch is vertically arranged with front and back and passes through The right bar shaped groove worn, the left and right side of the front end of back side panel, which respectively corresponds, is provided with left locking screw through-hole and right locking screw Line through-hole, the rear end of left clamping screw passes through insertion inside left bar shaped groove and spiral shell is filled to inside left locking screw through-hole, and The rear end of right clamping screw passes through insertion inside right bar shaped groove and spiral shell is filled to inside right locking screw through-hole；Left lock can be passed through Left bar shaped groove and right bar shaped groove on tight plate and right latch facilitate adjustable plate to move up adjusting, and can be by dividing The other left clamping screw of back rotation and right clamping screw, make the rear end of left latch and right latch respectively with rear side front edge of board Left and right side locking contact, so as to so that the position after adjustable plate is adjusted is locked, thus to the position of tensioning wheel into Row is locked, and prevents the position of the tensioning wheel caused by by external force rotation because of the second handwheel mobile, improves tensioning wheel to driving belt It is tensioned the use reliability adjusted.

A kind of cutter device for wafer etching apparatus of the utility model, two groups of upper left guide wheels, two groups of lower-left guide wheels, The outside of two groups of upper right guide wheels and two groups of bottom right guide wheels is provided with rubber sleave 26；It can reduce by two groups of left sides by rubber sleave The abrasion of upper block, two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels to silicon crystal column improves the guarantor to silicon crystal column Shield.

A kind of cutter device for wafer etching apparatus of the utility model, the left limit sliding block setting of left skateboard left end It is two groups, and the right end of two groups of left limit sliding blocks is connect with the front side of left skateboard left end and rear side respectively, and left limit plate It is two groups that the left limit sliding slot of right end, which is correspondingly arranged, and two groups of left limit sliding slots are separately positioned on the front side of left limit plate right end with after Side, two groups of left limit sliding blocks are slidably arranged in respectively inside two groups of left limit sliding slots, and the right limit of right slide plate right end is sliding Block is set as two groups, and the left end of two groups of right limit sliding blocks is connect with the front side of right slide plate right end and rear side respectively, and right It is two groups that the left limit sliding slot of limit plate left end, which is correspondingly arranged, before two groups of right limit sliding slots are separately positioned on right limit plate left end Side and rear side, two groups of right limit sliding blocks are slidably arranged in respectively inside two groups of right limit sliding slots；Two groups of left limits can be passed through The setting of sliding block and two groups of right limit sliding blocks improves the stability of left skateboard and right slide plate in uphill process, reduces and shake, from And the precision that depth of cut adjusting is carried out to silicon crystal column can be improved, improve use reliability.

A kind of cutter device for wafer etching apparatus of the utility model, further include adjustment axis 27, stiffening ring 28, Four groups of extension bars 29, adjustment disk 30 and four groups of inserted links 31, the inside of four groups of supporting legs is laterally fixedly installed support plate, and supports The top left hand of plate is provided with auxiliary tank, and auxiliary tank is internally provided with auxiliary ball bearing, and the bottom end of adjustment axis is inserted and fixed Inside installation to auxiliary ball bearing, the bottom end of the adjustment disk and top of adjustment axis is concentric connects, and the bottom end of four groups of inserted links Connect respectively with the front left side on adjustment disk top, left rear side, forward right side and right lateral side, the top of four groups of inserted links respectively longitudinally through First handwheel bottom inner portion and the top external world for extending out to the first handwheel, stiffening ring are fixedly set in the outside of adjustment axis, and The inner end of four groups of extension bars is evenly distributed with circumference connection and is arranged on the periphery wall of stiffening ring；The increasing of four groups of extension bars can be passed through The rotary arm of strong rotation adjustment axis, according to lever principle, so as to save operator during rotating adjustment axis Manpower, facilitate the rotation of adjustment axis by lower ball bearing, and can be separately inserted by four groups of inserted links to the first handwheel Internal setting, so as to the first handwheel be driven to be rotated, so as to by using four by rotation adjustment axis Group extension bar saves the manpower that rotation adjusts the first handwheel, easy to operate, improves practicability.

A kind of cutter device for wafer etching apparatus of the utility model further includes four groups of Anti-slip covers 32, and four groups anti- Sliding sleeve is fixedly set in respectively outside the outer end of four groups of extension bars；Operator's manpower can be improved by four groups of Anti-slip covers It to the frictional force in four groups of extension bar use processes, prevents from skidding, improves practicability.

A kind of cutter device for wafer etching apparatus of the utility model, at work, first by twisting upwards Loose two groups of clamping screws, overturn upper left slide plate and lower-left slide plate to the left under the action of two groups of hinges, make two groups of upper left guide wheels It overturns, silicon crystal column to be cut is placed on inside two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels, so to the left Afterwards by overturning upper left slide plate to the right, upper left slide plate is set to return back to home position, and by rotating two groups of locking screws separately down Bolt, makes longitudinally fixed between upper left slide plate and lower-left slide plate, passes through two groups of upper left guide wheels inside left skateboard and right slide plate, two groups Lower-left guide wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels carry out the silicon crystal column cut to stablize clamping, and pass through left limit Position plate and right limit plate carry out limited support to left skateboard and right slide plate, and through left limit sliding block inside left limit sliding slot Be slidably matched, while by right limit sliding block being slidably matched inside right limit sliding slot, carry out left skateboard and right slide plate Move up and down adjusting, and by connection of the top plate to left skateboard and right slide plate, at the same by adjusting screw and tapped through hole it Between spiral shell assemble and close, adjusted according to lever principle in rotation by the rotary arm of the enhancing rotation adjustment axis of four groups of extension bars The manpower that operator is saved during axis by the rotation of lower ball bearing adjustment axis, and passes through four groups of inserted link difference It injects to the setting inside the first handwheel, by rotating adjustment axis, drives the first handwheel to be rotated, by using four groups of lengthenings Bar saves the manpower that rotation adjusts the first handwheel, improves operator's manpower by four groups of Anti-slip covers and uses four groups of extension bars Frictional force in the process prevents from skidding, and by rotating the first handwheel, adjusting screw is driven to be rotated, and pushes top plate to moving up It is dynamic, push the silicon crystal column cut upwards under the limit of left limit sliding slot and right limit sliding slot along left limit sliding slot and right limit The direction stable movement upwards of position sliding slot improves left skateboard by the setting of two groups of left limit sliding blocks and two groups of right limit sliding blocks It with stability of the right slide plate in uphill process, reduces and shakes, improve the precision for carrying out depth of cut adjusting to silicon crystal column, and And it is right by left limit sliding slot and right limit sliding slot and two groups of upper left guide wheels, two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups The cooperation of lower tumbler makes that rubber tire is driven to be rotated, and pass through two groups of upper left guide wheels, two groups by driving the rotation of motor Under the rotational support of lower-left guide wheel, two groups of upper right guide wheels and two groups of bottom right guide wheels, make silicon crystal column inside left skateboard and right slide plate Stable rotation is driven the opposite rotation direction of motor and cutting motor by setting, makes silicon crystal column and cutting piece made from diamond Turn to it is identical, by upwards rotate adjusting screw to suitable depth of cut after, by the rotation of silicon crystal column, silicon crystal column is made to exist It is cut in rotary course, two groups of upper left guide wheels, two groups of lower-left guide wheels, two groups of upper right guide wheels and two is reduced by rubber sleave Abrasion of the group bottom right guide wheel to silicon crystal column, driving belt pass through two groups of dovetail slide blocks and two groups of swallows in long-time use process Being slidably matched between tail sliding slot adjusts adjustable plate along the direction longitudinal movement of two groups of dovetail chutes, passes through rotation second Handwheel makes screwed pipe in upper ball bearing and lower ball bearing inner rotation, pass through the spiral shell between screwed pipe and threaded rod respectively Assembly is closed, and makes threaded rod to precession inside screwed pipe, adjustable plate is driven to move up, by tensioning wheel bottom end and driving belt The rotatable cooperation of circle, tenses the tensioning shaft moved up upwards driving belt, can open to loose driving belt It is tight to adjust, adjusting is moved up by left bar shaped groove on left latch and right latch and right bar shaped groove adjustable plate, and And by rotating left clamping screw and right clamping screw respectively backward, make the rear end of left latch and right latch respectively with rear side The left and right side of front edge of board locks contact, and the position after adjusting adjustable plate is locked, and locks to the position of tensioning wheel It fastens, prevents the position of the tensioning wheel caused by by external force rotation because of the second handwheel mobile.

The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change It also should be regarded as the protection scope of the utility model into modification.

Claims (8)

1. a kind of cutter device for wafer etching apparatus, including operation panel (1), four groups of supporting legs (2), back side panel (3), cutting Connect on rear side of motor (4), driving belt (5) and cutting piece made from diamond (6), the bottom end of back side panel (3) and the top of operation panel (1) It connects, and the top of four groups of supporting legs (2) connects with the front left side of operation panel (1) bottom end, left rear side, forward right side and right lateral side respectively It connects, cutting motor (4) is mounted on the rear end right side central of back side panel (3), and the front output end of cutting motor (4) is provided with Transmission shaft, before the front end of transmission shaft passes through the inside of back side panel (3) and extend out to back side panel (3) from the rear end of back side panel (3) End is extraneous, and the front end of transmission shaft is provided with belt driving wheel, and the front end left side central portion of back side panel (3) is provided with left fixing groove, and And left fixing groove is internally provided with left ball bearing, the rear end of cutting piece made from diamond (6) has been arranged concentrically support shaft, and supports The rear end of axis is inserted and fixed installation to inside the front end of left ball bearing, and the external fixing sleeve of support shaft be equipped with belt from Driving wheel, driving belt (5) are set on belt driving wheel and belt slave wheel；It is characterised in that it includes left limit plate (7), right limit plate, left skateboard (8), right slide plate, top plate (9), adjusting screw (10), drive motor (11), two groups of upper left guide wheels (12), two groups of lower-left guide wheels, two groups of upper right guide wheels, two groups of bottom right guide wheels and two groups of clamping screws (13), the left limit plate (7) It is connect respectively with the left and right side in the operation panel (1) top left hand region with the bottom end of right limit plate, and left limit plate (7) right end is vertically arranged with left limit sliding slot, and the left end correspondence of right limit plate is vertically arranged with right limit sliding slot, the left cunning The left end of plate (8) is slidably contacted with the right end of the left limit plate (7), and the left skateboard (8) include upper left slide plate and Lower-left slide plate, the left end of the lower-left slide plate are provided with left limit sliding block, and left limit sliding slot is slidably arranged in left limit sliding block Inside, the right end of the right slide plate are slidably contacted with the left end of the right limit plate, and the right end setting of the right slide plate There is right limit sliding block, right limit sliding block is slidably arranged in inside right limit sliding slot, the left end of the top plate (9) and left skateboard (8) it is connect on the downside of connection on the downside of right end, the right end of top plate (9) and the left end of right slide plate, the bottom end and a left side of the upper left slide plate Side and the top left hand of lower-left slide plate are hingedly arranged by hinge, and the front side on upper left slide plate top and rear side are longitudinal It is provided with perforative bolt hole up and down, and the front side on lower-left slide plate top and rear side are provided with threaded hole, it is described The bottom end of two groups of clamping screws (13) is each passed through inside two groups of bolt holes insertion respectively and spiral shell is filled to inside two groups of threaded holes, Two groups of upper left guide wheels (12) are rotatably disposed in the front end and downside of the right end of upper left slide plate respectively, and described two groups left Lower tumbler is rotatably disposed in front side and the rear side of lower-left slide plate right end respectively, and the rotatable respectively of two groups of upper right guide wheels sets The upper front side in right slide plate left end and upper rear side are set, and two groups of bottom right guide wheels are rotatably disposed in right slide plate left end respectively Lower front side and lower rear side, the bottom end for driving motor (11) be mounted on the top middle portion of top plate (9), and drive motor (11) front output end is provided with drive rubber tire, and it is logical that the bottom end of the operation panel (1) is vertically arranged with perforative screw thread up and down Hole, and the tapped through hole is located at the middle part of left limit plate (7) and right limit plate, and the top of the adjusting screw (10) is grasped certainly The bottom making the bottom end spiral shell dress of plate (1) inside tapped through hole and screwing out to the top external world of operation panel (1) and the top plate (9) The contact of end middle part, the bottom end of adjusting screw (10) has been arranged concentrically the first handwheel (14)；It further include upper mounted plate (15), lower fixation Plate, left fixed plate (16), right fixed plate, screwed pipe (17), threaded rod (18), adjustable plate (19) and tensioning wheel (20), after described The left and right side of the central region of side plate (3) is vertically arranged with dovetail chute, and the left side of the adjustable plate (19) rear end Side and right side are provided with dovetail slide block, and two groups of dovetail slide blocks are slidably arranged in respectively inside two groups of dovetail chutes, and And the bottom end of the bottom plate is connect with the top middle portion of the back side panel (3), the left fixed plate (16) and right fixed plate Bottom end connect respectively with the left and right side on the bottom plate top, and the top of left fixed plate (16) and right fixed plate It is connect respectively with the left and right side of fixed plate (15) bottom end, in fixed plate (15) and the middle part of bottom plate Side is vertically arranged with fixed hole and lower fixed hole respectively, and fixes respectively inside upper fixed hole and lower fixed hole It is provided with upper ball bearing and lower ball bearing, the top of bottom end from the upper mounted plate (15) of the screwed pipe (17) sequentially passes through Upper ball bearing and lower ball bearing inside and the bottom end external world for extending out to bottom plate, upper ball bearing and lower ball bearing Inside is fixedly connected with the upper side and lower side of screwed pipe (17) outer circumferential walls respectively, and the top of the threaded rod (18) is inserted into and spiral shell It is filled to the bottom inner portion of screwed pipe (17), and the bottom end of threaded rod (18) is connect with the top middle portion of the adjustable plate (19), The top of screwed pipe (17) is connected with the second handwheel with one heart, and the rear end of the tensioning wheel (20) is provided with tensioning shaft, and The front center of adjustable plate (19) is provided with right fixing groove, and right fixing groove is internally provided with right ball bearing, the tensioning The rear end of axis is inserted and fixed inside installation to right ball bearing, the top and the driving belt (5) of the tensioning wheel (20) Inner ring on the upside of can be in rolling contact.

2. a kind of cutter device for wafer etching apparatus as described in claim 1, which is characterized in that further include installation spiral shell Bar (21) and rotating disk (22), the front end of the support shaft has been arranged concentrically installation axle, and the diameter of the installation axle is less than The diameter of the support shaft, the front end of installation axle is provided with installation threaded hole, and the cutting piece made from diamond (6) is set in institute State in installation axle, and the rear end of the rotating disk (22) with it is described installation screw rod (21) front end it is concentric connect, rotating disk (22) upside of rear end, downside, left and right side are provided with anti-skidding blob of viscose, and the rear end insertion of installation screw rod (21) And spiral shell be filled to installation threaded hole front end inside, and the rear end of four groups of anti-skidding blob of viscoses with the cutting piece made from diamond (6) contact is locked in front end.

3. a kind of cutter device for wafer etching apparatus as claimed in claim 2, which is characterized in that the rotating disk (22) front end is inscribed in circle and is provided with interior hexagonal fixing groove (23).

4. a kind of cutter device for wafer etching apparatus as claimed in claim 3, which is characterized in that further include left locking Plate (24), right latch, left clamping screw (25) (13) and right clamping screw (13), the right end of the left latch (24) and institute The left end connection of adjustable plate (19) is stated, and the left end of the right latch is connect with the right end of adjustable plate (19), left latch (24) it is slidably contacted with the front end of the back side panel (3) with the rear end of right latch, and the left latch (24) Front end is vertically arranged with pre-and post perforative left bar shaped groove, and the front end of the right latch be vertically arranged with it is pre-and post perforative Right bar shaped groove, the left and right side of the front end of the back side panel (3), which respectively corresponds, is provided with left locking screw through-hole and right lock Tight tapped through hole, the rear end of the left clamping screw (25) (13) passes through insertion inside left bar shaped groove and spiral shell is filled to left locking screw Inside line through-hole, and the rear end of right clamping screw (13) passes through the insertion of right bar shaped groove inside and spiral shell is filled to right locking screw and leads to Inside hole.

5. a kind of cutter device for wafer etching apparatus as claimed in claim 4, which is characterized in that two groups of upper lefts Guide wheel (12), two groups of lower-left guide wheels, two groups of upper right guide wheels and two groups of bottom right guide wheels outside be provided with rubber sleave (26).

6. a kind of cutter device for wafer etching apparatus as claimed in claim 5, which is characterized in that the left skateboard (8) the left limit sliding block of left end is set as two groups, and the right end of two groups of left limit sliding blocks respectively with the left skateboard (8) left end Front side connected with rear side, and it is two groups that the left limit sliding slot of the left limit plate (7) right end, which is correspondingly arranged, and described two groups are left Limit sliding chutes are separately positioned on the front side and rear side of left limit plate (7) right end, and two groups of left limit sliding blocks are slidably arranged in respectively Inside two groups of left limit sliding slots, and the right limit sliding block of the right slide plate right end is set as two groups, and two groups of right limits are sliding The left end of block is connect with the front side of the right slide plate right end and rear side respectively, and the left limit sliding slot of right limit plate left end Being correspondingly arranged is two groups, and two groups of right limit sliding slots are separately positioned on front side and the rear side of right limit plate left end, two groups of right limits Position sliding block is slidably arranged in respectively inside two groups of right limit sliding slots.

7. a kind of cutter device for wafer etching apparatus as claimed in claim 6, which is characterized in that further include adjustment axis (27), stiffening ring (28), four groups of extension bars (29), adjustment disk (30) and four groups of inserted links (31), the inside of four groups of supporting legs (2) It laterally is fixedly installed support plate, and the top left hand of the support plate is provided with auxiliary tank, auxiliary tank is internally provided with auxiliary Ball bearing is helped, the bottom end of the adjustment axis (27) is inserted and fixed inside installation to auxiliary ball bearing, the adjustment disk (30) bottom end with the top of the adjustment axis (27) is concentric connect, and the bottom end of four groups of inserted links (31) respectively with it is described Front left side, left rear side, the forward right side on adjustment disk (30) top are connected with right lateral side, and the top of four groups of inserted links (31) is longitudinally worn respectively It crosses the first handwheel (14) bottom inner portion and extend out to the top external world of the first handwheel (14), stiffening ring (28) fixing sleeve Circumference connection setting is evenly distributed with mounted in the inner end of the outside of the adjustment axis (27), and four groups of extension bars (29) to add described On the periphery wall of strong circle (28).

8. a kind of cutter device for wafer etching apparatus as claimed in claim 7, which is characterized in that further include four groups anti- Sliding sleeve (32), four groups of Anti-slip covers (32) are fixedly set in respectively outside the outer end of four groups of extension bars (29).