CN109176198A - A kind of monocrystalline silicon rod milling side processing unit for wafer flow production - Google Patents
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production Download PDFInfo
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- CN109176198A CN109176198A CN201811208664.1A CN201811208664A CN109176198A CN 109176198 A CN109176198 A CN 109176198A CN 201811208664 A CN201811208664 A CN 201811208664A CN 109176198 A CN109176198 A CN 109176198A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 39
- 238000003801 milling Methods 0.000 title claims abstract description 35
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 35
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 28
- 230000001681 protective effect Effects 0.000 claims abstract description 20
- 230000005540 biological transmission Effects 0.000 claims abstract description 19
- 238000003825 pressing Methods 0.000 claims abstract description 17
- 238000003780 insertion Methods 0.000 claims description 6
- 230000037431 insertion Effects 0.000 claims description 6
- 230000033001 locomotion Effects 0.000 claims description 5
- 238000005096 rolling process Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 62
- 239000013078 crystal Substances 0.000 abstract description 62
- 229910052710 silicon Inorganic materials 0.000 abstract description 62
- 239000010703 silicon Substances 0.000 abstract description 62
- 239000002699 waste material Substances 0.000 abstract description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000007787 solid Substances 0.000 description 4
- 230000005611 electricity Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 210000002683 foot Anatomy 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention relates to the technical fields of wafer flow production auxiliary equipment, more particularly to a kind of monocrystalline silicon rod milling side processing unit for wafer flow production, can be convenient to the progress of multiple groups silicon single crystal rod while the processing of the side of mill, shorten time-consuming；It can be convenient control the distance between barreling and silicon single crystal rod, reduce the fault of mill side, reduce the waste of resource；And it can be convenient control silicon single crystal rod and is accurately rotated by 90 °；Including motor, transmission shaft and barreling；It further include pedestal, four groups of supporting legs, two groups of support columns, top plate and bottom plate, multiple groups support rod, multiple groups fixing seat and two groups of adjusting threaded rods, two groups of adjusting threaded rod bottom ends are respectively arranged with two groups of swivel plates；Further include movable plate, move left track, move right track, protective shell, two groups of connecting shafts, two groups of left chain wheels, fixing axle and right pulley, protective shell right side wall and be provided with door；It further include multiple groups gear, multiple groups connecting rod, multiple groups fixed plate, pressing plate, multiple groups square inserted bar and two groups of fixed springs.
Description
Technical field
The present invention relates to the technical fields of wafer flow production auxiliary equipment, raw for wafer flow more particularly to one kind
The monocrystalline silicon rod milling side processing unit of production.
Background technique
It is well known that the monocrystalline silicon rod milling side processing unit for wafer flow production is a kind of for wafer flow production
In the process, polysilicon is melted, then planted in melting liquid into seed crystal, and after pulling it and forming columned silicon single crystal rod, to cutting
Silicon single crystal rod surface after section carries out the processing of the side of mill, its surface shaping is made to reach basic demand, improves the size essence of silicon single crystal rod
The auxiliary equipment of degree and surface smoothness is widely used in a variety of applications in the field of wafer flow production；It is existing to be used for
The monocrystalline silicon rod milling side processing unit of wafer flow production includes motor, transmission shaft and barreling, and barreling left side wall middle section is set
Be equipped with fixing groove, transmission shaft left end is connect with motor right side wall output end, and in transmission shaft right end insertion fixing groove and with it is solid
Determine the connection of slot inner sidewall；The existing monocrystalline silicon rod milling side processing unit for wafer flow production is in use, by motor and city
Electricity electrical connection, and the position of fixed motor, while starting motor, motor drives barreling to rotate by transmission shaft, staff's hand
The silicon single crystal rod of mill side is carried out required for holding close to the barreling rotated, by barreling grinding silicon single crystal rod, when being ground out a face
Afterwards, 90 degree of silicon single crystal rod are rotated, until four faces are ground out；The existing place of monocrystalline silicon rod milling side for wafer flow production
It is found in reason device use, it is inconvenient to the progress of multiple groups silicon single crystal rod while the processing of the side of mill, it is longer to expend the time；It is inconvenient
The distance between barreling and silicon single crystal rod are controlled, the fault of mill side is easy to appear, causes the waste of resource, practicability is poor；And
It, which is inconvenient to control silicon single crystal rod, is accurately rotated by 90 °, higher using limitation so as to cause it.
Summary of the invention
It can be convenient in order to solve the above technical problems, the present invention provides one kind to the progress of multiple groups silicon single crystal rod while place of the side of mill
Reason shortens time-consuming；It can be convenient control the distance between barreling and silicon single crystal rod, reduce the fault of mill side, reduce the waste of resource,
Improve practicability；And it can be convenient control silicon single crystal rod and is accurately rotated by 90 °, and reduces and is used for wafer flow using limitation
The monocrystalline silicon rod milling side processing unit of piece production.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, including motor, transmission shaft and
Barreling, barreling left side wall middle section are provided with fixing groove, and transmission shaft left end is connect with motor right side wall output end, and is driven
It is connect in axis right end insertion fixing groove and with fixing groove inner sidewall；It further include pedestal, four groups of supporting legs, two groups of support columns, top plate, bottoms
Plate, multiple groups support rod, multiple groups fixing seat and two groups of adjusting threaded rods, four groups of supporting leg tops are left front with base bottom respectively
Side, left rear side, forward right side are connected with right lateral side, two groups of support column bottom ends and top respectively with base top and top plate bottom
Front left side is connected with forward right side, and multiple groups lower through-hole is provided on the pedestal, and multiple groups support rod bottom end is each passed through multiple groups
Lower through-hole is simultaneously connect with bottom plate top, and the bottom plate left area and right half area are respectively arranged with two groups of adjustment holes, and two
Group adjustment hole inner sidewall is respectively arranged with internal screw thread corresponding with two groups of adjusting threaded rods, two groups of adjusting threaded rod tips
Spiral shell dress is rotatably connected by two groups of adjustment holes and with base bottom left area and right half area respectively, and in two groups of adjusting spiral shells
Rasp bar bottom end is respectively arranged with two groups of swivel plates, and the multiple groups fixing seat may be rotatably mounted at multiple groups supporting bar top respectively, and
Multiple groups locating slot is respectively arranged at the top of multiple groups fixing seat；Further include movable plate, moves left track, moves right track, protection
Shell, two groups of connecting shafts, two groups of left chain wheels, fixing axle and right pulley, it is described to move left track and move right track bottom end and pacify respectively
A left side is respectively arranged on track left side wall mounted in movable plate top left and right end, and moving left track right side wall and moving right
Sliding slot and right rail, are provided with protection chamber in the protective shell, and protective shell right side wall is provided with installing port, installing port and protect
Shield chamber communicates, and the protective shell right side wall is provided with door, and the motor is located in protective shell, and the transmission shaft left end passes through gear
Lid, two groups of connecting shaft left ends and right end are connect with two groups of left chain wheels and protective shell left side wall respectively, two groups of left chain wheels
It is respectively positioned in left sliding slot, the fixing axle left end and right end are connect with barreling right side wall middle section and right pulley respectively, described
Right pulley is located in right rail；It further include multiple groups gear, multiple groups connecting rod, multiple groups fixed plate, pressing plate, multiple groups square inserted bar and two
Fixed spring is organized, is provided with through-hole in multiple groups on the top plate, multiple groups connecting rod top is respectively and in multiple groups gear bottom
Region connection is entreated, and multiple groups connecting rod bottom end is each passed through through-hole in multiple groups and connects with multiple groups fixed plate top central region
Connect, multiple groups gear successively engages, two groups of fixed spring tops and bottom end respectively with left half-court at the top of pressing plate bottom and top plate
Domain is connected with right half area, and multiple groups gear top central region is respectively arranged with the rectangular slot of multiple groups, and the multiple groups are rectangular
Inserted link is installed in pressing plate bottom, and multiple groups square inserted bar bottom end is inserted into respectively in the rectangular slot of multiple groups.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further includes two groups of gag lever posts,
The movable plate left area and right half area are respectively arranged with two groups of limit holes, and in base top left area and right half-court
Domain is respectively arranged with multiple groups left limit slot and multiple groups right limit slot, and two groups of gag lever post bottom ends are each passed through two groups of limit holes simultaneously
It is inserted into one group of left limit slot corresponding with two groups of limit holes and one group of right limit slot.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further include two groups of connecting plates and
Two groups of limit springs, two groups of limit spring tops and bottom end respectively with left half-court at the top of two groups of connecting plate bottoms and movable plate
Domain is connected with right half area, and two groups of gag lever post upper half areas are located inside two groups of limit springs, and two groups of limits
Bar top is connect with two groups of connecting plate bottom middle sections respectively.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further include in multiple groups ball and
Ball under multiple groups is respectively arranged in multiple groups arc under arc groove and multiple groups in the multiple groups on through-hole and multiple groups lower through-hole inner sidewall
Shape slot, ball is located in multiple groups in arc groove and multiple groups lower arcuate slot under ball and multiple groups in the multiple groups, and multiple groups
Ball is contacted with multiple groups connecting rod and multiple groups support rod outer wall respectively under upper ball and multiple groups.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further includes non-slip mat in multiple groups
With non-slip mat under multiple groups, non-slip mat is separately mounted to multiple groups fixed plate bottom under non-slip mat and multiple groups in the multiple groups and multiple groups are solid
On reservation inner sidewall.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further include two groups of limit shafts,
Support and two groups of rear supports before two groups, the movable plate left area and right half area are respectively arranged with two groups of perforation, and described two
Group limit shaft be each passed through two groups of perforation, before described two groups support and two groups of rear supports be separately mounted to two groups of limit shaft front ends and
Rear end, and support and two groups of rear support bottom ends are connect with base top before two groups.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further includes two groups of mobile handles
Hand, two groups of moving handles are separately mounted to movable plate left end and right end.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further includes four groups of non-slip feets
Plate, four groups of anti-skidding soles are separately mounted to four groups of supporting leg bottom ends.
Compared with prior art the invention has the benefit that two groups of swivel plates can be rotated simultaneously, make two groups of adjusting spiral shells
Rasp bar rotates simultaneously, to make bottom plate that multiple groups support rod be driven to move down, increases the distance between multiple groups fixing seat and top plate
Greatly, and by the required multiple groups silicon single crystal rod bottom end handled it is inserted into the multiple groups locating slot of multiple groups fixing seat respectively, and anti-
Direction rotates two groups of swivel plates, rotates backward two groups of adjusting threaded rods, so that bottom plate be made to drive multiple groups by multiple groups support rod
Fixing seat and multiple groups silicon single crystal rod move up simultaneously, until silicon single crystal rod top is contacted with multiple groups fixed plate, so as to incite somebody to action
Multiple groups silicon single crystal rod is fixed between multiple groups top plate and multiple groups fixing seat, the displacement of multiple groups silicon single crystal rod is reduced, so as to side
Just multiple groups silicon single crystal rod is carried out while the processing of the side of mill, shortening is time-consuming；And it can be by two groups of left chain wheels and right pulley on a left side
Sliding up and down in sliding slot and right rail, which facilitates, to be limited barreling and moves up and down direction, after the completion of silicon single crystal rod is fixed, forward
Movable plate is pulled, so that movable plate drive is moved left track and is moved right track and moves forward close to silicon single crystal rod, and motor is led to
Electricity starts motor, and motor drives barreling to rotate by transmission shaft, and carries out mill side to silicon single crystal rod by the barreling of high-speed rotation
Processing, so as to facilitate control the distance between barreling and silicon single crystal rod, and the position that can move up and down motor drives
Barreling moves up and down, and carries out longitudinal imitation processing to silicon single crystal rod, keeps the degree for the treatment of of each section identical, so as to reduce mill
Side's fault, reduces the waste of resource, improves practicability；And lift pressing plate, drawstring two can need to be only gone up when rotating silicon single crystal rod
Group fixed spring, makes multiple groups square inserted bar leave the rectangular slot of multiple groups, and rotate any gear, since multiple groups gear is successively nibbled
It closes, therefore multiple groups gear can drive multiple groups silicon single crystal rod edge to turn clockwise or counterclockwise by the rotation of multiple groups fixed plate simultaneously
It is dynamic, after the completion of rotation, loosen pressing plate, at most organized in rectangular slot if multiple groups square inserted bar is directly inserted into, then it represents that is turned
It is dynamic to complete, it when that cannot be inserted directly into, needs to cooperate fine tuning, multiple groups square inserted bar can be inserted and at most organize in square groove,
So as to facilitate control silicon single crystal rod to be accurately rotated by 90 °, reduces and use limitation.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the partial enlarged view in the portion A in Fig. 1；
Fig. 3 is the partial enlarged view in the portion B in Fig. 1；
It is attached marked in the figure: 1, motor；2, transmission shaft；3, barreling；4, pedestal；5, supporting leg；6, support column；7, top plate；8, bottom plate；9,
Support rod；10, fixing seat；11, threaded rod is adjusted；12, swivel plate；13, movable plate；14, track is moved left；15, protective shell；
16, connecting shaft；17, fixing axle；18, right pulley；19, door；20, gear；21, connecting rod；22, fixed plate；23, pressing plate；24,
Square inserted bar；25, fixed spring；26, gag lever post；27, connecting plate；28, limit spring；29, upper ball；30, upper non-slip mat；
31, limit shaft；32, preceding support；33, moving handle；34, anti-skidding sole.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Implement below
Example is not intended to limit the scope of the invention for illustrating the present invention.
As shown in Figure 1 to Figure 3, a kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, packet
Motor 1, transmission shaft 2 and barreling 3 are included, 3 left side wall middle section of barreling is provided with fixing groove, 1 right side of 2 left end of transmission shaft and motor
The connection of wall output end, and connect in 2 right end of transmission shaft insertion fixing groove and with fixing groove inner sidewall；It further include 4, four groups of pedestal
5, two groups of support columns 6 of supporting leg, top plate 7, bottom plate 8, multiple groups support rod 9, multiple groups fixing seat 10 and two groups of adjusting threaded rods 11, four groups
5 top of supporting leg is connect with 4 bottom front left side of pedestal, left rear side, forward right side and right lateral side respectively, two groups of 6 bottom ends of support column and top
End is connect with 4 top of pedestal and 7 bottom front left side of top plate and forward right side respectively, and multiple groups lower through-hole, multiple groups branch are provided on pedestal 4
9 bottom end of strut be each passed through multiple groups lower through-hole and with connected at the top of bottom plate 8,8 left area of bottom plate and right half area are respectively set
There are two groups of adjustment holes, and be respectively arranged with internal screw thread corresponding with two groups of adjusting threaded rods 11 in two groups of adjustment hole inner sidewalls,
Distinguish spiral shell dress and pass through two groups of adjustment holes and can turn with 4 bottom left area of pedestal and right half area in two groups of 11 tops of adjusting threaded rod
Dynamic connection, and two groups of swivel plates 12 are respectively arranged with two groups of 11 bottom ends of adjusting threaded rod, multiple groups fixing seat 10 can be rotated respectively
It is mounted on 9 top of multiple groups support rod, and is respectively arranged with multiple groups locating slot at the top of multiple groups fixing seat 10；It further include movable plate
13, it moves left track 14, move right track, 15, two groups of protective shell, 16, two groups of connecting shaft left chain wheel, fixing axle 17 and right pulley
18, it moves left track 14 and moves right track bottom end and be separately mounted to 13 top left of movable plate and right end, and moving to left dynamic rail
It 14 right side wall of road and moves right and is respectively arranged with left sliding slot and right rail on track left side wall, protection is provided in protective shell 15
Chamber, and 15 right side wall of protective shell is provided with installing port, installing port is communicated with protection chamber, and 15 right side wall of protective shell is provided with door
19, motor 1 is located in protective shell 15, and 2 left end of transmission shaft passes through door 19, two groups of 16 left ends of connecting shaft and right end respectively with two groups
Left chain wheel is connected with 15 left side wall of protective shell, and two groups of left chain wheels are respectively positioned in left sliding slot, 17 left end of fixing axle and right end respectively with
3 right side wall middle section of barreling and right pulley 18 connect, and right pulley 18 is located in right rail；It further include multiple groups gear 20, multiple groups
Connecting rod 21, multiple groups fixed plate 22, pressing plate 23, multiple groups square inserted bar 24 and two groups of fixed springs 25 are provided with multiple groups on top plate 7
Upper through-hole, 21 top of multiple groups connecting rod are connect with 20 bottom central zones of multiple groups gear respectively, and 21 bottom end of multiple groups connecting rod
It is each passed through through-hole in multiple groups and is connect with 22 top central region of multiple groups fixed plate, multiple groups gear 20 successively engages, and two groups solid
Determine 25 top of spring and bottom end to connect with 23 bottom of pressing plate and 7 top left area of top plate and right half area respectively, multiple groups gear
20 top central regions are respectively arranged with the rectangular slot of multiple groups, and multiple groups square inserted bar 24 is installed in 23 bottom of pressing plate, and more
Group 24 bottom end of square inserted bar is inserted into respectively in the rectangular slot of multiple groups；Two groups of swivel plates can be rotated simultaneously, make two groups of adjusting screw threads
Bar rotates simultaneously, to make bottom plate that multiple groups support rod be driven to move down, increases the distance between multiple groups fixing seat and top plate,
And the required multiple groups silicon single crystal rod bottom end handled is inserted into respectively in the multiple groups locating slot of multiple groups fixing seat, and opposite direction
Two groups of swivel plates are rotated, two groups of adjusting threaded rods are rotated backward, so that bottom plate be made to drive multiple groups to fix by multiple groups support rod
Seat and multiple groups silicon single crystal rod move up simultaneously, are contacted with multiple groups fixed plate up to silicon single crystal rod top, so as to by multiple groups
Silicon single crystal rod is fixed between multiple groups top plate and multiple groups fixing seat, reduces the displacement of multiple groups silicon single crystal rod, so as to convenient pair
Multiple groups silicon single crystal rod carries out while the processing of the side of mill, shortens time-consuming；And it can be by two groups of left chain wheels and right pulley in left sliding slot
Facilitate with sliding up and down in right rail and limit barreling and move up and down direction, after the completion of silicon single crystal rod is fixed, is pulled along
Movable plate makes movable plate drive move left track and move right track and moves forward close to silicon single crystal rod, and by electrical power, opens
Dynamic motor, motor drives barreling to rotate by transmission shaft, and carries out the processing of the side of mill to silicon single crystal rod by the barreling of high-speed rotation,
So as to facilitate control the distance between barreling and silicon single crystal rod, and the position that can move up and down motor drives in barreling
Lower movement carries out longitudinal imitation processing to silicon single crystal rod, keeps the degree for the treatment of of each section identical, lose so as to reduce mill side
Accidentally, the waste of resource is reduced, practicability is improved；And lift pressing plate can need to be only gone up when rotating silicon single crystal rod, two groups of drawstring solid
Determine spring, so that multiple groups square inserted bar is left the rectangular slot of multiple groups, and rotate any gear, since multiple groups gear successively engages, therefore
Multiple groups gear can drive multiple groups silicon single crystal rod along rotating clockwise or counterclockwise by the rotation of multiple groups fixed plate simultaneously, when turning
After the completion of dynamic, to loosen pressing plate, at most organized in rectangular slot if multiple groups square inserted bar is directly inserted into, then it represents that rotation is completed,
It when that cannot be inserted directly into, needs to cooperate fine tuning, multiple groups square inserted bar can be inserted and at most organize in square groove, so as to
Facilitate control silicon single crystal rod to be accurately rotated by 90 °, reduces and use limitation.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further includes two groups of gag lever posts
26,13 left area of movable plate and right half area are respectively arranged with two groups of limit holes, and in 4 top left area of pedestal and right half
Region is respectively arranged with multiple groups left limit slot and multiple groups right limit slot, and two groups of 26 bottom ends of gag lever post are each passed through two groups of limit holes simultaneously
It is inserted into one group of left limit slot corresponding with two groups of limit holes and one group of right limit slot；It can be by the way that two groups of gag lever posts be passed through
Two groups of limit holes are simultaneously inserted into corresponding left limit slot and right limit slot and fix position of the movable plate on pedestal, improve mill side
Stability when processing.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further includes two groups of connecting plates 27
With two groups of limit springs 28, two groups of 28 tops of limit spring and bottom end are respectively and at the top of two groups of 27 bottoms of connecting plate and movable plate 13
Left area is connected with right half area, and two groups of 26 upper half areas of gag lever post are located inside two groups of limit springs 28, and two
Group 26 top of gag lever post is connect with two groups of 27 bottom central zones of connecting plate respectively；It can be by two groups of limit springs by two groups of companies
Fishplate bar is fixed at the top of movable plate, and when can move movable plate afterwards before necessary, is above mentioned two groups of connecting plates, made two groups of limits
It is mentioned on bar, and moves the position of movable plate, when being moved to suitable position, only need to loosen two groups of connecting plates can be in two groups of limits
Move down two groups of gag lever posts in the corresponding left limit slot of insertion and right limit slot under the elastic force effect of spring, so as to reduce
The loss of two groups of gag lever posts.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further includes ball 29 in multiple groups
With ball under multiple groups, arc groove and multiple groups arc lower in multiple groups are respectively arranged on through-hole and multiple groups lower through-hole inner sidewall in multiple groups
Slot, ball is located in multiple groups in arc groove and multiple groups lower arcuate slot under ball 29 and multiple groups in multiple groups, and is rolled in multiple groups
Ball is contacted with multiple groups connecting rod 21 and 9 outer wall of multiple groups support rod respectively under pearl 29 and multiple groups；In multiple groups connecting rod in multiple groups
It, can be by being rolled under ball in multiple groups and multiple groups when through hole rotates and when multiple groups support rod moves up and down at multiple groups lower through-hole
Pearl reduces the frictional force between multiple groups connecting rod and multiple groups support rod and top plate and pedestal, so as to facilitate multiple groups connecting rod
Rotation is moved up and down with multiple groups support rod.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further includes non-slip mat in multiple groups
30 and multiple groups under non-slip mat, non-slip mat is separately mounted to 22 bottom of multiple groups fixed plate and multiple groups under non-slip mat 30 and multiple groups in multiple groups
On 10 inner sidewall of fixing seat；In fixed silicon single crystal rod, multiple groups can be enhanced by non-slip mat under non-slip mat in multiple groups and multiple groups
Frictional force between top plate and multiple groups fixing seat and multiple groups silicon single crystal rod, so as to improve the crystallized ability to silicon single crystal rod.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further includes two groups of limit shafts
31, support 32 and two groups of rear supports before two groups, 13 left area of movable plate and right half area are respectively arranged with two groups of perforation, and two groups
Limit shaft 31 is each passed through two groups of perforation, before two groups support 32 and two groups of rear supports be separately mounted to two groups of 31 front ends of limit shaft and
Rear end, and support 32 and two groups of rear support bottom ends are connected at the top of pedestal 4 before two groups；Support and two before two groups can be passed through
Group rear support fixes the position of two groups of limit shafts, so as to move before and after two groups of limit shafts when movable plate is in upper back-and-forth motion
It is dynamic, so as to facilitate two groups of limit holes and left limit slot and right limit slot to it, reduce the offset of movable plate.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further includes two groups of moving handles
33, two groups of moving handles 33 are separately mounted to 13 left end of movable plate and right end；It can be when needing the position of mobile movable plate, it can
To pass through previously or pull back two groups of moving handles, it can facilitate and movable plate is pulled to be moved forward or rearward.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, further includes four groups of anti-skidding soles
34, four groups of anti-skidding soles 34 are separately mounted to four groups of 5 bottom ends of supporting leg；Four groups of supporting leg bottom ends can be enhanced by four groups of anti-skidding soles
So as to reduce the displacement of four groups of supporting legs, and then the stability of pedestal can be improved in frictional force between ground.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, at work, Ke Yitong
When rotate two groups of swivel plates, make two groups of adjusting threaded rods while rotating, thus make bottom plate drive multiple groups support rod move down, make
The distance between multiple groups fixing seat and top plate increase, and the required multiple groups silicon single crystal rod bottom end handled are inserted into respectively more
In the multiple groups locating slot of group fixing seat, and opposite direction rotates two groups of swivel plates, rotates backward two groups of adjusting threaded rods, to make
Bottom plate drives multiple groups fixing seat and multiple groups silicon single crystal rod to move up simultaneously by multiple groups support rod, until silicon single crystal rod top and
The contact of multiple groups fixed plate reduces multiple groups so as to which multiple groups silicon single crystal rod to be fixed between multiple groups top plate and multiple groups fixing seat
The displacement of silicon single crystal rod is shortened time-consuming so as to convenient to the progress of multiple groups silicon single crystal rod while the processing of the side of mill；And it can lead to
It crosses two groups of left chain wheels and right pulley sliding up and down in left sliding slot and right rail and facilitates and limit barreling and move up and down direction, when
After the completion of silicon single crystal rod is fixed, it is pulled along movable plate, so that movable plate drive is moved left track and moves right track forward movement
Close to silicon single crystal rod, and by electrical power, start motor, motor drives barreling to rotate by transmission shaft, and passes through high-speed rotation
Barreling the processing of the side of mill is carried out to silicon single crystal rod, and can so as to facilitate control the distance between barreling and silicon single crystal rod
It drives barreling to move up and down to move up and down the position of motor, longitudinal imitation processing is carried out to silicon single crystal rod, makes the place of each section
Reason degree is identical, so as to reduce the fault of mill side, reduces the waste of resource, improves practicability；And it can be in rotation monocrystalline
When silicon rod, lift pressing plate need to be only gone up, two groups of fixed springs of drawstring make multiple groups square inserted bar leave the rectangular slot of multiple groups, and rotate and appoint
Meaning gear, since multiple groups gear successively engages, therefore multiple groups gear can drive multiple groups list by the rotation of multiple groups fixed plate simultaneously
Crystalline silicon rod after the completion of rotation, loosens pressing plate along rotating clockwise or counterclockwise, if multiple groups square inserted bar be directly inserted into
In the rectangular slot of multiple groups, then it represents that rotation is completed, and when that cannot be inserted directly into, is needed to cooperate fine tuning, is made multiple groups square inserted bar can
To be inserted into multiple groups square groove, so as to facilitate control silicon single crystal rod to be accurately rotated by 90 °, reduces and use limitation, it can
To fix movable plate by the way that two groups of gag lever posts are passed through two groups of limit holes and are inserted into corresponding left limit slot and right limit slot
Position on pedestal is improved the stability when processing of mill side, can be fixed on two groups of connecting plates by two groups of limit springs
At the top of movable plate, and when can move movable plate afterwards before necessary, two groups of connecting plates are above mentioned, mention two groups of gag lever posts above, and
The position for moving movable plate, when being moved to suitable position, only need to loosen two groups of connecting plates can be in the bullet of two groups of limit springs
Move down two groups of gag lever posts in the corresponding left limit slot of insertion and right limit slot, so as to reduce by two groups of limits
The loss of bar moves up and down at multiple groups lower through-hole when through hole in multiple groups is rotated with multiple groups support rod in multiple groups connecting rod
When, it can be reduced between multiple groups connecting rod and multiple groups support rod and top plate and pedestal by ball under ball in multiple groups and multiple groups
Frictional force, can in fixed silicon single crystal rod so as to facilitate the rotation of multiple groups connecting rod and moving up and down for multiple groups support rod
To be enhanced between multiple groups top plate and multiple groups fixing seat and multiple groups silicon single crystal rod by non-slip mat under non-slip mat in multiple groups and multiple groups
Frictional force can fix two by support before two groups and two groups of rear supports so as to improve the crystallized ability to silicon single crystal rod
The position of group limit shaft, so as to be moved forward and backward when movable plate is in upper back-and-forth motion along two groups of limit shafts, so as to side
Just two groups of limit holes and left limit slot and right limit slot to it, reduce the offset of movable plate, mobile movable plate can needed
Position when, can by previously or pull back two groups of moving handles, can facilitate pull movable plate be moved forward or rearward,
The frictional force between four groups of supporting leg bottom ends and ground can be enhanced by four groups of anti-skidding soles, so as to reduce by four groups of supporting legs
Displacement, and then the stability of pedestal can be improved.
A kind of monocrystalline silicon rod milling side processing unit for wafer flow production of the invention, used motor are city
It is purchased on face, only need to be installed and be operated according to its subsidiary operation instruction.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvements and modifications, these improvements and modifications can also be made
Also it should be regarded as protection scope of the present invention.
Claims (8)
1. a kind of monocrystalline silicon rod milling side processing unit for wafer flow production, including motor (1), transmission shaft (2) and barreling
(3), barreling (3) left side wall middle section is provided with fixing groove, and transmission shaft (2) left end is connect with motor (1) right side wall output end,
And it is connect in transmission shaft (2) right end insertion fixing groove and with fixing groove inner sidewall；It is characterized in that, further including pedestal (4), four
Group supporting leg (5), two groups of support columns (6), top plate (7), bottom plate (8), multiple groups support rod (9), multiple groups fixing seat (10) and two groups of tune
Save threaded rod (11), four groups of supporting legs (5) top respectively with pedestal (4) bottom front left side, left rear side, forward right side and right lateral side
Connection, two groups of support columns (6) bottom end and top are respectively and at the top of pedestal (4) and top plate (7) bottom front left side and forward right side
It connects, is provided with multiple groups lower through-hole on the pedestal (4), multiple groups support rod (9) bottom end is each passed through multiple groups lower through-hole simultaneously
It is connect with bottom plate (8) top, bottom plate (8) left area and right half area are respectively arranged with two groups of adjustment holes, and at two groups
Adjustment hole inner sidewall is respectively arranged with internal screw thread corresponding with two groups adjusting threaded rod (11), two groups of adjusting threaded rods
(11) top difference spiral shell dress is rotatably connected by two groups of adjustment holes and with pedestal (4) bottom left area and right half area, and
Two groups of swivel plates (12) are respectively arranged with two groups of adjusting threaded rod (11) bottom ends, the multiple groups fixing seat (10) can be rotated respectively
It is mounted on multiple groups support rod (9) top, and is respectively arranged with multiple groups locating slot at the top of multiple groups fixing seat (10)；It further include movement
Plate (13) moves left track (14), moves right track, protective shell (15), two groups of connecting shafts (16), two groups of left chain wheels, fixing axles
(17) and right pulley (18), it is described move left track (14) and move right track bottom end be separately mounted to movable plate (13) top left
End and right end, and left sliding slot and right cunning are respectively arranged on track left side wall moving left track (14) right side wall and moving right
Slot, the protective shell (15) is interior to be provided with protection chamber, and protective shell (15) right side wall is provided with installing port, installing port and protection
Chamber communicates, and protective shell (15) right side wall is provided with door (19), and the motor (1) is located in protective shell (15), the biography
Moving axis (2) left end passes through door (19), two groups of connecting shafts (16) left end and right end respectively with two groups of left chain wheels and protective shell
(15) left side wall connects, and two groups of left chain wheels are respectively positioned in left sliding slot, fixing axle (17) left end and right end respectively with rolling
(3) right side wall middle section and right pulley (18) connection are ground, the right pulley (18) is located in right rail；It further include multiple groups gear
(20), multiple groups connecting rod (21), multiple groups fixed plate (22), pressing plate (23), multiple groups square inserted bar (24) and two groups of fixed springs
(25), be provided with through-hole in multiple groups on the top plate (7), multiple groups connecting rod (21) top respectively with multiple groups gear (20) bottom
The connection of portion's middle section, and multiple groups connecting rod (21) bottom end be each passed through in multiple groups through-hole and at the top of multiple groups fixed plate (22)
Middle section connection, multiple groups gear (20) successively engages, two groups of fixed springs (25) top and bottom end respectively with pressing plate
(23) bottom is connected with left area at the top of top plate (7) with right half area, multiple groups gear (20) the top central region difference
It is provided with the rectangular slot of multiple groups, the multiple groups square inserted bar (24) is installed in pressing plate (23) bottom, and multiple groups square inserted bar
(24) bottom end is inserted into respectively in the rectangular slot of multiple groups.
2. a kind of monocrystalline silicon rod milling side processing unit for wafer flow production as described in claim 1, which is characterized in that
It further include two groups of gag lever posts (26), movable plate (13) left area and right half area are respectively arranged with two groups of limit holes, and
Left area and right half area are respectively arranged with multiple groups left limit slot and multiple groups right limit slot at the top of the pedestal (4), and described two groups
Gag lever post (26) bottom end is each passed through two groups of limit holes and is inserted into one group of left limit slot corresponding with two groups of limit holes and one group
In right limit slot.
3. a kind of monocrystalline silicon rod milling side processing unit for wafer flow production as claimed in claim 2, which is characterized in that
It further include two groups of connecting plates (27) and two groups of limit springs (28), two groups of limit springs (28) top and bottom end are respectively with two
Group connecting plate (27) bottom is connected with left area at the top of movable plate (13) with right half area, two groups of gag lever posts (26) upper half
It is internal that region is located at two groups of limit springs (28), and two groups of gag lever post (26) tops respectively with two groups of connecting plate (27) bottoms
The connection of portion's middle section.
4. a kind of monocrystalline silicon rod milling side processing unit for wafer flow production as claimed in claim 3, which is characterized in that
Further include ball under ball in multiple groups (29) and multiple groups, is respectively arranged on through-hole and multiple groups lower through-hole inner sidewall in the multiple groups
Arc groove and multiple groups lower arcuate slot in multiple groups, ball is located at arc groove in multiple groups under ball (29) and multiple groups in the multiple groups
Ball is supported with multiple groups connecting rod (21) and multiple groups respectively under ball (29) and multiple groups in multiple groups lower arcuate slot, and in multiple groups
The contact of bar (9) outer wall.
5. a kind of monocrystalline silicon rod milling side processing unit for wafer flow production as claimed in claim 4, which is characterized in that
It further include non-slip mat under non-slip mat in multiple groups (30) and multiple groups, non-slip mat is pacified respectively under non-slip mat (30) and multiple groups in the multiple groups
On multiple groups fixed plate (22) bottom and multiple groups fixing seat (10) inner sidewall.
6. a kind of monocrystalline silicon rod milling side processing unit for wafer flow production as claimed in claim 5, which is characterized in that
It further include two groups of limit shafts (31), support (32) and two groups of rear supports before two groups, movable plate (13) left area and right half
Region is respectively arranged with two groups of perforation, and two groups of limit shafts (31) are each passed through two groups of perforation, support (32) before described two groups
Two groups of limit shaft (31) front-end and back-end, and support (32) and two groups of rear supports before two groups are separately mounted to two groups of rear supports
Bottom end is connect with pedestal (4) top.
7. a kind of monocrystalline silicon rod milling side processing unit for wafer flow production as claimed in claim 6, which is characterized in that
It further include two groups of moving handles (33), two groups of moving handles (33) are separately mounted to movable plate (13) left end and right end.
8. a kind of monocrystalline silicon rod milling side processing unit for wafer flow production as claimed in claim 7, which is characterized in that
It further include four groups of anti-skidding soles (32), four groups of anti-skidding soles (32) are separately mounted to four groups of supporting leg (5) bottom ends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811208664.1A CN109176198A (en) | 2018-10-17 | 2018-10-17 | A kind of monocrystalline silicon rod milling side processing unit for wafer flow production |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811208664.1A CN109176198A (en) | 2018-10-17 | 2018-10-17 | A kind of monocrystalline silicon rod milling side processing unit for wafer flow production |
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| CN109176198A true CN109176198A (en) | 2019-01-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811208664.1A Pending CN109176198A (en) | 2018-10-17 | 2018-10-17 | A kind of monocrystalline silicon rod milling side processing unit for wafer flow production |
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