CN101973082A - Single crystal butting machine featuring precise positioning - Google Patents
Single crystal butting machine featuring precise positioning Download PDFInfo
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- CN101973082A CN101973082A CN2010102591756A CN201010259175A CN101973082A CN 101973082 A CN101973082 A CN 101973082A CN 2010102591756 A CN2010102591756 A CN 2010102591756A CN 201010259175 A CN201010259175 A CN 201010259175A CN 101973082 A CN101973082 A CN 101973082A
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- steel wire
- monocrystalline
- dowel hole
- single crystal
- locating template
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Abstract
The invention provides a single crystal butting machine featuring precise positioning, comprising a numerical control machine, a single crystal positioning die plate which can move on the numerical control machine, and four groups of main shafts arranged around the single crystal positioning die plate; steel wires for cutting the single crystal in one direction are respectively arranged on the main shafts; the main shafts are provided with a plurality of steel wire grooves; the steel wires can movably arranged in the steel wire grooves of the corresponding main shafts; the spacing between two adjacent steel wire grooves is fixed; the panel of the numeric control machine is provided with a positioning pin; a group of location pinholes are respectively arranged at the two sides of the single crystal positioning die plate; the centers of the location pinholes of each group of location pinholes are positioned on the same straight line; the straight line and a straight line on which the steel wires are positioned form an included angles of 45 degrees, the quantity of the included angles is the same as the quantity of the steel wire grooves; and the spacing between the centers of two adjacent location pinholes is square root of 2 times as much as the spacing between steel wire grooves. The single crystal butting machine of the invention can accurately complete positioning, and save cost and time, thus achieving the purpose of improving the operating efficiency.
Description
Technical field
The present invention relates to a kind of cutting equipment of silicon single crystal material, be specifically related to a kind of location accurate monocrystalline butt machine.
Background technology
Steel wire butt machine is called the evolution machine again, be sharp a kind of with mortar (lapping liquid that SiC and oil mix together) thus spray on the steel wire of high-speed cruising the equipment that silicon single crystal rod or polycrystal silicon ingot are cut.
Wherein, high-speed cruising in the steel wire trough that steel wire is opened on main shaft cuts the monocrystalline silicon that is arranged on the monocrystalline locating template.Because spray has lapping liquid on the steel wire, therefore, in the rotating process starts, speed and the main shaft speed that perhaps can not accomplish steel wire in electrical control are in full accord, therefore cut several times, steel wire trough can produce the wearing and tearing cutting, at this moment cuts with regard to changing next steel wire trough, otherwise cause steel wire broken string or cutting accident easily, the spacing of supposing steel wire trough is P.When needs were changed steel wire trough, the monocrystalline silicon locating template also needed slot pitch of corresponding mobile, P.But cutting is carried out simultaneously at X, Y both direction, so locating template needs to move a slot pitch P simultaneously at X and Y direction simultaneously.
Use at present the two kinds of methods that mainly contain comparatively widely: first kind is to add a pad on main shaft, if when promptly court+directions X changes groove at pad that thickness is P of positive direction interpolation, make steel wire trough still in original position, and the like.This kind method can not mobile monocrystalline locating template, but the defective of this kind method be, the first cause the main shaft axial float owing to add pad easily to the structure on the main shaft, make cut quality lower in addition sometimes cutting products scrap; The second, to add pad and need dismantle main shaft, the replacing time is long, and efficient is low.
Second method: main shaft changes steel wire trough and does not add pad, and mobile monocrystalline locating template relies on screw to regulate, and at first adjusts a slot pitch P at directions X, adjusts a slot pitch P in the Y direction again.Its shortcoming is that adjusting is loaded down with trivial details, and very high to technical merit and the experience requirement of regulating personnel, also makes mistakes easily.
In sum, main existence location inaccuracy, the perhaps loaded down with trivial details technical problem of the mode of Tiao Jieing of prior art.
Summary of the invention
At above-mentioned defective, the purpose of this invention is to provide a kind of location accurate monocrystalline butt machine, when needing to adjust the position after changing steel wire trough with the butt machine monocrystalline locating template that solves prior art, the location inaccuracy is perhaps changed loaded down with trivial details technical problem.
For achieving the above object, the present invention has adopted following technical scheme:
A kind of location accurate monocrystalline butt machine, comprise Digit Control Machine Tool, the monocrystalline locating template that can on Digit Control Machine Tool, move, be arranged on described monocrystalline locating template four groups of main shafts all around, one steel wire that is used for cutting in one direction monocrystalline respectively is set on those main shafts, those main shafts are provided with a plurality of steel wire troughs, described steel wire is arranged in the steel wire trough of corresponding main shaft movably, and spacing is fixed between the two adjacent steel wire troughs;
Respectively be provided with an alignment pin at marginal position on the panel of described Digit Control Machine Tool, both sides are respectively arranged with one group of dowel hole on the described monocrystalline locating template, each dowel hole is centered close on the same straight line in every group of dowel hole, this straight line and described steel wire place straight line are in angle of 45 degrees, number is identical with the steel wire trough number of each main shaft, and spacing is the steel wire trough spacing between the two adjacent dowel hole centers
Doubly.
According to the described monocrystalline butt of preferred embodiment of the present invention machine, described monocrystalline locating template is fixed by the alignment pin on described dowel hole and the Digit Control Machine Tool.
According to the described monocrystalline butt of preferred embodiment of the present invention machine, more described dowel hole is measure-alike, and matches with described alignment pin size.
According to the described monocrystalline butt of preferred embodiment of the present invention machine, described monocrystalline locating template is being mobile on 45 directions of spending with steel wire.
According to the described monocrystalline butt of preferred embodiment of the present invention machine, there is corresponding numbering on described dowel hole next door with the other mark of described steel wire trough, and those are numbered one of numeral, English alphabet or other symbols.
Owing to adopted above technical scheme, made the present invention have following advantage and good effect than prior art:
At first, monocrystalline butt machine provided by the invention is provided with two groups of dowel holes on the monocrystalline locating template, cooperate with alignment pin on the Digit Control Machine Tool, can accurately finish the location, avoid when steel wire trough is changed, causing the location inaccuracy and problem that the cutting monocrystalline silicon that causes is scrapped;
Secondly, monocrystalline butt machine provided by the invention, when needs are changed monocrystalline locating template position, only corresponding dowel hole on the mobile monocrystalline locating template of needs and alignment pin are fixed and are got final product, need not complicated adjustment, measurement and positioning etc., can realize fast equally, save cost for the babe in the wood, also save time, thereby reach the purpose of increasing work efficiency.
Description of drawings
Fig. 1 is a kind of schematic diagram of locating accurate monocrystalline butt machine of the present invention;
Fig. 2 is the partial enlarged drawing at I position among Fig. 1;
Fig. 3 is the partial enlarged drawing at II position among Fig. 2.
The specific embodiment
Below in conjunction with accompanying drawing several preferred embodiments of the present invention is described in detail, but the present invention is not restricted to these embodiment.The present invention contain any on marrow of the present invention and scope, make substitute, modification, equivalent method and scheme.Understand for the public is had completely the present invention, in the following preferred embodiment of the present invention, describe concrete details in detail, and do not have the description of these details also can understand the present invention fully for a person skilled in the art
Please refer to Fig. 1, a kind of location accurate monocrystalline butt machine, comprise Digit Control Machine Tool 1, the monocrystalline locating template 2 that can on Digit Control Machine Tool, move, be arranged on four groups of main shafts 3 around the described monocrystalline locating template 2, a steel wire 5 that is used for cutting in one direction monocrystalline 4 respectively is set on those main shafts.
Wherein, every steel wire 5 all connects a pair of in the two opposite groups main shaft simultaneously, at X and Y direction monocrystalline silicon is cut respectively.
Please refer to Fig. 2, it is the partial enlarged drawing at I position among Fig. 1, as seen from Figure 2, main shaft 3 is provided with a plurality of steel wire troughs 31, steel wire 5 is arranged on the steel wire trough interior 31 of corresponding main shaft movably, be that steel wire 5 can be changed between the adjacent steel wire trough 31 of the steel wire trough 31, two at its place spacing and fixes, being assumed to spacing is P.
Please return with reference to figure 1, and simultaneously with reference to figure 3, Fig. 3 is the enlarged drawing at II position among Fig. 1, respectively be provided with an alignment pin (not illustrating among the figure) at marginal position on the panel of described Digit Control Machine Tool 1, both sides are respectively arranged with one group of dowel hole 21 on the monocrystalline locating template 2, each dowel hole is centered close on the same straight line in every group of dowel hole 21, the straight line at dowel hole place and steel wire 5 place straight lines are in angle of 45 degrees (owing to be vertical between two groups of steel wires, so no matter be 45 angles of spending) with X or Y direction, number is identical with the steel wire trough number of each main shaft, and spacing is steel wire trough 31 spacings between the two adjacent dowel holes
Doubly, promptly the center distance of dowel hole is
And each dowel hole measure-alike matches with the size of alignment pin, and the monocrystalline locating template is fixed by the alignment pin on described dowel hole and the Digit Control Machine Tool, thereby realizes that alignment pin is inner loosening at dowel hole, can realize the effect of locating.
And, because when steel wire is changed steel wire trough on main shaft, be sequential, therefore for avoiding confusion, at steel wire trough 31 edges numbering is set, also is arranged at simultaneously the numbering of each steel wire trough correspondence, for example 1,2,3,4 or A, B, C, D or the like on the dowel hole next door, when steel wire trough is changed, only the dowel hole of correspondence need be fixed getting final product with alignment pin.
Described monocrystalline locating template 2 is being mobile on 45 directions of spending with steel wire, because the center distance of dowel hole is
P, its projection in directions X and Y direction just in time is P, corresponding steel wire is at the moving interval P of X and Y direction, thereby realizes and the cooperating of alignment pin, and can not influence the precision of cutting, changes also more convenient.
In sum, owing to adopted above technical scheme, make the present invention have following advantage and good effect than prior art:
At first, monocrystalline butt machine provided by the invention is provided with two groups of dowel holes on the monocrystalline locating template, cooperate with alignment pin on the Digit Control Machine Tool, can accurately finish the location, avoid when steel wire trough is changed, causing the location inaccuracy and problem that the cutting monocrystalline silicon that causes is scrapped;
Secondly, monocrystalline butt machine provided by the invention, when needs are changed monocrystalline locating template position, only corresponding dowel hole on the mobile monocrystalline locating template of needs and alignment pin are fixed and are got final product, need not complicated adjustment, measurement and positioning etc., can realize fast equally, save cost for the babe in the wood, also save time, thereby reach the purpose of increasing work efficiency.
The preferred embodiment of the present invention just is used for helping to set forth the present invention.Preferred embodiment does not have all details of detailed descriptionthe, does not limit this invention yet and only is the described specific embodiment.Obviously, according to the content of this specification, can make many modifications and variations.These embodiment are chosen and specifically described to this specification, is in order to explain principle of the present invention and practical application better, thereby the technical field technical staff can utilize the present invention well under making.The present invention only is subjected to the restriction of claims and four corner and equivalent.
Claims (5)
1. locate accurate monocrystalline butt machine for one kind, comprise Digit Control Machine Tool, the monocrystalline locating template that can on Digit Control Machine Tool, move, be arranged on described monocrystalline locating template four groups of main shafts all around, one steel wire that is used for cutting in one direction monocrystalline respectively is set on those main shafts, it is characterized in that, those main shafts are provided with a plurality of steel wire troughs, and described steel wire is arranged in the steel wire trough of corresponding main shaft movably, and spacing is fixed between the two adjacent steel wire troughs;
Respectively be provided with an alignment pin at marginal position on the panel of described Digit Control Machine Tool, both sides are respectively arranged with one group of dowel hole on the described monocrystalline locating template, each dowel hole is centered close on the same straight line in every group of dowel hole, this straight line and described steel wire place straight line are in angle of 45 degrees, number is identical with the steel wire trough number of each main shaft, and spacing is the steel wire trough spacing between the two adjacent dowel hole centers
Doubly.
2. monocrystalline butt machine as claimed in claim 1 is characterized in that described monocrystalline locating template is fixed by the alignment pin on described dowel hole and the Digit Control Machine Tool.
3. monocrystalline butt machine as claimed in claim 1 is characterized in that more described dowel hole is measure-alike, and matches with described alignment pin size.
4. as any described monocrystalline butt machine of claim 1-3, it is characterized in that described monocrystalline locating template is being mobile on 45 directions of spending with steel wire.
5. monocrystalline butt machine as claimed in claim 1 is characterized in that, there is corresponding numbering on described dowel hole next door with the other mark of described steel wire trough, and those are numbered one of numeral, English alphabet or other symbols.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010259175.6A CN101973082B (en) | 2010-08-20 | 2010-08-20 | Single crystal butting machine featuring precise positioning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010259175.6A CN101973082B (en) | 2010-08-20 | 2010-08-20 | Single crystal butting machine featuring precise positioning |
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|---|---|
| CN101973082A true CN101973082A (en) | 2011-02-16 |
| CN101973082B CN101973082B (en) | 2015-01-28 |
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| CN201010259175.6A Active CN101973082B (en) | 2010-08-20 | 2010-08-20 | Single crystal butting machine featuring precise positioning |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102363329A (en) * | 2011-06-30 | 2012-02-29 | 常州天合光能有限公司 | Evolution cutting deviation preventing tool for polycrystalline silicon ingot and using method thereof |
| CN103707424A (en) * | 2013-11-27 | 2014-04-09 | 江苏美科硅能源有限公司 | Cutting coordinate insertion sheet tool |
| CN109176198A (en) * | 2018-10-17 | 2019-01-11 | 江苏英锐半导体有限公司 | A kind of monocrystalline silicon rod milling side processing unit for wafer flow production |
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| EP0990498A1 (en) * | 1998-09-10 | 2000-04-05 | Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft | Method and device for cutting wafers from a hard brittle ingot |
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| CN1697721A (en) * | 2003-01-24 | 2005-11-16 | 株式会社新王磁材 | Wire saw device and method of manufacturing sintered magnet using the same |
| JP2009149046A (en) * | 2007-11-28 | 2009-07-09 | Denso Corp | Manufacturing method for board |
| JP2009241161A (en) * | 2008-03-28 | 2009-10-22 | Nihon Slice Center:Kk | Cutting section mechanism of wire saw machine |
| CN101618519A (en) * | 2008-07-01 | 2010-01-06 | 内蒙古晟纳吉光伏材料有限公司 | Method and device thereof for linearly cutting silicon slice |
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2010
- 2010-08-20 CN CN201010259175.6A patent/CN101973082B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH692489A5 (en) * | 1998-01-26 | 2002-07-15 | Hct Shaping Systems Sa | Wire sawing device for cutting prisms comprises two parallel wire layers forming mesh network which is displaced against part to be sawn fixed on support table |
| EP0990498A1 (en) * | 1998-09-10 | 2000-04-05 | Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft | Method and device for cutting wafers from a hard brittle ingot |
| JP2002264003A (en) * | 2001-03-13 | 2002-09-18 | Nippei Toyama Corp | Machining roller for wire saw and wire saw |
| JP2002307285A (en) * | 2001-04-13 | 2002-10-23 | Fine Technica:Kk | Multi-thin wire saw device |
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| CN1697721A (en) * | 2003-01-24 | 2005-11-16 | 株式会社新王磁材 | Wire saw device and method of manufacturing sintered magnet using the same |
| JP2009149046A (en) * | 2007-11-28 | 2009-07-09 | Denso Corp | Manufacturing method for board |
| JP2009241161A (en) * | 2008-03-28 | 2009-10-22 | Nihon Slice Center:Kk | Cutting section mechanism of wire saw machine |
| CN101618519A (en) * | 2008-07-01 | 2010-01-06 | 内蒙古晟纳吉光伏材料有限公司 | Method and device thereof for linearly cutting silicon slice |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102363329A (en) * | 2011-06-30 | 2012-02-29 | 常州天合光能有限公司 | Evolution cutting deviation preventing tool for polycrystalline silicon ingot and using method thereof |
| CN103707424A (en) * | 2013-11-27 | 2014-04-09 | 江苏美科硅能源有限公司 | Cutting coordinate insertion sheet tool |
| CN109176198A (en) * | 2018-10-17 | 2019-01-11 | 江苏英锐半导体有限公司 | A kind of monocrystalline silicon rod milling side processing unit for wafer flow production |
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| Publication number | Publication date |
|---|---|
| CN101973082B (en) | 2015-01-28 |
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