CN208937525U - A kind of thin-film capacitor humidity sensor - Google Patents
A kind of thin-film capacitor humidity sensor Download PDFInfo
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- CN208937525U CN208937525U CN201820863512.4U CN201820863512U CN208937525U CN 208937525 U CN208937525 U CN 208937525U CN 201820863512 U CN201820863512 U CN 201820863512U CN 208937525 U CN208937525 U CN 208937525U
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Abstract
The utility model discloses a kind of thin-film capacitor humidity sensors, and wherein thin-film capacitor humidity sensor includes humidity-sensitive material film layer, and the humidity-sensitive material film layer is covered with upper electrode layer on one side, and another side is covered with lower electrode layer.Compared with the prior art, thin film capacitor sensors provided by the utility model can realize instant response to the moisture in air, the response time in 3 s, can rapidly monitor air humidity in real time under the premise of guaranteeing stability, sensitivity.
Description
Technical field
The utility model relates to sensor fields, and in particular to a kind of thin-film capacitor humidity of the instant response of high sensitivity
Sensor.
Background technique
In departments such as industrial and agricultural production, meteorology, environmental protection, national defence, scientific research, space flight, it is often necessary to be surveyed to ambient humidity
Amount and control, but in conventional environmental parameter, humidity is a parameter for being most difficult to accurately measure.
The sensor of more common survey ambient air humidity is mainly humistor and humicap, and humistor is general
It can only meet in normal environment (0 ~ 50 DEG C/humidity of temperature, 20 ~ 90%RH) and use, and accuracy rate and response speed are all poor；
Humicap can 0 ~ 100%RH of gamut test air humidity, used at a temperature of being generally able to satisfy -40 ~ 100 DEG C, response speed
Degree is also fast more many than humistor, can substantially reach within 10 s.Therefore, control air accurate for harsher, requirement
The environment of humidity generally can all select humicap as sensor.
Currently, mostly using ceramic substrate or flexible circuit board as the substrate of humicap in the market, basic structure is
Substrate (1), lower electrode (2), humidity-sensitive material layer (3) and top electrode (4), as shown in Figure 1.Wherein, top electrode and lower electrode are all
The thin metal layer of plating up, lower electrode are directly connect with substrate.In actual use, the moisture in air can only largely pass through
Top electrode thin metal layer entrance/discharge incudes in humidity-sensitive material layer, carries out hygrometric.Due to only having this moisture of top electrode logical
Road, response speed is about longer in 10 ~ 15 s or even response time, and response speed is very slow, and is difficult to guarantee stability simultaneously
With the superperformance of response speed.
Utility model content
To overcome existing technological deficiency, the utility model provides a kind of thin-film capacitor humidity sensor, not only stable
Property it is high, and response speed is exceedingly fast, and humidity in air can be detected in 3s.
For realization the purpose of this utility model, it is achieved using following technical scheme:
A kind of thin-film capacitor humidity sensor, including humidity-sensitive material film layer, the humidity-sensitive material film layer are covered on one side
There is upper electrode layer, another side is covered with lower electrode layer.
Compared with the existing technology, provided by the utility model is a kind of thin-film capacitor humidity sensor, and middle layer uses
The film that humidity-sensitive material is made into, the two sides of the humidity-sensitive material film layer are covered with electrode layer, that is, upper electrode layer and lower electricity respectively
Pole layer, the moisture in air can pass through top electrode and lower electrode entrance/discharge simultaneously.It is logical due to more moisture disengaging
Road, under the premise of guaranteeing humidity-sensitive material function admirable, the speed of capacitive humidity sensor response provided by the utility model
Faster, it has all been obtained obviously relative to the response speed of the capacitive humidity sensor of belt substrate (such as Fig. 1) and sensitivity
It improves.
The utility model has eliminated the mode for using substrate as carrier, directly uses film made by humidity-sensitive material as sense
Also carrier is used as while wet stock.The humidity-sensitive material layer of existing humidity sensor due to not as carrier, usually compared with
It is thin, about 0.5 ~ 1.5 μm of thickness.And in the present invention, to combine the performance as humidity-sensitive material and carrier, wet sensitive material
The thickness for expecting film is preferably 1 ~ 6 μm.In practical applications, the thickness of humidity-sensitive material film can be 1 μm, 1.5 μm, 2 μm,
2.5μm、3μm、3.5μm、4μm、4.5μm、5μm、5.5μm、6μm。
Humidity-sensitive material is a kind of high molecular polymer, its dielectric constant changes with the relative humidity variations of environment.
The most commonly used is polyvinyl alcohol, polyamide, Atriacetyl cellulose and metal oxide such as Al for humidity-sensitive material2O3Deng.It is practical new at this
In type, it is preferred to use using polyether resin that ehter bond is main sense wet point and crosslinking as humidity-sensitive material.
The humicap type sensor made in the prior art using acetylbutyrylcellulose and polyimide-type materials, by
Containing the ester bond or amido bond intolerant to hydrolysis in material, although so that this kind of humicap type sensor has preferable property
Can, but stability is insufficient.The utility model uses a kind of cross-linked polyether resin for being substantially free of ester bond, amido bond as wet
Photosensitive polymerization object, it is wet using ehter bond sense, there is space interpenetrating networks space structure, while guaranteeing sensitive to moisture responsive, tool
There is good water-fast function, is not easy to be swollen, not facile hydrolysis.Therefore the humicap type sensor linearity made of the polymer
It is good, humidity hysteresis is small, high sensitivity, fast response time, stability are good, under the condition of high temperature and high humidity, there is good reliability and stability.
Thin-film capacitor humidity sensor provided by the utility model has stability high, and to moisture-sensitive, moisture absorption/dehumidification is rapidly etc. excellent
Point.
Specifically, humidity-sensitive material used by the utility model with and preparation method thereof reference may also be made to application number
201610372727.1 and application No. is 201610531517.2 Chinese invention patents.
Further, the upper electrode layer and the lower electrode layer are plated in the humidity-sensitive material film layer.Due to
Upper electrode layer and lower electrode layer are all the channels of moisture, it is contemplated that electric conductivity, stability and the gas permeability of electrode, the utility model
The material of the electrode of selection is one or more of golden (Au), platinum (Pt), chromium (Cr).In addition, by comprehensively considering conduction
Property and gas permeability, upper electrode layer and lower electrode layer with a thickness of 50 ~ 200 nm.In practical applications, the thickness of upper/lower electrode can
To be 50nm, 100nm, 150nm, 200nm.
Preferably, 0.8 ~ 1.2 times with a thickness of lower electrode layer thickness of the upper electrode layer.It is further preferred that described
The thickness of upper electrode layer is equal to the thickness of the lower electrode layer.
The preparation method of above-mentioned thin-film capacitor humidity sensor, specifically includes the following steps:
Humidity-sensitive material: being tuned into the solution of certain viscosity by S1, and spin coating levelling is carried out on spin-coating equipment, is volatilized into solvent
After film, it is cut into the film of required shape；
S2: one layer of thin metal layer is plated respectively in the two sides for the film that step S1 is obtained, as upper electrode layer and lower electrode
Layer；
S3: respectively drawing a conductive lead wire for upper electrode layer and lower electrode layer respectively, forms capacitor.
Further, in step S1, the viscosity of humidity-sensitive material solution is 20 ~ 30 mPas.
Thin film capacitor sensors provided by the utility model, capacitive property is good, and D value can accomplish 0.001 rank,
Wet sensitive performance is as follows:
Sensitivity (RH of 10% RH ~ 95%): 0.4 ~ 0.5 pF/%RH
Humidity measurement range: 0 ~ 100% RH
Temperature application range: -50 ~ 150 DEG C
Humidity hysteresis: 1% RH of ﹤
Response speed (25 DEG C): t903 s of ﹤
Year drift value: 1% RH of ﹤
Compared with the prior art, thin film capacitor sensors provided by the utility model can guarantee stability, sensitivity
Under the premise of, instant response can be realized to the moisture in air, can rapidly monitor air humidity in real time.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of existing humicap；
Fig. 2 is the structural schematic diagram of film Humidity-Sensitive Capacitance Sensor provided by the utility model.
Specific embodiment
To keep the purpose of this utility model, technical solution and advantage clearer, with reference to the accompanying drawing to the utility model
Embodiment is described in more detail.
Embodiment
A kind of thin-film capacitor humidity sensor of the instant response of high sensitivity is present embodiments provided, successively includes lower electricity
Pole 2 ', humidity-sensitive material film 3 ' and top electrode 4 '.
Wherein, top electrode 4 ' and lower electrode 2 ', which can be, is plated on humidity-sensitive material film 3 '.
It is a kind of thin-film capacitor humidity sensor provided by the present embodiment, abandons traditional use substrate as carrier
Mode, but humidity-sensitive material is directly made into film, using the humidity-sensitive material film as carrier, then distinguished upper/lower electrode
It is plated in the two sides of humidity-sensitive material film.Due to the not set substrate of the present embodiment, upper/lower electrode can be for moisture entrance/discharge, so
Afterwards with humidity-sensitive material film contacts.The access of moisture disengaging compared with the existing technology, film provided by the present embodiment
The humidity that capacitive humidity sensor enables to its humidity-sensitive material that can quickly incude environment changes, response speed and sensitivity
All have greatly improved, response speed can be promoted to 3s.
To take into account the performance as humidity-sensitive material and carrier, embodiment as one preferred, in any of the above-described implementation
Example on the basis of, humidity-sensitive material film 3 ' with a thickness of 1 ~ 6 μm.It is further preferred that the humidity-sensitive material selection is with ehter bond
The cross-linked polyether resin of main sense wet point is as humidity-sensitive material.
Since top electrode 4 ' and lower electrode 2 ' are all the accesses as moisture disengaging, it is contemplated that electric conductivity, the stabilization of electrode
Property and gas permeability, embodiment as one preferred, based on any of the above embodiments, top electrode 4 ' and lower electrode
2 ' material can be one or more of golden (Au), platinum (Pt), chromium (Cr).
As a kind of further preferred embodiment, based on any of the above embodiments, the conduction of electrode in order to balance
Property and gas permeability, top electrode 4 ' with a thickness of 50 ~ 200 nm, lower electrode 2 ' with a thickness of 50 ~ 200 nm.
As a kind of further preferred embodiment, based on any of the above embodiments, top electrode 4 ' with a thickness of under
0.8 ~ 1.2 times of 2 ' thickness of electrode.Further preferably, the thickness of top electrode 4 ' is equal to the thickness of lower electrode 2 '.
The preparation method of above-mentioned thin-film capacitor humidity sensor, specifically includes the following steps:
Humidity-sensitive material: being tuned into the solution of certain viscosity by S1, and spin coating levelling is carried out on spin-coating equipment, is volatilized into solvent
After film, it is cut into the film of required shape, the thickness control of film is at 1 ~ 6 μm；
S2: one layer of thin metal layer is plated respectively in the two sides for the film that step S1 is obtained, as upper electrode layer and lower electrode
Layer, wherein the metal layer thickness of plating is 50 ~ 200 nm；
S3: respectively drawing a conductive lead wire for upper electrode layer and lower electrode layer respectively, forms capacitor.
Further, in step S1, the viscosity of humidity-sensitive material solution is 20 ~ 30 mPas.
As a preferred solution, it is preferred to use customization spin-coating equipment prepares standard film, standard by technology controlling and process
The requirement of film are as follows: it is smooth, pin-free, 1 ~ 6 μm of thickness control.
In the present embodiment, the film of application requirement is reached by technology controlling and process preparation, and due to substrate not being arranged as carrier,
Therefore, the present embodiment is by 1 ~ 6 μ m thick film, by subtle Manufacturing Techniques and high request coating technique,
Meet adhesive force and plate two electrodes in the case where not puncturing film, high performance capacitor is prepared.
The thin film capacitor sensors being made that using the method for the present embodiment, capacitive property is good, and D value can accomplish
0.001 rank, wet sensitive performance are as follows:
Sensitivity (RH of 10% RH ~ 95%): 0.4 ~ 0.5 pF/%RH
Humidity measurement range: 0 ~ 100% RH
Temperature application range: -50 ~ 150 DEG C
Humidity hysteresis: 1% RH of ﹤
Response speed (25 DEG C): t903 s of ﹤
Year drift value: 1% RH of ﹤.
Above-described embodiment is merely examples for clearly illustrating the present invention, and is not to the utility model
Embodiment restriction.For those of ordinary skill in the art, it can also make on the basis of the above description
Other various forms of variations or variation.There is no necessity and possibility to exhaust all the enbodiments.It is all practical new at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model right and wants within the spirit and principle of type
Within the protection scope asked.
Claims (10)
1. a kind of thin-film capacitor humidity sensor, which is characterized in that including humidity-sensitive material film layer, the humidity-sensitive material film layer
Be covered with upper electrode layer on one side, another side is covered with lower electrode layer.
2. thin-film capacitor humidity sensor according to claim 1, which is characterized in that the thickness of the humidity-sensitive material film
It is 1 ~ 6 μm.
3. thin-film capacitor humidity sensor according to claim 2, which is characterized in that the thickness of the humidity-sensitive material film
It is 2 ~ 5.5 μm.
4. thin-film capacitor humidity sensor according to claim 2, which is characterized in that the humidity-sensitive material film be by with
Ehter bond is the film that the cross-linked polyether resin of main sense wet point is prepared.
5. thin-film capacitor humidity sensor according to claim 1, which is characterized in that the upper electrode layer with a thickness of 50
~200 nm。
6. thin-film capacitor humidity sensor according to claim 1, which is characterized in that the lower electrode layer with a thickness of 50
~200 nm。
7. thin-film capacitor humidity sensor according to claim 1, which is characterized in that the upper electrode layer and lower electrode layer
Material be respectively gold, platinum, one or more of chromium.
8. thin-film capacitor humidity sensor described according to claim 1 or 5 or 6 or 7, which is characterized in that the upper electrode layer
0.8 ~ 1.2 times with a thickness of lower electrode layer thickness.
9. thin-film capacitor humidity sensor according to claim 8, which is characterized in that the thickness of the upper electrode layer is equal to
The thickness of the lower electrode layer.
10. thin-film capacitor humidity sensor according to claim 1, which is characterized in that the upper electrode layer and it is described under
Electrode layer is plated in the humidity-sensitive material film layer.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108398466A (en) * | 2018-06-05 | 2018-08-14 | 广州九思科技有限公司 | A kind of thin-film capacitor humidity sensor and preparation method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108398466A (en) * | 2018-06-05 | 2018-08-14 | 广州九思科技有限公司 | A kind of thin-film capacitor humidity sensor and preparation method thereof |
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