CN208937525U - A kind of thin-film capacitor humidity sensor - Google Patents

A kind of thin-film capacitor humidity sensor Download PDF

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CN208937525U
CN208937525U CN201820863512.4U CN201820863512U CN208937525U CN 208937525 U CN208937525 U CN 208937525U CN 201820863512 U CN201820863512 U CN 201820863512U CN 208937525 U CN208937525 U CN 208937525U
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humidity
thin
electrode layer
film
sensitive material
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杨启飞
廖胜楼
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Guangzhou Nine Thought Technology Co Ltd
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Guangzhou Nine Thought Technology Co Ltd
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Abstract

The utility model discloses a kind of thin-film capacitor humidity sensors, and wherein thin-film capacitor humidity sensor includes humidity-sensitive material film layer, and the humidity-sensitive material film layer is covered with upper electrode layer on one side, and another side is covered with lower electrode layer.Compared with the prior art, thin film capacitor sensors provided by the utility model can realize instant response to the moisture in air, the response time in 3 s, can rapidly monitor air humidity in real time under the premise of guaranteeing stability, sensitivity.

Description

A kind of thin-film capacitor humidity sensor
Technical field
The utility model relates to sensor fields, and in particular to a kind of thin-film capacitor humidity of the instant response of high sensitivity Sensor.
Background technique
In departments such as industrial and agricultural production, meteorology, environmental protection, national defence, scientific research, space flight, it is often necessary to be surveyed to ambient humidity Amount and control, but in conventional environmental parameter, humidity is a parameter for being most difficult to accurately measure.
The sensor of more common survey ambient air humidity is mainly humistor and humicap, and humistor is general It can only meet in normal environment (0 ~ 50 DEG C/humidity of temperature, 20 ~ 90%RH) and use, and accuracy rate and response speed are all poor; Humicap can 0 ~ 100%RH of gamut test air humidity, used at a temperature of being generally able to satisfy -40 ~ 100 DEG C, response speed Degree is also fast more many than humistor, can substantially reach within 10 s.Therefore, control air accurate for harsher, requirement The environment of humidity generally can all select humicap as sensor.
Currently, mostly using ceramic substrate or flexible circuit board as the substrate of humicap in the market, basic structure is Substrate (1), lower electrode (2), humidity-sensitive material layer (3) and top electrode (4), as shown in Figure 1.Wherein, top electrode and lower electrode are all The thin metal layer of plating up, lower electrode are directly connect with substrate.In actual use, the moisture in air can only largely pass through Top electrode thin metal layer entrance/discharge incudes in humidity-sensitive material layer, carries out hygrometric.Due to only having this moisture of top electrode logical Road, response speed is about longer in 10 ~ 15 s or even response time, and response speed is very slow, and is difficult to guarantee stability simultaneously With the superperformance of response speed.
Utility model content
To overcome existing technological deficiency, the utility model provides a kind of thin-film capacitor humidity sensor, not only stable Property it is high, and response speed is exceedingly fast, and humidity in air can be detected in 3s.
For realization the purpose of this utility model, it is achieved using following technical scheme:
A kind of thin-film capacitor humidity sensor, including humidity-sensitive material film layer, the humidity-sensitive material film layer are covered on one side There is upper electrode layer, another side is covered with lower electrode layer.
Compared with the existing technology, provided by the utility model is a kind of thin-film capacitor humidity sensor, and middle layer uses The film that humidity-sensitive material is made into, the two sides of the humidity-sensitive material film layer are covered with electrode layer, that is, upper electrode layer and lower electricity respectively Pole layer, the moisture in air can pass through top electrode and lower electrode entrance/discharge simultaneously.It is logical due to more moisture disengaging Road, under the premise of guaranteeing humidity-sensitive material function admirable, the speed of capacitive humidity sensor response provided by the utility model Faster, it has all been obtained obviously relative to the response speed of the capacitive humidity sensor of belt substrate (such as Fig. 1) and sensitivity It improves.
The utility model has eliminated the mode for using substrate as carrier, directly uses film made by humidity-sensitive material as sense Also carrier is used as while wet stock.The humidity-sensitive material layer of existing humidity sensor due to not as carrier, usually compared with It is thin, about 0.5 ~ 1.5 μm of thickness.And in the present invention, to combine the performance as humidity-sensitive material and carrier, wet sensitive material The thickness for expecting film is preferably 1 ~ 6 μm.In practical applications, the thickness of humidity-sensitive material film can be 1 μm, 1.5 μm, 2 μm, 2.5μm、3μm、3.5μm、4μm、4.5μm、5μm、5.5μm、6μm。
Humidity-sensitive material is a kind of high molecular polymer, its dielectric constant changes with the relative humidity variations of environment. The most commonly used is polyvinyl alcohol, polyamide, Atriacetyl cellulose and metal oxide such as Al for humidity-sensitive material2O3Deng.It is practical new at this In type, it is preferred to use using polyether resin that ehter bond is main sense wet point and crosslinking as humidity-sensitive material.
The humicap type sensor made in the prior art using acetylbutyrylcellulose and polyimide-type materials, by Containing the ester bond or amido bond intolerant to hydrolysis in material, although so that this kind of humicap type sensor has preferable property Can, but stability is insufficient.The utility model uses a kind of cross-linked polyether resin for being substantially free of ester bond, amido bond as wet Photosensitive polymerization object, it is wet using ehter bond sense, there is space interpenetrating networks space structure, while guaranteeing sensitive to moisture responsive, tool There is good water-fast function, is not easy to be swollen, not facile hydrolysis.Therefore the humicap type sensor linearity made of the polymer It is good, humidity hysteresis is small, high sensitivity, fast response time, stability are good, under the condition of high temperature and high humidity, there is good reliability and stability. Thin-film capacitor humidity sensor provided by the utility model has stability high, and to moisture-sensitive, moisture absorption/dehumidification is rapidly etc. excellent Point.
Specifically, humidity-sensitive material used by the utility model with and preparation method thereof reference may also be made to application number 201610372727.1 and application No. is 201610531517.2 Chinese invention patents.
Further, the upper electrode layer and the lower electrode layer are plated in the humidity-sensitive material film layer.Due to Upper electrode layer and lower electrode layer are all the channels of moisture, it is contemplated that electric conductivity, stability and the gas permeability of electrode, the utility model The material of the electrode of selection is one or more of golden (Au), platinum (Pt), chromium (Cr).In addition, by comprehensively considering conduction Property and gas permeability, upper electrode layer and lower electrode layer with a thickness of 50 ~ 200 nm.In practical applications, the thickness of upper/lower electrode can To be 50nm, 100nm, 150nm, 200nm.
Preferably, 0.8 ~ 1.2 times with a thickness of lower electrode layer thickness of the upper electrode layer.It is further preferred that described The thickness of upper electrode layer is equal to the thickness of the lower electrode layer.
The preparation method of above-mentioned thin-film capacitor humidity sensor, specifically includes the following steps:
Humidity-sensitive material: being tuned into the solution of certain viscosity by S1, and spin coating levelling is carried out on spin-coating equipment, is volatilized into solvent After film, it is cut into the film of required shape;
S2: one layer of thin metal layer is plated respectively in the two sides for the film that step S1 is obtained, as upper electrode layer and lower electrode Layer;
S3: respectively drawing a conductive lead wire for upper electrode layer and lower electrode layer respectively, forms capacitor.
Further, in step S1, the viscosity of humidity-sensitive material solution is 20 ~ 30 mPas.
Thin film capacitor sensors provided by the utility model, capacitive property is good, and D value can accomplish 0.001 rank, Wet sensitive performance is as follows:
Sensitivity (RH of 10% RH ~ 95%): 0.4 ~ 0.5 pF/%RH
Humidity measurement range: 0 ~ 100% RH
Temperature application range: -50 ~ 150 DEG C
Humidity hysteresis: 1% RH of ﹤
Response speed (25 DEG C): t903 s of ﹤
Year drift value: 1% RH of ﹤
Compared with the prior art, thin film capacitor sensors provided by the utility model can guarantee stability, sensitivity Under the premise of, instant response can be realized to the moisture in air, can rapidly monitor air humidity in real time.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of existing humicap;
Fig. 2 is the structural schematic diagram of film Humidity-Sensitive Capacitance Sensor provided by the utility model.
Specific embodiment
To keep the purpose of this utility model, technical solution and advantage clearer, with reference to the accompanying drawing to the utility model Embodiment is described in more detail.
Embodiment
A kind of thin-film capacitor humidity sensor of the instant response of high sensitivity is present embodiments provided, successively includes lower electricity Pole 2 ', humidity-sensitive material film 3 ' and top electrode 4 '.
Wherein, top electrode 4 ' and lower electrode 2 ', which can be, is plated on humidity-sensitive material film 3 '.
It is a kind of thin-film capacitor humidity sensor provided by the present embodiment, abandons traditional use substrate as carrier Mode, but humidity-sensitive material is directly made into film, using the humidity-sensitive material film as carrier, then distinguished upper/lower electrode It is plated in the two sides of humidity-sensitive material film.Due to the not set substrate of the present embodiment, upper/lower electrode can be for moisture entrance/discharge, so Afterwards with humidity-sensitive material film contacts.The access of moisture disengaging compared with the existing technology, film provided by the present embodiment The humidity that capacitive humidity sensor enables to its humidity-sensitive material that can quickly incude environment changes, response speed and sensitivity All have greatly improved, response speed can be promoted to 3s.
To take into account the performance as humidity-sensitive material and carrier, embodiment as one preferred, in any of the above-described implementation Example on the basis of, humidity-sensitive material film 3 ' with a thickness of 1 ~ 6 μm.It is further preferred that the humidity-sensitive material selection is with ehter bond The cross-linked polyether resin of main sense wet point is as humidity-sensitive material.
Since top electrode 4 ' and lower electrode 2 ' are all the accesses as moisture disengaging, it is contemplated that electric conductivity, the stabilization of electrode Property and gas permeability, embodiment as one preferred, based on any of the above embodiments, top electrode 4 ' and lower electrode 2 ' material can be one or more of golden (Au), platinum (Pt), chromium (Cr).
As a kind of further preferred embodiment, based on any of the above embodiments, the conduction of electrode in order to balance Property and gas permeability, top electrode 4 ' with a thickness of 50 ~ 200 nm, lower electrode 2 ' with a thickness of 50 ~ 200 nm.
As a kind of further preferred embodiment, based on any of the above embodiments, top electrode 4 ' with a thickness of under 0.8 ~ 1.2 times of 2 ' thickness of electrode.Further preferably, the thickness of top electrode 4 ' is equal to the thickness of lower electrode 2 '.
The preparation method of above-mentioned thin-film capacitor humidity sensor, specifically includes the following steps:
Humidity-sensitive material: being tuned into the solution of certain viscosity by S1, and spin coating levelling is carried out on spin-coating equipment, is volatilized into solvent After film, it is cut into the film of required shape, the thickness control of film is at 1 ~ 6 μm;
S2: one layer of thin metal layer is plated respectively in the two sides for the film that step S1 is obtained, as upper electrode layer and lower electrode Layer, wherein the metal layer thickness of plating is 50 ~ 200 nm;
S3: respectively drawing a conductive lead wire for upper electrode layer and lower electrode layer respectively, forms capacitor.
Further, in step S1, the viscosity of humidity-sensitive material solution is 20 ~ 30 mPas.
As a preferred solution, it is preferred to use customization spin-coating equipment prepares standard film, standard by technology controlling and process The requirement of film are as follows: it is smooth, pin-free, 1 ~ 6 μm of thickness control.
In the present embodiment, the film of application requirement is reached by technology controlling and process preparation, and due to substrate not being arranged as carrier, Therefore, the present embodiment is by 1 ~ 6 μ m thick film, by subtle Manufacturing Techniques and high request coating technique, Meet adhesive force and plate two electrodes in the case where not puncturing film, high performance capacitor is prepared.
The thin film capacitor sensors being made that using the method for the present embodiment, capacitive property is good, and D value can accomplish 0.001 rank, wet sensitive performance are as follows:
Sensitivity (RH of 10% RH ~ 95%): 0.4 ~ 0.5 pF/%RH
Humidity measurement range: 0 ~ 100% RH
Temperature application range: -50 ~ 150 DEG C
Humidity hysteresis: 1% RH of ﹤
Response speed (25 DEG C): t903 s of ﹤
Year drift value: 1% RH of ﹤.
Above-described embodiment is merely examples for clearly illustrating the present invention, and is not to the utility model Embodiment restriction.For those of ordinary skill in the art, it can also make on the basis of the above description Other various forms of variations or variation.There is no necessity and possibility to exhaust all the enbodiments.It is all practical new at this Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model right and wants within the spirit and principle of type Within the protection scope asked.

Claims (10)

1. a kind of thin-film capacitor humidity sensor, which is characterized in that including humidity-sensitive material film layer, the humidity-sensitive material film layer Be covered with upper electrode layer on one side, another side is covered with lower electrode layer.
2. thin-film capacitor humidity sensor according to claim 1, which is characterized in that the thickness of the humidity-sensitive material film It is 1 ~ 6 μm.
3. thin-film capacitor humidity sensor according to claim 2, which is characterized in that the thickness of the humidity-sensitive material film It is 2 ~ 5.5 μm.
4. thin-film capacitor humidity sensor according to claim 2, which is characterized in that the humidity-sensitive material film be by with Ehter bond is the film that the cross-linked polyether resin of main sense wet point is prepared.
5. thin-film capacitor humidity sensor according to claim 1, which is characterized in that the upper electrode layer with a thickness of 50 ~200 nm。
6. thin-film capacitor humidity sensor according to claim 1, which is characterized in that the lower electrode layer with a thickness of 50 ~200 nm。
7. thin-film capacitor humidity sensor according to claim 1, which is characterized in that the upper electrode layer and lower electrode layer Material be respectively gold, platinum, one or more of chromium.
8. thin-film capacitor humidity sensor described according to claim 1 or 5 or 6 or 7, which is characterized in that the upper electrode layer 0.8 ~ 1.2 times with a thickness of lower electrode layer thickness.
9. thin-film capacitor humidity sensor according to claim 8, which is characterized in that the thickness of the upper electrode layer is equal to The thickness of the lower electrode layer.
10. thin-film capacitor humidity sensor according to claim 1, which is characterized in that the upper electrode layer and it is described under Electrode layer is plated in the humidity-sensitive material film layer.
CN201820863512.4U 2018-06-05 2018-06-05 A kind of thin-film capacitor humidity sensor Active CN208937525U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108398466A (en) * 2018-06-05 2018-08-14 广州九思科技有限公司 A kind of thin-film capacitor humidity sensor and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108398466A (en) * 2018-06-05 2018-08-14 广州九思科技有限公司 A kind of thin-film capacitor humidity sensor and preparation method thereof

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