CN2543063Y - Composite high polymer resistance film humidity-sensitive element - Google Patents

Composite high polymer resistance film humidity-sensitive element Download PDF

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Publication number
CN2543063Y
CN2543063Y CN 02217694 CN02217694U CN2543063Y CN 2543063 Y CN2543063 Y CN 2543063Y CN 02217694 CN02217694 CN 02217694 CN 02217694 U CN02217694 U CN 02217694U CN 2543063 Y CN2543063 Y CN 2543063Y
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China
Prior art keywords
humidity
sensitive
interdigital
electrode
cell
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Expired - Fee Related
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CN 02217694
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Chinese (zh)
Inventor
杨慕杰
李扬
黄德欢
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SHANGHAI HUASHI NANO MATERIAL CO Ltd
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Individual
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Abstract

The utility model relates to a compound high molecular resistive membrane dew cell, wherein a porous ceramics matrix is arranged; an interdigital golden electrode is vapor deposited on the surface of the porous ceramics matrix; a lead is connected onto the interdigital golden electrode; a humidity sensing film is overlain on the porous ceramics matrix and the interdigital golden electrode; a protective film is overlain on the humidity sensing film. The utility model has the advantages that: 1) the polystyrene sulfonic acid sodium salt and carboxymethyl cellulose are adopted to make a sensitive layer, wherein the humidity sensitive range is wide, from 10% to 97% RH; the response linearity is good; the high humidity sensitivity is high; the humidity hysteresis is small; the precision is high; the combination between the sensitive layer and the electrode is sound; the stability of the cell is improved; 2) the celluloid is adopted for the protective film, thus the ability of high humidity environment resistance and long term stability of the cell are improved; 3) the response of the cell is speedy; the temperature coefficient is relatively small, of 0.3-0.4% RH/degree; 4) the dew cell can be prepared by a dip coating method with the adoption of the humidity-sensitive material; the method is easy and convenient and is suitable for a mass production; the consistency is good.

Description

Compound polymer resistor type film humidity-sensitive element
Technical field
The utility model relates to a kind of compound polymer resistor type film humidity-sensitive element.
Background technology
As everyone knows, the polymer electrolyte humidity sensor is to use the wider novel humidity sensor of a class at present.Advantages such as it is fast to respond, highly sensitive, and anti-environmental pollution ability is strong progressively replace inorganic ceramic type humidity sensor, dominate.Macromolecule resistance type humidity sensor wherein, more with its good response characteristic, the hygrometric wide ranges is made easyly, is easy to integratedly, and miniaturization is produced in batches, and lower-price characteristic becomes the focus of research.But it is lower that it also has high humidity sensitivity, anti-high humidity environment ability, stability and shortcoming such as reliability is not satisfactory.
Summary of the invention
The utility model purpose provides a kind of compound polymer resistor type film humidity-sensitive element.
Compound polymer resistor type film humidity-sensitive element has porous ceramic matrices suitable; evaporation has interdigital gold electrode on the porous ceramic matrix surface; on interdigital gold electrode, be connected with lead-in wire, on porous ceramic matrices suitable and interdigital gold electrode, be coated with humidity-sensitive film, be coated with diaphragm on the humidity-sensitive film.
The utility model has the advantages that:
1) adopt kayexalate and sodium carboxymethyl cellulose to make sensitive layer, its humidity sensing range is wide, from 10%~97%RH, almost covers whole humidity range.And response linearity is good, and high humidity is highly sensitive, and humidity hysteresis is little, the precision height.Sensitive layer combines well with electrode, has improved element stability;
2) adopting xylonite is protective seam, has improved the anti-high humidity environment ability of element;
3) adopting xylonite is protective seam, and improved the element long-time stability: energising work is 4 months in atmosphere, its response change~1%RH; In atmosphere, store 8 months, response change~1%RH;
4) adopt the adjuvant of sodium carboxymethyl cellulose as the humidity-sensitive element sensitive layer, employing xylonite is protective seam, do not influence the wet quick response characteristic of element, and response rapidly;
5) adopting the humidity-sensitive element of this humidity-sensitive material preparation to have the less coefficient of temperature, is 0.3~0.4%RH/ ℃.
6) but adopt this humidity-sensitive material dip coating to prepare humidity-sensitive element, method is easy, is suitable for producing in batches, and high conformity.
Description of drawings
Fig. 1 is the structural representation of compound polymer resistor type film humidity-sensitive element;
Fig. 2 is compound polymer resistor type film humidity-sensitive element typical response figure as a result;
Fig. 3 is that the compound polymer resistor type film humidity-sensitive element response characteristic varies with temperature figure.
Embodiment
Compound polymer resistor type film humidity-sensitive element has porous ceramic matrices suitable 1; evaporation has interdigital gold electrode 2 on the porous ceramic matrix surface; on interdigital gold electrode, be connected with lead-in wire 5, on porous ceramic matrices suitable and interdigital gold electrode, be coated with humidity-sensitive film 3, be coated with diaphragm 4 on the humidity-sensitive film.
Said interdigital gold electrode is 5~8 pairs of interdigital gold electrodes, and the interdigital width of interdigital gold electrode is 200~400 μ m, and interdigital spacing is 200~400 μ m, and electrode size is 12mm * 5mm * 0.5mm.
The wet-sensitive liquid of humidity-sensitive film is (1) complex polyelectrolyte particle-kayexalate, and its molecular weight is 70,000~400,000; (2) adjuvant-sodium carboxymethyl cellulose; Both are with 1: 0.5~2 weight ratio, are configured to concentration expressed in percentage by weight and are 0.2%~4% aqueous solution.
The protective seam liquid of diaphragm is that concentration expressed in percentage by weight is 1%~4% xylonite acetone soln.
The utility model is to make to have sensitive layer and the double-deck humidity-sensitive element of protective seam on the interdigital gold electrode of porous ceramics; the response that has high molecule electric resistance type humidity sensitive element on the one hand is fast; highly sensitive advantage; on the other hand; its hygrometric scope wide (high humidity environment) from the low humidity of 10%RH to 97%RH, the stability under high humidity environment, long-time stability and element consistance are all better, and element impedance and ambient humidity are log-linear and respond; and simple for production, be suitable for producing in batches.
Feature of the present utility model is to adopt the compound humidity-sensitive material of macromolecule, is made of sensitive layer material and protective layer material.The wet main body of its sensitive layer material sense is a complex polyelectrolyte particle material kayexalate, molecular weight 70,000~400,000, it has good chemical stability, add the adjuvant sodium carboxymethyl cellulose simultaneously, both are mixedly configured into aqueous solution (weight percent concentration is 0.2%~4%) with 1: 0.5~2 weight ratio, and dipping is filmed and made sensitive layer on interdigital gold electrode.Its protective layer material is an xylonite, is configured to concentration expressed in percentage by weight and is 1%~4% acetone soln, and dipping is coated with and invests on the interdigital gold electrode that has the sensitive layer material, forms protective seam.Element is through thermal treatment, and burin-in process promptly makes the high molecule electric resistance type composite humidity sensor.Because each material all can be configured to the less solution of viscosity, can adopt the dip-coating mode to prepare element, and is simple and easy to do, be suitable for producing in batches.
The effect of adjuvant sodium carboxymethyl cellulose is that itself and complex polyelectrolyte particle material kayexalate are compound with certain proportion, can effectively improve the element responds linearity, it can strengthen the bonding degree of sensitive layer and electrode surface simultaneously, improve element stability, and, can increase planar water umber amount because it has strong hydroscopicity, strengthen the ionic conduction ability, reduce element impedance, enlarge measurement range, especially can hang down hygroscopy under the wet environment.
For the dissolving loss of complex polyelectrolyte particle under high humidity environment in the solution humidity-sensitive element sensitive membrane causes the problem of element responds variation, the utility model adopts xylonite as the humidity-sensitive element diaphragm.It has good gas penetration potential, can make that adsorbed water molecule freely passes through in water in air molecule or the sensitive layer, can not influence the susceptibility to ambient humidity, also can not cause big humidity hysteresis.And prevent that polyelectrolyte from dissolving loss under high humidity environment, improved the stability of element under high humidity environment greatly, avoid sensitive layer directly to be exposed in the atmospheric environment in addition, reduced the destruction of external environment, obviously improved the long-time stability of element sensitive layer.
Its performance of element of the compound humidity-sensitive material preparation of high molecule electric resistance type provided by the utility model is:
1) moisture measurement scope: 10~97%RH
2) serviceability temperature scope :-5~50 ℃
3) temperature coefficient: 0.3~0.4%RH/ ℃
4) response time: moisture absorption<15s, dehumidification<40s
5) humidity hysteresis:<± 2%RH
6) long-time stability: worked online its response change~1%RH 4 months;
In atmosphere, store 8 months, its response change~1%RH;

Claims (4)

1. compound polymer resistor type film humidity-sensitive element; it is characterized in that: it has porous ceramic matrices suitable (1); evaporation has interdigital gold electrode (2) on the porous ceramic matrix surface; on interdigital gold electrode, be connected with lead-in wire (5); on porous ceramic matrices suitable and interdigital gold electrode, be coated with humidity-sensitive film (3), be coated with diaphragm (4) on the humidity-sensitive film.
2. a kind of compound polymer resistor type film humidity-sensitive element according to claim 1, it is characterized in that: said interdigital gold electrode is 5~8 pairs of interdigital gold electrodes, the interdigital width of interdigital gold electrode is 200~400 μ m, interdigital spacing is 200~400 μ m, and electrode size is 12mm * 5mm * 0.5mm.
3. a kind of compound polymer resistor type film humidity-sensitive element according to claim 1 is characterized in that: the wet-sensitive liquid of said humidity-sensitive film is (1) complex polyelectrolyte particle-kayexalate, and its molecular weight is 70,000~400,000; (2) adjuvant-sodium carboxymethyl cellulose; Both are with 1: 0.5~2 weight ratio, are configured to concentration expressed in percentage by weight and are 0.2%~4% aqueous solution.
4. a kind of compound polymer resistor type film humidity-sensitive element according to claim 1 is characterized in that: the protective seam liquid of said diaphragm is that concentration expressed in percentage by weight is 1%~4% xylonite acetone soln.
CN 02217694 2002-05-24 2002-05-24 Composite high polymer resistance film humidity-sensitive element Expired - Fee Related CN2543063Y (en)

Priority Applications (1)

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CN 02217694 CN2543063Y (en) 2002-05-24 2002-05-24 Composite high polymer resistance film humidity-sensitive element

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100447561C (en) * 2005-12-27 2008-12-31 上海大学 Preparation method of humidity sensitive element humidity sensing membrane of humidity sensor
US7498823B2 (en) 2004-06-21 2009-03-03 Telecom Italia S.P.A. Physical quantity, particularly humidity detection device, and related detecting method
CN101324539B (en) * 2008-07-22 2011-10-26 浙江大学 Polymer compound resistor type humidity sensitive element with nanometer fiber structure and manufacturing method thereof
CN108776159A (en) * 2018-08-27 2018-11-09 广州西博臣科技有限公司 A kind of novel high polymer impedance type humidity sensor
CN112611787A (en) * 2020-12-15 2021-04-06 无锡豪帮高科股份有限公司 High-molecular resistance type humidity sensitive element and preparation method thereof
CN114910185A (en) * 2022-03-23 2022-08-16 厦门大学 Indium tin oxide high-temperature thin film sensor combining laser pyrolysis with Versenberg direct writing

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7498823B2 (en) 2004-06-21 2009-03-03 Telecom Italia S.P.A. Physical quantity, particularly humidity detection device, and related detecting method
CN1973200B (en) * 2004-06-21 2011-03-30 意大利电信股份公司 Physical quantity, particularly humidity detection device, and related detecting method
CN100447561C (en) * 2005-12-27 2008-12-31 上海大学 Preparation method of humidity sensitive element humidity sensing membrane of humidity sensor
CN101324539B (en) * 2008-07-22 2011-10-26 浙江大学 Polymer compound resistor type humidity sensitive element with nanometer fiber structure and manufacturing method thereof
CN108776159A (en) * 2018-08-27 2018-11-09 广州西博臣科技有限公司 A kind of novel high polymer impedance type humidity sensor
CN112611787A (en) * 2020-12-15 2021-04-06 无锡豪帮高科股份有限公司 High-molecular resistance type humidity sensitive element and preparation method thereof
CN114910185A (en) * 2022-03-23 2022-08-16 厦门大学 Indium tin oxide high-temperature thin film sensor combining laser pyrolysis with Versenberg direct writing

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C14 Grant of patent or utility model
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ASS Succession or assignment of patent right

Owner name: NINGBO GUANGTONG NANOMETER INSTRUMENT CO., LTD.

Free format text: FORMER OWNER: YANG MUJIE

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Effective date: 20041022

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Effective date of registration: 20041022

Address after: 315040, Lingyun road 199, Ningbo science and Technology Park, Zhejiang

Patentee after: Ningbo Guangtong nano Instrument Co. Ltd.

Address before: 310013, Zhejiang, Zhejiang Province, Zhejiang Province, Xihu District Qiushi village 52, room, 307

Co-patentee before: Li Yang

Patentee before: Yang Mujie

Co-patentee before: Huang Dehuan

ASS Succession or assignment of patent right

Owner name: SHANGHAI HUASHI NANO MATERIALS CO., LTD.

Free format text: FORMER OWNER: NINGBO GUANGTONG NANOMETER INSTRUMENT CO., LTD.

Effective date: 20070727

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20070727

Address after: 201108, A, 260 Cao Cao Road, Shanghai, Minhang District

Patentee after: Shanghai Huashi Nano Material Co., Ltd.

Address before: 315040, Lingyun road 199, Ningbo science and Technology Park, Zhejiang

Patentee before: Ningbo Guangtong nano Instrument Co. Ltd.

C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee