CN208928470U - Computer type HMDS glue spreader - Google Patents
Computer type HMDS glue spreader Download PDFInfo
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- CN208928470U CN208928470U CN201821421009.XU CN201821421009U CN208928470U CN 208928470 U CN208928470 U CN 208928470U CN 201821421009 U CN201821421009 U CN 201821421009U CN 208928470 U CN208928470 U CN 208928470U
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- hmds
- cavity
- vacuum
- computermatic
- glue spreader
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- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 title claims abstract description 73
- 239000003292 glue Substances 0.000 title claims description 28
- 239000007788 liquid Substances 0.000 claims abstract description 29
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 239000012530 fluid Substances 0.000 claims description 18
- 238000005259 measurement Methods 0.000 claims description 13
- 230000005693 optoelectronics Effects 0.000 claims description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims description 11
- 239000010935 stainless steel Substances 0.000 claims description 11
- 230000009467 reduction Effects 0.000 claims description 8
- 238000005485 electric heating Methods 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 5
- 238000003466 welding Methods 0.000 claims description 5
- DBUTVDSHVUGWOZ-UHFFFAOYSA-N [Si].[Ni].[Cr].[Ni] Chemical compound [Si].[Ni].[Cr].[Ni] DBUTVDSHVUGWOZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 229920003023 plastic Polymers 0.000 claims description 3
- 239000000523 sample Substances 0.000 claims description 3
- 229920002379 silicone rubber Polymers 0.000 claims description 3
- 239000004945 silicone rubber Substances 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 238000005476 soldering Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 27
- 229910052710 silicon Inorganic materials 0.000 abstract description 27
- 239000010703 silicon Substances 0.000 abstract description 27
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 9
- 238000012545 processing Methods 0.000 abstract description 6
- 239000003814 drug Substances 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 3
- 210000000056 organ Anatomy 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 18
- 230000006870 function Effects 0.000 description 10
- 101100190618 Arabidopsis thaliana PLC3 gene Proteins 0.000 description 9
- 229910052757 nitrogen Inorganic materials 0.000 description 9
- 239000000047 product Substances 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000014759 maintenance of location Effects 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 238000005070 sampling Methods 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000004026 adhesive bonding Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 125000001165 hydrophobic group Chemical group 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- -1 siloxanes Chemical class 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Abstract
The utility model discloses a computer formula HMDS spreading machine, box, chamber door, cavity, controller, vacuum system, supply liquid medicine system, temperature control system, normally closed relay, photoelectric switch, heating element, temperature measuring element, touch-sensitive screen, bee calling organ and pilot lamp, vacuum system are including vacuum pump, pump and vacuum detecting element, supply the liquid medicine system including the liquid medicine steam drum, and temperature control system is including the temperature controller. The utility model discloses have the safety protection function, through setting up this oven to holding time isoparametric when setting for operating temperature, processing time, the processing of oven HMDS preliminary treatment process, can be at silicon chip, the even coating one deck HMDS of substrate surface, reduced the silicon chip contact angle after the HMDS handles, reduced the quantity of photoresist, improved the adhesiveness of photoresist with the silicon chip.
Description
Technical field
The utility model relates to electronic technology field, specifically a kind of computermatic HMDS glue spreader.
Background technique
In production process of semiconductor, photoetching is that integrated circuit pattern shifts an important process procedure, gluing quality
The quality of photoetching is directly influenced, coating technique is also particularly important.Most photoresists are thin in photoetching coating technique
Water, and the hydroxyl of silicon chip surface and remaining hydrone be it is hydrophilic, this causes the adhesion of photoresist and silicon wafer poor, especially
It is positive photoresist, and developer solution can invade the junction of photoresist and silicon wafer when development, be easy to cause drift item, floating glue etc., leads to photoetching
The failure of pattern transfer, while wet etching is easy to happen sideetching.
Tackifier HMDS (hexamethyldisilazane) can improve this situation well.HMDS is coated onto silicon chip surface
Afterwards, the compound generated based on siloxanes can be reacted through baking oven heating.Silicon chip surface is successfully become thin from hydrophilic by it
Water, hydrophobic group can play a part of coupling agent well in conjunction with photoresist.
Therefore, one layer of HMDS of the substrate surfaces such as silicon wafer before spin coating even spread can reduce HMDS treated silicon
Piece contact angle, and then photoresist improves the adhesion of photoresist and silicon wafer in the difficulty of silicon chip surface drawout when reduction spin coating,
Reduce the dosage of photoresist.
Utility model content
The purpose of the utility model is to provide a kind of computermatic HMDS glue spreaders, have function of safety protection, pass through setting
The glue spreader, and the parameters such as retention time when setting operating temperature, processing time, processing, can be uniform in silicon wafer, substrate surface
It is coated with one layer of HMDS, treated to reduce HMDS silicon wafer contact angle reduces the dosage of photoresist, and improve photoresist and silicon wafer
Adhesion.
The technical solution of the utility model is as follows:
A kind of computermatic HMDS glue spreader, include cabinet, chamber door, cavity, controller, vacuum system, for medical fluid system,
Temperature control system and the closed type relay being connected in current supply circuit, it is characterised in that: the open side peace in the chamber door
Equipped with optoelectronic switch, the sheet metal matched with the optoelectronic switch, one side of controller are fixed in the cabinet
Face is connected with the optoelectronic switch, is on the other hand connected with the closed type relay；
The cavity is set in the cabinet, and the inside of cavity is equipped with multiple layer tray, the two sides outside the cavity
It is separately installed with heating element with bottom, temperature element is installed in cavity, is respectively equipped on rear side of cavity and is vacuumized interface, fills
Gas interface, vacuum degree measurement interface and for medical fluid interface；
The vacuum system includes vacuum pump, inflator pump and vacuum degree measurement element, the vacuum pump and inflation
Pump is respectively corresponded by pipeline and vacuumizes interface and inflatable interface is connected with described, the vacuum degree measurement element with it is described
Vacuum degree measurement interface is connected, and probe extends to the inside of the cavity；The vacuum pump vacuumizes interface with described
Between connecting line on electromagnetism pressure difference charge valve is installed, pacify on the inflator pump and the connecting line of the inflatable interface
Equipped with the first solenoid valve；On the one hand the controller is connected with the vacuum degree measurement element, on the other hand respectively with institute
Vacuum pump, inflator pump and the first solenoid valve is stated to be connected；
Described includes liquid steam tank for medical fluid system, the liquid steam tank by pipeline respectively with the confession
Medical fluid interface is connected with inflator pump, divides on liquid steam tank and the connecting line between medical fluid interface and inflator pump
Second and third solenoid valve is not installed, the controller is connected with second and third described solenoid valve respectively；
The temperature control system includes the temperature controller being connected with the controller, and the temperature controller is on the one hand
It is connected with the temperature element, is on the other hand connected by solid-state relay with the heating element；
Operation panel is installed in the side of the chamber door on the cabinet, touching is separately installed on the operation panel
Screen, buzzer and indicator light are touched, the touch screen is connected with the controller, the alarm signal output ends of the temperature controller
It is connected respectively with the buzzer and indicator light.
The computermatic HMDS glue spreader, it is characterised in that: the cabinet is adopted by main body frame and surfaces externally and internally
It is formed with the hanging plate assembly welding of workmanship of spraying plastics.
The computermatic HMDS glue spreader, it is characterised in that: the chamber door is equipped with through-hole and is installed by flange
There is sight glass, the flange is surrounded by silicone rubber O-ring.
The computermatic HMDS glue spreader, it is characterised in that: the surrounding of the inside of the chamber door and cavity difference
Ceramic beaverboard for insulation is installed.
The computermatic HMDS glue spreader, it is characterised in that: the cavity is using the vertical of stainless steel sealing welding
Cube structure.
The computermatic HMDS glue spreader, it is characterised in that: the controller uses PLC.
The computermatic HMDS glue spreader, it is characterised in that: the heating element uses stainless steel electric heating tube；Institute
The temperature element stated uses nickel chromium-nickel silicon thermocouple；The vacuum degree measurement element uses resistance vacuum gauge.
The computermatic HMDS glue spreader, it is characterised in that: be separately installed with " power supply " on the operation panel and press
Button, " emergency stop " button and " noise reduction " button, " noise reduction " button stated are connected to alarm signal output ends and the institute of the temperature controller
It states between buzzer.
The computermatic HMDS glue spreader, it is characterised in that: the company between the inflator pump and the inflatable interface
Adapter tube road is separately installed with speed governing valve and pressure gauge.
The computermatic HMDS glue spreader, it is characterised in that: the side bypass of the liquid steam tank has medicinal liquid bottle.
The course of work of the utility model is as follows:
Gluing process:
1, vacuum pump is opened, and electromagnetism pressure difference charge valve is opened, and cavity enters evacuated state；
2, after reaching certain vacuum degree, electromagnetism pressure difference charge valve is closed, and vacuum pump stops, and inflator pump is opened, the first electromagnetism
Valve is opened, and nitrogen is filled with into cavity；
3, after reaching certain rough vacuum, the first solenoid valve is closed, and inflator pump stops, and vacuum pump is opened, and electromagnetism pressure difference fills
Air valve is opened, and cavity enters evacuated state again；
4, according to above-mentioned steps carry out it is multiple vacuumize, be filled with nitrogen procedure, until reaching the vacuum values of setting；
5, second solenoid valve is opened, and using the suction function of cavity, absorbs the HMDS liquid steam in liquid steam tank, into
Uniform adsorption behind the surface of product (silicon wafer, substrate), the adsorption time for reaching setting, close by second solenoid valve after entering cavity；
6, inflator pump is again turned on, and third solenoid valve is opened, and supplements nitrogen into liquid steam tank, in liquid steam tank
After pressure returns to normal value, third solenoid valve is closed, and inflator pump stops.
Drying course:
1, heating element is opened, and three face heating cavities make its internal temperature reach 150 DEG C or so；
2, into the stage of holding, so that the OH on product (silicon wafer, substrate) surface is reacted with HMDS, in product (silicon wafer, base
Piece) Surface Creation silicon ether, eliminate hydrogen bond, so that polar surfaces be made to become apolar surfaces；
3, after the retention time for reaching setting, vacuum pump is opened, and electromagnetism pressure difference charge valve is opened, and cavity, which enters, vacuumizes shape
State, HMDS liquid steam (tail gas) extra in cavity is extracted out by vacuum pump at this time, is discharged into dedicated gas sampling pipeline (in nothing
Special disposal need to be done when dedicated gas sampling pipeline)；
4, inflator pump is opened, and the first solenoid valve is opened, and nitrogen is filled with into cavity.
The utility model has the beneficial effects that
The utility model have function of safety protection, by the way that the glue spreader is arranged, and set operating temperature, processing the time,
The parameters such as retention time when processing can reduce HMDS treated silicon in one layer of silicon wafer, substrate surface even spread HMDS
Piece contact angle reduces the dosage of photoresist, improves the adhesion of photoresist and silicon wafer.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model.
Fig. 2 is vacuum system and the structure principle chart for medical fluid system in the utility model.
Fig. 3 is the utility model electric control theory figure.
Specific embodiment
Referring to attached drawing, a kind of computermatic HMDS glue spreader, include cabinet 1, chamber door 2, cavity 7, PLC3, vacuum system,
For medical fluid system, temperature control system and the closed type relay 4 being connected in current supply circuit, the open side in chamber door 2 is installed
There is optoelectronic switch 5, the sheet metal 6 matched with optoelectronic switch 5 is fixed in cabinet 1, on the one hand PLC3 is connected with optoelectronic switch 5
It connects, is on the other hand connected with closed type relay 4；
Cavity 7 is set in cabinet 1, and the inside of cavity 7 is equipped with two layers of pallet 8, and two layers of pallet 8 are by the inside of cavity 7
Space is separated into two mutually independent small clip cavities for holding product (silicon wafer, substrate), two sides and bottom difference outside cavity 7
Stainless steel electric heating tube 9 is installed, nickel chromium-nickel silicon thermocouple 10 is installed, it is true that the rear side of cavity 7 is respectively equipped with pumping in cavity 7
Null interface 11, inflatable interface 12, vacuum degree measurement interface 13 and for medical fluid interface 32；
Vacuum system includes vacuum pump 14, inflator pump 15 and resistance vacuum gauge 16, and vacuum pump 14 and inflator pump 15 pass through
Pipeline 17 respectively corresponds and vacuumizes interface 11 and inflatable interface 12 is connected, resistance vacuum gauge 16 and vacuum degree measurement interface
13 are connected, and probe extends to the inside of cavity 7, and vacuum pump 14 and vacuumizing is equipped on connecting line between interface 11
First solenoid valve 33 is installed on the connecting line of electromagnetism pressure difference charge valve 18, inflator pump 15 and inflatable interface 12；Mono- side of PLC3
Face is connected with resistance vacuum gauge 16, is on the other hand connected respectively with vacuum pump 14, inflator pump 15 and the first solenoid valve 33；
It include liquid steam tank 34 for medical fluid system, liquid steam tank 34 is by pipeline 38 respectively and for medical fluid interface 32
It is connected with inflator pump 15, liquid steam tank 34 and for being installed respectively on the connecting line between medical fluid interface 32 and inflator pump 15
There are second and third solenoid valve 35,36, PLC3 to be connected respectively with second and third solenoid valve 35,36；
Temperature control system includes the temperature controller 19 being connected with PLC3,19 one side of temperature controller and nickel chromium triangle-nisiloy heat
Galvanic couple 10 is connected, and is on the other hand connected by solid-state relay 20 with stainless steel electric heating tube 9；
Operation panel 21 is installed in the side of chamber door 2 on cabinet 1, be separately installed on operation panel 21 touch screen 22,
Buzzer 24 and indicator light 25, touch screen 22 are connected with PLC3, the alarm signal output ends of temperature controller 19 respectively with buzzer
24 are connected with indicator light 25.
In the utility model, cabinet 1 by main body frame and surfaces externally and internally be all made of workmanship of spraying plastics hanging plate assembly welding and
At having the characteristics that sound construction, be unlikely to deform, lighter in weight.
Chamber door 2 is equipped with through-hole and is equipped with sight glass 27 by flange 26, and flange 26 is surrounded by silicone rubber O-ring,
Play good sealing function.
The inside of chamber door 2 and the surrounding of cavity are separately installed with the ceramic beaverboard for insulation, to reach heat preservation
Heat-blocking action.
Cavity is the cube structure using stainless steel (SUS316) sealing welding.
" power supply " button 28, " emergency stop " button 29 and " noise reduction " button 23 are separately installed on operation panel 21, wherein " disappearing
Sound " button 23 is connected between the alarm signal output ends of temperature controller 19 and buzzer 24.
It is separately installed with speed governing valve 30 and pressure gauge 31 on connecting line between inflator pump 15 and inflatable interface 12, leads to
Overregulate that speed governing valve 30 is adjustable to be currently passed through the intracorporal gas flow of chamber.
Liquid steam tank 34 side bypass have medicinal liquid bottle 37, with real-time liquid steam tank 34 to supplement medical fluid.
Gluing process:
1, vacuum pump 14 is opened, and electromagnetism pressure difference charge valve 18 is opened, and cavity 7 enters evacuated state；
2, after reaching certain vacuum degree, electromagnetism pressure difference charge valve 18 is closed, and vacuum pump 14 stops, and inflator pump 15 is opened, the
One solenoid valve 33 is opened, and is filled with nitrogen into cavity 7；
3, after reaching certain rough vacuum, the first solenoid valve 33 is closed, and inflator pump 15 stops, and vacuum pump 14 is opened, electromagnetism
Pressure difference charge valve 18 is opened, and cavity 7 enters evacuated state again；
4, according to above-mentioned steps carry out it is multiple vacuumize, be filled with nitrogen procedure, until reaching the vacuum values of setting；
5, second solenoid valve 35 is opened, and using the suction function of cavity 7, absorbs the HMDS liquid medicine steaming in liquid steam tank 34
Vapour, into cavity 7 after uniform adsorption behind the surface of product (silicon wafer, substrate), the adsorption time for reaching setting, second solenoid valve
35 close；
6, inflator pump 15 is again turned on, and third solenoid valve 36 is opened, and nitrogen, liquid steam are supplemented into liquid steam tank 34
After 34 pressure returns to normal value in tank, third solenoid valve 36 is closed, and inflator pump 15 stops.
Drying course:
1, stainless steel electric heating tube 9 is opened, and three face heating cavities 7 make its internal temperature reach 150 DEG C or so；
2, into the stage of holding, so that the OH on product (silicon wafer, substrate) surface is reacted with HMDS, in product (silicon wafer, base
Piece) Surface Creation silicon ether, eliminate hydrogen bond, so that polar surfaces be made to become apolar surfaces；
3, after the retention time for reaching setting, vacuum pump 14 is opened, and electromagnetism pressure difference charge valve 18 is opened, and cavity 7, which enters, to be taken out
Vacuum state, HMDS liquid steam (tail gas) extra in cavity 7 is extracted out by vacuum pump at this time, is discharged into dedicated gas sampling pipe
Road (need to do special disposal when without dedicated gas sampling pipeline)；
4, inflator pump 15 is opened, and the first solenoid valve 33 is opened, and is filled with nitrogen into cavity 7.
The utility model is further described below in conjunction with attached drawing:
Chamber door 2 is connected using special hinge with cabinet 1.The closing of chamber door 2 is protected by optoelectronic switch 5, when chamber door 2 is accidentally beaten
When opening, PLC3, PLC3 outputs level signals to 4 coil of closed type relay, coil are detected and fed back to by optoelectronic switch 5
Electric, normally-closed contact disconnection is obtained, cutting current supply circuit plays the role of power-off protection, avoids that contingency occurs.
9 sticking type of stainless steel electric heating tube is mounted on two sides and bottom outside cavity 7, to form uniform heat radiation to production
Product are thermally dried.Cavity 7 carries out insulation by being outside it the ceramic beaverboard of surrounding, and outside lead is complete
Portion is using kiln and the dedicated sealing material sealing of vacuum equipment.
What the connection type of all pipelines of vacuum system was all made of is the dedicated quick-release type connector of vacuum equipment, is conveniently torn open
It unloads, good seal performance.The effect of vacuum pump 14 is vacuumized to inside cavity 7；The effect of inflator pump 15 is to vacuumize
A certain amount of nitrogen is poured in forward direction cavity 7, to improve the vacuumizing effect of vacuum pump 14；The effect of resistance vacuum gauge 16 is to survey
It measures the vacuum degree in cavity 7 (vacuum chamber) and reaches the requirement of integrative display.Vacuum pump 14 uses direct-connected rotary-vane vaccum pump, electricity
Magnetic pressure differential charge valve 18 controls the on-off of vacuum line, and electromagnetism pressure difference charge valve 18 when power is off keeps cavity 7 (vacuum chamber)
Atmosphere is filled in pump chamber while vacuum, to avoid pumping fluid reverse flow and pollute cavity 7 (vacuum chamber).
Temperature control system uses DCS Distributed Control System, and upper is touch screen 22, and bottom is PLC3.Two kinds of control phases
It is mutually independent but can communicate each other, increase the operability of equipment operation.Temperature controller 19 has self-setting function, deviation report
The functions such as the multinomial alarm and protection such as alert, P.I.D. parameter setting and locking, high temperature upper limit alarm.Temperature controller 19 is by the temperature of temperature measuring point
Degree and set temperature are compared, handle, output level to the on-off for controlling solid-state relay 20, so that control is to stainless steel electricity
The energization and power-off of heating tube 9 realize balance heating, and reduce to power grid and peripheral equipment to achieve the purpose that temperature control
Interference, extend the service life of control device.Temperature controller 19, which is simultaneously passed through the temperature signal of temperature measuring point by PLC3, to be sent to touching
It touches screen 22 to be shown, realizes tracking, the monitoring of temperature.
Touch screen 22 realizes the functions such as data acquisition, record, state analysis, parameter regulation and curve memory, and can be real
The unified management of existing temperature control etc..
Touch screen 22 can be implemented function such as mainly:
(1), temperature acquisition and record: convenient for quality management and sintering situation tracking；
(2), curve is stored and recalled automatically: client can be for different product, and setting is a variety of to use curve, and can adjust at any time
It uses out；
(3), parameter adjusts: including the slave computers such as temperature, control parameter (PLC) adjustable parameter, (can touch in host computer
Screen) realize control.
The temperature control system of the utility model also has a characteristic that
(1), multiple functional: the machine issues alarm signal to failures such as overtemperatures in the course of work, and is automatically performed guarantor
Shield movement.Operator can determine the content of alarm by two kinds of forms of audible alarm and signal lamp indicating operating status.
(2), easy to operate: directly after set-up function is completed at touch screen operation interface, later work is automatically performed.
(3), all touch screen operation monitoring, working condition are very clear.
Warm 10 real-time monitoring warm area temperature of nickel chromium-nickel silicon thermocouple simultaneously feeds back to temperature controller 19, and temperature is once more than setting
Value, then stainless steel electric heating tube 9 stops working.
The utility model combines type of alarm using acousto-optic, and when temperature is more than setting value, indicator light 25 is lighted, while bee
Ring device 24 sounds the alarm, and maintenance personnel can press " noise reduction " button 23 and temporarily eliminate alarm.
Each button is described as follows:
" power supply " button 28: device power or power-off.
" emergency stop " button 29: all electric appliances on off device.
" noise reduction " button 23: the sound of pass hull closure buzzer.
Above embodiment is only that the preferred embodiment of the utility model is described, not to the utility model
Protection scope be defined, under the premise of not departing from the spirit of the design of the utility model, those of ordinary skill in the art to this
The modification and improvement that the technical solution of utility model is made should all be fallen into the protection scope of the utility model.
Claims (10)
1. a kind of computermatic HMDS glue spreader, include cabinet, chamber door, cavity, controller, vacuum system, for medical fluid system, temperature
Degree control system and the closed type relay being connected in current supply circuit, it is characterised in that: the open side installation in the chamber door
There is optoelectronic switch, the sheet metal matched with the optoelectronic switch is fixed in the cabinet, the controller is on the one hand
It is connected with the optoelectronic switch, is on the other hand connected with the closed type relay；
The cavity is set in the cabinet, and the inside of cavity is equipped with multiple layer tray, two sides and bottom outside the cavity
Portion is separately installed with heating element, and temperature element is equipped in cavity, is respectively equipped on rear side of cavity and vacuumizes interface, inflation connects
Mouthful, vacuum degree measurement interface and for medical fluid interface；
The vacuum system includes vacuum pump, inflator pump and vacuum degree measurement element, and the vacuum pump and inflator pump are logical
It crosses pipeline and respectively corresponds and vacuumize interface and inflatable interface is connected with described, the vacuum degree measurement element and the vacuum
Degree detection interface is connected, and probe extends to the inside of the cavity；It the vacuum pump and described vacuumizes between interface
Connecting line on electromagnetism pressure difference charge valve is installed, be equipped on the inflator pump and the connecting line of the inflatable interface
First solenoid valve；On the one hand the controller is connected with the vacuum degree measurement element, on the other hand respectively with it is described true
Sky pump, inflator pump and the first solenoid valve are connected；
Described includes liquid steam tank for medical fluid system, and the liquid steam tank is by pipeline respectively with described for medical fluid
Interface is connected with inflator pump, pacifies respectively on liquid steam tank and the connecting line between medical fluid interface and inflator pump
Equipped with second and third solenoid valve, the controller is connected with second and third described solenoid valve respectively；
The temperature control system includes the temperature controller being connected with the controller, the temperature controller one side and institute
It states temperature element to be connected, be on the other hand connected by solid-state relay with the heating element；
Operation panel is installed in the side of the chamber door on the cabinet, touch is separately installed on the operation panel
Screen, buzzer and indicator light, the touch screen are connected with the controller, the alarm signal output ends point of the temperature controller
It is not connected with the buzzer and indicator light.
2. computermatic HMDS glue spreader according to claim 1, it is characterised in that: the cabinet is by main body frame and interior
The hanging plate assembly welding that outer surface is all made of workmanship of spraying plastics forms.
3. computermatic HMDS glue spreader according to claim 1, it is characterised in that: the chamber door is equipped with through-hole and leads to
It crosses flange and sight glass is installed, the flange is surrounded by silicone rubber O-ring.
4. computermatic HMDS glue spreader according to claim 1, it is characterised in that: the inside of the chamber door and the cavity
Surrounding be separately installed with the ceramic beaverboard for insulation.
5. computermatic HMDS glue spreader according to claim 1, it is characterised in that: the cavity is close using stainless steel
The cube structure that soldering and sealing connects.
6. computermatic HMDS glue spreader according to claim 1, it is characterised in that: the controller uses PLC.
7. computermatic HMDS glue spreader according to claim 1, it is characterised in that: the heating element uses stainless steel
Electric heating tube；The temperature element uses nickel chromium-nickel silicon thermocouple；The vacuum degree measurement element uses resistance vacuum
Meter.
8. computermatic HMDS glue spreader according to claim 1, it is characterised in that: installed respectively on the operation panel
There are " power supply " button, " emergency stop " button and " noise reduction " button, " noise reduction " button stated is connected to the alarm signal of the temperature controller
Between output end and the buzzer.
9. computermatic HMDS glue spreader according to claim 1, it is characterised in that: the inflator pump connects with the inflation
Speed governing valve and pressure gauge are separately installed on connecting line between mouthful.
10. computermatic HMDS glue spreader according to claim 1, it is characterised in that: by the side of the liquid steam tank
It is connected with medicinal liquid bottle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821421009.XU CN208928470U (en) | 2018-08-31 | 2018-08-31 | Computer type HMDS glue spreader |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821421009.XU CN208928470U (en) | 2018-08-31 | 2018-08-31 | Computer type HMDS glue spreader |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208928470U true CN208928470U (en) | 2019-06-04 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108855773A (en) * | 2018-08-31 | 2018-11-23 | 合肥真萍电子科技有限公司 | Computer type HMDS glue spreader |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108855773A (en) * | 2018-08-31 | 2018-11-23 | 合肥真萍电子科技有限公司 | Computer type HMDS glue spreader |
| CN108855773B (en) * | 2018-08-31 | 2023-12-12 | 合肥真萍电子科技有限公司 | Computer type HMDS glue spreader |
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